CN102060542A - Method for producing fused silica ceramic crucible - Google Patents

Method for producing fused silica ceramic crucible Download PDF

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Publication number
CN102060542A
CN102060542A CN 201010562157 CN201010562157A CN102060542A CN 102060542 A CN102060542 A CN 102060542A CN 201010562157 CN201010562157 CN 201010562157 CN 201010562157 A CN201010562157 A CN 201010562157A CN 102060542 A CN102060542 A CN 102060542A
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China
Prior art keywords
fused quartz
quartz ceramic
preparation
powder
ceramic crucible
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CN 201010562157
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Chinese (zh)
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李飞
吕和平
王飞
何博
孙宝德
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Shanghai Jiaotong University
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Shanghai Jiaotong University
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Priority to CN 201010562157 priority Critical patent/CN102060542A/en
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Abstract

The invention relates to a method for producing a fused silica ceramic crucible, which belongs to the technical field of a nonmetallic material. The method comprises the steps of: blending fused silica ceramic powder with a grain composition and a premix liquid to prepare a sizing agent, and then carrying out vacuum defoaming, pouring, curing, demoulding, drying and sintering to produce a silica ceramic crucible. In the method, the fused silica ceramic powder with a grain composition is used as a raw material, and thus the produced crucible has a uniform organizational structure, excellent thermal shock resistance, high temperature resistance and chemical stability and can meet the process requirements for the production of polysilicon. The method has the advantages of simple process, short production period and low cost and is suitable for industrialized application.

Description

The preparation method of fused quartz ceramic crucible
Technical field
What the present invention relates to is a kind of method of technical field of inorganic nonmetallic materials, specifically is a kind of preparation method of fused quartz ceramic crucible.
Background technology
Ceramic crucible is the container that polycrystalline silicon ingot casting is used.The solar energy polycrystalline silicon industry adopts fused quartz to make ceramic crucible as raw material more, mainly be because fused quartz has higher acid and alkali-resistance erosion performance and thermal shock resistance, particularly thermal expansivity is more much lower than other stupalith, so quartz ceramic crucible has become irreplaceable key consumable material in the polysilicon production process.
At present, the main method of making quartz ceramic crucible comprises the gel injection method that grows up at the traditional slip casting method and the beginning of the nineties in last century.Find through retrieval, put down in writing a kind of slip casting method that adopted among the Chinese patent application 200810124615.X and made the quartz ceramic crucible that is used for polycrystalline silicon ingot casting prior art.The disclosed technology of this technology mainly is to adopt the gypsum mold suction precipitator method to realize the accumulation moulding of quartz particles, but can there be quartz particles thickness skewness on height and the wall thickness direction inevitably in the ceramic crucible that adopts this technology to make, produce density gradient, cause the mechanics of crucible integral body and thermal property to descend; Production cycle while is long, and blank strength is low, and requires many cover gypsum molds to match.
Further retrieval is found, disclosing a kind of employing composite multi-stage fused quartz powder in the Chinese patent application numbers 200910087303.0 is raw material, and the gel injection legal system is made the technology of quartz ceramic crucible.The characteristics of this technology are by controlling the grain size distribution of quartzy powder, and it is even to obtain weave construction, controlled porosity, the quartz crucible with good anti-thermal shock and resistance to elevated temperatures.But there is certain defective in this method.At first,, have the elasticity of rubber like, and rigidity is lower, because the size of crucible biscuit is bigger, so the deadweight distortion because of crucible just is difficult to control before its finish-drying by the biscuit of ceramics that the gel injection method obtains; Secondly, the quartz-ceramics slurry because air is discharged rapidly, easily causes pulp gelization to be carried out in advance in vacuumizing the process of degasification, so difficult control set time; The 3rd, adopt the gel injection method to make fused silica crucible, need under high humidity and room temperature condition, be dried to base substrate for a long time usually remarkable contraction no longer takes place, could under higher temperature, carry out drying then, so drying cycle is very long.
In sum, exploring the new technology of making quartz ceramic crucible, still is the important research direction in solar energy polycrystalline silicon ingot casting field.
Summary of the invention
The present invention is directed to the prior art above shortcomings, a kind of preparation method of fused quartz ceramic crucible is provided, the fused quartz powder that adopts grain composition is as raw material, the weave construction of the crucible for preparing is even, have excellent anti-thermal shock, resistance to elevated temperatures and chemical stability, can satisfy the processing requirement of production of polysilicon, and technology is simple, fabrication cycle short, with low cost, be suitable for commercial application.
The present invention is achieved by the following technical solutions, and the present invention carries out froth in vacuum behind the slurry and handles by the fused quartz ceramic powder of grain composition and premixed liquid are mixed with, and makes quartz ceramic crucible then behind cast, curing, the demoulding, drying and sintering.
The fused quartz ceramic powder of described grain composition prepares in the following manner: choose that purity reaches 99.9wt.% or above and granularity is respectively 0.1 μ m~1.0 μ m, 1.0 the fused quartz powder of μ m~10 μ m and 10 μ m~100 μ m, according to following weight proportion: granularity is that the silica powder of 0.1 μ m~1.0 μ m is 5-20%, granularity is that the silica powder of 0.1 μ m~1.0 μ m is 30-60%, surplus is that granularity is the fused quartz powder of 10 μ m~100 μ m, fused quartz powder after the proportioning packed into carry out dry mixed in the mixer, mixing time is more than the 2h, obtains the fused quartz ceramic powder of grain composition.
The component of described premixed liquid and content are: tetraethyl silicate 35wt.%, dehydrated alcohol 30wt.%, Virahol 2.5wt.%, propylene glycol monomethyl ether 10wt.%, acidic silicasol 22wt.% and hydrochloric acid 0.5wt.%, wherein: the purity 〉=99wt.% of tetraethyl silicate, the H value is 3-4, solid content 30wt.%; Silicon oxide colloid particle diameter 10~15nm in the acidic silicasol; Purity 〉=the 99.5wt.% of dehydrated alcohol; Purity 〉=the 98wt.% of propylene glycol monomethyl ether; Purity 〉=the 99.5wt.% of Virahol; Purity 〉=the 99wt.% of hydrochloric acid.
Described slurry prepares in the following manner: be to obtain the quartz-ceramics slurry after putting into ball mill ball milling 1h-12h after 80: 20~50: 50 the ratio batching with weight ratio with the fused quartz ceramic powder of premixed liquid and grain composition.
Described froth in vacuum is handled and is meant: slurry is put into vacuum vessel stir de-bubble 5-30min, the solidifying agent that takes by weighing the 0.5-2% of premixed liquid weight then adds in the slurry, continues to stir de-bubble 1-2min.
The component of described solidifying agent and content are: Di-n-Butyl Amine 30 weight parts of purity 〉=98.5wt.% and dehydrated alcohol 70 weight parts of purity 〉=99.5wt.%.
The described cast cured explosive demoulding is meant: the slurry after adopting pressure reduction injects or normal pressure injects mode with solidification treatment injects the mould that metal, plastics, glass or ceramic die are made, and at room temperature place up to slurry curing, then with the solidified quartz ceramic crucible biscuit demoulding.
Described drying and sintering is meant: seasoning 12-48h at first at room temperature, at room temperature the exsiccant biscuit is put in the sintering oven with 0.5 ℃-5 ℃ temperature rise rate and is heated to 1150 ℃-1350 ℃ and be incubated 1h-24h then, and the cooling back obtains the fused quartz ceramic crucible.
Be that monomeric gel injection method is compared with organism such as acrylamides, advantage of the present invention comprises:
At first, adopted premixed liquid based on tetraethyl silicate and acidic silicasol, with Di-n-Butyl Amine can at normal temperatures curing reaction can take place, the time that reacts can be adjusted according to the ratio of Di-n-Butyl Amine and premixed liquid, shorten along with the increase of solidifying agent add-on the set time that is slurry, the controllability of set time has guaranteed that the operator can reserve adequate time and finish injection molded process, simultaneously do not need mould is heated the curing that can realize slurry, simplified operating procedure; Secondly, adopted wedding agent, burnt till, all can be transformed into the silicon-dioxide that has identical component with the fused quartz powder,, guaranteed the homogeneity of the chemical constitution of crucible so there is not other ceramic phase in the crucible through high temperature based on tetraethyl silicate and acidic silicasol; The 3rd, because having adopted the organic solvent that is higher than water with rate of volatilizations such as dehydrated alcohols is dispersion medium, so need under the condition of high humidity and room temperature, not carry out predrying, but also need be further not dry in being higher than the baking oven of room temperature, directly carry out sintering and get final product, saved the energy and Production Time; The 4th, the biscuit that obtains after drying at room temperature has certain rigidity, and has certain elasticity unlike the biscuit that in the past gel injection method obtains, so can not deform because of action of gravity in drying process, has guaranteed the dimensional precision of crucible.
Embodiment
Below embodiments of the invention are elaborated, present embodiment is being to implement under the prerequisite with the technical solution of the present invention, provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
Embodiment 1
The first step, the fused quartz ceramic powder of preparation grain composition
Prepare burden according to 100Kg fused quartz ceramic powder, the silica powder that takes by weighing granularity and be 0.1 μ m~1.0 μ m is 5Kg, granularity is that the silica powder of 0.1 μ m~1.0 μ m is 45Kg, granularity is the fused quartz powder 55Kg of 10 μ m~100 μ m, pack into and carry out dry mixed in the mixer, mixing time is 5h, obtains to be used to make the fused quartz ceramic mixed powder of crucible, and is standby.
Second step, the preparation premixed liquid
According to 100Kg preparation premixed liquid, screening formulation is as follows: tetraethyl silicate 35Kg, dehydrated alcohol 30Kg, Virahol 2.5Kg, propylene glycol monomethyl ether 10Kg, acidic silicasol 22Kg, hydrochloric acid 0.5Kg, above-mentioned chemical reagent is joined in the agitation vat, adopt powerful alr mode that above-mentioned chemical reagent is mixed and obtain mixing solutions, and adopt the type of cooling that the mixing solutions temperature is controlled between 7-11 ℃.The mixing solutions that obtains by above process is premixed liquid, and is standby.
The 3rd step, the preparation solidifying agent
According to 10Kg preparation solidifying agent, take by weighing Di-n-Butyl Amine 3Kg, dehydrated alcohol 7Kg joins in the agitation vat, mixes, and is as solidifying agent, standby.
The 4th step, the making of crucible biscuit
Take by weighing 20 kilograms of the premixed liquids of the second step preparation, put in the ball mill that has vacuum extractor, the fused quartz ceramic powder 80Kg that adds the first step preparation then, ball milling mixing 12h, vacuum stripping 30 minutes adds the 3rd then and goes on foot the solidifying agent 100g for preparing, continue to stir 2 minutes, be injected in the mould, at room temperature keep about 30min, slurry curing becomes biscuit; After the biscuit demoulding, be put on the platform of level, after about 12 hours, the biscuit complete drying; The biscuit that drying is good is put into sintering oven, is heated to 1350 ℃ with the heating rate of 0.5 ℃/min, keeps 1h under this temperature, cools to room temperature with the furnace, obtains the fused quartz ceramic crucible.
Embodiment 2
The first step, the fused quartz ceramic powder of preparation grain composition
Prepare burden according to 100Kg fused quartz ceramic powder, the silica powder that takes by weighing granularity and be 0.1 μ m~1.0 μ m is 10Kg, granularity is that the silica powder of 0.1 μ m~1.0 μ m is 45Kg, granularity is the fused quartz powder 45Kg of 10 μ m~100 μ m, pack into and carry out dry mixed in the mixer, mixing time is 3h, obtains to be used to make the fused quartz ceramic mixed powder of crucible, and is standby.
Second step, the preparation premixed liquid
According to 100Kg preparation premixed liquid, screening formulation is as follows: tetraethyl silicate 35Kg, dehydrated alcohol 30Kg, Virahol 2.5Kg, propylene glycol monomethyl ether 10Kg, acidic silicasol 22Kg, hydrochloric acid 0.5Kg, above-mentioned chemical reagent is joined in the agitation vat, adopt powerful alr mode that above-mentioned chemical reagent is mixed and obtain mixing solutions, and adopt the type of cooling that the mixing solutions temperature is controlled between 7-11 ℃.The mixing solutions that obtains by above process is premixed liquid, and is standby.
The 3rd step, the preparation solidifying agent
According to 10Kg preparation solidifying agent, take by weighing Di-n-Butyl Amine 3Kg, dehydrated alcohol 7Kg joins in the agitation vat, mixes, and is as solidifying agent, standby.
The 4th step, the making of crucible biscuit
Take by weighing 35 kilograms of the premixed liquids of the second step preparation, put in the ball mill that has vacuum extractor, the fused quartz ceramic powder 65Kg that adds the first step preparation then, ball milling mixing 6h, vacuum stripping 20 minutes adds the 3rd then and goes on foot the solidifying agent 350g for preparing, continue to stir 1.5 minutes, be injected in the mould, at room temperature keep about 20min, slurry curing becomes biscuit; After the biscuit demoulding, be put on the platform of level, after about 18 hours, the biscuit complete drying; The biscuit that drying is good is put into sintering oven, is heated to 1250 ℃ with the heating rate of 2.5 ℃/min, keeps 12h under this temperature, cools to room temperature with the furnace, obtains the fused quartz ceramic crucible.
Embodiment 3
The first step, the fused quartz ceramic powder of preparation grain composition
Prepare burden according to 100Kg fused quartz ceramic powder, the silica powder that takes by weighing granularity and be 0.1 μ m~1.0 μ m is 20Kg, granularity is that the silica powder of 0.1 μ m~1.0 μ m is 60Kg, granularity is the fused quartz powder 20Kg of 10 μ m~100 μ m, pack into and carry out dry mixed in the mixer, mixing time is 2h, obtains to be used to make the fused quartz ceramic mixed powder of crucible, and is standby.
Second step, the preparation premixed liquid
According to 100Kg preparation premixed liquid, screening formulation is as follows: tetraethyl silicate 35Kg, dehydrated alcohol 30Kg, Virahol 2.5Kg, propylene glycol monomethyl ether 10Kg, acidic silicasol 22Kg, hydrochloric acid 0.5Kg, above-mentioned chemical reagent is joined in the agitation vat, adopt powerful alr mode that above-mentioned chemical reagent is mixed and obtain mixing solutions, and adopt the type of cooling that the mixing solutions temperature is controlled between 7-11 ℃.The mixing solutions that obtains by above process is premixed liquid, and is standby.
The 3rd step, the preparation solidifying agent
According to 10Kg preparation solidifying agent, take by weighing Di-n-Butyl Amine 3Kg, dehydrated alcohol 7Kg joins in the agitation vat, mixes, and is as solidifying agent, standby.
The 4th step, the making of crucible biscuit
Take by weighing 50 kilograms of the premixed liquids of the second step preparation, put in the ball mill that has vacuum extractor, the fused quartz ceramic powder 50Kg that adds the first step preparation then, ball milling mixing 1h, vacuum stripping 5 minutes adds the 3rd then and goes on foot the solidifying agent 1000g for preparing, continue to stir 1 minute, be injected in the mould, at room temperature keep about 5min, slurry curing becomes biscuit; After the biscuit demoulding, be put on the platform of level, after about 24 hours, the biscuit complete drying; The biscuit that drying is good is put into sintering oven, is heated to 1150 ℃ with the heating rate of 5 ℃/min, keeps 24h under this temperature, cools to room temperature with the furnace, obtains the fused quartz ceramic crucible.

Claims (8)

1. the preparation method of a fused quartz ceramic crucible, it is characterized in that, carry out froth in vacuum behind the slurry and handle by the fused quartz ceramic powder of grain composition and premixed liquid are mixed with, after cast, curing, the demoulding and drying and sintering, make quartz ceramic crucible then.
2. the preparation method of fused quartz ceramic crucible according to claim 1, it is characterized in that, the fused quartz ceramic powder of described grain composition prepares in the following manner: choose that purity reaches 99.9wt.% or above and granularity is respectively 0.1 μ m~1.0 μ m, 1.0 the fused quartz powder of μ m~10 μ m and 10 μ m~100 μ m, according to following weight proportion: granularity is that the silica powder of 0.1 μ m~1.0 μ m is 5-20%, granularity is that the silica powder of 0.1 μ m~1.0 μ m is 30-60%, surplus is that granularity is the fused quartz powder of 10 μ m~100 μ m, fused quartz powder after the proportioning packed into carry out dry mixed in the mixer, mixing time is more than the 2h, obtains particle level fused quartz ceramic powder.
3. the preparation method of fused quartz ceramic crucible according to claim 1, it is characterized in that, the component of described premixed liquid and content are: tetraethyl silicate 35wt.%, dehydrated alcohol 30wt.%, Virahol 2.5wt.%, propylene glycol monomethyl ether 10wt.%, acidic silicasol 22wt.% and hydrochloric acid 0.5wt.%, wherein: the purity 〉=99wt.% of tetraethyl silicate, the H value is 3-4, solid content 30wt.%; Silicon oxide colloid particle diameter 10~15nm in the acidic silicasol; Purity 〉=the 99.5wt.% of dehydrated alcohol; Purity 〉=the 98wt.% of propylene glycol monomethyl ether; Purity 〉=the 99.5wt.% of Virahol; Purity 〉=the 99wt.% of hydrochloric acid.
4. the preparation method of fused quartz ceramic crucible according to claim 1, it is characterized in that described slurry prepares in the following manner: be to obtain the quartz-ceramics slurry after putting into ball mill ball milling 1h-12h after 80: 20~50: 50 the ratio batching with premixed liquid and particle level fused quartz ceramic powder with weight ratio.
5. the preparation method of fused quartz ceramic crucible according to claim 1, it is characterized in that, described vacuum solidification is handled and is meant: slurry is put into vacuum vessel stir de-bubble 5-30min, the solidifying agent that takes by weighing the 0.5-2% of premixed liquid weight then adds in the slurry ball milling blend 1-2min.
6. the preparation method of fused quartz ceramic crucible according to claim 1 is characterized in that, the component of described solidifying agent and content are: Di-n-Butyl Amine 30 weight parts of purity 〉=98.5wt.% and dehydrated alcohol 70 weight parts of purity 〉=99.5wt.%.
7. the preparation method of fused quartz ceramic crucible according to claim 1, it is characterized in that, the described cast demoulding is meant: the slurry after adopting pressure reduction injects or normal pressure injects mode with solidification treatment injects the mould that metal, plastics, glass or ceramic die are made, and at room temperature place up to slurry curing, then with the solidified quartz-ceramics biscuit demoulding.
8. the preparation method of fused quartz ceramic crucible according to claim 1, it is characterized in that, described drying and sintering is meant: seasoning 12-48h at first at room temperature, at room temperature the exsiccant biscuit is put in the sintering oven with 0.5 ℃-5 ℃ temperature rise rate and is heated to 1150 ℃-1350 ℃ and be incubated 1h-24h then, and the cooling back obtains the fused quartz ceramic crucible.
CN 201010562157 2010-11-26 2010-11-26 Method for producing fused silica ceramic crucible Pending CN102060542A (en)

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Cited By (10)

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CN102632190A (en) * 2012-04-22 2012-08-15 丹阳市精密合金厂有限公司 Core filling material for casing type precision casting support plate and preparing method of core filling material
CN103011567A (en) * 2012-12-28 2013-04-03 江苏太平洋石英股份有限公司 Preparation method of quartz ceramic crucible
CN103030405A (en) * 2012-11-23 2013-04-10 江苏中硅工程材料有限公司 Control method for firing high-performance quartz ceramic
CN103145339A (en) * 2013-03-20 2013-06-12 江苏中硅工程材料有限公司 Quartz ceramic material and application for same
CN103359918A (en) * 2012-04-01 2013-10-23 比亚迪股份有限公司 Crucible and preparation method thereof
CN103508660A (en) * 2012-06-15 2014-01-15 宁国市锦宏耐磨材料有限公司 Crucible and manufacturing method thereof
CN104803579A (en) * 2015-05-06 2015-07-29 江苏圣达石英制品有限公司 Device and technological method for producing light-guiding crystal rod by adopting single-furnace sealing method
CN105541311A (en) * 2015-12-09 2016-05-04 中钢集团洛阳耐火材料研究院有限公司 Preparation method of silicon nitride-fused silica crucible for polysilicon ingot casting
CN107285789A (en) * 2017-08-08 2017-10-24 芜湖通全科技有限公司 A kind of preparation method of vitreous silica gradient pore foamed ceramics
CN109759539A (en) * 2019-02-28 2019-05-17 上海万泽精密铸造有限公司 A kind of compound binding agent and preparation method thereof for investment casting shell

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Cited By (15)

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Publication number Priority date Publication date Assignee Title
CN103359918B (en) * 2012-04-01 2015-07-22 比亚迪股份有限公司 Crucible and preparation method thereof
CN103359918A (en) * 2012-04-01 2013-10-23 比亚迪股份有限公司 Crucible and preparation method thereof
CN102632190A (en) * 2012-04-22 2012-08-15 丹阳市精密合金厂有限公司 Core filling material for casing type precision casting support plate and preparing method of core filling material
CN103508660A (en) * 2012-06-15 2014-01-15 宁国市锦宏耐磨材料有限公司 Crucible and manufacturing method thereof
CN103030405A (en) * 2012-11-23 2013-04-10 江苏中硅工程材料有限公司 Control method for firing high-performance quartz ceramic
CN103030405B (en) * 2012-11-23 2014-02-12 江苏中硅工程材料有限公司 Control method for firing high-performance quartz ceramic
CN103011567A (en) * 2012-12-28 2013-04-03 江苏太平洋石英股份有限公司 Preparation method of quartz ceramic crucible
CN103011567B (en) * 2012-12-28 2015-09-23 江苏太平洋石英股份有限公司 A kind of preparation method of quartz ceramic crucible
CN103145339A (en) * 2013-03-20 2013-06-12 江苏中硅工程材料有限公司 Quartz ceramic material and application for same
CN103145339B (en) * 2013-03-20 2015-06-03 江苏中硅工程材料有限公司 Quartz ceramic material and application for same
CN104803579A (en) * 2015-05-06 2015-07-29 江苏圣达石英制品有限公司 Device and technological method for producing light-guiding crystal rod by adopting single-furnace sealing method
CN105541311A (en) * 2015-12-09 2016-05-04 中钢集团洛阳耐火材料研究院有限公司 Preparation method of silicon nitride-fused silica crucible for polysilicon ingot casting
CN105541311B (en) * 2015-12-09 2018-11-13 中钢集团洛阳耐火材料研究院有限公司 The preparation method of polycrystalline silicon ingot casting silicon nitride bonded silicon fused silica crucible
CN107285789A (en) * 2017-08-08 2017-10-24 芜湖通全科技有限公司 A kind of preparation method of vitreous silica gradient pore foamed ceramics
CN109759539A (en) * 2019-02-28 2019-05-17 上海万泽精密铸造有限公司 A kind of compound binding agent and preparation method thereof for investment casting shell

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Application publication date: 20110518