CN102130036A - 浅沟槽隔离结构制作方法 - Google Patents
浅沟槽隔离结构制作方法 Download PDFInfo
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- CN102130036A CN102130036A CN2010100227021A CN201010022702A CN102130036A CN 102130036 A CN102130036 A CN 102130036A CN 2010100227021 A CN2010100227021 A CN 2010100227021A CN 201010022702 A CN201010022702 A CN 201010022702A CN 102130036 A CN102130036 A CN 102130036A
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- protective layer
- oxide layer
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- isolation structure
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN 201010022702 CN102130036B (zh) | 2010-01-12 | 2010-01-12 | 浅沟槽隔离结构制作方法 |
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CN 201010022702 CN102130036B (zh) | 2010-01-12 | 2010-01-12 | 浅沟槽隔离结构制作方法 |
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CN102130036A true CN102130036A (zh) | 2011-07-20 |
CN102130036B CN102130036B (zh) | 2013-06-19 |
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CN 201010022702 Active CN102130036B (zh) | 2010-01-12 | 2010-01-12 | 浅沟槽隔离结构制作方法 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102931299A (zh) * | 2012-11-20 | 2013-02-13 | 无锡华润华晶微电子有限公司 | 一种发光二极管激光刻蚀方法 |
CN103021804A (zh) * | 2011-09-24 | 2013-04-03 | 台湾积体电路制造股份有限公司 | 在ⅲ-ⅴ族制造工艺中形成在硅晶圆的背面上方的保护膜 |
CN109360806A (zh) * | 2018-11-30 | 2019-02-19 | 上海华力微电子有限公司 | 一种形成浅沟槽隔离结构的方法 |
CN111341724A (zh) * | 2018-12-19 | 2020-06-26 | 上海新微技术研发中心有限公司 | 浅沟槽隔离工艺及浅沟槽隔离结构 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5296385A (en) * | 1991-12-31 | 1994-03-22 | Texas Instruments Incorporated | Conditioning of semiconductor wafers for uniform and repeatable rapid thermal processing |
US5856230A (en) * | 1996-12-31 | 1999-01-05 | Hyundai Electronics Industries Co., Ltd. | Method for making field oxide of semiconductor device |
US20030054664A1 (en) * | 2001-09-20 | 2003-03-20 | Yoshirou Tsurugida | Method for selectively oxidizing a silicon wafer |
CN1862777A (zh) * | 2005-05-09 | 2006-11-15 | 联华电子股份有限公司 | 沟槽绝缘方法 |
CN1979798A (zh) * | 2005-12-06 | 2007-06-13 | 上海华虹Nec电子有限公司 | 实现sti的工艺方法 |
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2010
- 2010-01-12 CN CN 201010022702 patent/CN102130036B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5296385A (en) * | 1991-12-31 | 1994-03-22 | Texas Instruments Incorporated | Conditioning of semiconductor wafers for uniform and repeatable rapid thermal processing |
US5856230A (en) * | 1996-12-31 | 1999-01-05 | Hyundai Electronics Industries Co., Ltd. | Method for making field oxide of semiconductor device |
US20030054664A1 (en) * | 2001-09-20 | 2003-03-20 | Yoshirou Tsurugida | Method for selectively oxidizing a silicon wafer |
CN1862777A (zh) * | 2005-05-09 | 2006-11-15 | 联华电子股份有限公司 | 沟槽绝缘方法 |
CN1979798A (zh) * | 2005-12-06 | 2007-06-13 | 上海华虹Nec电子有限公司 | 实现sti的工艺方法 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103021804A (zh) * | 2011-09-24 | 2013-04-03 | 台湾积体电路制造股份有限公司 | 在ⅲ-ⅴ族制造工艺中形成在硅晶圆的背面上方的保护膜 |
CN103021804B (zh) * | 2011-09-24 | 2015-10-21 | 台湾积体电路制造股份有限公司 | 在ⅲ-ⅴ族制造工艺中形成在硅晶圆的背面上方的保护膜 |
CN102931299A (zh) * | 2012-11-20 | 2013-02-13 | 无锡华润华晶微电子有限公司 | 一种发光二极管激光刻蚀方法 |
CN109360806A (zh) * | 2018-11-30 | 2019-02-19 | 上海华力微电子有限公司 | 一种形成浅沟槽隔离结构的方法 |
CN111341724A (zh) * | 2018-12-19 | 2020-06-26 | 上海新微技术研发中心有限公司 | 浅沟槽隔离工艺及浅沟槽隔离结构 |
CN111341724B (zh) * | 2018-12-19 | 2022-11-04 | 上海新微技术研发中心有限公司 | 浅沟槽隔离工艺及浅沟槽隔离结构 |
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Publication number | Publication date |
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CN102130036B (zh) | 2013-06-19 |
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Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130617 Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHA Effective date: 20130617 |
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Effective date of registration: 20130617 Address after: 100176 No. 18 Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Patentee after: Semiconductor Manufacturing International (Shanghai) Corporation Address before: 201203 No. 18 Zhangjiang Road, Shanghai Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |