CN102077337B - 具有吸附力的非接触式搬运板 - Google Patents

具有吸附力的非接触式搬运板 Download PDF

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CN102077337B
CN102077337B CN2009801246877A CN200980124687A CN102077337B CN 102077337 B CN102077337 B CN 102077337B CN 2009801246877 A CN2009801246877 A CN 2009801246877A CN 200980124687 A CN200980124687 A CN 200980124687A CN 102077337 B CN102077337 B CN 102077337B
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Abstract

本发明公开了一种搬运玻璃的同时产生小量的吸附力,因此连搬运的玻璃的细微颤动也可以防止,并且与玻璃接触的上板不仅耐磨性好,而且还具有带电防止功能的具有吸附力的非接触式搬运板。根据本发明的搬运板包括:设有小室的下板;叠加在下板的上面并具有与小室连通的多个结合孔的中板;叠加在中板的上面并具有与结合孔连通的喷气孔的上板;***、固定在喷气孔中从而收容小室的空气,并引向与喷气孔之间产生的空隙中的喷气螺栓。此时,在喷气螺栓的上端设有朝着上方斜线方向喷出空气的头部,并且在喷气螺栓的上面设有凹陷的凹槽,因此由于气压差而产生真空。并且,在头部的下面朝着上方斜线方向设有倾斜面,且喷气孔的上端形成倒圆为佳。进而为使空气从上板的上面到下板的下面通过,可设置多个通气孔。或者,上板用超高分子量聚乙烯(PE-UHMW)制作从而具耐磨性并防止静电。

Description

具有吸附力的非接触式搬运板
技术领域
本发明涉及一种非接触式搬运板,尤其涉及一种利用空气的喷出而提升玻璃的同时形成真空空间,从而连上升、搬运的玻璃的细微颤抖也可以防止的具有吸附力的非接触式搬运板。
背景技术
通常,在线FPD自动光学检测装置(In-Line FPD Automatic OpticalInspection)是一种引导薄膜场效应晶体管液晶显示器(TFT LCD)面板或等离子显示器(PDP)、彩色滤光片等显示面板(display panel)等,并使用光学镜头与CCD相机抓取检测对象的图像后,利用图像处理算法检测出使用者要找出的各种缺陷的装置。
这种在线自动光学检测装置大体上分为检测不良的扫描单元(scansection)、复查单元(review section)以及取出单元(unload section)。这种检测装置为了发挥检测***的功能,精确地查出检测的缺陷的位置与大小很重要,而且从扫描单元(scan section)到取出单元(unload section)引导搬运物(检测对象)的搬运装置的功能也是重要的因素。
现有的搬运装置曾公开了利用辊子(roller)的旋转力搬运搬运物的接触式搬运装置,但由于是利用辊子的旋转力进行搬运,因此不仅在搬运物上发生划痕或由于棍子的旋转而发生污迹,而且若摩擦力小或者旋转力弱,搬运物就会滑落,从而存在不能顺利搬运的问题。
为解决前述的问题,最近开始使用向细小的多个气孔上供应压缩空气,并利用从气孔中喷出的空气提升搬运物而进行搬运的非接触式搬运装置。简略说明非接触式搬运板的结构如下,如图1所示,由在内部设有引导空气的流动的小室的下板10、具有结合在下板10上部从而喷出流入到小室的压缩空气的气孔21的上板20构成。即,在下板10下部设有供应压缩空气的空气接头11,并将该压缩空气从小室分支到各通道且通过上板20的气孔21喷出。随之放在上板20上的玻璃上升到一定高度从而进行非接触式搬运。
然而,这种搬运板即使玻璃上升到上板上面,也会因上板上产生的静电而引发玻璃与上板相贴的问题。
因此,对上板进行特殊涂层处理,从而抑制静电的发生并使上板具备较高耐磨性。
若如上所述地对上板进行特殊涂层处理,就会引发上板的制作费用增加的问题,而且经涂层处理的上板还存在不能再生利用的问题。例如进行特殊涂层的上板每公斤的购买费用为55,000韩元。并且若涂层面脱落,就只能作废该上板而重新购买上板。
并且,在搬运玻璃时由于玻璃上升,因此发生颤抖现象。即使该现象非常微小,这种颤抖的现象也会导致致命的缺陷,因此最好的对策是最大限度地减少颤抖。
发明内容
本发明是为解决如上所述的问题而提出的,其目的在于提供一种使用超高分子量聚乙烯(PE-UHMW)作为上板的材料,从而根据材料的特性,耐磨性好且具有防止带电功能的非接触式搬运板。
并且,本发明目的在于提供一种在上板上***喷气螺栓从而将空气的喷射引向螺栓与上板之间的空隙,从而向侧面扩散,同时使喷气螺栓的上部中央因气压差而形成真空,从而吸附上升、搬运的玻璃,由此连细微的颤抖也可以抑制的具有吸附力的非接触式搬运板。
为解决上述问题,本发明的具有吸附力的非接触式搬运板,其包括:设有小室的下板;叠加在下板的上面并具有与小室连通的多个结合孔的中板;叠加在中板的上面并具有与结合孔连通的喷气孔的上板;***、固定在喷气孔中而收容小室的空气,并引向与喷气孔之间产生的空隙中的喷气螺栓,其特征在于,在喷气螺栓的上端设有朝着上方斜线方向喷出空气的头部,并在喷气螺栓的上面设有凹陷的凹槽。此时,喷气螺栓的下部与结合孔进行螺栓连接,并且在喷气螺栓的外周面与喷气孔的内周面上设有相互对应的凸边,为佳。
并且,设有从喷气螺栓的下部到中部沿着轴方向引导空气的吸气孔,并且,优选地,在吸气孔的上端设有在喷气螺栓的外周面上四方贯通的排气孔。
并且,优选地,在头部的下面朝着上方斜线方向设有倾斜面,并且喷气口的上端进行倒圆。并且,优选地,为了拧紧或拧开喷气螺栓,设在头部上的凹槽由扳手孔而形成。
并且,为使空气从上板的上面通到下板的下面,可以设置多个通气孔。
并且,上板由超高分子量聚乙烯(PE-UHMW)制成,从而具有耐磨性并可防止静电。
如上所述根据本发明的具有吸附力的非接触式搬运板由于在搬运的同时产生小量的吸附力,因此具有连玻璃的细微的颤抖也可以防止的特征。
并且将接触玻璃的上板用超高分子量聚乙烯制作,从而具有耐磨性好且防止带电的功能从而可减少静电的影响。
附图说明
图1为现有技术的非接触式搬运板的斜视图。
图2为根据本发明的非接触式搬运板的分解图。
图3为从上面俯视图2所示下板的平面图。
图4为从上面俯视图2所示中板的平面图。
图5为从上面俯视图2所示上板的平面图。
图6为示出图2所示喷气螺栓的结合结构的剖视图。
图7为示出根据本发明的具有吸附力的非接触式搬运板的运行原理的剖视图。
具体实施方式
下面,参照附图说明根据本发明优选实施例的具有吸附力的非接触式搬运板。
参照图2,根据本发明的搬运板100包括下板110、中板120、上板130以及喷气螺栓140。
首先,下板110是由外部的压缩器(未图示)提供空气的板,在下板110的下面设有多个空气连接口111,且在下板110的上面设有将供应的空气分支的小室112。优选地,小室112设计成,从一个空气连接口111上分支数个至数十个方向,并且在经由整个下板110而设置小室112。进而与各空气连接口111连通的小室112之间设有上下贯通的下部通气孔113。
中板120叠加在下板110的上面,为了与设在下板110上的小室112的分支的端部连通,从而上下设有多个结合孔121。此时,在结合孔121的内周面上设有用于连接喷气螺栓140的螺母121a。并且在中板120上上下贯通设置中间通气孔123,以用于与设在下板110上的下部通气孔113连通。
上板130叠加在中板120的上面,为了与设在中板120上的结合孔121连通,喷气孔131采用相同的布置。并且为了与设在下板110以及中板120上的下部通气孔113以及中间通气孔123连通,上下贯通设有上部通气孔133。此时,在上板130的上面设置上部通气孔133的位置比上板130的上面低,以使空气的流出顺利。
这种上板130是玻璃接触的部位,因此为了较高耐磨性与可防止静电,从而使用了具有带电防止功能的超高分子量聚乙烯(PE-UHMW)。
喷气螺栓140从上板130的上侧***到喷气孔131中,从而装配于中板120的结合孔121上,并且在喷气螺栓140的下部外周面上设有与设在结合孔121内周面上的内螺纹121a相对应的外螺纹141a。并且在外螺纹141a的上部外面上设有阶梯形状的凸边142。
具体说明喷气螺栓140的内部结构如下,从喷气螺栓140下面到中间部分沿着中心轴方向设有吸气道143。并且在吸气道143的上端设有朝着喷气螺栓140的外周面四方分支的喷气道144。
在如此形成的喷气螺栓140的上端设有侧向延伸的头部145。此时,头部145的上面水平设计,而头部145的下面则设计成越往上延伸越宽的斜线146。
另一方面,***喷气螺栓140的上板130喷气孔131内部具体为,喷气孔131以中间部分的凸边132为起点,形成直径互不相同的上下两个喷出孔。此时,下侧的喷出孔比上侧的喷出孔更小,以使喷气螺栓140的凸边142挂接在喷气孔131的凸边132上。
之所以在喷气孔131与喷气螺栓140上形成相对应的凸边132、142,是因为外螺纹141a与内螺纹121a相互连接而喷气螺栓140下降时,可使喷气螺栓140的头部145与喷气孔131相隔一定间隔,从而空气可通过头部145与喷气孔131之间的空隙喷出。
并且,喷气孔131的上端形成倒圆134,以使喷气螺栓140的头部145由于斜线146而分开,并使喷出的空气的流动顺畅。
并且,***喷气螺栓140的喷气孔131可直接对上板130进行加工而形成,然后***相吻合的铝材的安装圈135而安装喷气螺栓140。
另一方面,在喷气螺栓140的上面中央设置凹陷的凹槽147,从而形成可形成真空的空间。即、通过喷气螺栓140与喷气孔131的空隙喷出的空气朝着四方侧向流出,因此在其中央由于气压差自然形成了真空。此时,进一步增加凹陷的凹槽147从而增大真空的空间,就可进一步提高吸附力。
凹陷的凹槽147优先设计成六角或八角等多角形扳手孔,从而在装拆喷气螺栓140时也可利用此扳手孔的多种用途使用。
根据本发明的具有吸附力的非接触式搬运板100中空气通过喷气螺栓140与喷气孔131之间的空隙朝着斜线方向喷出,从而提升放在上板130上的玻璃G,并且通过空气的喷出支撑由于在其中心部产生的真空而上升的玻璃G,从而可防止细微的颤抖。
如上参照本发明的优先实施例进行了说明,但熟悉本技术所属领域技术的人可在不超过权利要求书中记载的本发明的思想以及领域的范围内,多种多样地修改及变更本发明。
如上所述根据本发明的具有吸附力的非接触式搬运板由于在搬运的同时产生小量的吸附力,因此具有连玻璃的细微的颤抖也可以防止的特征。
并且将接触玻璃的上板用超高分子量聚乙烯制作,从而具有耐磨性好且防止带电的功能从而可减少静电的影响。

Claims (5)

1.一种具有吸附力的非接触式搬运板,其包括:设有小室(112)的下板(110);叠加在所述下板(110)的上面并具有与所述小室(112)连通的多个结合孔(121)的中板(120);叠加在所述中板(120)的上面并具有与所述结合孔(121)连通的喷气孔(131)的上板(130);***、固定在所述喷气孔(131)中从而***述小室(112)的空气,并引向与所述喷气孔(131)之间产生的空隙中的喷气螺栓(140),其特征在于,
在所述喷气螺栓(140)的上端设有朝着上方斜线方向喷出空气的头部(145),且所述头部(145)的下面是越朝上方延伸越宽的斜线(146),所述喷气孔(131)的上端形成倒圆(134),在所述喷气螺栓(140)的上面设有凹陷的凹槽(147),
所述上板(130)由超高分子量聚乙烯制成。
2.根据权利要求1所述的具有吸附力的非接触式搬运板,其特征在于,所述喷气螺栓(140)的下部与所述结合孔(121)进行螺栓连接,并且在所述喷气螺栓(140)的外周面与所述喷气孔(131)的内周面上设有相互对应的凸边(142、132)。
3.根据权利要求1所述的具有吸附力的非接触式搬运板,其特征在于,设有从所述喷气螺栓(140)的下部到中部沿着轴方向引导空气的吸气道(143),并且在所述吸气道(143)的上端设有在所述喷气螺栓(140)的外周面上四方贯通的排气道(144)。
4.根据权利要求1所述的具有吸附力的非接触式搬运板,其特征在于,所述凹槽(147)由扳手孔形成,以拧紧或拧开所述喷气螺栓(140)。
5.根据权利要求1所述的具有吸附力的非接触式搬运板,其特征在于,设有多个通气孔(113、123、133),以使空气从所述上板(130)的上面通到所述下板(110)的下面。
CN2009801246877A 2008-06-25 2009-05-07 具有吸附力的非接触式搬运板 Expired - Fee Related CN102077337B (zh)

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CN112278862B (zh) * 2020-10-13 2022-09-27 南京多脉智能设备有限公司 无摩擦气动式玻璃面板载具机械手

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101081515A (zh) * 2006-06-02 2007-12-05 Smc株式会社 非接触输送装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4493742B2 (ja) * 1998-10-12 2010-06-30 株式会社渡辺商行 浮上搬送装置用の気体噴出構造
AU2005262191A1 (en) * 2004-07-09 2006-01-19 Oc Oerllikon Balzers Ag Gas bearing substrate-loading mechanism process
JP2006347719A (ja) * 2005-06-17 2006-12-28 Shinko Electric Co Ltd 気体浮上ユニット及び気体浮上搬送装置
KR100650290B1 (ko) * 2005-11-23 2006-11-27 (주)넥스트인스트루먼트 비접촉 반송플레이트

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101081515A (zh) * 2006-06-02 2007-12-05 Smc株式会社 非接触输送装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP特开2006-347719A 2006.12.28

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