CN102050566A - Absorption apparatus - Google Patents

Absorption apparatus Download PDF

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Publication number
CN102050566A
CN102050566A CN2009102244245A CN200910224424A CN102050566A CN 102050566 A CN102050566 A CN 102050566A CN 2009102244245 A CN2009102244245 A CN 2009102244245A CN 200910224424 A CN200910224424 A CN 200910224424A CN 102050566 A CN102050566 A CN 102050566A
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CN
China
Prior art keywords
district
adsorption unit
substrate
group
pneumatic
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Pending
Application number
CN2009102244245A
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Chinese (zh)
Inventor
陈瑞玺
孙立璇
曾世明
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孙月卫
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Publication of CN102050566A publication Critical patent/CN102050566A/en
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
  • Packaging Frangible Articles (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Attitude Control For Articles On Conveyors (AREA)

Abstract

The invention relates to an absorption apparatus connected to a low-pressure source for absorbing a substrate.The absorption apparatus comprises an absorption body and an air pressure controlling means.The absorption body is equipped with a plane and a plurality of holes, wherein the plain distributes within a certain range and is adapted to contact with the substrate.The holes formed on the plane are evenly distributed within the distribution range of the plane.The air pressure controlling means controls the low-pressure source and the holes.When the substrate is in contact with the plane and the air pressure controlling means is connected with the low-pressure source and the holes, the substrate and the absorption body are stable.

Description

Adsorption unit
Technical field
The invention relates to a kind of adsorption unit; Particularly about a kind of in order to adsorb the adsorption unit of a substrate.
Background technology
Progress along with development of science and technology and semi-conductor manufacturing, two-d display panel has had very important role in daily life, such as in order to appreciate the flat-surface television of image and sound program, or be the small size LCD screen (LCD) of being carried in mobile phone and the camera, all be under the jurisdiction of the product category of two-d display panel.
In the manufacturing step of liquid crystal panel, how can make large-sized substrate earlier, and according to different customer demands according to the different panels size, carry out the manufacturing of LCD screen unit motherboard (LCD cell mother board) and be divided into independently LCD screen unit, to make LCD screen.
Specifically, panel unit cutting (Cell cut) step is to be carried out at after upright (Cellassembly) step of panel unit group.The panel unit group is upright for A surface glass that will have colored filter (Color Filter) and the B surface glass with liquid crystal cells (LCD Cell) carry out up and down bit pattern, thereby forms LCD screen unit motherboard.The panel unit cutting step then is this LCD screen unit motherboard of cutting, to meet the specification of specific dimensions LCD screen.Owing to have IC pick-up zone or other terminal line areas between A surface glass and B surface glass, therefore when carrying out the panel cutting step, need finish the cutting of A surface glass earlier, then this display panel substrate overturns, cutting B surface glass continues, or, could form the panel unit of specific dimensions, and guarantee that IC pick-up zone or other terminal line areas preserve from according to the reverse order cutting.
Known technology must use known sucker with also mobile liquid crystal screen unit motherboard or the like the step of overturning when carrying out LCD screen unit motherboard cutting step.The right adsorptive power of on business knowing sucker be with concentrate on glass substrate a bit, cause stress concentration easily, and when using known sucker absorption large substrate, also take place easily the each point sucker move inconsistent or translational speed too fast, cause substrate breakage.Be limited to the restriction of above-mentioned known sucker, when carrying out large-sized substrate cut step at present, eventful elder generation is with large-size substrate, LCD screen unit motherboard for example, carry out the quartern and be cut into the less substrate of four sizes, or be cut into the littler substrate of more sizes, step such as carefully carry out the upset of display panel substrate with manual type again and move.Yet above-mentioned manufacturing along with the substrate thickness of the increasing of display panel substrate size and thinning day by day, has caused that cost of labor is too high, production efficiency is low and fine ratio of product problem on the low side or the like.
In view of this, providing a kind of adsorption unit that can firmly adsorb large-size substrate, is an industry problem demanding prompt solution for this reason.
Summary of the invention
A purpose of the present invention is to provide a kind of adsorption unit, it can adsorb a large-size substrate, and not damaged, finish transportation and actions such as this substrate that overturns expeditiously, avoid this display panel substrate to break, produce yield in order to do improving, save labour turnover and enhance productivity.
For reaching above-mentioned purpose, adsorption unit has an absorption body and a Pneumatic controller.The absorption body comprises a plane and a plurality of hole.The plane has a distribution range, and suitable with a substrate contacts.Those holes are to be formed on the plane also to be evenly distributed in fact in the planar distribution range.Pneumatic controller is according to control pneumatic connection one subatmospheric source and those holes, makes with the substrate of plane contact firm mutually with the absorption body.When substrate with plane contact and Pneumatic controller is pneumatic when being connected those holes and subatmospheric source, substrate is firm mutually with the absorption body.By this, adsorption unit of the present invention is suitable to avoid stress concentration ground absorption substrate, in order to manufacturings such as follow-up automated substrate upset and substrate transportations.
For above-mentioned purpose, technical characterictic and advantage can be become apparent, hereinafter be to be elaborated with the preferred embodiment conjunction with figs..
Description of drawings
Fig. 1 is the stereographic map of adsorption unit of the present invention; And
Fig. 2 adsorbs the upward view of body for the present invention.
Nomenclature
10 adsorption units, 20 absorption bodies
22 planes, 24 holes
26 distribution ranges, 261 first districts
The 3rd district, 262 second districts 263
The 5th district, 264 the 4th districts 265
266 the 6th districts, 28 grooves
30 Pneumatic controllers, 40 snubber assemblys
50 supporting structures
Embodiment
As shown in Figure 1, it is the stereographic map of an adsorption unit 10 of the present invention.Wherein adsorption unit 10 is suitable connecting a subatmospheric source (figure does not show), and in order to adsorb a substrate (figure does not show).Adsorption unit 10 comprises an absorption body 20 and a Pneumatic controller 30.Please consult Fig. 2 simultaneously, absorption body 20 comprises a plane 22 and a plurality of hole 24.Plane 22 has a distribution range 26, and plane 22 suitable with substrate contacts.Hole 24 is to be formed on the plane 22, and is evenly distributed in fact in the distribution range 26 on plane 22.Pneumatic controller 30 makes the substrate that contacts with plane 22 firm mutually with absorption body 20 according to the pneumatic connection subatmospheric source of control and those holes 24.By this, when substrate was connected those holes 24 with the subatmospheric source with plane 22 contacts and Pneumatic controller 30, substrate is suitable can firmly and not to drop mutually with absorption body 20.At this moment, adsorption unit 10 is by the hole 24 in the distribution range 26 that is evenly distributed in plane 22 in fact, apply equally distributed adsorptive power on the surface of substrate, suitable can avoid stress concentration that substrate is broken accidentally, the transportation of substrate and upset etc. are made can mechanical automation.What need to specify is, in present embodiment, substrate is preferably divisible and manufactures a glass substrate of the LCD unit motherboard of a liquid-crystal display, and low pressure source is preferably a vacuum pumps.
In a preferred embodiment, those holes 24 of absorption body 20 can be divided into a plurality of groups, and Pneumatic controller 30 correspondingly comprises a plurality of pneumatic control valves.Those pneumatic control valves are those groups of respectively pneumatic connection, and respectively this pneumatic control valve suitable with independent control respectively those holes 24 in this group be connected with the subatmospheric source is pneumatic respectively.In embodiments of the invention, preferably, those pneumatic control valves are preferable respectively to be to be a magnetic valve, those hole 24 preferable one first group, one second group, one the 3rd group, a four group group and one the 5th group, totally five groups of dividing into.Those pneumatic control valves are preferably five pneumatic control valves, with this five group of the pneumatic connection of difference.As shown in Figure 2, the distribution range 26 on plane 22 is to divide into one first district 261, one second district 262, one the 3rd district 263, one the 4th district 264, one the 5th district 265 and one the 6th district 266.Second district 262, the 3rd district 263 and the 4th district 264 outwards are provided with around first district 261 in regular turn, and the 5th district 265 and the 6th district 266 are two opposite sides that are arranged at the 4th district 264 respectively.First group of those holes 24, second group, the 3rd group and four group group are to be evenly distributed in first district, 261 interior, second district, 262 interior, the 3rd district 263 interior reaching in the 4th district 264 respectively in fact, and the 5th group of those holes 24 is evenly distributed in fact in the 5th district 265 and the 6th district 266.
By this, distribution range 26 and substrate contacts when plane 22, and Pneumatic controller 30 is respectively with those holes of the pneumatic connection of those pneumatic control valves 24 during with the subatmospheric source, absorption body 20 is suitable can pass through first district 261, second district 262, the 3rd district 263, the 4th district 264, the 5th district 265 and the 6th district 266 and substrate firm mutually.So the advantage that is provided with is, in above-mentioned first district 261, second district 262, the 3rd district 263, the 4th district 264, the 5th district 265 and the 6th district 266, arbitrary zone is arranged, because pneumatic control valve breaks down or can't low pressure be leaked with base plate seals because of other factors, cause in the time of to adsorb substrate, other zone still can be kept the action of absorption substrate by those pneumatic control valves of normal operation, and be unlikely to lose the absorption power, and then cause substrate to drop and damaged substrate.Simultaneously, the setting of those holes 24 also has and disperses the absorption power, avoids adsorbing stress concentration and effect that substrate is damaged.In addition, the plane 22 of absorption body 20 more is formed with a plurality of grooves 28, is arranged at 266 in first district 261, second district 262, the 3rd district 263, the 4th district 264, the 5th district 265 and the 6th district.
Adsorption unit 10 can also comprise a snubber assembly 40 and a supporting structure 50, and snubber assembly 40 is to be arranged at supporting structure 50 and to adsorb 20 of bodies.Supporting structure 50 more connects other mechanised equipment, to overturn and to transport manufacturings such as substrate.A surging force that is produced when being absorbed in absorption body 20 with substrate moment touching by snubber assembly 40 is avoided substrate is damaged, and improves and produces yield.
Adsorption unit 10 of the present invention can be widely used in the LCD screen unit motherboard cutting manufacturing.For example in one used, adsorption unit 10 was upset portions that are arranged at a substrate turnover device, and when adsorption unit 10 absorption and firm substrate, upset portion is suitable can to drive adsorption unit 10 together with substrate overturn.In Another Application, adsorption unit 10 is to be arranged at a substrate conveyer, and when adsorption unit 10 absorption and firm substrate, the substrate conveyer is suitable to drive adsorption unit 10 together with substrate, moves to a second position by a first location.
In sum, adsorption unit 10 of the present invention is to see through Pneumatic controller 30 according to the pneumatic connection subatmospheric source of control and those holes 24, makes the contact area 26 suitable adsorbable and firm substrates of absorption body 20.Because those pneumatic control valves of Pneumatic controller 20 are respectively holes 24 in this group of independent control, even if therefore have arbitrary zone or arbitrary pneumatic control valve can't normal operation with the absorption substrate, also do not influence the normal operation in other pneumatic control valve or zone, thereby significantly increase the reliability of adsorption unit 10 firm substrates, avoid substrate is produced injury.Moreover, be evenly distributed in those holes 24 in the distribution range 26 on plane 22, also have average dispersion adsorptive power road, avoid adsorbing that stress is too concentrated and the function that causes wounded substrate, and then improve the production yield of substrate.
The above embodiments only are used for exemplifying enforcement aspect of the present invention, and explain technical characterictic of the present invention, are not to be used for limiting protection category of the present invention.Any be familiar with this operator can unlabored change or the arrangement of the isotropism scope that all belongs to the present invention and advocated, protection scope of the present invention should be as the criterion according to the content that claim defined.

Claims (11)

1. an adsorption unit is characterized in that, in order to adsorbing a substrate, and suitable to connect a subatmospheric source, this adsorption unit comprises:
One absorption body comprises a plane and a plurality of hole, and wherein this plane has a distribution range, and suitable with this substrate contacts, and those holes are to be formed on this plane and to be evenly distributed in fact in this distribution range of this planar; And
One Pneumatic controller, suitable with according to control this subatmospheric source of pneumatic connection and those holes, make with this substrate and this absorption body of this plane contact firm mutually.
2. adsorption unit according to claim 1, it is characterized in that, those holes of this absorption body are to divide into a plurality of groups, this Pneumatic controller correspondingly comprises a plurality of pneumatic control valves, those pneumatic control valves are those groups of respectively pneumatic connection, and respectively this pneumatic control valve suitable with independent control respectively those holes in this group the subatmospheric source is pneumatic is connected with this.
3. adsorption unit according to claim 2, it is characterized in that, those holes are to divide into one first group, one second group, one the 3rd group, a four group group and one the 5th group, and those pneumatic control valves are to be five pneumatic control valves, those groups of respectively corresponding pneumatic connection.
4. adsorption unit according to claim 3, it is characterized in that, this distribution range of this planar is to divide into one first district, one second district, one the 3rd district, one the 4th district, one the 5th district and one the 6th district, this second district, the 3rd district and the 4th district outwards are provided with around this first district in regular turn, the 5th district and the 6th district are two opposite sides that are arranged at the 4th district respectively, this first group, this second group, the 3rd group and this four group group are to be evenly distributed in fact respectively in this first district, in this second district, in in the 3rd district and the 4th district, and the 5th group is evenly distributed in fact in the 5th district and the 6th district.
5. adsorption unit according to claim 4, it is characterized in that, also comprise a snubber assembly and a supporting structure, and this snubber assembly is to be arranged between this supporting structure and this absorption body, a surging force that is produced when absorbing this absorption body and this substrate moment touching.
6. adsorption unit according to claim 5 is characterized in that, this plane of this absorption body also is formed with a plurality of grooves, is arranged between this first district, this second district, the 3rd district, the 4th district, the 5th district and the 6th district.
7. adsorption unit according to claim 2 is characterized in that, those pneumatic control valves respectively are a magnetic valve.
8. adsorption unit according to claim 1 is characterized in that, this adsorption unit is a upset portion that is arranged at a substrate turnover device, and should upset portion suitablely can drive this adsorption unit, together with this adsorption unit absorption and this firm substrate overturn.
9. adsorption unit according to claim 1, it is characterized in that this adsorption unit is to be arranged at a substrate conveyer, and this substrate conveyer is suitable to drive this adsorption unit, together with adsorbing and this firm substrate, move to a second position by a first location with this adsorption unit.
10. adsorption unit according to claim 1 is characterized in that, this low pressure source is a vacuum pumps.
11. adsorption unit according to claim 1 is characterized in that, this substrate is a glass substrate of a liquid-crystal display.
CN2009102244245A 2009-10-30 2009-11-20 Absorption apparatus Pending CN102050566A (en)

Applications Claiming Priority (2)

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US25637209P 2009-10-30 2009-10-30
US61/256,372 2009-10-30

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Application Number Title Priority Date Filing Date
CN2009102244476A Pending CN102054728A (en) 2009-10-30 2009-11-20 Substrate adsorption unit and substrate adsorption assembly
CN2009102244508A Pending CN102050564A (en) 2009-10-30 2009-11-20 Method for cutting LCD unit motherboard and automatic cutting system thereof
CN2009102244512A Pending CN102050567A (en) 2009-10-30 2009-11-20 Turning device for turning plate body and turning method
CN2009102244245A Pending CN102050566A (en) 2009-10-30 2009-11-20 Absorption apparatus
CN2009102244480A Expired - Fee Related CN102050280B (en) 2009-10-30 2009-11-20 Box body, guide carrier for guiding the position of box body and position guiding method

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CN2009102244476A Pending CN102054728A (en) 2009-10-30 2009-11-20 Substrate adsorption unit and substrate adsorption assembly
CN2009102244508A Pending CN102050564A (en) 2009-10-30 2009-11-20 Method for cutting LCD unit motherboard and automatic cutting system thereof
CN2009102244512A Pending CN102050567A (en) 2009-10-30 2009-11-20 Turning device for turning plate body and turning method

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CN2009102244480A Expired - Fee Related CN102050280B (en) 2009-10-30 2009-11-20 Box body, guide carrier for guiding the position of box body and position guiding method

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CN (5) CN102054728A (en)
TW (5) TWI381981B (en)

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CN104097933A (en) * 2013-04-11 2014-10-15 三星泰科威株式会社 Device for rotating material in material production equipment
CN105093577A (en) * 2015-07-22 2015-11-25 武汉华星光电技术有限公司 Cutting device for liquid crystal display panel
CN106353902A (en) * 2016-11-08 2017-01-25 武汉华星光电技术有限公司 Liquid crystal panel transferring device and liquid crystal panel cutting system
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Publication number Publication date
CN102050280A (en) 2011-05-11
TWI380943B (en) 2013-01-01
CN102050564A (en) 2011-05-11
TW201114703A (en) 2011-05-01
TWI381981B (en) 2013-01-11
TWI379817B (en) 2012-12-21
CN102050280B (en) 2012-11-14
TW201114525A (en) 2011-05-01
TW201114669A (en) 2011-05-01
TW201115678A (en) 2011-05-01
CN102054728A (en) 2011-05-11
CN102050567A (en) 2011-05-11
TW201114659A (en) 2011-05-01

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Application publication date: 20110511