CN102075111A - Two-stroke compact type piezoelectric linear motor - Google Patents
Two-stroke compact type piezoelectric linear motor Download PDFInfo
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- CN102075111A CN102075111A CN2010105613403A CN201010561340A CN102075111A CN 102075111 A CN102075111 A CN 102075111A CN 2010105613403 A CN2010105613403 A CN 2010105613403A CN 201010561340 A CN201010561340 A CN 201010561340A CN 102075111 A CN102075111 A CN 102075111A
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Abstract
The invention relates to a two-stroke compact type multi-mode compound piezoelectric linear motor, which comprises a stator and a rotor, wherein the stator comprises an upper elastic block, a lower elastic block, a first group of piezoelectric actuating parts, a second group of electric actuating parts and fastening screws, wherein the first group of piezoelectric actuating parts are clamped between the upper elastic block and the lower elastic block and are uniformly clamped by the fastening screws; and the second group of piezoelectric actuating parts are firmly stuck on two opposite lateral surfaces of the lower elastic block. The rotor of the motor is a linear guide rail; and the lower part of the motor is supported by two parallel guide wheels. The motor is in a compact shape approximate to a cub and has the characteristic of two-stroke power output as well as high energy density, stable and precise motion output, high electro-mechanical transformation efficiency and simple structure and is easy for miniaturization.
Description
Technical field
The present invention relates to non-electromagnetic principle linear electric motors and linear actuators that a kind of rectilinear motion drove and controlled dual-purpose.The two-stroke compact piezoelectric linear motor that particularly a kind of volume is little, energy density is high.
Background technology
Ultrasound electric machine is that the high-frequency resonance of utilizing piezoelectric ceramic or other function element to inspire elastomeric certain predetermined modality is vibrated, by the New-type electric machine and the power set of friction output mechanical energy.Compare with traditional electromagnetic machine, one of its remarkable advantages is the output that can produce rectilinear motion mechanical energy with the part of unusual compact structure and minute quantity.Owing to being utilizes friction to realize the conversion and the output of mechanical energy,, make motor obtain bigger self-sustaining power even after therefore cutting off the power supply, its pre-pressure mechanism also makes stator tightly be pressed on the mover.Distinguish from operation principle, ultrasound electric machine can be divided into two kinds of travelling-wave type and standing wave types.For linear ultrasonic motor, utilize the standing wave type linear ultrasonic motor of composite mode work technical ripe relatively at present.In practical application, this linear ultrasonic motor subject matter is that power output is little.The existing linear ultrasonic motor that power output is relatively large, lateral dimension (motor is in the size perpendicular to the line slide rail direction) is generally bigger than normal again.And when high thrust is worked the stationarity variation of motor output movement.
Prior art has the (application for a patent for invention number: 2,007 1 0024372.8) of a kind of double-driving foot linear ultrasonic motor, the stator of this motor has adopted two sandwich piezoelectric vibrators, and the layout that is in the shape of the letter V, the protecgulum of two oscillators have been merged into door font elastomer structure, form double-driving foot thus.The main deficiency of this motor is: 1) overall dimension of motor is bigger, and energy density is not high; 2) motor lacks a solid fulcrum that can make energy loss reduce to minimum.
Summary of the invention
The objective of the invention is to defective at the prior art existence, a kind of two-stroke compact piezoelectric linear motor is provided, have approximate cubical compact appearance, volume is little, energy density is high, thrust and self-sustaining power is big, motion output steadily, Motion Resolution rate height, electromechanical conversion efficiency height.
For achieving the above object, the present invention adopts following technical proposals.
A kind of piezoelectric linear motor of two-stroke compact, comprise stator and mover, it is characterized in that: described stator is by last elastomer block, down elastomer block, first group piezoelectric actuated, second group piezoelectric actuated and trip bolt constitute, wherein first group piezoelectric actuated is clamped between elastomer block and the following elastomer block, and evenly clamps with trip bolt; On two relative sides that second group piezoelectric actuated then sticks on down elastomer block securely; Following elastomer block is with making such as specific acoustic impedance materials with smaller such as duralumin, and last elastomer block is with making such as bigger material of specific acoustic impedance such as steel.Described mover is a line slideway with smooth working surface, and its below is supported by two directive wheels that be arranged in parallel.The following elastomer block of described stator has the smooth top face of double wedge and this line slideway inconsistent, by peripheral encapsulating structure precompression is acted on elastomer block below midpoint, this point is the relative rest point of whole stator when vibrating by predetermined modality, and this precompression makes described stator keep vertical compressing with described mover.
Described stator is respectively complete symmetrical structure along left and right directions and fore-and-aft direction.Top of elastomer block has 4 projections on it.It has 2 protruding pin in bottom of elastomer block down.The anti-phase each other extensional vibration mode of 2 of elastomer block protruding pin is first operation mode under the motor utilization, and utilizing the anti-phase each other horizontal beat mode of oscillation of these 2 protruding pin is second operation mode.The frequency of two operation modes is close, and is combined into the required elliptical orbit vibration of motion output at the double wedge end of following elastomer block.
Described first group piezoelectric actuated and second group piezoelectric actuated all be the even coating galactic pole of upper and lower surface, along the even piezoelectric ceramic piece of polarization of thickness direction.Two families about described first group of piezoelectric actuated branch, the piezoelectric ceramic piece that is the even number sheet builds up, and the polarised direction of piezoelectric ceramic piece of the same clan is positioned opposite in twos, and extraction electrode sheet between the same polarity composition surface is used to apply external electric field.Between two family's piezoelectric ceramic pieces, the incorgruous each other layout of the polarised direction of counterpiece.Be used to encourage described first operation mode.Described second group piezoelectric actuated also be divided into about two families, every family is made up of two piezoelectric ceramic pieces in front and back.The polarised direction of two piezoelectric ceramic pieces of the same clan arranges in the same way, and incorgruous each other with the corresponding piezoelectric ceramic piece polarised direction of another family.Be used to encourage described second operation mode.
The electric excitation mode of motor is to be that the same frequency harmonic signal alternating electric field of pi/2 encourages first group piezoelectric actuated and second group piezoelectric actuated dither respectively with two groups of phase differences.Its effect is that the double wedge end of elastomer block is alternately contacted with mover with 180 ° of phase differences, and produces equidirectional two-stroke friction-driven effect, promotes the continuous rectilinear motion of mover output.During two groups of electric excitation signal exchanges, the direction of motion of output is reverse.
The present invention compared with prior art has following outstanding substantive distinguishing features and remarkable advantage:
1. the following elastomer block driven that has two protruding pin is reached the two-stroke that is similar to bi-block engine and is driven effect, and the motor overall volume is reduced, and energy density strengthens;
2. piezoelectric actuated structural design of sandwich utilized the thickness vibration mode of piezoelectric element, and electromechanical coupling factor is big, and because bigger precompression can be provided, so vibration force is big, makes that thrust and self-sustaining power that motor produced are big;
3. used many groups piezoelectric actuated except motor stator extensional vibration excitation, the horizontal beat vibrational excitation of motor stator has also been used many groups piezoelectric actuated, so the availability height of piezoelectric element, makes the energy density of motor strengthen;
4. two mutually orthogonal antisymmetric vibration mode of motor stator have been utilized, there is public vibration nodal point between these two mode, make things convenient for motor to prop up admittedly herein, bear precompression, thereby at utmost reduced of the consumption of solid fulcrum, made the motor electromechanical conversion efficiency improve for vibration wave reflection and vibrational energy;
5. the two-stroke mode of operation of motor stator of the present invention was doubled than the time of the sufficient stator contact of common single driving mover, and machine operation is more steady, and the precision of rectilinear motion of output improves.
6. descend elastomer block to make 2 long bulge-structures, make of the specific acoustic impedance materials with smaller, last elastomer block is made 4 short and thick bulge-structures, with the bigger material of specific acoustic impedance, make the vibrational energy of motor stator assemble in motor-driven foot end, amplify vibration amplitude, improved the thrust output and the speed of motor.
Description of drawings
Fig. 1 is the structural representation of one embodiment of the present of invention;
Fig. 2 is first operation mode of the motor stator of one embodiment of the present of invention;
Fig. 3 is second operation mode of corresponding diagram 2;
Fig. 4 is that piezoelectric actuated polarised direction of the motor stator of one embodiment of the present of invention and extra electric field signal insert schematic diagram;
Fig. 5 is the stator of one embodiment of the present of invention during with first operation mode and the second operation mode complex vibration, following elastomer block oscillating movement track decomposing schematic representation.The phase place mutual deviation is 90 ° between its extensional vibration and the transverse vibration.Wherein figure (a) is the situation that extensional vibration reaches the forward peak swing, figure (b) is the situation that transverse vibration reaches the forward peak swing, figure (c) is the situation that extensional vibration reaches negative peak amplitude, and figure (d) is the situation that transverse vibration reaches negative peak amplitude.
Embodiment:
Details are as follows in conjunction with the accompanying drawings for the preferred embodiments of the present invention:
Embodiment one: referring to Fig. 1, this two-stroke compact piezoelectric linear motor comprises stator and mover, and described stator is by last elastomer block 1, down elastomer block 5, first group piezoelectric actuated 4, second groups piezoelectric actuated 6 and trip bolt 12 constitute; Wherein be clamped in for first group piezoelectric actuated 4 between elastomer block 1 and the following elastomer block 5, and evenly clamp, on two relative sides 11 that second group piezoelectric actuated 6 stick on down elastomer block 5 securely with trip bolt 12; Described mover is a line slideway 9, and its below is supported by two directive wheels that be arranged in parallel 10; The following elastomer block 5 of described stator has toothed projections 8 inconsistent with the end face of this line slideway 9, and precompression acts on elastomer block 1 below midpoint 3, makes described mover keep vertical compressing with described stator.
Embodiment two: present embodiment and embodiment one are basic identical, special feature is as follows: described elastomer block 5 is down made by the specific acoustic impedance materials with smaller, the described elastomer block 1 that goes up is made by the bigger material of specific acoustic impedance, promptly goes up the material specific acoustic impedance of the material specific acoustic impedance of elastomer block 1 greater than following elastomer block 5.Described stator is respectively complete symmetrical structure along left and right directions and fore-and-aft direction, and top of elastomer block 1 has 4 projections 2 on it, and it has 2 protruding pin 7 in bottom of elastomer block 5 down.The described material of going up elastomer block 1 is a steel, and the described material of elastomer block 5 down is an aluminium.Described first group and second group piezoelectric actuated 4,6 all be the even coating galactic pole of upper and lower surface, along the even piezoelectric ceramic piece of polarization of thickness direction.The anti-phase each other extensional vibration mode of 2 protruding pin 7 of elastomer block 5 is first operation mode under the described motor utilization, utilizing the anti-phase each other horizontal beat mode of oscillation of these 2 protruding pin 7 is second operation mode, the frequency of two operation modes is close, in following elastomer block 5 protruding pin 7 lower ends double wedge 8 is arranged, be combined into the required elliptical orbit vibration of motion output by the end of this two double wedge 8.
Described first group piezoelectric actuated two families about 4 minutes build up by the piezoelectric ceramic piece of even number sheet, and the polarised direction of piezoelectric ceramic piece of the same clan is positioned opposite in twos, and extraction electrode sheet between the same polarity composition surface is used to apply external electric field; Between two family's piezoelectric ceramic pieces, the incorgruous each other layout of the polarised direction of counterpiece is used to encourage described first operation mode; Described second group piezoelectric actuated 6 also be divided into about two families, every family is made up of two piezoelectric ceramic pieces in front and back.The polarised direction of two piezoelectric ceramic pieces of the same clan arranges in the same way, and incorgruous each other with the corresponding piezoelectric ceramic piece polarised direction of another family, is used to encourage described second operation mode.
Electric excitation mode is: with two groups of phase differences is the dither that the same frequency harmonic signal alternating electric field of pi/2 encourages respectively first group piezoelectric actuated 4 and second groups piezoelectric actuated 6, its effect is that double wedge 8 ends of elastomer block 5 are alternately contacted with mover with 180 ° of phase differences, and produce equidirectional two-stroke friction-driven effect, promote the continuous rectilinear motion of mover output; During two groups of electric excitation signal exchanges, the direction of motion of output is reverse.
Embodiment three: present embodiment and embodiment two are basic identical, and special feature is: motor stator monnolithic case size is 20.2mm * 15.6mm * 12.0mm.Described mover is that cross dimensions is the straight steel line slideway of the smooth working surface of having of 12mm * 6mm, and the node location that vibrates at motor stator applies precompression, makes aforementioned mover drive sufficient end face and contacts with the smooth working surface of guide rail, and compress.
The stator of motor is along left and right directions and the complete symmetrical structure of fore-and-aft direction difference, and constituted the composite material elastomer of an integral body, utilizing the anti-phase each other extensional vibration mode of these elastomeric two lower lobes structures is first operation mode, and utilizing this elastomeric two anti-phase each other horizontal beat mode of oscillation that drives foot is second operation mode.Utilize finite element numerical to calculate, obtain making the mutual approaching concrete structure size of frequency of two mode.The operation mode frequency that calculates is near 110kHz, and when encouraging under this frequency, motor stator is combined into the required elliptical orbit vibration of motion output at following elastomer block toothed projections end.
Claims (8)
1. two-stroke compact piezoelectric linear motor, comprise stator and mover, it is characterized in that: described stator is made of last elastomer block (1), following elastomer block (5), first group piezoelectric actuated (4), second group piezoelectric actuated (6) and trip bolt (12); Wherein first group piezoelectric actuated (4) are clamped between elastomer block (1) and the following elastomer block (5), and evenly clamp with trip bolt (12), second group piezoelectric actuated (6) then stick on down on two relative sides (11) of elastomer block (5) securely; Described mover is a line slideway (9), and its below is supported by two directive wheels that be arranged in parallel (10); The following elastomer block (5) of described stator has toothed projections (8) inconsistent with the end face of this line slideway (9), and precompression acts on elastomer block (1) below midpoint (3), makes described mover keep vertical compressing with described stator.
2. two-stroke compact piezoelectric linear motor according to claim 1, it is characterized in that described stator is respectively complete symmetrical structure along left and right directions and fore-and-aft direction, the top of elastomer block on it (1) has 4 projections (2), and it has 2 protruding pin (7) in bottom of elastomer block (5) down.
3. two-stroke compact piezoelectric linear motor according to claim 1, it is characterized in that described down elastomer block (5) made by the specific acoustic impedance materials with smaller, the described elastomer block (1) that goes up is made by the bigger material of specific acoustic impedance, promptly goes up the material specific acoustic impedance of the material specific acoustic impedance of elastomer block (1) greater than following elastomer block (5).
4. two-stroke compact piezoelectric linear motor according to claim 3 is characterized in that the described material of going up elastomer block (1) is a steel, and the described material of elastomer block (5) down is an aluminium.
5. two-stroke compact piezoelectric linear motor according to claim 1, it is characterized in that described first group and second group piezoelectric actuated (4,6) all be the even coating galactic pole of upper and lower surface, along the even piezoelectric ceramic piece of polarization of thickness direction.
6. two-stroke compact piezoelectric linear motor according to claim 1, the anti-phase each other extensional vibration mode that it is characterized in that 2 protruding pin (7) of elastomer block under the motor utilization (5) is first operation mode, utilizing the anti-phase each other horizontal beat mode of oscillation of these 2 protruding pin (7) is second operation mode, the frequency of two operation modes is close, in the following protruding pin of elastomer block (5) (7) lower end double wedge (8) is arranged, be combined into the required elliptical orbit vibration of motion output by the end of this two double wedge (8).
7. two-stroke compact piezoelectric linear motor according to claim 6, it is characterized in that two families about described first group piezoelectric actuated (4) branch, piezoelectric ceramic piece by the even number sheet builds up, the polarised direction of piezoelectric ceramic piece of the same clan is positioned opposite in twos, extraction electrode sheet between the same polarity composition surface is used to apply external electric field; Between two family's piezoelectric ceramic pieces, the incorgruous each other layout of the polarised direction of counterpiece is used to encourage described first operation mode; Two families about described second group piezoelectric actuated (6) also are divided into, every family is made up of two piezoelectric ceramic pieces in front and back; The polarised direction of two piezoelectric ceramic pieces of the same clan arranges in the same way, and incorgruous each other with the corresponding piezoelectric ceramic piece polarised direction of another family, is used to encourage described second operation mode.
8. two-stroke compact piezoelectric linear motor according to claim 1, it is characterized in that electric excitation mode is: with two groups of phase differences is the dither that the same frequency harmonic signal alternating electric field of pi/2 encourages first group piezoelectric actuated (4) and second group piezoelectric actuated (6) respectively, its effect is that double wedge (8) end that makes down elastomer block (5) alternately contacts with mover with 180 ° of phase differences, and produce equidirectional two-stroke friction-driven effect, promote the continuous rectilinear motion of mover output; During two groups of electric excitation signal exchanges, the direction of motion of output is reverse.
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CN 201010561340 CN102075111B (en) | 2010-11-27 | 2010-11-27 | Two-stroke compact type piezoelectric linear motor |
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CN 201010561340 CN102075111B (en) | 2010-11-27 | 2010-11-27 | Two-stroke compact type piezoelectric linear motor |
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CN102075111B CN102075111B (en) | 2013-09-04 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108780838A (en) * | 2016-03-15 | 2018-11-09 | 物理仪器(Pi)两合有限公司 | Piezoelectric actuator |
CN111030502A (en) * | 2019-12-24 | 2020-04-17 | 上海大学 | Tuning fork type double-foot linear piezoelectric motor |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6211603B1 (en) * | 1997-05-23 | 2001-04-03 | Seiko Instruments Inc. | Ultrasonic motor and electronic apparatus with ultrasonic motor |
CN2529448Y (en) * | 2001-07-27 | 2003-01-01 | 南京航空航天大学 | Linear-type standing-wave altrosonic electric machine |
CN1977403A (en) * | 2004-05-18 | 2007-06-06 | 物理设备(Pi)两合公司 | Piezoelectric ultrasound motor |
CN101001054A (en) * | 2006-12-26 | 2007-07-18 | 华南农业大学 | Double-cylinder vibrator linear ultrasonic motor |
CN101119079A (en) * | 2007-09-13 | 2008-02-06 | 上海大学 | Triangle bended plate type piezoelectric straight line ultrasound electric motor |
-
2010
- 2010-11-27 CN CN 201010561340 patent/CN102075111B/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6211603B1 (en) * | 1997-05-23 | 2001-04-03 | Seiko Instruments Inc. | Ultrasonic motor and electronic apparatus with ultrasonic motor |
CN2529448Y (en) * | 2001-07-27 | 2003-01-01 | 南京航空航天大学 | Linear-type standing-wave altrosonic electric machine |
CN1977403A (en) * | 2004-05-18 | 2007-06-06 | 物理设备(Pi)两合公司 | Piezoelectric ultrasound motor |
CN101001054A (en) * | 2006-12-26 | 2007-07-18 | 华南农业大学 | Double-cylinder vibrator linear ultrasonic motor |
CN101119079A (en) * | 2007-09-13 | 2008-02-06 | 上海大学 | Triangle bended plate type piezoelectric straight line ultrasound electric motor |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108780838A (en) * | 2016-03-15 | 2018-11-09 | 物理仪器(Pi)两合有限公司 | Piezoelectric actuator |
JP2019510457A (en) * | 2016-03-15 | 2019-04-11 | フィジック インストゥルメント(ピーアイ)ゲーエムベーハー アンド ツェーオー.カーゲー | Piezoelectric drive |
US11101750B2 (en) | 2016-03-15 | 2021-08-24 | Physik Instrumente (Pi) Gmbh & Co. Kg | Piezoelectric drive with at least two independent drive sections |
CN108780838B (en) * | 2016-03-15 | 2022-04-26 | 物理仪器(Pi)两合有限公司 | Piezoelectric actuator |
JP7208794B2 (en) | 2016-03-15 | 2023-01-19 | フィジック インストゥルメント(ピーアイ)ゲーエムベーハー アンド ツェーオー.カーゲー | piezoelectric drive |
CN111030502A (en) * | 2019-12-24 | 2020-04-17 | 上海大学 | Tuning fork type double-foot linear piezoelectric motor |
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