CN102022300A - High-precision continuous glue supplying pump device - Google Patents
High-precision continuous glue supplying pump device Download PDFInfo
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- CN102022300A CN102022300A CN 201010284590 CN201010284590A CN102022300A CN 102022300 A CN102022300 A CN 102022300A CN 201010284590 CN201010284590 CN 201010284590 CN 201010284590 A CN201010284590 A CN 201010284590A CN 102022300 A CN102022300 A CN 102022300A
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Abstract
The invention relates to the field of wafer spraying, in particular to a high-precision continuous glue supplying pump device which is applied to supplying glue for spraying a wafer in a semiconductor process. The device is provided with three piston cylinders, one end of each piston cylinder is provided with a piston, the other end of each piston cylinder is respectively communicated with an outlet pipeline through a piston cylinder outlet connecting pipeline and communicated with an inlet pipeline through a piston cylinder inlet connecting pipeline, one-way valves are respectively arranged on the piston cylinder outlet connecting pipeline and the piston cylinder inlet connecting pipeline, the outlet pipeline is connected with an external nozzle, the inlet pipeline is connected with a liquid supply tank, the end parts of the pistons of the three piston cylinders respectively support against three cams on a transmission shaft, and the three cams are uniformly arranged around the transmission shaft. The invention realizes the glue supply in the spraying process and high-precision control on the liquid flow, and ensures the stability of continuous operation.
Description
Technical field
The present invention relates to wafer spraying field, be specially a kind of high-precision lasting gumming pump device, be applied to the confession glue that in the manufacture of semiconductor wafer is sprayed.
Background technique
The tradition wafer is rotation and applies, and utilizes intermittent type to cooperate centrifugal force to make the crystal column surface glued membrane even for glue glue pump, but can't implement at irregular surface.Traditional whirl coating technology can't solve the glued membrane uniformity of irregular crystal column surface, and the generation of spraying technology has solved this difficult problem, and the solution feed pump of spray glue need realize that highi degree of accuracy also can continuous liquid supply.
Summary of the invention
The object of the present invention is to provide a kind of high-precision lasting gumming pump device, can realize the glue supply in the spray-bonding craft,, guarantee the stability of running continuously the fluid flow High Accuracy Control.
Technological scheme of the present invention is:
A kind of high-precision lasting gumming pump device, this device is provided with three piston cylinders, one end of each piston cylinder is installed piston, the other end of each piston cylinder is communicated with export pipeline by piston cylinder outlet connecting pipe road respectively, be communicated with inlet ductwork by piston cylinder inlet connecting branch road, on described piston cylinder outlet connecting pipe road, the piston cylinder inlet connecting branch is respectively equipped with one-way valve on the road, export pipeline connects external nozzles, inlet ductwork connects supply tank, the piston rod end of three pistons respectively with a transmission shaft on three cams contact, three cams evenly distribute around transmission shaft.
Described high-precision lasting gumming pump device, three piston cylinders are arranged in the protective body.
Described high-precision lasting gumming pump device, the protective body top is provided with upper end cap, and export pipeline, inlet ductwork are arranged in the upper end cap.
Described high-precision lasting gumming pump device, the height of three piston rods and cam dome contacts raises gradually in order or reduces.
Described high-precision lasting gumming pump device, transmission shaft advances motor by coupling and micro-stepping and is connected.
The invention has the beneficial effects as follows:
1, the present invention is a semiconductor irregular surface wafer spraying technology, and it is to strengthen the liquid feed means that the wafer irregular surface is evenly sprayed.Continue spray gluing method spraying irregular surface wafer, need continue glue feeder supply optical resist with highi degree of accuracy.This device is provided with stepper motor, piston, the lasting glue that supplies of cam realization highi degree of accuracy, utilizes micro-stepping to advance controller and cooperates the realization High Accuracy Control with cam and piston.
2, the present invention utilizes micro-stepping to advance motor to cooperate one-way valve to realize spuing and resorption of liquid with piston cylinder and piston, and alternation realizes the without interruption and continuous supplementation of liquid.
Description of drawings
Fig. 1 is the structural representation of the high-precision lasting gumming pump device of the present invention.
Fig. 2 is the pipeline schematic representation of the high-precision lasting gumming pump device of the present invention.
Among the figure, 1 upper end cap; 2 export pipelines; 3 inlet ductwork; 4 one-way valves; 5 protective bodies; 6 piston cylinders; 7 pistons; 8 cams; 9 transmission shafts; 10 coupling; Motor is advanced in 11 micro-steppings; 12 piston cylinder outlet connecting pipe roads; 13 piston cylinder inlet connecting branch roads.
Embodiment
Shown in Fig. 1-2, the high-precision lasting gumming pump device of the present invention mainly comprises: motor 11, piston cylinder outlet connecting pipe road 12, piston cylinder inlet connecting branch road 13 are entered in upper end cap 1, export pipeline 2, inlet ductwork 3, one-way valve 4, protective body 5, piston cylinder 6, piston 7, cam 8, transmission shaft 9, coupling 10, micro-stepping, and concrete structure is as follows:
Three piston cylinders 6 are set in protective body 5, one end opening of each piston cylinder 6 is used to install piston 7, the other end of each piston cylinder 6 is communicated with export pipeline 2 by piston cylinder outlet connecting pipe road 12 respectively, be communicated with inlet ductwork 3 by piston cylinder inlet connecting branch road 13, on described piston cylinder outlet connecting pipe road 12, piston cylinder inlet connecting branch road 13, be respectively equipped with one-way valve 4, export pipeline 2 is responsible for connecting external nozzles, and inlet ductwork 3 is responsible for connecting supply tank.Protective body 5 tops are provided with upper end cap 1, and described export pipeline 2, inlet ductwork 3 are arranged in the upper end cap 1.
Three piston cylinders 6 are connected with separately piston cylinder outlet connecting pipe road 12, piston cylinder inlet connecting branch road 13 respectively, and piston cylinder 6 is responsible for the glue buffer memorys.The piston rod end of three pistons 7 contacts with three cams 8 respectively, three cams 8 evenly distribute around transmission shaft 9, promptly the height of three piston rods and cam 8 dome contacts raises gradually in order or reduces), transmission shaft 9 advances motor 11 by coupling 10 and micro-stepping and is connected, and three cams 8 alternately rise and realize the without interruption of glue.
Among the present invention, spray 0.1-5.0 milliliter (precision ± 0.01) for the glue per minute.
Among the present invention, it is as follows that the technical parameter of motor is advanced in micro-stepping:
1.8 in the degree/step, can segment to 1/2500.
Working procedure of the present invention is as follows:
During work, micro-stepping is advanced motor 11 and is driven transmission shaft 9 rotations, transmission shaft 9 advances motor 11 by coupling 10 and micro-stepping and is connected, transmission shaft 9 drives three cams 8 and rotates, three cams 8 connect the position difference of piston 7, three cam 8 designs are evenly distributed, and when transmission shaft 9 rotated a circle like this, three cams 8 alternately rose and realize the without interruption of glue.Piston 7 is by spuing up and down and the resorption glue, the glue in piston cylinder 6 through piston cylinder outlet connecting pipe road 12, piston cylinder inlet connecting branch road 13 is connected the control that realizes glue with one-way valve into and out of glue.Utilize micro-stepping to advance motor and cooperate one-way valve to realize spuing and resorption of liquid with piston cylinder and piston, alternation, the without interruption and continuous supplementation of realization liquid.
The result shows, uses micro-stepping and advances motor, and by can the very accurate liquid capacity that draws each injection to the computing of cam and piston cylinder diameter, the even distribution by three cams realizes the lasting supply to liquid.
Claims (5)
1. high-precision lasting gumming pump device, it is characterized in that: this device is provided with three piston cylinders, one end of each piston cylinder is installed piston, the other end of each piston cylinder is communicated with export pipeline by piston cylinder outlet connecting pipe road respectively, be communicated with inlet ductwork by piston cylinder inlet connecting branch road, on described piston cylinder outlet connecting pipe road, the piston cylinder inlet connecting branch is respectively equipped with one-way valve on the road, export pipeline connects external nozzles, inlet ductwork connects supply tank, the piston rod end of three pistons respectively with a transmission shaft on three cams contact, three cams evenly distribute around transmission shaft.
2. according to the described high-precision lasting gumming pump device of claim 1, it is characterized in that: three piston cylinders are arranged in the protective body.
3. according to the described high-precision lasting gumming pump device of claim 2, it is characterized in that: the protective body top is provided with upper end cap, and export pipeline, inlet ductwork are arranged in the upper end cap.
4. according to the described high-precision lasting gumming pump device of claim 1, it is characterized in that: the height of three piston rods and cam dome contacts raises gradually in order or reduces.
5. according to the described high-precision lasting gumming pump device of claim 1, it is characterized in that: transmission shaft advances motor by coupling and micro-stepping and is connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010102845907A CN102022300B (en) | 2010-09-17 | 2010-09-17 | High-precision continuous glue supplying pump device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010102845907A CN102022300B (en) | 2010-09-17 | 2010-09-17 | High-precision continuous glue supplying pump device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102022300A true CN102022300A (en) | 2011-04-20 |
| CN102022300B CN102022300B (en) | 2012-02-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010102845907A Active CN102022300B (en) | 2010-09-17 | 2010-09-17 | High-precision continuous glue supplying pump device |
Country Status (1)
| Country | Link |
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| CN (1) | CN102022300B (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103423120A (en) * | 2013-08-21 | 2013-12-04 | 利穗科技(苏州)有限公司 | Three-plunger high-pressure pump |
| CN104906658A (en) * | 2015-06-03 | 2015-09-16 | 长春微纪元科技有限公司 | High-capacity continuous injection system and control method thereof |
| CN105422405A (en) * | 2015-12-28 | 2016-03-23 | 中国科学院苏州生物医学工程技术研究所 | Metering pump |
| CN109985757A (en) * | 2019-05-22 | 2019-07-09 | 缙云唐纳机械科技有限公司 | A kind of fireproof coating is evenly distributed with scatter coated system |
| CN112848509A (en) * | 2021-02-02 | 2021-05-28 | 徐秋花 | Gluing equipment for producing high-quality glued paper boxes |
| CN115551224A (en) * | 2022-12-05 | 2022-12-30 | 苏州康尼格电子科技股份有限公司 | PCBA board packaging equipment |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2361099Y (en) * | 1998-12-30 | 2000-02-02 | 段成刚 | High-precision quantitative liquid supply device |
| US6644930B1 (en) * | 1999-04-09 | 2003-11-11 | Oy Pro-Hydro Ab | Method and arrangement for pumping a material using a dual chamber pump system |
| CN101092953A (en) * | 2007-07-12 | 2007-12-26 | 储岳海 | Flux adjustable high precision diaphragm metering pump without pulsation |
| CN101737314A (en) * | 2008-11-14 | 2010-06-16 | 沈阳芯源微电子设备有限公司 | Precise glue pump with high viscosity |
-
2010
- 2010-09-17 CN CN2010102845907A patent/CN102022300B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2361099Y (en) * | 1998-12-30 | 2000-02-02 | 段成刚 | High-precision quantitative liquid supply device |
| US6644930B1 (en) * | 1999-04-09 | 2003-11-11 | Oy Pro-Hydro Ab | Method and arrangement for pumping a material using a dual chamber pump system |
| CN101092953A (en) * | 2007-07-12 | 2007-12-26 | 储岳海 | Flux adjustable high precision diaphragm metering pump without pulsation |
| CN101737314A (en) * | 2008-11-14 | 2010-06-16 | 沈阳芯源微电子设备有限公司 | Precise glue pump with high viscosity |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103423120A (en) * | 2013-08-21 | 2013-12-04 | 利穗科技(苏州)有限公司 | Three-plunger high-pressure pump |
| CN104906658A (en) * | 2015-06-03 | 2015-09-16 | 长春微纪元科技有限公司 | High-capacity continuous injection system and control method thereof |
| CN105422405A (en) * | 2015-12-28 | 2016-03-23 | 中国科学院苏州生物医学工程技术研究所 | Metering pump |
| CN109985757A (en) * | 2019-05-22 | 2019-07-09 | 缙云唐纳机械科技有限公司 | A kind of fireproof coating is evenly distributed with scatter coated system |
| CN112848509A (en) * | 2021-02-02 | 2021-05-28 | 徐秋花 | Gluing equipment for producing high-quality glued paper boxes |
| CN115551224A (en) * | 2022-12-05 | 2022-12-30 | 苏州康尼格电子科技股份有限公司 | PCBA board packaging equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102022300B (en) | 2012-02-01 |
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Address after: 110168 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Patentee after: Shenyang Core Source Microelectronic Equipment Co., Ltd. Address before: 110168 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Patentee before: Shenyang Siayuan Electronic Equipment Co., Ltd. |
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