CN102049722B - Hook of single side polishing machine - Google Patents
Hook of single side polishing machine Download PDFInfo
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- CN102049722B CN102049722B CN201010207015.7A CN201010207015A CN102049722B CN 102049722 B CN102049722 B CN 102049722B CN 201010207015 A CN201010207015 A CN 201010207015A CN 102049722 B CN102049722 B CN 102049722B
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- hook
- jump ring
- connecting rod
- single side
- polishing machine
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Abstract
The invention discloses a hook of a single side polishing machine. The hook of the single side polishing machine comprises a fixing part, a sliding part, calipers and a connecting rod, wherein the fixing part is arranged on a flat plate of a polishing head; the sliding part is connected with the fixing part and can slide along the fixing part; the calipers comprise a clamp spring made of a stainless steel material and a clamp hook made of a Teflon plastic material; the clamp hook is connected at the back end of the clamp spring; the clamp spring can rotate along the rotating shaft of a bracket; the bracket is connected with the fixing part; a ceramic disk acts on the connecting rod when adhered to the polishing head so that the connecting rod moves up and down; the connecting rod drives the clamp spring to rotate along the rotating shaft to frap the clamp hook; and the sliding part is contacted with the front end of the clamp spring and drives the clamp spring to rotate along the rotating shaft when sliding so as to open the clamp hook. The hook of the single side polishing machine adopts the clamp spring made of the stainless steel material and the clamp hook made of the Teflon plastic material, so that ceramics is prevented from crumbling; the loss caused by the deformation and the abrasion of the Teflon is reduced; and various losses caused by unreliable contact between the polishing head and the ceramic disk are reduced.
Description
Technical field
The present invention relates to semi-conductor wafer materials processing technique field, particularly relate to a kind of hook of single side polishing machine.
Background technology
In the sticky wax single-sided polishing technique of gallium arsenide wafer, must first gallium arsenide wafer and ceramic disk be pasted, then face down the ceramic disk being stained with wafer reversal of the natural order of things, and thick, fine polishing ray machine rubbing head carries out polishing.Ceramic disk is at high temperature sintered by the clay material of densification to form, and has sedate, that density is large feature.At present, the general ceramic disk diameter used is 30cm, and thickness is 2cm, and weight is about 5kg, is applied in semiconductor wafer manufacture field.Because semiconductor application field is very high to parameter requests such as wafer surface roughness, flatness, edge integrity, using and changing and it is also proposed very high requirement ceramic disk.
Before polishing, gallium arsenide wafer is through the wafer with diamond dust grinding, chemical reagent process, is called chemical polishing sheet.Because auxiliary material used in GaAs material and process is quite expensive, the wafer selecting work before bonding die, the appropriate use of ceramic disk are very necessary.First chemical polishing sheet will by the inspection of professional, by surface smoothness difference, the change that visually observes gross imperfection throws sheet screening and rejects; Then by chemical polishing sheet on request thickness stepping to be placed in multi-disc box and record; Secondly the ceramic disk of paster will be put into and heating platform starts heating (be used for cementing the wax of gallium arsenide wafer at a relatively high temperature, after the cooling period, preferably adhesive effect can be played), after ceramic disk surface wipes is clean with the paper rag being moistened with isopropyl alcohol, discharge 0.4 ~ 0.6ml liquid wax with syringe, then push away instrument with sticky wax and wax is smeared evenly; Finally wafer is placed with on ceramic disk in order successively.
Sticky wax single-sided polishing technique comprises rough polishing, fine polishing and essence throw three technical process, in order to ensure in rough polishing technical process, rubbing head, ceramic disk, link up with proper engagement each other, especially the surface quality of gallium arsenide chip that fine finishining goes out meets the requirement of semiconductor chip process, such as avoid sheet, the appearance of the defective modes such as wafer surface line, before chemically mechanical polishing, note clean or change polishing pad, rinse polishing fluid pipeline, the filter core of periodic maintenance polishing fluid filter, in good time, appropriate preparation rough polishing liquid, after preparation puts in place, the ceramic disk will going up dish is taken out from the special plate rail of placing ceramic dish, the to be processed ceramic disk being stained with wafer is faced down, the back side is labelled on the rubbing head of polishing machine upward, ceramic disk is when being close to rubbing head lower surface, clamp jockey can be touched thus two clamp are left behind and tighten up, whether properly judge that ceramic disk enters position by the gap size between range estimation ceramic disk and rubbing head and the sound of clamp jockey action, guarantee to coil on ceramic disk is on rubbing head accurate.
After confirming that ceramic disk is firmly linked with, can rough polishing technical process be carried out: open polishing liquid pump, regulate chassis rotating speed, throw the rough polishing of sheet by the carrying out of time of setting.Because GaAs material belongs to a kind of to water, the more sensitive material of air ratio, especially under also there is the condition of corrosive liquids, if surface treatment not in time, improper, surface roughness, cleanliness factor very block will change, thus cause product quality problem.So, after rough polishing terminates, must fast lifting rubbing head.Adopt hook at present and can drive rise with the ceramic disk being about to be stained with polished silicon wafer, like this, technologist just can take hydraulic giant deionized water rinse the wafer surface being pasted on ceramic disk lower surface in time immediately, obtains desirable wafer surface.
Fine polishing, essence are thrown with rough polishing process substantially similar, and hook structure is identical, and difference is polishing cloth material used in polishing process, the aspect such as particle diameter, proportioning of polishing fluid there are differences.
A lot of hook adopts ferrous material, because ceramic material enbrittles feature, with ferrous material contact process, if stressed a little, can fall bits unavoidably, and this, concerning processed GaAs material, is destructive disaster.For solving the problem, present hooking device have employed Teflon plastics soft material, thus avoids the shortcoming that pottery falls slag,
But because Teflon material is not wear-resistant, and in CMP process, wearing and tearing are again the facts at every moment existed; In addition, Teflon material hook is under large strength impact power repeated action, after using several times, physically just there occurs deformation, thus effectively can not hook ceramic disk, easy appearance race dish, hook such as to fracture at the phenomenon when playing dish, cause in technical process, often will carry out the replacing of clamp hook, not only constrain the raising of efficiency, more let us is difficult to accept, and the hook cost of this material is quite high.
Summary of the invention
The problem to be solved in the present invention is to provide a kind of hook of single side polishing machine, to overcome prior art in CMP process, rubbing head screens is not in place, or damage, or distortion, cause ceramic disk not lift in time or in polishing processing, ceramic disk comes off, ceramic disk edge falls slag etc. to polishing material surface causes the defect of damage.
For achieving the above object, technical scheme of the present invention provides a kind of hook of single side polishing machine, and described hook comprises: standing part, is arranged on rubbing head flat board; Slipper, is connected with described standing part, can slide along described standing part; Clamp, comprise the jump ring of stainless steel and the grab of Teflon plastic material, described grab is connected to the rear end of described jump ring; Described jump ring can rotate along the rotating shaft of support, and described support is connected on described standing part; Connecting rod, to described connecting rod effect when ceramic disk is labelled to rubbing head, described connecting rod is moved up, and described connecting rod drives described jump ring to rotate along rotating shaft, tightens up snap fit; The front end in contact of described slipper and described jump ring, drives described jump ring to rotate along rotating shaft, snap fit is opened during slip.
Further, described standing part comprises fixture and the second pad, and described fixture is arranged on rubbing head flat board, and described second pad is arranged on described fixture, and described second pad inside has a rectangular through-hole.
Further, described slipper comprises rear connectors, the first pad and sliding shoe, described rear connectors rear end is an inclined-plane, and a rectangular cam is arranged at top, and described rectangular cam is connected with sliding shoe with after the rectangular through-hole of the first pad through the rectangular through-hole of the second pad successively.
Further, described jump ring is L shape, and there is an inclined-plane front end, can engage with the inclined-plane of described rear connectors rear end, have a manhole in the mutually perpendicular two-part junction of described jump ring, described jump ring is connected with the rotating shaft of support by described manhole, can rotate along rotating shaft; The front end in contact of described sliding shoe and described jump ring, drives described jump ring to rotate along rotating shaft, snap fit is opened during slip.
Further, described connecting rod contacts with the engagement place of rear connectors with jump ring, to described connecting rod effect when ceramic disk is labelled to rubbing head, described connecting rod is moved up, described connecting rod produces extruding backward to described rear connectors, drives described jump ring to rotate along rotating shaft, tightens up snap fit.
Compared with prior art, beneficial effect of the present invention is as follows:
Hook of single side polishing machine of the present invention is by adopting the jump ring of stainless steel and the grab of Teflon plastic material, both avoid pottery and fall slag, reduce again the loss of Teflon distortion, wearing and tearing, reduce because rubbing head contacts the unreliable various losses caused with ceramic disk.
Accompanying drawing explanation
Fig. 1 is the structural representation of the fixture of hook of single side polishing machine of the present invention;
Fig. 2 is the structural representation of the second pad of hook of single side polishing machine of the present invention;
Fig. 3 is the structural representation of the rear connectors of hook of single side polishing machine of the present invention;
Fig. 4 is the structural representation of the first pad of hook of single side polishing machine of the present invention;
Fig. 5 is the structural representation of the sliding shoe of hook of single side polishing machine of the present invention;
Fig. 6 is the structural representation of the jump ring of hook of single side polishing machine of the present invention;
Fig. 7 is the structural representation of the grab of hook of single side polishing machine of the present invention;
Fig. 8 is the structural representation of the connecting rod of hook of single side polishing machine of the present invention;
Fig. 9 is the schematic diagram of the present invention's mounting fixing parts when assembling hook of single side polishing machine;
Figure 10 is the schematic diagram that the present invention places spring when assembling hook of single side polishing machine;
Figure 11 is the schematic diagram that the present invention loads rear connectors when assembling hook of single side polishing machine;
Figure 12 is the schematic diagram that the present invention loads pad when assembling hook of single side polishing machine;
Figure 13 is the schematic diagram that the present invention loads sliding shoe when assembling hook of single side polishing machine;
Figure 14 is the schematic diagram that the present invention loads connecting rod when assembling hook of single side polishing machine;
Figure 15 is the schematic diagram that the present invention loads jump ring when assembling hook of single side polishing machine;
Figure 16 is the schematic diagram that the present invention loads snap fit when assembling hook of single side polishing machine;
Figure 17 is the structural representation that hook of single side polishing machine of the present invention is arranged on rubbing head;
Figure 18 is the structural representation of rubbing head flat board of the present invention.
Detailed description of the invention
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples for illustration of the present invention, but are not used for limiting the scope of the invention.
The structure of each parts of a kind of hook of single side polishing machine of the present invention, as shown in Fig. 1 ~ Fig. 8, comprises standing part, slipper, clamp and connecting rod; Described standing part comprises fixture and the second pad, and described fixture is arranged on rubbing head flat board, and described second pad is arranged on described fixture, and described second pad inside has a rectangular through-hole; Described slipper comprises rear connectors, the first pad and sliding shoe, and described rear connectors rear end is an inclined-plane, and a rectangular cam is arranged at top, and described rectangular cam is connected with sliding shoe with after the rectangular through-hole of the first pad through the rectangular through-hole of the second pad successively; Described clamp comprise the jump ring of stainless steel and the grab of Teflon plastic material, described jump ring is L shape, there is an inclined-plane front end, can engage with the inclined-plane of described rear connectors rear end, a manhole is had in the mutually perpendicular two-part junction of described jump ring, described jump ring is connected with the rotating shaft of support by described manhole, and can rotate along rotating shaft, described support is connected on described fixture; Described grab is connected to the rear end of described jump ring; The front end in contact of described sliding shoe and described jump ring, drives described jump ring to rotate along rotating shaft time mobile, snap fit is opened; Described connecting rod contacts with the engagement place of rear connectors with jump ring, to described connecting rod effect when ceramic disk is labelled to rubbing head, described connecting rod is moved up, described connecting rod produces extruding backward to described rear connectors, drive described jump ring to rotate along rotating shaft, tighten up snap fit.
Each assembling parts of hook of single side polishing machine of the present invention becomes the process of hook as follows:
The first step: the tram of fixture being placed rubbing head, as shown in Figure 9.
Second step: place spring, as shown in Figure 10.
3rd step: load rear connectors, as shown in figure 11.
4th step: load the first pad and the second pad, as shown in figure 12.
5th step: load sliding shoe, as shown in figure 13.
6th step: load connecting rod, as shown in figure 14.
7th step: load jump ring, as shown in figure 15, jump ring of the present invention is stainless steel.
8th step: load snap fit, as shown in figure 16, snap fit of the present invention is Teflon plastic material.Now, hook groups of the present invention installs into.
Hook of single side polishing machine of the present invention is arranged on rubbing head, and as shown in figure 17, wherein the structure of rubbing head flat board as shown in figure 18 for the structure after its installation.
When adopting hook of single side polishing machine of the present invention to carry out chemically mechanical polishing, slip locating piece above rubbing head in Figure 17 is promoted inwards, state hook being in open, both hands holder ceramic disk, face down, ceramic disk is tilted a little, just ceramic disk can be close to rubbing head lower surface puts in the hook that opens, on edge and rubbing head, symmetrically four stationary positioned blocks of position are installed and are coincide, these four fixing metal positioning block are screwed on rubbing head, after observation ceramic disk position is errorless, ceramic disk is a little firmly made to be close to rubbing head surface, ceramic disk just can touch the connecting rod of clamp, connecting rod is upwards in reseting procedure, can to rear connectors generation extruding backward, thus the inclined-plane, front end of jump ring and the inclined-plane of rear connectors rear end are engaged each other, after engagement, hook is then made to reclaim inwards, block ceramic disk edge groove, after confirming that ceramic disk is firmly linked with, just polishing machine can be started, open polishing fluid, start chassis to rotate, fall the polishing pad that rubbing head and chassis rotate and carry out chemically mechanical polishing.
Polishing machine in the present embodiment adopts 815 type single side polishing machines, when polishing machine runs, ceramic disk is pressed on polishing pad by the pressure of setting by rubbing head, the rotating speed set with chassis due to polishing pad rotates, rubbing head is designed to servo-actuated head, so in polishing process frictional force effect under, rotate in the direction identical with direction, chassis, the rotating speed on chassis is generally set in (50 ~ 70) rpm.
Hook of single side polishing machine of the present invention is by adopting the jump ring of stainless steel and the grab of Teflon plastic material, both avoid pottery and fall slag, reduce again the loss of Teflon distortion, wearing and tearing, reduce because rubbing head contacts the unreliable various losses caused with ceramic disk.
By the use of hook of single side polishing machine of the present invention, make obtain significant increase the service life of consumable accessory, in production process, the safety of the safety of load plate, the safety of rapidoprint, process operator obtains and highly ensures, the size of bond material production and processing amount, regularly the grab, jump ring etc. of hook are changed, accidental loss and relevant hidden danger thereof can be avoided completely.Substantially stopped because rubbing head contacts the unreliable various losses caused with ceramic disk, to comprise 815 type single side polishing machines various models semi-conductor industry on adopt the perfect of single side polishing machine rubbing head of CMP process to have positive role.
The above is only the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the prerequisite not departing from the technology of the present invention principle; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (5)
1. a hook of single side polishing machine, is characterized in that, described hook comprises:
Standing part, is arranged on rubbing head flat board;
Slipper, is connected with described standing part, can slide along described standing part;
Clamp, comprise the jump ring of stainless steel and the grab of Teflon plastic material, described grab is connected to the rear end of described jump ring; Described jump ring can rotate along the rotating shaft of support, and described support is connected on described standing part;
Connecting rod, to described connecting rod effect when ceramic disk is labelled to rubbing head, described connecting rod is moved up, and described connecting rod drives described jump ring to rotate along rotating shaft, tightens up snap fit;
The front end in contact of described slipper and described jump ring, drives described jump ring to rotate along rotating shaft, snap fit is opened during slip.
2. hook of single side polishing machine as claimed in claim 1, it is characterized in that, described standing part comprises fixture and the second pad, and described fixture is arranged on rubbing head flat board, described second pad is arranged on described fixture, and described second pad inside has a rectangular through-hole.
3. hook of single side polishing machine as claimed in claim 2, it is characterized in that, described slipper comprises rear connectors, the first pad and sliding shoe, described rear connectors rear end is an inclined-plane, one rectangular cam is arranged at top, and described rectangular cam is connected with sliding shoe with after the rectangular through-hole of the first pad through the rectangular through-hole of the second pad successively.
4. hook of single side polishing machine as claimed in claim 3, it is characterized in that, described jump ring is L shape, there is an inclined-plane front end, can engage with the inclined-plane of described rear connectors rear end, have a manhole in the mutually perpendicular two-part junction of described jump ring, described jump ring is connected with the rotating shaft of support by described manhole, can rotate along rotating shaft; The front end in contact of described sliding shoe and described jump ring, drives described jump ring to rotate along rotating shaft, snap fit is opened during slip.
5. hook of single side polishing machine as claimed in claim 4, it is characterized in that, described connecting rod contacts with the engagement place of rear connectors with jump ring, to described connecting rod effect when ceramic disk is labelled to rubbing head, described connecting rod is moved up, described connecting rod produces extruding backward to described rear connectors, drives described jump ring to rotate along rotating shaft, tightens up snap fit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010207015.7A CN102049722B (en) | 2010-06-23 | 2010-06-23 | Hook of single side polishing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010207015.7A CN102049722B (en) | 2010-06-23 | 2010-06-23 | Hook of single side polishing machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102049722A CN102049722A (en) | 2011-05-11 |
| CN102049722B true CN102049722B (en) | 2015-07-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010207015.7A Expired - Fee Related CN102049722B (en) | 2010-06-23 | 2010-06-23 | Hook of single side polishing machine |
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| Country | Link |
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| CN (1) | CN102049722B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2794732Y (en) * | 2004-10-22 | 2006-07-12 | 沈阳黎明航空发动机(集团)有限责任公司 | Quick clamp loading mechanism |
| CN201186404Y (en) * | 2008-04-24 | 2009-01-28 | 中芯国际集成电路制造(上海)有限公司 | Simple polisher station |
| CN101733697A (en) * | 2009-12-04 | 2010-06-16 | 北京有色金属研究总院 | Silicon chip polishing method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008147591A (en) * | 2006-12-13 | 2008-06-26 | Nec Electronics Corp | Apparatus and method for manufacturing semiconductor |
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2010
- 2010-06-23 CN CN201010207015.7A patent/CN102049722B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2794732Y (en) * | 2004-10-22 | 2006-07-12 | 沈阳黎明航空发动机(集团)有限责任公司 | Quick clamp loading mechanism |
| CN201186404Y (en) * | 2008-04-24 | 2009-01-28 | 中芯国际集成电路制造(上海)有限公司 | Simple polisher station |
| CN101733697A (en) * | 2009-12-04 | 2010-06-16 | 北京有色金属研究总院 | Silicon chip polishing method |
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| Publication number | Publication date |
|---|---|
| CN102049722A (en) | 2011-05-11 |
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Granted publication date: 20150701 Termination date: 20160623 |