CN102109778B - Adjusting mechanism - Google Patents
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- CN102109778B CN102109778B CN 200910247416 CN200910247416A CN102109778B CN 102109778 B CN102109778 B CN 102109778B CN 200910247416 CN200910247416 CN 200910247416 CN 200910247416 A CN200910247416 A CN 200910247416A CN 102109778 B CN102109778 B CN 102109778B
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- driving lever
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Abstract
The invention provides an adjusting mechanism. The adjusting mechanism sequentially comprises a foundation, an X-direction structure, a theta-direction structure, and a Y-direction structure from bottom to top; the X-direction structure comprises an X-direction positioning and adjusting module, an X-direction adjusting component, and an X-direction sliding plate; the theta-direction structure comprises a theta-direction positioning adjusting module, a theta-direction adjusting component, and a positioning rod; and the Y-direction structure comprises a Y-direction positioning adjusting module, a Y-direction adjusting component and a Y-direction sliding plate. In the adjusting mechanism, all axes are driven to move based on the rotation of the adjusting components. The structures of the three directions are organically combined and are not interfered with one another. The mechanism is easy to manufacture and is simple and reliable in assembly and the manufacturing cost is low. The horizontality of the adjusting mechanism can be adjusted, the X-direction, Y-direction and theta-direction position adjustment on the horizontal plane can be realized, and the mechanism is easy to operate. The requirements on the horizontality, positioning accuracy and the like of an installation plane can be reduced, and the six-freedom-degree position adjustment can be performed according to actual requirements in the process of integration and debugging of a system.
Description
Technical field
The invention relates to technical field of lithography, and particularly relevant for a kind of adjusting mechanism of mask alignment device.
Background technology
Traditional slide unit majority is single shaft or the bidimensional that is formed by stacking or three-dimensional mechanism, is difficult to satisfy the needs that multiaxis is adjusted, and it is big to take up room, and is difficult to place in the lithographic equipment of compact conformation.Stroke is little, high precision, slim slide unit price are expensive again, and the slide unit of outsourcing often the interface size can not be complementary with actual needs, and the self-control slide unit often volume is big and be difficult to guarantee in precision.
In lithographic equipment, units such as mask plate store, mask alignment device all have very high requirement to bearing accuracy, yet entire equipment is difficult to guarantee that by the machining precision of part said units equipment is with respect to the bearing accuracy of miscellaneous part in the process of carrying out modular design.Add the accumulation of error in the assembling process, actual debuging can find in the process that units such as mask plate store or mask alignment device have bigger position deviation, and just need suitable adjustment is carried out in its position this moment.Here just need a kind of adjusting mechanism, can realize easily units such as mask plate store or mask alignment device are carried out multiple degrees of freedom, trace ground position adjustment, to guarantee the relative positional accuracy requirement between each parts, traditional slide unit is difficult to meet the demands.
Summary of the invention
In order to overcome the deficiencies in the prior art, the object of the present invention is to provide a kind of can the realization easily that units such as mask plate store or mask alignment device are carried out multiple degrees of freedom, the position adjustment of trace ground, the adjusting mechanism that requires with the relative positional accuracy that guarantees between each parts.
For reaching above-mentioned purpose, the present invention proposes a kind of adjusting mechanism, comprise that the X-direction that arranges is from top to bottom adjusted structure, θ adjusts structure to adjusting structure and Y-direction, wherein X-direction adjustment structure comprises X-direction location adjusting module, X-direction is adjusted element and X-direction slide plate, and described X-direction is adjusted element makes described X-direction slide plate generation along the displacement of directions X by finely tuning described X-direction location adjusting module; θ comprises θ to the location adjusting module to the adjustment structure, and θ is to adjusting element and Y-direction slide plate, and described θ makes described Y-direction slide plate generation along the rotation of θ direction by finely tuning described θ to the location adjusting module to adjusting element; Y-direction adjustment structure comprises Y-direction location adjusting module, and Y-direction is adjusted element and Y-direction slide plate, and described Y-direction is adjusted element makes described Y-direction slide plate generation along the displacement of Y-direction by finely tuning described Y-direction location adjusting module.Wherein X-direction is adjusted structure, θ is connected by backstay with Y-direction adjustment structure to adjusting structure.Wherein X-direction location adjusting module comprises the X-direction block, and X-direction driving lever and the pin of stirring that is fixed in described X-direction driving lever make described X-direction block drive described X-direction driving lever rotation by rotating described X-direction adjustment element.Wherein X-direction location adjusting module comprises the X-direction spacer pin, is used for the displacement of the described X-direction slide plate of restriction.θ to the location adjusting module comprise θ to block and θ to driving lever; Described Y-direction location adjusting module comprises the Y-direction driving lever.θ is same θ-Y driving lever to driving lever and Y-direction driving lever.Make described θ-Y driving lever drive the generation of Y-direction slide plate along the rotation of θ direction by rotating described θ to adjusting element.Make described θ-Y driving lever drive the generation of Y-direction slide plate along the displacement of θ direction by rotating described Y-direction adjustment element.The Y-direction slide plate also comprises an interface, is used for installing object to be adjusted.X-direction is adjusted element, θ adjusts element for adjusting screw to adjusting element and Y-direction.
This adjusting mechanism also comprises a base, and described X-direction is adjusted structure and base is fixed.X-direction location adjusting module is also adjusted element and described base by the fixing described X-direction of first locating piece, and described X-direction is adjusted between element and the described base does not have relative displacement.Described θ also fixes described θ to adjusting element and described X-direction slide block by second locating piece to the location adjusting module, and described Y-direction location adjusting module is also by the fixing described Y-direction adjustment element of the 3rd locating piece and described Y-direction slide block.
This adjusting mechanism comprises that also at least one latch mechanism is used for the fixing described adjusting mechanism of vertical direction.
In sum, the present invention is mainly constituted to structure etc. by X-direction structure, Y-direction structure, θ, is based on the rotation of adjusting element and drives the motion of each.The structure of three directions combines, and does not disturb mutually again simultaneously.This mechanism is easy to processing and manufacturing, and low cost of manufacture, and assembling is simple, reliable.Can adjust the levelness of self, and can realize X-direction on the surface level, Y-direction and θ to the position adjustment, simple to operate.Reduce the requirement to aspects such as the levelness of installed surface and bearing accuracies, and in the process of system integration debugging, can carry out the position adjustment of six degree of freedom according to actual needs.
Description of drawings
Fig. 1 is that the X-direction structure of the embodiment of the invention is installed in the synoptic diagram on the base;
Fig. 2 is the direction of motion synoptic diagram of X-direction structure;
Fig. 3 is the displacement exploded view of X-direction slide plate;
Fig. 4 is that the θ of the embodiment of the invention is installed in the structural synoptic diagram of X-direction to structure;
Fig. 5 is that the Y-direction structure of the embodiment of the invention is installed in θ to structural synoptic diagram;
Fig. 6 a and Fig. 6 b are the latch mechanism synoptic diagram of the embodiment of the invention.
Embodiment
For above and other objects of the present invention, feature and advantage can be become apparent, preferred embodiment cited below particularly, and conjunction with figs. are described in detail below.
This adjusting mechanism is mainly constituted to structure etc. by X-direction structure, Y-direction structure, θ, is based on the rotation of adjusting element and drives the motion of each.The structure of three directions combines, and does not disturb mutually again simultaneously.Whole adjusting mechanism arranges respectively from top to bottom: base, X-direction structure, θ are to structure and Y-direction structure.Wherein X-direction is vertical mutually with Y-direction, and X-direction, Y-direction, Z-direction are vertical in twos, and θ is to being around Z axle rotation, namely Rz to.Certainly, can also be transformed into other array mode based on the thought of this patent.Present embodiment takes a single example and describes.
Fig. 1 is that the X-direction structure of the embodiment of the invention is installed in the synoptic diagram on the base.Fig. 2 is the direction of motion synoptic diagram of X-direction structure.Fig. 3 is the displacement exploded view of X-direction slide plate.Fig. 4 is that the θ of the embodiment of the invention is installed in the structural synoptic diagram of X-direction to structure.Fig. 5 is that the Y-direction structure of the embodiment of the invention is installed in θ to structural synoptic diagram.Fig. 6 a and Fig. 6 b are the latch mechanism synoptic diagram of this embodiment.Please also refer to Fig. 1 to Fig. 6.
The X-direction structure comprises that X-direction driving lever 7, X-direction adjust element 11, X-direction block 5, be positioned at and stir pin 9 and X-direction slide plate 20 on the X-direction driving lever 7.And further comprise X-direction setting element 6, locating piece 12.In the present embodiment, compacter for making structure, preferably X-direction driving lever 7, X-direction adjustment element 11 and X-direction block 5 all are installed in the groove of base.
Among Fig. 1, holding screw 1a, 1b are used for adjusting the levelness of whole adjusting mechanism, utilize the adjusting of the principle realization levelness of " determining a plane at 3 ".X-direction driving lever 7 is fixed on the base 2 by setting element 6, and can be rotated around setting element 6.Locating piece 12 is used for that X-direction is adjusted element 11 and is fixed on base 2, and making X-direction adjust element 11 does not have relative displacement at base 2.When the rotation X-direction was adjusted element 11, X-direction block 5 was adjusted element 11 along X-direction and is produced displacements under the drive of screw thread, thereby drove X-direction driving lever 7 around setting element 6 generation rotations.The rotation of X-direction driving lever 7 is stirred the X-direction slide plate 20 that pin 9 can drive the side of being located thereon and is produced displacements by fixed thereon, and spacer pin 3 (is namely determining the stroke of X-direction) with the displacement restriction of X-direction slide plate 20 in the certain limit of directions X.
Among Fig. 2, when the sense of displacement of X-direction block 5 be A to the time, the sense of displacement of stirring pin 9 be B to.As shown in Figure 3, since spacer pin 3 limited the displacement of X-direction slide plate 20 can only be at directions X, so stir the B of pin 9 is broken down into B from X-direction to displacement
XB with Y-direction
YStir the B of 9 pairs of X-direction slide plates 20 of pin
XTo acting force make the X-direction slide plate produce X-direction displacement, B
YActing force make stir pin 9 in the stopper slot of X-direction slide plate 20 to B
YTo movement.So just, realized the position adjustment of directions X.
θ to structure comprise θ to driving lever 23, θ to adjust element 21, θ to block 24, θ to locating piece 22 and backstay 25; The Y-direction structure comprises Y-direction slide plate 30, Y-direction driving lever 23, Y-direction adjustment element 31, Y-direction locating piece 32.In the present embodiment, in order to make structure compacter, Y-direction driving lever and θ are integrated into a part 23 to the function of driving lever, are designed to Y-θ to 23.Those skilled in the art expect easily, with Y-direction driving lever and θ to driving lever separately design can realize the present invention too.Y-θ all is installed in the groove of X-direction slide plate 20 to block 24 to adjusting element 21 and θ to driving lever 23, θ, makes structure compacter.Y-direction slide plate 30 provides external interface, and the parts of needs being adjusted its position are installed on the Y-direction slide plate 30.
As shown in Figure 4, with the X-direction structure in like manner, locating piece 22 is used for θ is fixed on X-direction slide plate 20 to adjusting element 21, makes θ not have relative displacement to adjusting element 21 at X-direction slide plate 20.With the X-direction structure in like manner, when rotating θ when adjusting element 21, θ produces displacements along θ to adjusting element 21 to block 24 under the drive of screw thread, produce rotation to driving lever 23 around backstay 25 thereby drive Y-θ.
As shown in Figure 5, when Y-θ rotates to driving lever 23, because it and Y-direction slide plate 30 structurally be combined together, so can driving Y-direction slide plate 30 to the rotation of driving lever 23, Y-θ is rotated around backstay 25, thereby produce θ to displacement, namely rotate around the Z axle.
As shown in Figure 5, with the X-direction structure in like manner, locating piece 32 is used for that Y-direction is adjusted element 31 and is fixed on Y-direction slide plate 30, making Y-direction adjust element 31 does not have relative displacement at Y-direction slide plate 30.When rotating Y-direction adjustment element 31, Y-θ will produce relative motions with Y-direction slide plate 30 to driving lever 23 under the effect of screw thread.And Y-θ is to being fixed on the X-direction slide plate 20 by backstay 25 to driving lever 23, and the displacement that it all can not produce Y-direction with respect to X-direction slide plate 20, X-direction slide plate 20 with respect to base 2 is so the displacement that Y-direction slide plate 30 will produce Y-direction under the effect of screw thread.Y-direction slide plate 30 and Y-θ have determined the stroke of Y-direction displacement to the length to the length of the square hole of driving lever 23 cooperation places and Y-direction and the θ space between 23.
The structure of three directions of XY θ positions by a backstay and is connected.The mounting hole 10 of backstay is the (see figure 1) of X-direction on the base, and namely the shape of mounting hole 10 is similar to the oblong along directions X, and this makes X-direction slide plate and backstay to produce displacement in X-direction.In like manner, the mounting hole 40 of backstay is the (see figure 5) of Y-direction on the Y-direction slide plate, and namely the shape of mounting hole 40 is similar to the oblong along Y-direction, makes the Y-direction slide plate to produce the Y-direction displacement with respect to backstay.The motion of three directions is not disturbed mutually.
When carrying out the displacement adjustment, each part does not stress in vertical direction.After adjustment finishes, lock by lever principle.
As shown in Figure 6, latch segment 35 is installed in the installation site (seeing the latch segment installation site 4 among Fig. 1) of the latch segment 35 on the base 2, preferably adopted two cover locking pieces in the present embodiment, but the present invention is not as limitation.Pass latch segment in the middle of the safety wheel 36, two ends are fixed on the base 2.Latch segment 35 can be rotated around safety wheel 36.Adjust element 37 and be fixed on the base 2, rotation can prop up latch segment 35 when adjusting element 37.Pull bar 33 is installed in latch segment 35 tops, and an end of pull bar 33 is pushed down Y-direction slide plate 30 (see figure 5)s, and the other end piece 35 that is locked is pushed down.When rotation adjustment element 37 makes it prop up latch segment 35, latch segment 35 rotates to certain angle and can't rotate freely, 35 pairs of pull bars 33 of latch segment this moment apply downward pulling force, make 33 pairs of Y-direction slide plates 30 of pull bar apply downward pressure, make total fixing in the vertical direction.When needs carry out the position adjustment, namely unclamp and adjust element 37, latch segment 35 is rotated freely, pull bar 33 is not subjected to downward pulling force, and Y-direction slide plate 30 and total namely do not stress in the vertical direction, can carry out the adjustment of all directions.After adjusting end, lock again.
In order to realize the present invention better, those skilled in the art can be easy to expect, by at this adjusting mechanism outer setting sensor, detect adjusting mechanism and whether have adjusted to assigned address.Further, by the mode of closed-loop control, realize that more remedying this adjusting mechanism can not show the defective of adjusting precision.One outside reference also can be set, and (stationkeeping of this object of reference is constant, perhaps the relative position between institute's installing mechanism namely is the position relation that the operator need realize on this object of reference and the adjusting mechanism), by between the mechanism of detecting this object of reference and adjusting mechanism or installing on it apart from size, judge whether adjusting mechanism adjusts to the right place.
In sum, the present invention is mainly constituted to structure etc. by X-direction structure, Y-direction structure, θ, is based on the rotation of adjusting element and drives the motion of each.The structure of three directions combines, and does not disturb mutually again simultaneously.This mechanism is easy to processing and manufacturing, and low cost of manufacture, and assembling is simple, reliable.Can adjust the levelness of self, and can realize X-direction on the surface level, Y-direction and θ to the position adjustment, simple to operate.Reduce the requirement to aspects such as the levelness of installed surface and bearing accuracies, and in the process of system integration debugging, can carry out the position adjustment of six degree of freedom according to actual needs.
Concrete case study on implementation only is preferable case study on implementation of the present invention described in the present invention, is not to limit practical range of the present invention.Be that all equivalences of doing according to the content of the present patent application claim change and modification, all should be as technology category of the present invention.
Claims (14)
1. an adjusting mechanism comprises that the X-direction that arranges is from top to bottom adjusted structure, θ adjusts structure to adjusting structure and Y-direction, it is characterized in that:
Described X-direction adjustment structure comprises X-direction location adjusting module, and X-direction is adjusted element and X-direction slide plate, and described X-direction is adjusted element makes described X-direction slide plate generation along the displacement of directions X by finely tuning described X-direction location adjusting module;
Described θ comprises θ to the location adjusting module to the adjustment structure, and θ is to adjusting element and Y-direction slide plate, and described θ makes described Y-direction slide plate generation along the rotation of θ direction by finely tuning described θ to the location adjusting module to adjusting element;
Described Y-direction adjustment structure comprises Y-direction location adjusting module, and Y-direction is adjusted element and Y-direction slide plate, and described Y-direction is adjusted element makes described Y-direction slide plate generation along the displacement of Y-direction by finely tuning described Y-direction location adjusting module.
2. adjusting mechanism according to claim 1 is characterized in that, described adjusting mechanism also comprises a base, and described X-direction is adjusted structure and base is fixed.
3. adjusting mechanism according to claim 1 is characterized in that, described X-direction is adjusted structure, θ is connected by backstay with Y-direction adjustment structure to adjusting structure.
4. adjusting mechanism according to claim 1, it is characterized in that, described X-direction location adjusting module comprises the X-direction block, and X-direction driving lever and the pin of stirring that is fixed on the described X-direction driving lever make described X-direction block drive described X-direction driving lever rotation by rotating described X-direction adjustment element.
5. adjusting mechanism according to claim 2 is characterized in that, described X-direction location adjusting module is also adjusted element and described base by the fixing described X-direction of first locating piece, and described X-direction is adjusted between element and the described base does not have relative displacement.
6. adjusting mechanism according to claim 1 is characterized in that, described X-direction location adjusting module comprises the X-direction spacer pin, is used for the displacement of the described X-direction slide plate of restriction.
7. adjusting mechanism according to claim 1 is characterized in that, described θ to the location adjusting module comprise θ to block and θ to driving lever; Described Y-direction location adjusting module comprises the Y-direction driving lever.
8. adjusting mechanism according to claim 7 is characterized in that, described θ is same θ-Y driving lever to driving lever and Y-direction driving lever.
9. adjusting mechanism according to claim 8 is characterized in that, makes described θ-Y driving lever drive the generation of Y-direction slide plate along the rotation of θ direction by rotating described θ to adjusting element.
10. adjusting mechanism according to claim 8 is characterized in that, makes described θ-Y driving lever drive the generation of Y-direction slide plate along the displacement of θ direction by rotating described Y-direction adjustment element.
11. adjusting mechanism according to claim 1 is characterized in that, described Y-direction slide plate also comprises an interface, is used for installing object to be adjusted.
12. adjusting mechanism according to claim 2, it is characterized in that, described θ also fixes described θ to adjusting element and described X-direction slide block by second locating piece to the location adjusting module, and described Y-direction location adjusting module is also by the fixing described Y-direction adjustment element of the 3rd locating piece and described Y-direction slide block.
13. adjusting mechanism according to claim 1 is characterized in that, described adjusting mechanism comprises that also at least one latch mechanism is used for the fixing described adjusting mechanism of vertical direction.
14. adjusting mechanism according to claim 1 is characterized in that, described X-direction is adjusted element, θ adjusts element for adjusting screw to adjusting element and Y-direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910247416 CN102109778B (en) | 2009-12-29 | 2009-12-29 | Adjusting mechanism |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910247416 CN102109778B (en) | 2009-12-29 | 2009-12-29 | Adjusting mechanism |
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| CN102109778A CN102109778A (en) | 2011-06-29 |
| CN102109778B true CN102109778B (en) | 2013-07-17 |
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| CN 200910247416 Active CN102109778B (en) | 2009-12-29 | 2009-12-29 | Adjusting mechanism |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105397505B (en) * | 2015-12-11 | 2017-10-03 | 合肥欣奕华智能机器有限公司 | A kind of six-degree-of-freedom adjusting |
| CN107462584B (en) * | 2017-08-08 | 2019-12-03 | 吉林大学 | Multiple degrees of freedom regulating device, digital micro-mirror bad point detection device and method |
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2009
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Non-Patent Citations (1)
| Title |
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| JP特开2004-274024A 2004.09.30 |
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Address after: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Co-patentee after: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Co-patentee before: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
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