CN102053180B - Method for reinforcing lateral rigidity of hanging nanotube device through electron beam induced metal deposition - Google Patents
Method for reinforcing lateral rigidity of hanging nanotube device through electron beam induced metal deposition Download PDFInfo
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- CN102053180B CN102053180B CN 201010563410 CN201010563410A CN102053180B CN 102053180 B CN102053180 B CN 102053180B CN 201010563410 CN201010563410 CN 201010563410 CN 201010563410 A CN201010563410 A CN 201010563410A CN 102053180 B CN102053180 B CN 102053180B
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Abstract
The invention relates to a method for reinforcing the lateral rigidity of a hanging nanotube device through electron beam induced metal deposition, belonging to the technical field of nanotube devices. The method comprises the following steps of: placing a hanging nanotube device to be subjected to rigidity optimization on a sample table of focusing electron beam equipment; carrying out appearance observation on the nanotube device through an electron beam imaging system, and regulating the work distance of the focusing electron beam equipment; heating a metal organic compound to a gaseous state, and leading the gaseous metal organic compound to flow through the hanging nanotube device; then, starting the focusing electron beam generator of the focusing electron beam equipment, and carrying out electron beam scanning irradiation on the nanotube device partially or wholly; decomposing the gaseous metal compound under the irradiation bombardment of electron beams in an appointed irradiation area for the electron beams so as to deposite metal precipitates on a nanotube irradiated by the electron beams; and stopping the irradiation of the electron beams after an expected deposition parameter is reached, closing a valve for the gaseous metal organic compound, and stopping heating the gaseous metal organic compound. The method provided by the invention is stable and reliable, can realize transverse rigidity control on different characteristic structures for the hanging nanotube device, and has the advantages of high positioning precision and good flexibility.
Description
Technical field
The present invention relates to a kind of method of reinforcing lateral rigidity of hanging nanotube device through electron beam induced metal deposition, the method can be used for that the scanning probe microscopy carbon nanotube probes detects at pattern, nanoprocessing, and the field such as an emission nanometer tube device.
Background technology
The scanning probe microscopy carbon nanotube probes is the end that nanotube is fixed on common probe, and nanotube is carried out work as probe.Carbon nanotube probes has shown the not available premium properties of many common probes, such as higher resolution, wearing quality and good pliability etc.Because length-diameter ratio is large, it is the desirable probe that characterizes precipitous sample that nanotube probe is supposed to.Yet because carbon nano-tube is elongated, the transverse elasticity coefficient of nanotube probe is little, causes it when large depth-to-width ratio sample is carried out morphology characterization, is easy to the generation bending-buckling because lateral stiffness is little, make the image of acquisition deposit living illusion, its big L/D ratio advantage is not fully played.
Coarse precipitous sample for the scanning of a surface big rise and fall, need carbon nanotube probes to have the advantage of certain length to guarantee that its length-diameter ratio is large, reduce the broadening effect of probe, and need simultaneously to improve the diameter of nanotube to improve its elasticity coefficient and stability.The diameter increase certainly will affect probe resolution, so for the coarse sample surfaces of characterization of surfaces, the nanotube probe of end diameter refinement is ideal chose.And the large nanotube probe preparation research of big L/D ratio and lateral stiffness is still both at home and abroad a still unsolved manufacturing difficult problem.
Summary of the invention
The object of the invention is to, a kind of method of reinforcing lateral rigidity of hanging nanotube device through electron beam induced metal deposition is provided.The regulate and control method that the present invention proposes can significantly improve the usability of the suspended nanometer tube devices such as nanotube probe.
A kind of method of reinforcing lateral rigidity of hanging nanotube device through electron beam induced metal deposition comprises the following steps:
1) will need the suspended nanometer tube device of stiffness optimization to place on the focused beam equipment sample platform;
2) by the electron beam patterning system nanometer tube device is carried out pattern observation, adjust the operating distance of focused electron beam device;
3) the heating of metal organic compound makes it become gaseous state, and makes the metal organic compound gas flow cross suspended nanometer tube device;
4) then open the focused electron beam generator of focused electron beam device, to the local of nanometer tube device or all carry out the electron beam scanning irradiation;
5) specify irradiation area at electron beam, under the irradiation bombardment of electron beam, metal compound gas is decomposed, and metal deposit deposits on the nanotube that is subjected to electron beam irradiation;
6) reach the expection deposition parameter after, stop electron beam irradiation, close the metal organic compound gas valve, and stop its heating.
As preferred implementation, described metal organic compound is for becoming the metal organic compound of tungsten, gold, aluminium and the platinum of gaseous state after heating; Can utilize the zone of all nanotubes of electron beam irradiation, metal deposit is all wrapped up nanotube, also can to the local nanometer tube device of electron beam irradiation, guarantee that the unsettled end of nanotube is not by metal deposition; Also can guarantee the unsettled end of nanotube not by metal deposition to the local nanometer tube device of electron beam irradiation, near the fixing position increase electron beam scanning irradiation time of nanotube and substrate, realize more metal depositions simultaneously.
The method that the present invention proposes is reliable and stable, can realize that to suspended nanometer tube device the lateral stiffness of different characteristic structure is controlled, and bearing accuracy is high, dirigibility is good.
Description of drawings
The ultimate principle figure of the method for Fig. 1 reinforcing lateral rigidity of hanging nanotube device through electron beam induced metal deposition wherein, (a) is the front nanometer tube device of stiffness optimization; (b) be nanometer tube device stiffness optimization scheme 1; (c) be nanometer tube device stiffness optimization scheme 2; (d) nanometer tube device stiffness optimization scheme 3.
Embodiment
The below is further described the present invention.
1) will need the suspended nanometer tube device (such as various material nano pipes such as carbon nano-tube, nano-tubes) of stiffness optimization to place on the focused beam equipment sample platform, the suspended nanometer tube device here refers to the fixedly unsettled nanometer tube device of the other end of an end, such as scanning probe microscopy nanotube probe, nanotube field ballistic device etc.;
2) by the electron beam patterning system nanometer tube device is carried out pattern observation, adjust the focused beam operating distance;
3) heating of metal compound, such as the metal organic compound of tungsten, gold, aluminium and platinum etc.: Wu (CO) 6, C7H7F602Au, (CH3) 3Al, C7H7Pt makes it become gaseous state.And make metal compound gas flow through suspended nanometer tube device;
4) then open the focused electron beam generator, select suitable beam energy (1～30Kv accelerating potential), an end suspended nanometer tube device is carried out the electron beam scanning irradiation at assigned address;
5) specify irradiation area at electron beam, under the irradiation bombardment of electron beam, metal compound gas is decomposed, and metal deposit deposits on the nanotube that is subjected to electron beam irradiation;
Nanometer tube device stiffness optimization scheme 1: the zone of all nanotubes of electron beam irradiation, metal deposit all wraps up nanotube;
Nanometer tube device stiffness optimization scheme 2: the local nanotube region of electron beam irradiation guarantees that the unsettled end of nanotube is not by metal deposition;
Nanometer tube device stiffness optimization scheme 3: the local nanotube region of electron beam irradiation, guarantee the unsettled end of nanotube not by metal deposition, near the fixing position increase electron beam scanning irradiation time of nanotube and substrate, realize more metal depositions simultaneously;
6) reach the expection deposition parameter after, stop electron beam irradiation, close the metal compound gas valve, and stop its heating.
Claims (5)
1. the method for a reinforcing lateral rigidity of hanging nanotube device through electron beam induced metal deposition comprises the following steps:
1) will need the suspended nanometer tube device of stiffness optimization to place on the focused beam equipment sample platform;
2) by the electron beam patterning system nanometer tube device is carried out pattern observation, adjust the operating distance of focused electron beam device;
3) the heating of metal organic compound makes it become gaseous state, and makes the metal organic compound gas flow cross suspended nanometer tube device;
4) then open the focused electron beam generator of focused electron beam device, to the local of nanometer tube device or all carry out the electron beam scanning irradiation;
5) specify irradiation area at electron beam, under the irradiation bombardment of electron beam, metal organic compound gas is decomposed, and metal deposit deposits on the nanometer tube device that is subjected to electron beam irradiation;
6) reach the expection deposition parameter after, stop electron beam irradiation, close the metal organic compound gas valve, and stop its heating.
2. the method for reinforcing lateral rigidity of hanging nanotube device through electron beam induced metal deposition according to claim 1 is characterized in that, described metal organic compound is for becoming the metal organic compound of tungsten, gold, aluminium and the platinum of gaseous state after heating.
3. the method for reinforcing lateral rigidity of hanging nanotube device through electron beam induced metal deposition according to claim 1 is characterized in that, utilizes the zone of all nanometer tube devices of electron beam irradiation, and metal deposit is all wrapped up nanometer tube device.
4. the method for reinforcing lateral rigidity of hanging nanotube device through electron beam induced metal deposition according to claim 1 is characterized in that, to the local nanometer tube device of electron beam irradiation, guarantees that the unsettled end of nanometer tube device is not by metal deposition.
5. the method for reinforcing lateral rigidity of hanging nanotube device through electron beam induced metal deposition according to claim 1, it is characterized in that, to the local nanometer tube device of electron beam irradiation, guarantee that the unsettled end of nanometer tube device is not by metal deposition, simultaneously near the fixing position increase electron beam scanning irradiation time of nanometer tube device and substrate, realize more metal depositions.
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| CN 201010563410 CN102053180B (en) | 2010-11-26 | 2010-11-26 | Method for reinforcing lateral rigidity of hanging nanotube device through electron beam induced metal deposition |
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| CN 201010563410 CN102053180B (en) | 2010-11-26 | 2010-11-26 | Method for reinforcing lateral rigidity of hanging nanotube device through electron beam induced metal deposition |
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| CN103100726A (en) * | 2013-02-01 | 2013-05-15 | 东南大学 | Preparing method for alkali metal simple substance nanometer materials |
| CN103498133B (en) * | 2013-09-23 | 2016-02-10 | 华东理工大学 | A kind of method being prepared SiCx nano material in transmission electron microscope by electron beam-induced liquid deposition |
| CN103693634B (en) * | 2013-12-08 | 2015-10-28 | 北京工业大学 | E-beam induced deposition prepares the method for carbon nanotube |
| CN104555911B (en) * | 2015-01-20 | 2016-02-10 | 东南大学 | A kind of method preparing nano wire |
| CN109231162B (en) * | 2018-09-07 | 2019-11-01 | 厦门大学 | A kind of method of seamless welding carbon nanotube |
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Inventor after: Xu Lihua Inventor after: Fang Fengzhou Inventor after: Xu Zongwei Inventor after: Xiao Yinjing Inventor before: Fang Fengzhou Inventor before: Xu Zongwei Inventor before: Xiao Yinjing |
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