CN102004027A - Laser two-coordinate device - Google Patents
Laser two-coordinate device Download PDFInfo
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- CN102004027A CN102004027A CN2009101764420A CN200910176442A CN102004027A CN 102004027 A CN102004027 A CN 102004027A CN 2009101764420 A CN2009101764420 A CN 2009101764420A CN 200910176442 A CN200910176442 A CN 200910176442A CN 102004027 A CN102004027 A CN 102004027A
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Abstract
The invention discloses a laser two-coordinate standard device which meets the requirements on high accuracy, large stroke and micro-step distance and carries out high-accuracy measurement and source tracing on a two-dimension optical line standard device (or a mask plate and a grafting plate). The laser two-coordinate device comprises a substrate and is characterized in that a coplanar floating displacement platform in an X direction and a Y direction is arranged on the substrate plane; the air floating displacement platform is provided with a zero inflation glass platform; a member to be measured is arranged on the zero inflation glass platform; the substrate is arranged on four air floating leg supports; the floating displacement platform is provided with a drive device which is displaced in an X direction and a Y direction; and the air floating displacement platform is also provided with a laser measuring device and an optical imaging device which meet the Abbe's principle. The position feedback resolution ratio of the laser used by the device is 10nm and the length measurement resolution ratio is 0.3nm so as to ensure that the whole system realizes the large stroke, the micro-step distance and the nano-grade positioning accuracy.
Description
Technical field:
The invention belongs to exact instrument manufacturing and field of measuring technique, specifically relate to a kind of measurement and the device of tracing to the source that are used for two-dimentional strain line standard and the measurement of ultraprecise mask plate that can directly trace to the source.
Background technology:
The mask manufacturing technology is the embodiment of sub-micron and nanofabrication technique, and the mask measuring technique then is monitoring and the important means that guarantees manufacture level.Because non-contacting optical image measurement pattern and high precision and the powerful characteristics of digital function, the coordinate measuring machine and the measuring microscope of image measurer, band vision gauge head replace conventional instrument, are widely used in numerous areas such as FPD industry, IC industry, PCB industry, space flight and aviation industry, communications industry, instrument and meter industry.Though it is different with optical image measurement grade that mask is measured, measuring object is different with range of application, but they all are to use the digitized video measuring principle, must use the two-dimension optical strain line standard (or being called mask plate, standard waffle slab etc.) of different accuracy grade to come its individual event of calibration testing and synthesis precision, and it is unified to Mi Dingyi to trace to the source.Two-dimension optical strain line standard is a kind of standard of coordinate figure in length and breadth that has, and the measurement accuracy of its distance between centers of tracks or centre point (X, Y) coordinate will directly have influence on the accuracy of the value of image measurer, the coordinate measuring machine of being with the vision gauge head or measuring microscope.Along with image measurer, the coordinate measuring machine of band vision gauge head or a large amount of uses of measuring microscope, it is checked and accepted, calibrates, traces to the source transmit and keep the requirement of value accuracy just strong day by day, therefore need set up the measurement or the device of tracing to the source the value alignment requirements and that can directly be traceable to the definition of wavelength rice that uncertainty of measurement satisfies high-precision two-dimensional optics strain line standard.The groove of two-dimension optical strain line standard is wide between 0.1～6 μ m at present, need the X-Y worktable of laser two coordinate standard set-ups to have very fine motion and ten minutes accurate localization for this reason, simultaneously for cooperating the specification and the yardstick of two-dimension optical strain line standard, requiring it to measure stroke should be greater than 300mm, but big stroke and high precision are a pair of very responsive contradiction, the requirement of big stroke must be to the stability of standard set-up, the distortion of parts deadweight, the error stack that stroke brings etc. all is exaggerated, be a systematic contradiction, thus do not reach otherwise conventional coordinate measuring set can be accomplished high precision big stroke or.Therefore how to solve big stroke, high-precision two coordinate standard set-ups have crucial meaning to modern sub-micron, nanoscale measurement.
Summary of the invention:
Goal of the invention of the present invention is to disclose a kind of laser two coordinate standard set-ups that satisfy high precision, big stroke and micro-stepping, can carry out high-acruracy survey and trace to the source two-dimension optical strain line standard (or mask plate, waffle slab).
Realize that technical solution of the present invention is as follows: comprise pedestal, key is the coplane air float displacement platform that base plane is provided with tool X, Y direction, the air float displacement platform is provided with the zero expansion glass platform, measured piece is placed on the zero expansion glass platform, pedestal places in 4 air supporting pin supportings, but the air float displacement platform is provided with the drive unit of X, the displacement of Y direction, satisfies the laser measuring device for measuring and the optical imaging device of abbe ' s principle on the air float displacement platform in addition.
Described coplane air float displacement platform intersects chimeric by X displacement platform and Y displacement platform and is supporting surface jointly with the base-plates surface.
Described pedestal, X displacement platform and Y displacement platform all have the hollow hole or the strip hole of corresponding light-permeable, and the pedestal below is provided with optical transmission device.
Described drive unit is located at the sidewall of pedestal respectively, and this drive unit is by motor shaft and at least one friction pulley clamping one polished rod of motor, and the air-bearing of polished rod one end is connected with X displacement platform or Y displacement platform.
Described friction pulley opposite side is provided with the horizontal flexibility hinge that a pair of friction pulley applies parallel pressure, and horizontal flexibility hinge opposite side contacts with a gland nut, is provided with symmetrically arranged two balance wheels at the opposite side of motor shaft.
Described laser measuring device for measuring comprises that laser head, spectroscope, deviation mirror, interference mirror, catoptron and reference mirror constitute, and optical imaging device is located at the top of glass platform.
The light path that described laser measuring device for measuring forms is high together with the height that places the measured piece surface on the glass platform, and laser optical path is divided into three the tunnel, wherein two-way is that X, Y survey long light path, another road and aforesaid X survey long light path or Y surveys long light path parallel setting, can monitor X, the Y displacement platform rotation amount with respect to the Z axle in real time.
Described optical imaging device one side is provided with Z axle focus control, and optical imaging device comprises CCD, two light pipe and object lens, and lighting system has two kinds of reflective and transmission-types, all is by optical fiber light source to be introduced reflection or diaphotoscope group, forms parallel light.
Laser two coordinate standard set-ups disclosed by the invention have the X of coplane, Y displacement platform structure, air supporting suspension type support foot forms the high platform of stability, whole center of gravity is low, friction driving way between motor shaft and the polished rod, flexible hinge and air-bearing shafts bearing structure, the motion structure of air-float guide rail and sliding friction makes the present invention have the good location repeatability of extraordinary guide rail rectilinearity and total system, adjusting by motor reasonable selection and control system PID, can produce and realize arbitrarily small step pitch, therefore as long as how little the feedback resolutions of control system have, how high precision have, and friction driving mechanisms just can produce how little step pitch.Because use laser interference length-measuring to feed back as positioning control, laser position feedback resolution used in the present invention is 10nm, surveying long resolution is 0.3nm, realizes big stroke, micro-stepping and nano level bearing accuracy so can guarantee total system.
Description of drawings:
Fig. 1 is a whole perspective view of the present invention.
Fig. 2 is the perspective view of coplane formula X, Y precision positioning displacement platform.
Fig. 3 is the structural representation of friction pulley flexible hinge hold-down support.
Fig. 4 is for being with Y-axis polished rod and the Y three-dimensional structure diagram to the Y of the hollow out of air-bearing displacement platform.
Embodiment:
See also Fig. 1～Fig. 4, specific embodiments of the invention are as follows: comprise pedestal 1, it can be made by marble, pedestal 1 plane is provided with tool X, the coplane air float displacement platform (3 of Y direction, 4), the air float displacement platform is provided with zero expansion glass platform 5, pedestal 1 places in 4 air supporting pin supportings 2, utilize the air supporting pin to support 2 antivibratioves on the one hand, the small skew that causes during X Y plane of motion motion simultaneously also can remain constant air supporting gap by air supporting pin supporting 2 and obtain fine setting, but the air float displacement platform is provided with X, the drive unit of Y direction displacement, satisfy the laser measuring device for measuring 17 and the optical imaging device 16 of abbe ' s principle on the air float displacement platform in addition, on zero expansion glass platform 5, place two-dimension optical strain line standard, make X displacement platform Y displacement platform (3 by drive unit, 4) displacement, by optical imaging device and laser measuring device for measuring two-dimension optical strain line standard is measured, utilize two-dimension optical strain line standard to give the video measuring instrument again, to guarantee the value accuracy and the consistance of video measuring instrument with transmission of quantity value.
Described coplane air float displacement platform intersects chimeric by X displacement platform 3 and Y displacement platform 4 and is supporting surface with pedestal 1 surface jointly, Y displacement platform 4 is positioned at X displacement platform 3 belows, the air supporting weight-bearing surface of X displacement platform 3 is positioned at marble pedestal 1 surface, the air supporting weight-bearing surface of Y displacement platform 4 also is positioned at marble pedestal 1 surface, form coplanar structure, X Y displacement platform (3,4) guide rail is separated from each other, mutually noninterfere, avoided intercoupling and shortcoming that load differs of guide rail eclipsed form structure effectively, Y buries in pedestal 1 platform to guide rail, can lower the center of gravity, improve system stability.
Described pedestal 1, X displacement platform 3 and Y displacement platform 4 all have the hollow hole or the strip hole of corresponding light-permeable, and pedestal 1 below is provided with optical transmission device 6, when needs use the transmitted light mode to throw light on, optical transmission device 6 will be from pedestal 1 below the hollow hole by aforesaid light-permeable or strip hole directional light is moved near the measured piece, comprised a cover transmission light microscopic group in the optical transmission device 6, this mirror group can be converted into fiber optic point source measures required directional light, and optical transmission device 6 can drive whole arrangement of mirrors group upper and lower displacement and use with convenient.
Described drive unit is located at the sidewall of pedestal 1 respectively, and this drive unit is by the motor shaft 9 and at least one friction pulley 10 clampings one polished rod 11 of motor 8, and the air-bearing 12 of polished rod 11 1 ends is connected with X displacement platform 3 or Y displacement platform 4; Motor 8 is a direct current constant force torque motor, motor shaft 9 self is a friction pulley and other friction pulley 10 clamping polished rods 11, promptly motor shaft 9 closely is connected with polished rod 11 by snap-in force, when motor shaft 9 rotates, because the frictional force drives that produces between friction pulley and polished rod, can drive polished rod 11 front and back displacements, polished rod 11 connects together with displacement platform 3 or Y displacement platform 4 by air-bearing 12, moving of polished rod 11 can promote X Y displacement platform (3,4) move forward and backward, above-mentioned friction structure and air-bearing 12 can compensate alignment error and the beat in the moving process and the interference of drive unit, because the structure of X Y displacement platform, position and stressed difference, X Y displacement platform (3, the structure of air-bearing 4) can be done suitable variation.
For stability and the ultraprecise that further improves drive unit drives, be provided with the horizontal flexibility hinge 18 that a pair of friction pulley 10 applies parallel pressure at friction pulley 10 opposite sides, these horizontal flexibility hinge 18 opposite sides contact with a gland nut 19, and regulate friction pulleys 10 by gland nut 19 and put on the pressure of polished rod 11 and then regulate friction force, motor shaft 9 rotates then polished rod 11 moving linearlies under the effect of friction force; For further improving the stability of polished rod 11 motions, opposite side at motor shaft 9 is provided with symmetrically arranged two balance wheels 20, but the pressure that the polished rod 11 that these balance wheel 20 balance motor axles 9 are subjected to passes over, avoid the subtle change of motor shaft 9, make motor shaft 9 remain at the center of motor and do not produce tangential and radial deflection, improve precision.
Described laser measuring device for measuring 17 comprises that laser head, spectroscope, deviation mirror, interference mirror 13, catoptron 14 and reference mirror 15 constitute, the laser beam that laser head sends is divided into X-axis light beam and Y-axis light beam by spectroscope and deviation mirror, the X-axis light beam forms differential light beam in interference mirror 13 formation interference fringes through X to catoptron 14 and reference mirror 15, can obtain the displacement of X displacement platform 3, in like manner also can obtain the displacement of Y displacement platform 4 with respect to the Z central shaft with respect to the Z central shaft; Described optical imaging device 16 is located at the top of zero expansion glass platform 5, Z axle focus control 7 also is located at optical imaging device 16 1 sides, Z axle focus control 7 makes optical imaging device 16 always accurately aim at the measured piece surface of placing on the zero expansion glass platform 5, torque motor in the friction drive device 8 is sent the instruction of operation and displacement by the multi-axis motion control card in the industrial computer of setting of the present invention, according to instruction, drive unit drives X, Y displacement platform (3,4) motion, laser interferometer records X simultaneously, the actual displacement amount of Y direction is input to motion control card, form the control of displacement ring, guarantee X, Y displacement platform (3,4) be with measured piece to move to specific bit.When measured piece moves to assigned address, read X, the Y coordinate of laser interferometer in this position, the image of 16 pairs of measured pieces of optical imaging device aims at and gathers the pixel coordinate of this position simultaneously, the compensation of X, the computing of Y coordinate geometry and corresponding geometric position and shape error by image processing software, laser and pixel is calculated, and can accurately obtain spacing or distance of center circle between each groove on the measured piece.
Described laser measuring device for measuring 17 light path that forms and the height that places the measured piece surface on the zero expansion glass platform 5 are with high, the layout and the Machine Design of light path meet abbe ' s principle, and laser optical path is divided into three the tunnel, wherein two-way is that X, Y survey long light path, another road and aforesaid X survey long light path or Y surveys long light path parallel setting, can monitor X, Y displacement platform (3, the 4) rotation amount with respect to the Z axle in real time.
Described optical imaging device 16 1 sides are provided with Z axle focus control 7, optical imaging device 16 comprises CCD, two light pipe and object lens (not shown), its lighting system has two kinds, a kind of is indirect illumination, by optical fiber light source is connected with light pipe, form the coaxial indirect illumination of the object space heart far away, use optical fiber can avoid of the influence of the heat of light source the measured piece size; Another kind is a transillumination, also is by optical fiber light source to be incorporated into the transillumination mirror group from pedestal 1 below to form directional light.
Claims (8)
1. laser two coordinate devices, comprise pedestal (1), it is characterized in that pedestal (1) plane is provided with the coplane air float displacement platform (3,4) of tool X, Y direction, the air float displacement platform is provided with zero expansion glass platform (5), pedestal (1) places in 4 air supporting pin supportings (2), but the air float displacement platform is provided with the drive unit of X, the displacement of Y direction, satisfies the laser measuring device for measuring (17) and the optical imaging device (16) of abbe ' s principle on the air float displacement platform in addition.
2. by the described laser two coordinate devices of claim 1, it is characterized in that described coplane air float displacement platform is by X displacement platform (3) with Y displacement platform (4) intersection is chimeric and be supporting surface with pedestal (1) surface jointly.
3. by the described laser two coordinate devices of claim 2, it is characterized in that described pedestal (1), X displacement platform (3) and Y displacement platform (4) all have the hollow hole or the strip hole of corresponding light-permeable, and pedestal (1) below is provided with optical transmission device (6).
4. by claim 1 or 2 described laser two coordinate devices, it is characterized in that described drive unit is located at the sidewall of pedestal (1) respectively, this drive unit is by the motor shaft (9) and at least one friction pulley (10) clamping one polished rod (11) of motor (8), and the air-bearing (12) of polished rod (11) one ends is connected with X displacement platform (3) or Y displacement platform (4).
5. by the described laser two coordinate devices of claim 4, it is characterized in that described friction pulley (10) opposite side is provided with the horizontal flexibility hinge (18) that a pair of friction pulley (10) applies parallel pressure, horizontal flexibility hinge (18) opposite side contacts with a gland nut (19), is provided with symmetrically arranged two balance wheels (20) at the opposite side of motor shaft (9).
6. by the described laser two coordinate devices of claim 5, it is characterized in that described laser measuring device for measuring (17) comprises that laser head, spectroscope, deviation mirror, interference mirror (13), catoptron (14) and reference mirror (15) constitute, optical imaging device (16) is located at the top of zero expansion glass platform (5).
7. by the described laser two coordinate devices of claim 6, it is characterized in that described laser measuring device for measuring light path that forms and the height that places the measured piece surface on the glass platform (5) are with high, and laser optical path is divided into three the tunnel, wherein two-way is that X, Y survey long light path, another road and aforesaid X survey long light path or Y surveys long light path parallel setting, can monitor X, Y displacement platform (3, the 4) rotation amount with respect to the Z axle in real time.
8. by the described laser two coordinate devices of claim 7, it is characterized in that described optical imaging device one side is provided with Z axle focus control (7), optical imaging device (16) comprises CCD, two light pipe, object lens, lighting system has two kinds of reflective and transmission-types, all be light source to be incorporated into reflection or diaphotoscope group, form parallel light by optical fiber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101764420A CN102004027B (en) | 2009-09-15 | 2009-09-15 | Laser two-coordinate device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101764420A CN102004027B (en) | 2009-09-15 | 2009-09-15 | Laser two-coordinate device |
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| Publication Number | Publication Date |
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| CN102004027A true CN102004027A (en) | 2011-04-06 |
| CN102004027B CN102004027B (en) | 2012-05-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2009101764420A Expired - Fee Related CN102004027B (en) | 2009-09-15 | 2009-09-15 | Laser two-coordinate device |
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| CN105081888A (en) * | 2015-09-02 | 2015-11-25 | 上海交通大学 | Two-dimensional vibration auxiliary laser scanning in-situ detection system and detection method thereof |
| CN105252505A (en) * | 2015-11-30 | 2016-01-20 | 中国计量科学研究院 | Precise air-floatation displacement platform |
| CN105571476A (en) * | 2015-12-24 | 2016-05-11 | 须颖 | Flat panel detection device |
| CN107014589A (en) * | 2017-03-01 | 2017-08-04 | 中国科学院光电研究院 | A kind of optical measurement bench frame apparatus |
| CN108533612A (en) * | 2018-03-30 | 2018-09-14 | 中国人民解放军国防科技大学 | High-precision air-floating shaft system based on glass guide rail and glass guide rail processing method thereof |
| CN109060208A (en) * | 2018-08-21 | 2018-12-21 | 京东方科技集团股份有限公司 | Mechanics detection device and the detection method for using the mechanics detection device |
| CN109115826A (en) * | 2018-08-24 | 2019-01-01 | 合肥工业大学 | A kind of expansion indicator and application method |
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Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN2120322U (en) * | 1992-05-21 | 1992-10-28 | 清华大学 | Laser high degree of accuracy measurement big diameter apparatus |
| CN1252444C (en) * | 2002-12-24 | 2006-04-19 | 中国航空工业总公司第三○四研究所 | Laser interference length measuring system for realizing real-time compensation of Abbe errors |
| CN101476880B (en) * | 2009-02-05 | 2011-06-29 | 范勇 | Surface shape detection apparatus and method for large-bore plane optical element |
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2009
- 2009-09-15 CN CN2009101764420A patent/CN102004027B/en not_active Expired - Fee Related
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| CN105081888B (en) * | 2015-09-02 | 2017-06-16 | 上海交通大学 | A kind of two-dimension vibration auxiliary laser scans in-place detection system and its detection method |
| CN105081888A (en) * | 2015-09-02 | 2015-11-25 | 上海交通大学 | Two-dimensional vibration auxiliary laser scanning in-situ detection system and detection method thereof |
| CN105252505A (en) * | 2015-11-30 | 2016-01-20 | 中国计量科学研究院 | Precise air-floatation displacement platform |
| CN105571476B (en) * | 2015-12-24 | 2018-07-20 | 须颖 | Flat plate testing apparatus |
| CN105571476A (en) * | 2015-12-24 | 2016-05-11 | 须颖 | Flat panel detection device |
| CN107014589B (en) * | 2017-03-01 | 2019-07-09 | 中国科学院光电研究院 | A kind of optical measurement bench frame apparatus |
| CN107014589A (en) * | 2017-03-01 | 2017-08-04 | 中国科学院光电研究院 | A kind of optical measurement bench frame apparatus |
| CN108533612A (en) * | 2018-03-30 | 2018-09-14 | 中国人民解放军国防科技大学 | High-precision air-floating shaft system based on glass guide rail and glass guide rail processing method thereof |
| CN109060208A (en) * | 2018-08-21 | 2018-12-21 | 京东方科技集团股份有限公司 | Mechanics detection device and the detection method for using the mechanics detection device |
| CN109115826A (en) * | 2018-08-24 | 2019-01-01 | 合肥工业大学 | A kind of expansion indicator and application method |
| CN109115826B (en) * | 2018-08-24 | 2021-05-18 | 合肥工业大学 | Thermal expansion measuring instrument and using method |
| CN112319056A (en) * | 2020-09-18 | 2021-02-05 | 季华实验室 | Nozzle adjusting device and adjusting method thereof and ink-jet printing equipment |
| CN112319056B (en) * | 2020-09-18 | 2021-12-14 | 季华实验室 | Nozzle adjusting device and adjusting method thereof and ink-jet printing equipment |
| CN114034257A (en) * | 2021-12-13 | 2022-02-11 | 中国计量科学研究院 | High-precision three-dimensional thread measuring machine |
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| CN102004027B (en) | 2012-05-30 |
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