CN101995409A

CN101995409A - Inspection apparatus of metal mold for anti-glare process

Info

Publication number: CN101995409A
Application number: CN2010102638288A
Authority: CN
Inventors: 藤井贵志
Original assignee: Sumitomo Chemical Co Ltd
Current assignee: Sumitomo Chemical Co Ltd
Priority date: 2009-08-25
Filing date: 2010-08-25
Publication date: 2011-03-30
Also published as: TW201129793A; JP2011047681A; KR20110021664A

Abstract

The present invention relates to an inspection apparatus, used for detecting concave defects and/or convex defects on a surface of a mold for anti-glare process. The inspection apparatus comprises: a first lighting fixture for irradiating first light to the surface of the mold; a second lighting fixture for irradiating second light to the surface of the mold; a two-dimension camera fixture for collecting an image of an area including a part of the surface of the mold irradiated by the first and second light; a light intensity control mechanism for controlling intensity of the first and second light; and a calculation mechanism for calculating a difference of brightness of a preassigned dot and a preassigned brightness or brightness range of the preassigned dot on the image.

Description

The non-glare treated testing fixture of mould

Technical field

The present invention relates to a kind of automatic checking device that is used for by the mould of giving the non-glare treated that the micro concavo-convex surface configuration carries out base material, relate in more detail and a kind ofly be used to detect non-glare treated with the lip-deep concavity defect of metal die and the automatic checking device that has or not of convex defective with chrome-plated surface.

Background technology

(leonard's tube: CRT) to be shining into outer light time visibility significantly impaired for its display surface of image display device such as display, organic electroluminescent (EL) display for LCD, plasm display panel, Brown tube.In the past in order to prevent being shining into of so outer light, at outer video camera, the digital camera that uses in room of the televisor of paying attention to image quality or personal computer, outer light intensity and utilize the processing that the surface of image display device is gone in illumination outside enforcement is used to prevent in the portable phone that reflected light shows etc.The no reflection events that the processing that the surface of image display device is implemented like this is different from the interference that utilizes optical multilayer is handled and by forming fine concavo-convex incident light scattering, the fuzzy non-glare treated that is shining into picture of making from the teeth outwards.The former no reflection events is handled owing to the multilayer film that needs to form uniform blooming, so the cost height.With respect to this, the latter's non-glare treated is owing to carrying out with lower price, so be widely used in purposes such as large-scale personal computer or monitor.

The non-glare treated of above-mentioned image display device is typically finished by the surperficial bonding anti-dazzle film of giving anti-dazzle property at image display device.Anti-dazzle film for example was coated on the substrate sheets by the resin solution of disperse particles is adjusted thickness in the past, and this particulate is exposed on the coated film surface, thereby formed the manufacturings such as method of concave-convex surface at random on substrate sheets.But, the configuration of the atomic resin solution that used such dispersion and its concave-convex surface of anti-dazzle film of making and shape by atomic disperse state in the resin solution or coating state etc. about, be difficult to the concave-convex surface that obtains wanting, hanging down under the situation of the size of setting anti-dazzle film, existence can not obtain the problem of sufficient antiglare effect.In addition, such anti-dazzle film in the past is configured under the lip-deep situation of image display device, exists to be easy to generate display surface integral body is turned white, become the problem of the what is called " whiting " that shows muddy color by scattered light.In addition, also exist the height along with nearest image display device to become more meticulous, the pixel of image display device and the film concaveconvex shape of anti-dazzle film take place easily interfere, its result produces briliancy and distributes, and is difficult to see the problem of what is called " dazzle " phenomenon of display surface.In order to eliminate dazzle, also attempt at binder resin and be dispersed between wherein the particulate refringence is set, make light scattering, but when also existing on the surface that will such anti-dazzle film be configured in image display device, make the problem of contrast reduction easily by the scattering of light on the interface of particulate and binder resin.

On the other hand, also attempt not comprising particulate, and the fine concavo-convex anti-dazzle property (for example the Jap.P. spy opens the 2002-189106 communique) that manifests that only forms on the surface by transparent resin layer.According to this mode, owing to manifest anti-dazzle property, result from atomic whiting so can not produce by the shape on surface.In addition, add in the mode of atomic resin in coating, because the change by applied thickness produces uneven, so require accurate applied thickness control, but form in the fine concavo-convex mode on the surface, owing to do not produce the problem of the inequality that the change of applied thickness brings, so can reach outstanding productivity.

As the method for such formation concave-convex surface, it seems that from productive viewpoint preferred especially use use in advance forms the mould of concave-convex surface shape, is transferred to the concaveconvex shape of this mould the lip-deep mode of object (transparent resin film etc.).But, because the concave-convex surface shape of roller mould, so when having defective on the convex-concave surface of mould, product (anti-dazzle surface etc.) is whole can to continue the generation defective.Therefore, the defects detection of the convex-concave surface of mould is the very important technology of left and right sides product quality.

But non-glare treated was difficult with the realization of the automatic checking device of mould in the past.In the mould that non-glare treated is used, in order to prevent that the scratch that adds man-hour from taking place, need implement the high chromium plating of skin hardness on its surface, but implement under the situation of chromium plating, the low-down defective of aspect ratio of the concavity of multiple diameter 100 μ m degree, the degree of depth or height 2 μ m degree or convex (overshooting shape) formation produces the defective that the people can recognize on the die surface.Even but be difficult to realize producing simultaneously low concavity defect of such aspect ratio and convex defective in the past, also can be simultaneously with its detected device.In addition, in detecting the testing fixture that have or not of non-glare treated with the defective of die surface, preferably can detect defective about being used to give multiple kinds of molds different anti-dazzle performances, that have different concave-convex surface shapes, but under the situation of the mould of checking different kinds, be difficult to realize to access the testing fixture of stable inspection precision in the past.

Like this, check the precision problem of unstable between the mould of the problem of the detection that is difficult to detect the distinctive defective that chrome-plated surface produces and anti-dazzle performance difference (concave-convex surface shape difference), the non-glare treated that is unrealized is a present situation with the automatic checking device of mould.

Summary of the invention

Therefore, the objective of the invention is to, provide a kind of non-glare treated of can detecting simultaneously with the lip-deep concavity defect of metal die and having or not of convex defective, and also can carry out the automatic checking device of mould of the detection of defective to multiple kinds of molds with higher inspection precision with different concave-convex surface shapes with chrome-plated surface.

The invention provides a kind of testing fixture, it is used to detect non-glare treated with the concavity defect on the die surface and/or person's convex defective, and it has: first illuminating equipment that is used for this die surface is shone first light; Be used for this die surface is shone second illuminating equipment of second light; Be used to gather the two-dimentional picture pick-up device of image in a part of zone of the die surface in the zone that comprises illuminated first light and second light; Be used to control the light intensity control gear of first light and second light intensity; Be used for the brightness of the preassigned point on the image that computing obtains by two-dimentional picture pick-up device with about this preassigned point and the arithmetical organ of the difference of the scope of preassigned brightness or preassigned brightness.

Preferred above-mentioned two-dimentional picture pick-up device, first illuminating equipment and second illuminating equipment with produce on the image of obtaining by two-dimentional picture pick-up device result from first scattering of light first highlights, result from second highlights of second scattering of light and between first highlights and second highlights and the mode of the low dark portion of brightness ratio first highlights and second highlights dispose.

In testing fixture of the present invention, preferably according to the operation result of above-mentioned arithmetical organ, control first light and/or second light intensity by above-mentioned light intensity control gear, so that the brightness of the preassigned point on the above-mentioned image becomes described preassigned brightness or becomes in the preassigned brightness range.

Preassigned point on the above-mentioned image preferably comprises at least one point and at least one the interior point of second highlights in above-mentioned first highlights.

In addition, in testing fixture of the present invention, preferably control first light intensity, so that first highlights shows maximum brightness in above-mentioned image by above-mentioned light intensity control gear.

In the testing fixture of the present invention, preferably the existence by detecting the bright spot in the described dark portion side end zone of first highlights whether and/or the existence of the dim spot in second highlights whether, detect having or not of concavity defect on the die surface and/or convex defective.

Preferably, central point T and the straight line parallel with the optical axis of two-dimentional picture pick-up device by the zone corresponding with above-mentioned dark section is straight line M on the mould surface; With straight line M angulation be that 2 α and the straight line by central point T are when being straight line N; Wherein, α (°) be normal and the straight line M angulation of the face behind the zone leveling of lip-deep illuminated first light of mould; Above-mentioned first illuminating equipment is to be configured in by satisfying following formula (1) in the situation in the regional R of straight line M and straight line N regulation; Being configured in the mode that satisfies following formula (2) in the outer situation of regional R disposes

θ _E1≤2α-2x (1)

θ _E1≥2α+2x (2)

At this, θ in the formula _E1(°) be the some L on the straight line N side end in straight line M and binding first illuminating equipment _E1With the straight line angulation of central point T, x (°) for having the minimum value of the angle of the defective that should detect in the maximum inclination angle that can be present in each concavity defect on the die surface.

In addition; Preferably, central point T ' and the straight line parallel with the optical axis of two-dimentional picture pick-up device by the zone corresponding with second highlights is straight line M ' on the mould surface; With straight line M ' angulation be that 2 α ' and the straight line by central point T ' they are straight line N ' time; Wherein, α ' (°) be normal and the straight line M ' angulation of the face behind the zone leveling of lip-deep illuminated described second light of described mould; Above-mentioned second illuminating equipment is configured on the straight line N ' in the mode that satisfies following formula (3) and (4)

θ′ _E1＞2α′-2x′(3)

θ′ _E2＜2α′+2x′(4)

At this, θ ' in the formula _E1(°) be straight line M ' with the straight line M ' side end that links in second illuminating equipment on some L ' _E1With the straight line angulation of central point T ', θ ' _E2(°) be straight line M ' and the some L ' that links in second illuminating equipment and end straight line M ' side opposition side _E2With the straight line angulation of central point T ', x ' (°) for having the minimum value of the angle of the defective that should detect in the maximum inclination angle that can be present in each the convex defective on the die surface.

Testing fixture of the present invention preferably also has the travel mechanism that move the position zone, on die surface that makes illuminated first light and described second light.This travel mechanism preferably comprises the unit that two-dimentional picture pick-up device, first illuminating equipment and second illuminating equipment are moved with respect to mould under the state of keeping the relation of position toward each other.

In addition, testing fixture of the present invention preferably also has the Flame Image Process mechanism that is used for the image of being obtained by two-dimentional picture pick-up device is carried out the Image Speckle adjustment.

According to testing fixture of the present invention, can detect non-glare treated simultaneously with the lip-deep concavity defect of metal die and/or having or not of convex defective with chrome-plated surface, even and produce at the same time under concavity defect and both situations of convex defective, also can detect these defectives simultaneously.In addition, also can stably carry out the detection of defective to multiple kinds of molds with higher inspection precision with different concave-convex surface shapes.

Description of drawings

Fig. 1 is the approximate three-dimensional map of a preferred embodiment of expression testing fixture of the present invention.

Fig. 2 is the calcspar of a preferred embodiment of the structure of expression testing fixture of the present invention.

Fig. 3 is the synoptic diagram that is used to illustrate the image of being obtained by two-dimentional picture pick-up device.

Fig. 4 is the diagram that an embodiment of the view data that testing fixture of the present invention obtains is used in expression.

Fig. 5 is the process flow diagram of the method for expression control first light and/or second light intensity.

Fig. 6 is used for illustrating the view data diagram of the point (coordinate) of given luminance in advance.

Fig. 7 is the synoptic diagram that is used for illustrating the configuration of testing fixture first illuminating equipment of the present invention.

Fig. 8 is the synoptic diagram that is used for illustrating the reflection of light direction of concavity defect.

Fig. 9 is the synoptic diagram of configuration that is used for illustrating second illuminating equipment of testing fixture of the present invention.

Figure 10 is the synoptic diagram that is used for illustrating the reflection of light direction of convex defective.

Figure 11 schematically illustrates as checking the diagram of the suitable non-glare treated of object with a preferred embodiment of the first half of the manufacture method of mould.

Figure 12 schematically illustrates as checking the diagram of the suitable non-glare treated of object with a preferred embodiment of the latter half of the manufacture method of mould.

Figure 13 schematically illustrates the diagram of carrying out the etched state of side in first etching work procedure.

Figure 14 schematically illustrates the male and fomale(M﹠F) that formed by first etching work procedure diagram by the state of the second etching work procedure passivation.

Figure 15 is the diagram that schematically illustrates the testing fixture of making in embodiment 1.

Embodiment

＜testing fixture 〉

Fig. 1 is the approximate three-dimensional map of a preferred embodiment of expression testing fixture of the present invention, and Fig. 2 is the calcspar of a preferred embodiment of the structure of expression testing fixture of the present invention.Testing fixture of the present invention is to be used to detect the device of non-glare treated with concavity defect on the die surface and/or convex defective, as Fig. 1 and shown in Figure 2, on surface, have at least: first illuminating equipment 102 that is used to shine first light as the mould 201 of checking object, be used to shine second illuminating equipment 103 of second light, be used to gather two-dimentional picture pick-up device 101 about the image in the part zone of the die surface in the zone that comprises illuminated first light and second light, be used to control the light intensity control gear 106 of first light and second light intensity, be used for the brightness of the preassigned point on the image that computing obtains by two-dimentional picture pick-up device with about this preassigned point and the arithmetical organ 107 of the difference of preassigned brightness or preassigned brightness range.Below, illustrate in greater detail about the testing fixture of mould of the present invention.

(first illuminating equipment and second illuminating equipment)

Testing fixture of the present invention has first

illuminating equipment

102 and 103 at least two illuminating equipments of second illuminating equipment.First illuminating equipment 102 is used for surface irradiation first light to the mould of using as the non-glare treated of checking object 201, and second illuminating equipment 103 is used for surface irradiation second light to mould 201.By using two different illuminations, thereby the lip-deep concavity defect and the convex defective both sides that can be present in mould 201 can be detected.Promptly, first illuminating equipment 102 is the illuminations that are used to detect concavity defect, second illuminating equipment 103 is the illuminations that are used to detect the convex defective.

Can use incandescent lamp, fluorescent light, light emitting diode various illuminating equipments such as (LED) as first illuminating equipment 102 and second illuminating equipment 103, but wherein consider that from the stable aspect of strength control and brightness the LED illuminating equipment preferentially uses.In addition, straight pipe type fluorescent lamp etc. is considered preferred from cheap aspect.Shape as first illuminating equipment 102 and second illuminating equipment 103 is for example annular, surface plate shape and different shape such as linear, but the die surface of checking (having the surface that is transferred to the micro concavo-convex shape on the base materials such as film that are subjected to non-glare treated) is under the situation of side of cylindrical die (roller shape mould) or under the situation on the surface of tabular mould, as shown in Figure 1, as the shaft-like illumination of first illuminating equipment, 102 preferred uses, cold-cathode tube, the illuminating equipment of wire such as straight pipe type fluorescent lamp (linear) is as second illuminating equipment, the 103 preferred illuminating equipments that use the surface plate shape.

(light intensity control gear)

Testing fixture of the present invention has and is used to control light intensity control gear 106 first light and second light intensity, that be connected with first illuminating equipment 102 and second illuminating equipment 103.Use under the situation of LED illumination as first illuminating equipment 102 and second illuminating equipment 103, as the light intensity control gear 106 of its luminous intensity of control, can be fit to use vibration frequency with respect to abundant fast pulse-length modulation (PWM) mechanism of the time shutter of two-dimentional picture pick-up device described later.Such pulse-length modulation mechanism can use commercially available product, for example CA-DC100, CA-DC20E (company limited's Keyemce (キ one エ Application ス) system), PC-2 (the nearly rattan of company limited is made made) etc.In addition, under the situation of incandescent lamp, can use slidac or variohm etc. as light intensity control gear 106, under the situation of fluorescent light, the inverter etc. that can use the change input voltage is as light intensity control gear 106.

(two-dimentional picture pick-up device)

Testing fixture of the present invention has the two-dimentional picture pick-up device 101 that is used to gather about the image in the zone of the part on the surface of the mould 201 in the zone that comprises illuminated first light and second light.In the present invention, this image according to being gathered by two-dimentional picture pick-up device 101 detects having or not of mould 201 lip-deep concavity defects and/or convex defective.

Can use the picture pick-up device of variety of ways such as CCD mode, CMOS mode as two-dimentional picture pick-up device 101.Two-dimentional picture pick-up device as the CCD mode for example has CV-H500C, CV-H500M, CV-H200C, CV-H200M, CV-H100C, CV-H100M (above, company limited's Keyemce system) and FZ-SC5M, FZ-S5M, FZ-SC2M, FZ-S2M (above, Omron's system) etc.

Among the present invention, from the aspect that can detect finer defective and under the situation of identical resolution characteristic, check wide region more die surface aspect consider, as the two-dimentional picture pick-up device 101 preferred structures of using with higher shooting resolution.For example, under the situation of the two-dimensional CCD picture pick-up device of above-mentioned illustrative company limited Keyemce system, CV-H200C than CV-H100C more preferably, CV-H500C is than CV-H200C more preferably.In addition, though the CCD picture pick-up device exists colored and black and white two types, in the testing fixture of mould of the present invention, can both preferably use.

In above-mentioned commercially available two-dimentional picture pick-up device, generally can be according to the various lens that are mounted of selections such as focal length and magnification.For example the lens of selling as the company limited Keyemce CA-LH series (focal length 8mm, 16mm, 25mm, 50mm) is arranged and adopt telecentric optical system CA-LM series (optical magnification * 0.5～* 1.0, * 2, * 4, * 6, * 8) etc.Adopt the lens of telecentric optical system to have the size of images that obtains by two-dimentional picture pick-up device not rely on two-dimentional picture pick-up device and as the advantage of the distance of the mould of checking object.In testing fixture of the present invention, can use any lens combination, but owing to be taken into the efficient height of light, so the common lens of telecentric optical system are not adopted in preferred use.When use is taken into the high lens of the efficient of light, can quicken shutter speed, thus, can be making a video recording at a high speed, and can reduce the fuzzy of picture.

Focal length as testing fixture preferred lens of the present invention is long.This is because the focal length elder can dwindle the angular range of the light that is taken into, and detects the scattering of light that defective causes easily.The preferred focus distance is more than the 25mn, more preferably more than the 50mm.Under the short situation of focal length, because of defective can arrive two-dimentional picture pick-up device, so the detectability of defective has the tendency of reduction with also being taken into by lens combination with the light of different usually angular range inscattering.The aperture of the lens when in addition, preferred testing fixture uses is little.Even because reduce aperture, also can expect the effect of the angular range of the light that reduces to be taken into.

(arithmetical organ)

Testing fixture of the present invention have the brightness that is used for the preassigned point on the image that computing obtains by two-dimentional picture pick-up device 101 with about this preassigned point and the arithmetical organ 107 of the difference of preassigned brightness or preassigned brightness range.As arithmetical organ 107, can exemplify multi-purpose computer (more specifically, central arithmetic processing apparatus (CPU)) based on personal computer and Programmable Logic Controller (PLC) etc.For example can use the low price personal computer that loads Windows XP Pro as operating system (OS) as the multi-purpose computer that can be used in arithmetical organ 107.The not special restriction of machine, but preferred Ethernet (Ethernet) or RS 232C (serial ports) wait and have the machine (Vostro220 of concrete example such as Dell Co., Ltd's sale etc.) that is used for the function of communicating by letter with other devices.

In addition, testing fixture of the present invention has information, and the storing mechanism 110 of the view data of the picture that obtained by two-dimentional picture pick-up device 101 of the preassigned point (coordinate) that is used for storing in advance on the image that is compared the above-mentioned luminance difference of computing and preassigned brightness on this aspect or preassigned brightness range usually.Use under the situation of multi-purpose computers such as personal computer as arithmetical organ 107, the memory storage that can use this multi-purpose computer is as storing mechanism 110.The difference of the brightness of this specified point in the view data of the picture that is accumulated in the preassigned brightness (perhaps brightness range) on the specified point (coordinate) in the storing mechanism 110, on the image and is obtained by two-dimentional picture pick-up device 101 is by above-mentioned arithmetical organ 107 computings.In addition, as the multi-purpose computers such as personal computer of arithmetical organ 107 and storing mechanism 110, the control gear 111 that can comprise light intensity control gear 106 and control motor controller 112 described later.

(Flame Image Process mechanism)

Testing fixture of the present invention preferably has the picture that will be obtained by two-dimentional picture pick-up device 101 and is converted to view data, this view data is sent to the Flame Image Process mechanism 108 of storing mechanism 110.Wherein, self also can have function as personal computer of arithmetical organ 107 and storing mechanism 110 etc. as this Flame Image Process mechanism.

Above-mentioned Flame Image Process mechanism 108 directly or via the camera control unit 109 that is used to change or handle the signal of sending here from two-dimentional picture pick-up device 101 is connected two-dimentional picture pick-up device 101 (with reference to Fig. 2).In addition, also preferably the CV-5700 one-piece type image processing systems of camera control unit such as (company limited's Keyemce systems) is used as Flame Image Process mechanism 108 double camera control units 109.CV-5700 has via Ethernet will be sent to the function of storing mechanisms 110 such as personal computer by the picture that two-dimentional picture pick-up device 101 obtains as the view data of bitmap form.Personal computer is connected by Ethernet with CV-5700, thereby can sends the picture of two-dimentional picture pick-up device to personal computer etc. as view data.

Above-mentioned Flame Image Process mechanism 108 also can have the function of the view data of the picture that is obtained by two-dimentional picture pick-up device 101 being carried out various Filtering Processing.Handle by carrying out such image filtering, the reduction that can disturb, brightness change emphasizes or the compensation of the inequality of luminance state etc.As filtrator, for example Image Speckle is adjusted wave filter, contrast correction wave filter, luminance compensation wave filter, median filter (also claiming the intermediate value wave filter), diffusion filter etc.Each Filtering Processing can realize by known various algorithms.

Flame Image Process mechanism 108 with such Filtering Processing function as mentioned above, can be and different devices such as personal computer as arithmetical organ 107 and storing mechanism 110 also can be this personal computer etc. itself.Under the former situation, require to use the image processing system that loads special-purpose digital signal processor (DSP) as Flame Image Process mechanism 108 under the situation of the processing speed that image filtering handles.As the device that has carried the image processing system that is mounted with DSP, the Keyemce system CV-5000 of company limited series, CV-3000 series, the system ZFX of Omron (China) Co., Ltd. series, FZ3 series etc. are for example arranged.In addition, under the latter's the situation, also can use the device that is called workstation that is mounted with a plurality of jumbo main storage means or CPU.

In above-mentioned Filtering Processing, testing fixture of the present invention is adjusted function owing to can stably carry out the detection that has or not of defective so preferably have Image Speckle.So-called Image Speckle adjustment is meant that compensation can be changed by the background luminance as the view data of the inequality generation of the sensitivity of the illumination condition of the mould 201 of checking object or two-dimentional picture pick-up device 101.For example, the periphery that produces view data is compared the situation of dark brightness disproportionation with central part under, can make the overall brightness uniformity by the Image Speckle adjustment.

The algorithm of Image Speckle adjustment has various motions, changes the method that compensates in view of the above but the most general method is the brightness of the background that causes from the image data extraction illumination condition of gained etc.The method that changes as the brightness of extracting background has by the view data to gained and for example is suitable for diffusion filter or median filter, thereby removes trickle luminance fluctuation, infers the method that the brightness of background changes.

The Image Speckle adjustment can be equipped with image processing system that Image Speckle adjusts function by use and use or use the personal computer that is mounted with image processing software to wait as above-mentioned Flame Image Process mechanism 108 to carry out.As being installed, Image Speckle adjusts CV-5700 (company limited's Keyemce system), the graphics processing unit PSM-3310-01AD14 (A Waer of company limited data system) that is mounted with dynamic image spot adjustment function etc. that the image processing system of function for example is mounted with real-time deep or light compensate function.

(travel mechanism)

Testing fixture of the present invention preferably also is provided with the travel mechanism zone, that move in mould 201 lip-deep positions that makes illuminated first light and second light.Thus, can be in turn or continuous review constitute the whole micro concavo-convex surface of the mould of checking object.This travel mechanism can be first travel mechanism 104 that two-dimentional picture pick-up device 101, first illuminating equipment 102 and second illuminating equipment 103 are moved with respect to mould 201 under the state of keeping the relative position of each other relation, also can be to make second travel mechanism 105 that self moves or rotate as the mould 201 of checking object, also can be to have this both mechanism in addition.

As above-mentioned first travel mechanism 104, can exemplify as the linear actuator of straight-moving mechanism or the structure (for example servo linear actuator) of on this, assembling stepping motor, servomotor or DC motor etc.In the embodiment shown in fig. 1, use servo linear actuator as first travel mechanism 104, servo linear actuator keeps the pedestal that keeps two-dimentional picture pick-up device 101, first illuminating equipment 102 and second illuminating equipment 103.Therefore, when servo linear actuator moved, each pedestal of its maintenance kept two-dimentional picture pick-up device 101, first illuminating equipment 102 and second illuminating equipment, 103 relative position relations not to change and moves with respect to mould 201.Like this, can be by being provided with they first travel mechanisms 104 when the relative position relation that makes two-dimentional picture pick-up device 101, first illuminating equipment 102 and second illuminating equipment 103 is fixing as a cell moving, thereby the inspection condition can be kept constant, and on the whole micro concavo-convex surface of mould, check simultaneously.

Can use various driving mechanisms such as stepping motor, servomotor, DC motor as above-mentioned second travel mechanism 105.From the controlled viewpoint of amount of movement, particularly can preferably use stepping motor.In addition, also can be according to necessary accuracy, the various gears of torque recombinant.As stepping motor AS series, AR series are for example arranged, NX series (all being east motor company limited system) is for example arranged as servomotor, respectively can be as obtaining with the product of gear combination.In addition, as linear actuator for example ESR series, EZSII series, EZX series (all being east motor company limited system) etc.These motor are general products, can obtain same product from each company.

First and second travel mechanism 104,105 is connected on their the drive electric motor controller 112 (for example motor controller EMP400 of east motor company limited system) of control usually, and motor controller 112 is connected on the control gear 111 of controlling it.Control gear 111 also carries out the control of light intensity control gear 106 with motor controller 112 usually.

The detection of the defective of＜use testing fixture 〉

Then, describe about the non-glare treated of the testing fixture that uses the invention described above detection method with concavity defect on the die surface and/or convex defective.In addition, also describe in the lump about preferred disposition condition of first illuminating equipment 102 in the testing fixture and second illuminating equipment 103 etc.

At first, on as the surface (have the surface that be transferred to the micro concavo-convex shape base materials such as film that be subjected to non-glare treated on) of the non-glare treated of checking object, shining first light, second light respectively, obtaining picture about the zone of the part of the die surface in the zone that comprises illuminated this first light and second light by two-dimentional picture pick-up device 101 from first illuminating equipment 102, second illuminating equipment 103 with mould 201.Obtained picture is converted to view data by Flame Image Process mechanism 108 grades as mentioned above, and implements Filtering Processing such as Image Speckle adjustment as required, is stored in the storing mechanism 110.

For example, to use CV-5700 (company limited's Keyemce system) to use as Flame Image Process mechanism 108 double camera control units 109, to describe as example as the situation that arithmetical organ 107, storing mechanism 110 and control gear 111 use by the personal computer that Ethernet is connected on the CV-5700, then the picture of being obtained by two-dimentional picture pick-up device 101 is stored in the storing mechanism 110 of personal computer by the view data that CV-5700 is converted to bitmap form.In this case, the output format of CV-5700 is 24 color bitmap forms, and view data can not changed and directly be stored in the storing mechanism 110 as 24 color bitmap forms to former state.In 24 color bitmap forms, record the head of the width, height etc. of image in succession, red green blue tricolor is assigned separately the information of 8 24 of totals as a pixel record.This bitmap images is stored in the degree that can store guarantees continuously in the storage area of storing mechanism 110 of this bitmap images.

At this, in the present invention, by the two-dimentional picture pick-up device 101 of suitable adjustment, first illuminating equipment 102 and the relative position of second illuminating equipment 103 in testing fixture, thereby as shown in Figure 3, in the image (view data) 300 that obtains by two-dimentional picture pick-up device 101, first highlights 301 that first scattering of light that generation is shone by first illuminating equipment 102 causes, second highlights 302 that causes by second scattering of light of second illuminating equipment 103 irradiation and between first highlights 301 and second highlights 302 and brightness ratio first highlights 301 and the low dark portion 303 of second highlights 302.

In the present invention, obtain have the first above-mentioned highlights 301, the view data of second highlights 302 and dark portion 303, carry out the concavity defect on the die surface and/or the detection of convex defective according to this view data.Promptly, with reference to Fig. 3, in first illuminating equipment 102 provides in first highlights 301 of brightness as first inspection area 310 in dark portion 303 side end zones, detect and have or not concavity defect, promptly detect in second inspection area 320 at second highlights 302, particularly its middle section that second illuminating equipment 103 provides brightness and have or not the convex defective.First inspection area 310 is the low zone of middle section of brightness ratio first highlights 301, can have or not the bright spot that is present in first inspection area 310 by affirmation, thereby judge having or not of concavity defect.This bright spot results from part scattering on two-dimentional picture pick-up device 101 directions by concavity defect of first light.In addition, have or not the dim spot that is present in second inspection area 320 by affirmation, thereby can judge having or not of convex defective.This dim spot results from the scattering on the direction beyond the two-dimentional picture pick-up device 101 by the convex defective of the part of second light.

Fig. 4 is the diagram that an embodiment of the view data that testing fixture of the present invention obtains is used in expression.Among the embodiment shown in Figure 4, on the zone that is equivalent to first inspection area 310, there is the bright spot that is equivalent to concavity defect.

When obtaining above-mentioned view data, for can precision more the highland detect concavity defect and convex defective both, in addition, for with the inspection precision higher, more stably carry out the detection of defective, preferably meet the following conditions and suitably control first light and/or second light intensity by light intensity control gear 106 with respect to multiple kinds of molds with different concave-convex surface shapes.

Promptly, the brightness that preferably is controlled so as to the preassigned point (coordinate) on the image of being obtained by two-dimentional picture pick-up device 101 of first light and/or second light intensity becomes about this point and by preassigned brightness (perhaps in the brightness range).Be used to satisfy first light of such condition and/or the control of second light intensity can be carried out according to process flow diagram shown in Figure 5 according to the operation result of above-mentioned arithmetical organ 107.Promptly, at first, the view data from be stored in storing mechanism 110 obtains the monochrome information of the preassigned point (coordinate) on the view data that stores in this storing mechanism 110.Then, by arithmetical organ 107 by the brightness on this point (coordinate) on the computing view data with about being stored in the poor of the preassigned brightness of this preassigned point (coordinate) (the perhaps scope of brightness) in the storing mechanism 110, judge whether the brightness of this point (coordinate) is preassigned brightness (it is interior perhaps to be in brightness range).The result who judges is, when the point about whole appointments is that promptly illumination intensity is set in currency under the situation of appointed brightness (perhaps in the brightness range).Under the situation in addition, the intensity of illumination that brightness will be provided the specified point of the brightness of non-appointment (perhaps in the brightness range) is by 106 changes of light intensity control gear.The width of the intensity of change illumination is determined by the difference of the brightness that constitutes target with current brightness.

By controlling first light and/or second light intensity satisfying above-mentioned condition, thereby can make the inspection stable accuracy of non-glare treated with mould.

In addition, in order to obtain the monochrome information on the preassigned point (coordinate) on the view data, can read the information that is stored in the address of trying to achieve by try to achieve the address of corresponding storing mechanism 110 based on the computing of the information of the width height of bitmap images by computing.At this moment, can independently read the information corresponding respectively, also can adopt the mean value of the value of RGB to adopt as brightness with red green blue tricolor.In addition, also can select the information corresponding as monochrome information according to illuminator with arbitrary look.For example, under the situation of using the red LED illumination, can be only with red value as monochrome information.In addition, the pixel that obtains monochrome information can be a pixel, also can be the mean value of a plurality of pixels.By trying to achieve the mean value of a plurality of pixels, can try to achieve more stable check result, so be preferred.

In addition, above-mentioned " the preassigned point (coordinate) on the view data " preferably comprises at least one point in first highlights 301 and at least one point in second highlights 302.Fig. 6 be used to illustrate on the view data, the figure of the point (coordinate) of given luminance in advance.Such example shown in Figure 6, as the specified point (coordinate) in first highlights 301, select near " the brightness specified coordinate 1 " of first highlights, 301 central authorities,, select near " the brightness specified coordinate 3 " of second highlights, 302 central authorities as the specified point (coordinate) in second highlights 302.Like this, intensity by the control illumination, so that the brightness of at least one point at least one point in first highlights 301 and second highlights 302 becomes preassigned brightness (or in brightness range), thus, can make the brightness that has or not that becomes easy half section pairing bright spot and dim spot as the brightness of first inspection area 310 in the zone that has or not that is used to detect defective and second inspection area 320.

At this, as mentioned above, the detection of the concavity defect in first inspection area 310 was judged by having or not of the bright spot in this zone.Therefore, for more reliable and precision detect concavity defect well, therefore the preferred scattered intensity that improves as far as possible by the two-dimentional picture pick-up device direction of first light of concavity defect scattering, preferably shows that with first brightness 301 mode of the brightness of maximum controls first light intensity on image.This means will be about the preassigned brightness settings of specified point (coordinate) in first brightness 301 for bigger than the given luminance of other any specified points.For example, in the embodiment of Fig. 6, control illumination intensity in the big mode of other any brightness specified points of brightness ratio of " brightness specified coordinate 1 ".

On the other hand, in first inspection area 310, for more reliable and precision detect the bright spot that is equivalent to concavity defect well, make the scattered intensity of two-dimentional picture pick-up device direction smaller, the luminance difference that increases bright spot is favourable.From the viewpoint, preferably further specify at least one point (for example " the brightness specified coordinate 2 " among Fig. 6) in first inspection area 310 (promptly, in first highlights 301 dark portion 303 side end zones), be set at the given luminance of the brightness specified point in first inspection area 310 littler than the given luminance of the specified point in first highlights 301 as above-mentioned " the preassigned point (coordinate) on the view data ".

In addition, as mentioned above, the detection of the convex defective in second inspection area 320 was judged according to having or not of the dim spot in this zone.Therefore, for more reliable and precision detect the convex defective well, make the scattered intensity of two-dimentional picture pick-up device direction bigger in the second dark portion 302 (thus, second inspection area 320), the luminance difference that increases dim spot is favourable.From this viewpoint, preferably control second light intensity in the mode of the above brightness of second highlights, 302 demonstration regulations.This means about the specified point (coordinate) in second highlights 302 and set the above brightness of regulation.

Wherein, the given luminance of the specified point in second highlights 302 is preferably set to littler than the given luminance of the specified point in first highlights 301.This is because when showing that with second highlights 302 mode of maximum brightness is set the intensity of illumination, two-dimentional picture pick-up device 101 is saturated by the high light of first and second illuminating equipment 102,103, is difficult to detect bright spot and the dim spot that is produced by defective.

In testing fixture of the present invention, detect concavity defect in order to be present in as the brightness in first inspection area 310 in the dark portion 303 side end zones of first highlights 301, need on two-dimentional picture pick-up device direction, carry out first light by the concavity defect scattering.Therefore, first illuminating equipment 102 preferably disposes in the mode that satisfies following formula (1) or (2).

More specifically, with reference to Fig. 7 and Fig. 8, is straight line M on mould 201 surfaces by the central point T in the zone corresponding with dark portion 303 and the straight line parallel with the optical axis of two-dimentional picture pick-up device 101, the angle that constitutes with this straight line M be 2 α (°) and be straight line N by the straight line of central point T.At this, α (°) with reference to Fig. 8, be the normal of the face Y behind the zone leveling of mould 201 lip-deep illuminated first light and the angle that straight line M constitutes, satisfy α＜90 °.At this moment, first illuminating equipment 102 is configured under the situation in the region R that is limited by straight line M and straight line N, and first illuminating equipment 102 preferably satisfies following formula (1):

θ _E1≤2α-2x (1)。

In the above-mentioned formula (1), θ _E1(°) be the some L on the straight line N side end in straight line M and binding first illuminating equipment 102 _E1Straight line Q angulation with central point T.X (°) for being present in minimum value in the maximum inclination angle of mould 201 lip-deep each concavity defect A, that have the angle of the defective that should detect.

Shown in Fig. 8 (a), the incident direction that is radiated at first light on the inclined-plane of concavity defect A is 2 α-2x with the angle that ejaculation direction by the light of the inclined-plane reflection of concavity defect A constitutes.Therefore, in order to make first light by the inclined-plane scattering of concavity defect A, in first inspection area 310, observe the bright spot that is equivalent to concavity defect, preferred θ towards two-dimentional picture pick-up device direction with maximum inclination angle x _E1Be 2 α-below the 2x.

On the other hand, first illuminating equipment 102 is configured under the region R situation outward that is limited by straight line M and straight line N, and first illuminating equipment 102 preferably satisfies following formula (2):

θ _E1≥2α+2x (2)

θ in the above-mentioned formula (2) _E1, α and x and above-mentioned be identical meanings.In addition, first illuminating equipment 102 is configured under the region R situation outward that is limited by straight line M and straight line N, and α+2x is below 90 °.

Shown in Fig. 8 (b), under first illuminating equipment 102 was configured in situation outside the region R, the incident direction that is radiated at first light on the inclined-plane of concavity defect A was 2 α+2x with ejaculation direction angulation by the light of the inclined-plane reflection of concavity defect A.Therefore, first illuminating equipment 102 is configured under the outer situation of region R, in order to make first light by the inclined-plane scattering of concavity defect A, in first inspection area 310, observe the bright spot that is equivalent to concavity defect, preferred θ towards two-dimentional picture pick-up device direction with maximum inclination angle x _E1Be 2 α+more than the 2x.

In addition, in testing fixture of the present invention, in order to detect the convex defective, second light by the convex defect scattering is carried out on the direction beyond the two-dimentional picture pick-up device direction as the dim spot in second inspection area 320 that is present in second highlights 302.Therefore, second illuminating equipment 103 preferably disposes in the mode that satisfies following formula (3) and (4).

More specifically, with reference to Fig. 9 and Figure 10, is straight line M ' on mould 201 surfaces by the central point T ' in the zone corresponding with second highlights 302 and the straight line parallel with the optical axis of two-dimentional picture pick-up device, with the angle of this straight line M ' formation be that 2 α ' and the straight line by central point T ' they are straight line N '.At this, α ' (°) with reference to Figure 10, be the normal of the face Y ' behind the zone leveling of mould 201 lip-deep illuminated second light and the angle of straight line M ' formation, satisfy α '＜90 °.At this moment, second illuminating equipment 103 is configured on the straight line N ' in the mode that satisfies following formula (3) and (4):

θ′ _E1＞2α′-2x′ (3)

θ′ _E2＜2α′+2x′ (4)。

In addition, α '+2x ' is below 90 °.

In the above-mentioned formula, θ ' _E1(°) be straight line M ' with the straight line M ' side end that links in second illuminating equipment 103 on some L ' _E1With the angle of the straight line Q ' formation of central point T ', θ ' _E2(°) be straight line M ' and the some L ' that links in second illuminating equipment 103 and end straight line M ' side opposition side _E2Angle with the straight line S ' formation of central point T '.X (°) for being present in minimum value in the maximum inclination angle of mould 201 lip-deep each convex defective B, that have the angle of the defective that should detect.

Shown in Figure 10 (a), about second light that the straight line M ' side end from second illuminating equipment 103 sends, the incident direction that is radiated at second light on the inclined-plane of convex defective B is 2 α '-2x ' with the angle that constitutes with ejaculation direction by the light of the inclined-plane reflection of convex defective B.Therefore, in order to make the direction of second light beyond two-dimentional picture pick-up device direction by the inclined-plane scattering of convex defective B with maximum inclination angle x, and do not arrive two-dimentional picture pick-up device, in second inspection area 320, observe the dim spot that is equivalent to the convex defective, preferred θ ' _E1Bigger than 2 α '-2x '.In addition, about second light that sends from the end with straight line M ' side opposition side of second illuminating equipment 103, shown in Figure 10 (b), the incident direction that is radiated at second light on the inclined-plane of convex defective B is 2 α '+2x ' with the angle that constitutes with ejaculation direction by the light of the inclined-plane reflection of convex defective B.Therefore, in order to make the direction of second light beyond two-dimentional picture pick-up device direction by the inclined-plane scattering of convex defective B with maximum inclination angle x, and do not arrive two-dimentional picture pick-up device, in second inspection area 320, observe the dim spot that is equivalent to the convex defective, preferred θ ' _E2Littler than 2 α '+2x '.

By adjusting, thereby can be met first illuminating equipment 102 and second illuminating equipment 103 of above-mentioned formula to the relative configuration of two-dimentional picture pick-up device, the size (width etc.) of illumination etc.The adjustment of the size of illumination also can be finished by a part of being covered illuminating part by the shadow shield of setting up.In addition, according to research of the present invention, when the maximum inclination angle x of concavity defect that produces on the surface of the non-glare treated with chrome-plated surface with metal die and convex defective and x ' are more than 4 ° the time, concavity defect and convex defective become the defective of the degree that the people can recognize.Therefore, in above-mentioned formula (1)～(4), the angle below 4 ° is brought into, can detect whole defectives of the degree that the people can recognize by testing fixture of the present invention as x and x '.

According to above order, micro concavo-convex surface about the part of mould 201, what be checked through concavity defect and/or convex defective has without male offspring, use above-mentioned travel mechanism (first travel mechanism 104 and/or second travel mechanism 105) change to check the position, thereby also can carry out same inspection about the micro concavo-convex surface of other parts.

＜as the non-glare treated mould of checking object 〉

Testing fixture of the present invention preferably uses the non-glare treated of making below for example with in the defect inspection of mould.

Figure 11 schematically illustrates as checking the diagram of the suitable non-glare treated of object with a preferred embodiment of the first half of the manufacture method of mould.In Figure 11, schematically illustrate the section of the mould of each operation.The manufacture method of this mould comprises (1) first plating operation, (2) grinding step, (3) photosensitive resin film formation operation, (4) exposure process, (5) developing procedure, (6) first etching work procedures, (7) photosensitive resin film stripping process, (8) second plating operations basically.

(1) first plating operation

In this operation, at first on the surface of the base material that is used for mould, implement copper facing or nickel plating.Pass through like this mould is implemented copper facing or nickel plating with the surface of base material, thus the connecting airtight property or the glossiness of the chromium plating in the second plating operation after can improving.

As the copper or the nickel that in the first plating operation, use, except that can being separately the simple metal, also can be based on the alloy of copper or based on the alloy of nickel, therefore, so-called in this instructions " copper " is the meaning that comprises copper and aldary, and " nickel " is the meaning that comprises nickel and nickel alloy in addition.Copper facing and nickel plating can be undertaken by the electrolysis plating respectively, also can apply by electroless plating and carry out, but adopt the electrolysis plating usually.

When implementing copper facing or nickel plating,, then can not thoroughly get rid of the influence of substrate surface, so preferably its thickness is more than the 50 μ m if coating is too thin.The upper limit of plating layer thickness is preferably about 500 μ m.

As be suitable for mould with the metal material of the formation of base material from the preferred aluminium of cost viewpoint, iron etc.From the convenience of installing, the more preferably aluminium of light weight.Except that being respectively the simple metal, also can be the alloy based on aluminium or iron at this so-called aluminium or iron.In addition, mould can be the suitable shape that in the past adopted in this field with the shape of base material, and for example tabular also can be roller cylindric or cylindraceous in addition.

(2) grinding step

In ensuing grinding step, the substrate surface of being implemented copper facing or nickel plating by the first above-mentioned plating operation is ground.Through this operation, substrate surface preferably grinds to form the form of approximate minute surface.This be because, as the sheet metal of base material or metal roller in order to reach desired precision, be implemented machinings such as cutting or grinding more, thus, at substrate surface residual process line, even implemented under the state of copper facing or nickel plating, also residual their processing line, the state lower surface at plating also is not limited to smooth fully in addition.In Figure 11 (a), schematically illustrate by the first plating operation flat mould is implemented copper facing or nickel plating (layer of copper facing that forms in about this operation or nickel plating is not shown) with the surface of base material 7, and then have the state that mould is carried out the surface 8 of mirror ultrafinish with base material 7 by grinding step.

Be not particularly limited about the substrate surface that has been implemented copper facing or nickel plating is carried out abrasive method, can use any method in mechanical milling method, electrolytic polishing method, the chemical grinding method.As for example superfinishing method of mechanical milling method, polishing polishing, fluid polishing, polishing polishing etc.The center line average roughness Ra that surfaceness after the grinding is preferably based on the regulation of JIS B 0601 is below the 0.1 μ m, more preferably below the 0.05 μ m.When the center line average roughness Ra after the grinding is bigger than 0.1 μ m, the possibility of the influence of the surfaceness after residual grinding on the concaveconvex shape of final die surface is arranged.

(3) photosensitive resin film forms operation

Form in the operation at ensuing photosensitive resin film, with photoresist form the solution be dissolved in the solvent be coated in the mould of implementing mirror ultrafinish by above-mentioned grinding step with base material 7 polished surperficial 8 on and heat drying, thereby form photosensitive resin film.In Figure 11 (b), schematically illustrate mould with base material 7 polished surperficial 8 on form the state of photosensitive resin film 9.

Can use known in the past photoresist as photoresist.The photoresist of minus that partly has the character of sclerosis as sensitization for example can use potpourri, tygon cinnamate compounds of the monomer of the acrylate that has acrylic or methacrylic acid group in molecule or prepolymer, two azos and dience rubber etc.In addition, as having by development stripping sensitization part, only the photoresist of the eurymeric of the residual character of not sensitization part for example can use phenolics class or novolac resin etc.In addition, also can in photoresist, cooperate various adjuvants such as sensitizer, development accelerant, connecting airtight property modification agent, screening characteristics modifying agent as required.With these photoresists be coated in mould with base material 7 polished surperficial 8 on the time, apply in order to form good filming, preferably to be diluted in the appropriate solvent.

As the method for coating photoresist solution can use that meniscus coating, fountain coating, dip coating, spin coated, roller coat apply, foundry pig coating, air knife coating, plate applies and known method such as curtain formula coating.The thickness of coated film preferably is the scope of 1～6 μ m after drying.

(4) exposure process

In ensuing exposure process, pattern exposure that will be corresponding with desirable micro concavo-convex surface configuration is being formed on the photosensitive resin film 9 that forms in the operation by above-mentioned photosensitive resin film.The light source that is used for exposure process can suitably be selected according to the wavelength photoreceptor of coated photoresist and sensitivity etc., for example can use the g line (wavelength: 436nm), the h line of high-pressure mercury-vapor lamp (wavelength: 405nm), the i line of high-pressure mercury-vapor lamp (wavelength: 365nm), semiconductor laser (wavelength: 830nm, 532nm, 488nm, 405nm etc.), YAG laser instrument (wavelength: 1064nm), KrF excimer laser (wavelength: 248nm), ArF excimer laser (wavelength: 193nm), F2 excimer laser (wavelength: 157nm) etc. of high-pressure mercury-vapor lamp.Method as exposing patterns can exemplify the laser instrument drafting.

In Figure 11 (c), schematically illustrate the state of exposing patterns in photosensitive resin film 9.Under the situation that photosensitive resin film is formed by the photoresist of minus, the cross-linking reaction of resin is carried out by exposure in the zone 10 that is exposed, and the dissolubility of developer solution described later is reduced.Thus, unexposed regional 11 by developing solution dissolution in developing procedure, and the zone 10 that only is exposed remains on the substrate surface and forms mask.On the other hand, under the situation that photosensitive resin film is formed by the photoresist of eurymeric, the zone 10 that is exposed cuts off the coupling of resin by exposure, and the dissolubility of developer solution described later is increased.Thus, the zone 10 that is exposed in developing procedure is by developing solution dissolution, and only unexposed regional 11 remain on the substrate surface, forms mask.

(5) developing procedure

In ensuing developing procedure, use at photosensitive resin film 9 under the situation of photoresist of minus, unexposed regional 11 by developing solution dissolution, and the zone 10 that only is exposed remains in mould with on the base material, plays the effect as mask in ensuing first etching work procedure.On the other hand, use at photosensitive resin film 9 under the situation of photoresist of eurymerics, the zone 10 that only is exposed is by developing solution dissolution, and unexposed regional 11 remain in mould with on the base material, plays the effect as the mask in ensuing first etching work procedure.

About the developer solution that uses in the developing procedure, can use known in the past developer solution.NaOH for example, potassium hydroxide, sodium carbonate, sodium silicate, sodium metasilicate, inorganic bases such as ammoniacal liquor, ethamine, primary amine Class such as n-propylamine, diethylamine, secondary amine classes such as 2-n-butylamine, triethylamine, tertiary amines such as methyl-diethyl-amine, dimethylethanolamine, alcaminess such as triethanolamine, Tetramethylammonium hydroxide, tetraethyl ammonium hydroxide, quaternary ammonium salts such as trimethyl hydroxyethylammoniumhydroxide hydroxide, the pyrroles, alkaline aqueous solutions such as cyclic amine such as piperidines, and dimethylbenzene, organic solvents such as toluene etc.

Developing method about developing procedure is not particularly limited, but can use methods such as immersion development, spray development, brush development, ultrasound wave development yet.

In Figure 11 (d), schematically illustrate the photoresist that in photosensitive resin film 9, uses minus, carry out the state of development treatment.Unexposed regional 11 by developing solution dissolution in Figure 11 (c), and the zone 10 that only is exposed remains on the substrate surface, constitutes mask 12.In Figure 11 (e), schematically illustrate use and in photosensitive resin film 9, use the photoresist of eurymeric, carry out the state of development treatment.The zone 10 that is exposed in Figure 11 (c) is by developing solution dissolution, and only unexposed regional 11 remain on the substrate surface, constitutes mask 12.

(6) first etching work procedures

In ensuing first etching work procedure, use behind above-mentioned developing procedure, remain in mould with the photosensitive resin film on the substrate surface as mask, main etching does not have the mould base material at the position of mask, formation is concavo-convex on polished surfacing.Figure 12 schematically illustrates as checking the diagram of the suitable non-glare treated of object with a preferred embodiment of the latter half of the manufacture method of mould.In Figure 12 (a), schematically illustrate by the main etching of first etching work procedure and do not have the mould at the position 13 of the mask state of base material 7.The mould of the bottom of mask 12 uses base material 7 not from mould substrate surface etching, and carries out the never etching at the position 13 of mask along with etched carrying out.Thus, at mask 12 and the boundary vicinity that does not have the position 13 of mask, also the mould of the bottom of etching mask 12 is with base material 7.Such mask 12 and do not have mask position 13 boundary vicinity also the mould of the bottom of etching mask 12 below be called lateral erosion and carve with base material 7.Figure 13 schematically illustrates that side is etched carries out.14 stages of dotted line of Figure 13 are represented the mould that changes along with etched the carrying out surface with base material.

Etch processes in first etching work procedure is usually by using iron chloride (FeCl ₃) liquid, cupric chloride (CuCl ₂) liquid, alkaline etching liquid (Cu (NH ₃) ₄Cl ₂) wait and make corrosion and carry out, but also can use strong acid such as hydrochloric acid or sulfuric acid, also can use the contrary electrolytic etching that utilizes current potential opposite when implementing with the electrolysis plating.Mould when implementing etch processes with the concave shape that forms on the base material according to differences such as the kind of the kind of base metal, photosensitive resin film and etching gimmicks, so, can not say so usually, but under etch quantity is situation below the 10 μ m, roughly isotropically etched from the metal surface of touching etching solution.At the thickness of this so-called etch quantity for the base material that reams by etching.

Preferred 1～50 μ m of etch quantity in first etching work procedure.Under the situation of etch quantity less than 1 μ m, on the metal surface, form concaveconvex shape hardly, and form the mould of general planar, so be not suitable for mould as non-glare treated.In addition, under etch quantity surpassed the situation of 50 μ m, the difference of height that is formed on the concaveconvex shape of metal surface became big, can produce whiting in the image display device of the anti-dazzle film that is suitable for the Mold Making of using gained.Etch processes in first etching work procedure can be undertaken by an etch processes, and etch processes is carried out more than also can be at twice.More than at twice, carry out under the situation of etch processes, the etch quantity in the above etch processes of preferably twice add up to 1～50 μ m.

(7) photosensitive resin film stripping process

In ensuing photosensitive resin film stripping process, the residual photosensitive resin film that uses as mask is removed in dissolving in first etching work procedure fully.In the photosensitive resin film stripping process, use stripper to dissolve photosensitive resin film.Use the liquid identical as stripper with above-mentioned developer solution.Stripping means in the photosensitive resin film stripping process is not particularly limited, and can use methods such as immersion development, spray development, brush development, ultrasound wave development.Figure 12 (b) schematically illustrates by dissolving the state of removing the photosensitive resin film that uses as mask 12 in first etching work procedure in the photosensitive resin film stripping process fully.By utilizing the etching of the mask 12 that constitutes by photosensitive resin film, form first surface concaveconvex shape 15 on substrate surface at mould.

(8) second plating operations

Then, by formed male and fomale(M﹠F) (first surface concaveconvex shape 15) being implemented chromium plating, thereby make the concaveconvex shape passivation on surface.Expression is passed through to form chromium coating 16 on first surface concaveconvex shape 15 among Figure 12 (c), thereby forms the state than the surface (surface 17 of chromium plating) of first surface concaveconvex shape 15 concavo-convex passivation.

The kind of chromium plating is not particularly limited, but preferred the use is called so-called gloss chromium plating or decorates with chromium plating chromium plating etc., that good gloss occurs.Chromium plating is undertaken by electrolysis usually, uses as its plating bath to comprise chromic acid (CrO ₃) and the aqueous solution of a spot of sulfuric acid.Can control the thickness of chromium plating by regulating current density and electrolysis time.

In the manufacture method of above-mentioned mould, by in the chrome-faced that is formed with fine concave-convex surface shape, thereby obtain the mould that concaveconvex shape passivation and its skin hardness improve.At this moment concavo-convex degree of passivation is because the concavo-convex size that obtains according to the kind of base metal, by first etching work procedure and the degree of depth and plating kind or thickness etc. and different, so, though be not usually, maximum factor is a plating thickness on the control degree of passivation.When the thickness attenuation of chromium plating, the effect of the concavo-convex surface configuration passivation that obtains before chromium plating processing is insufficient, with the enforcement of this concaveconvex shape transfer printing gained on transparent bases such as transparent membrane the optical characteristics of the transparent base of non-glare treated (anti-dazzle film etc.) become not so good.On the other hand, if plating thickness is blocked up, productivity variation then, and be called the plating defective that can produce the overshooting shape of tuberculosis, so not preferred.Therefore, the thickness of chromium plating is preferably in the scope of 1～10 μ m, more preferably in the scope of 3～6 μ m.

The chromium coating that in this second plating operation, forms be preferably formed for Vickers hardness be more than 800, more preferably to form more than 1000.

In addition, preferably between above-mentioned (7) photosensitive resin film stripping process and (8) second plating operations, comprise and make the male and fomale(M﹠F) that forms by first etching work procedure second etching work procedure by the etch processes passivation.In second etching work procedure, the first surface concaveconvex shape 15 that is formed by first etching work procedure that uses photosensitive resin film as mask is by the etch processes passivation.By this second etch processes, the rapid part of surface tilt in the first surface concaveconvex shape 15 that elimination is formed by first etch processes, the optical characteristics of using the anti-dazzle film etc. of the mould manufacturing of gained to be implemented the transparent base of non-glare treated changes to preferred direction.Schematically illustrate among Figure 14 by second etch processes and make first surface concaveconvex shape 15 passivation of mould with base material 7, the rapid part of surface tilt is passivated, and forms the state of the second surface concaveconvex shape 18 of the surface tilt with mitigation.

The etch processes of second etching work procedure also with first etching work procedure similarly, use iron chloride (FeCl usually ₃) liquid, cupric chloride (CuCl ₂) liquid, alkaline etching liquid (Cu (NH ₃) ₄Cl ₂) wait and make surface corrosion and carry out, but also can use strong acid such as hydrochloric acid or sulfuric acid, also can use the contrary electrolytic etching that utilizes current potential opposite when implementing with the electrolysis plating.Implement concavo-convex size that the concavo-convex degree of passivation after the etch processes obtains according to the kind of base metal, etching gimmick and by first etching work procedure and the degree of depth etc. and different, so, can not say so usually, but maximum factor is an etch quantity on the control degree of passivation.At this so-called etch quantity, also with first etching work procedure similarly, be the thickness of the base material that reams by etching.When etch quantity hour, make the effect of the concavo-convex surface configuration passivation that obtains by first etching insufficient, with the enforcement of this concaveconvex shape transfer printing gained on transparent bases such as transparent membrane the optical characteristics of the transparent base of non-glare treated (anti-dazzle film etc.) become not so good.On the other hand,, then almost do not have concaveconvex shape, form the mould of general planar if etch quantity is excessive.Therefore, etch quantity is preferably in the scope of 1～50 μ m, more preferably in the scope of 4～20 μ m.About the etch processes in second etching work procedure, with first etching work procedure similarly, can be undertaken by an etch processes, carry out etch processes more than also can be at twice.More than at twice, carry out under the situation of etch processes, the etch quantity in the above etch processes of preferably twice add up to 1～50 μ m.

Embodiment

Below, show to be described more specifically the present invention by embodiment, but can't help this embodiment, the present invention limits.

＜embodiment 1 〉

Making is formed at the automatic checking device of the non-glare treated of diameter 200mm, width 650mm with the inspection of the defective on the micro concavo-convex surface on the side of roller mould 201.The summary of the testing fixture of making in the expression present embodiment among Figure 15.

Be mounted with the low distortion lens CA-LH50 of focal length 50mm and the 5000000 pixel ccd video camera CV-H500C (company limited's Keyemce system) of close-perspective recording ring OP-51612 (all being company limited's Keyemce system) as two-dimentional picture pick-up device 101 uses, it is configured in the front end of CA-LH50 and checks that the distance of the mould 201 of object is on the position of 240mm.Optical system is adjusted in the mode of the scope of about 35mm side on the micro concavo-convex surface of shooting mould 201.A pixel of this two dimension picture pick-up device 101 is corresponding with the lip-deep 15 μ m of micro concavo-convex.

Two dimension picture pick-up device 101 is connected as Flame Image Process mechanism 108 via Ethernet and holds concurrently on the one-piece type image processing system CV-5700 of camera control unit (company limited's Keyemce system) of camera control units 109, and CV-5700 is connected on the personal computer Vostro220 (Dell Co., Ltd's system) as arithmetical organ 107, storing mechanism 110 and control gear 111 via Ethernet.

To be connected on the lighting controller CA-DC20E as light intensity control gear 106 as the White LED lamp stand of first illuminating equipment 102 illumination CA-DBW13 (company limited's Keyemce system, width w=15mm) and as the White LED surface plate illumination CA-DASW15 (company limited's Keyemce system, width w=150mm) of second illuminating equipment 103.First illuminating equipment 102 and second illuminating equipment 103 are provided with the position as shown in figure 15 in testing fixture, be arranged in the image that is obtained by two-dimentional picture pick-up device 101, above-mentioned first highlights 301, dark portion 303 and second highlights 302 be in turn and on the position with respect to the rotation axes of symmetry configured in parallel of the roller mould 201 of checking object.CA-DC20E uses this function by the structure of above-mentioned personal computer control from the light intensity of first illuminating equipment 102 and 103 irradiations of second illuminating equipment by being connected the function that has via the light intensity of Ethernet control illumination with CV-5700, having in the present embodiment.Form and will be connected on the CV-5700 via Ethernet promptly, in the present embodiment as the CA-DC20E of light intensity control gear 106, can be by the light intensity of above-mentioned personal computer control from first illuminating equipment 102 and 103 irradiations of second illuminating equipment.

In addition, as first travel mechanism 104 and second travel mechanism 105, with Fig. 1 similarly, use to guarantee keep respectively the pedestal of two-dimentional picture pick-up device 101, first illuminating equipment 102 and second illuminating equipment 103 servo linear actuator EXZ9LH-80WA (east motor company limited system), make the stepping motor AR98AA-H50-2 (east motor company limited system) of mould rotation.These travel mechanisms have and are connected the structure that goes up and via RS232C (serial ports) controller EMP402-1 is controlled by above-mentioned personal computer as the controller EMP402-1 of motor controller 112.

It is that about concavity defect and maximum inclination angle x ' more than 2.8 ° is about convex defective more than 3.5 ° that testing fixture with present embodiment shown in Figure 15 of said structure can detect maximum inclination angle x.

Use the testing fixture of above structure, be formed on the defect inspection on the micro concavo-convex surface on the side of above-mentioned roller mould 201.At first, as the intensity of following adjustment first illuminating equipment 102 and second illuminating equipment 103.On above-mentioned stepping motor, place roller mould 201, from first illuminating equipment 102 and second illuminating equipment 103 respectively with first light and second light towards the micro concavo-convex surface irradiation, obtain the picture of this irradiation area by two-dimentional picture pick-up device 101, be converted to view data by CV-5700, send it to above-mentioned personal computer.In the storing mechanism 110 of personal computer, amount to three specified points and store preassigned brightness about the central point of the central point of the central point of first highlights 301, first inspection area 310 and second highlights 302, the brightness value of this specified point that is extracted by personal computer to these given luminance values with from the view data that sends compares, according to process flow diagram shown in Figure 5, adjust first light and second light intensity, so that the brightness value of the specified point on the view data is the given luminance value substantially.Final brightness value in above-mentioned 3 on the view data is respectively 255 (given luminance values 255), 206 (given luminance values 200), 231 (given luminance values 230).In addition, the brightness value from the specified point of image data extraction is the mean value of the pixel corresponding with 150 μ m width.

Behind above adjustment first light and second light intensity, the image pickup scope of two-dimentional picture pick-up device is moved and check.At first, with similarly above-mentioned, obtain the picture of examination scope by two-dimentional picture pick-up device 101, be converted to view data by CV-5700, and suitable Image Speckle is adjusted wave filter and the contrast correction wave filter comes the correction image data, and then, extract the bright spot (being equivalent to concavity defect) in first inspection area have examination scope and the pixel coordinate of the dim spot (being equivalent to the convex defective) in second inspection area, send it to personal computer.Then,, according to this information with there is the pixel coordinate of above-mentioned bright spot and dim spot, try to achieve the absolute coordinates of bright spot and dim spot, be stored in the storing mechanism 110 of personal computer by the location coordinate information of the CPU computing travel mechanism of personal computer.

Then,, similarly check two-dimentional picture pick-up device 101, first illuminating equipment 102 and second illuminating equipment 103 mobile 30mm on respect to the parallel direction of the rotation axes of symmetry of roller mould 201 integratedly by first travel mechanism 104 with above-mentioned.Same repeatedly operation, end is after the inspection on a series of micro concavo-convex surface of the direction parallel with the rotation axes of symmetry of mould, by second travel mechanism 105 roller mould 201 is rotated 2mm with length surface, carry out again along the inspection on a series of micro concavo-convex surface of the direction parallel with the rotation axes of symmetry of mould.The whole periphery of roller mould is carried out above operation, finish the whole inspection in micro concavo-convex surface of mould.

Check as above, according to the coordinate that is kept in the storing mechanism 110, by the surface of observation by light microscope roller mould 201.In addition, use roller mould 201 to make the film of the micro concavo-convex shape of transfer printing roller mould 201, the micro concavo-convex shape of observing this film by confocal microscope.

Its result, being equivalent in roller mould 201, be kept at the convex defective of the concavity defect that confirms the about 100 μ m of diameter, the about 2 μ m of the degree of depth (degree of depth is the guess value according to the observation structure of the micro concavo-convex shape of transfer film) on the position of the coordinate position in the storing mechanism 110 and diameter minimum about 50 μ m, the about 2 μ m of the degree of depth (degree of depth is the guess value according to the observations of the micro concavo-convex shape of transfer film).

As can be known from the above results, according to testing fixture of the present invention, can precision detect well concavity defect and convex defective the two.

Claims

1. the testing fixture of a mould, it is used to detect non-glare treated with concavity defect on the die surface and/or convex defective, it is characterized in that having:

Be used for described die surface is shone first illuminating equipment of first light;

Be used for described die surface is shone second illuminating equipment of second light;

The two dimension picture pick-up device, it is used to gather the regional image of a part of the die surface in the zone that comprises illuminated described first light and described second light;

Be used to control the light intensity control gear of described first light and described second light intensity;

Arithmetical organ, its be used for the brightness of the preassigned point on the image that computing obtains by described two-dimentional picture pick-up device with about described point and preassigned brightness or preassigned brightness range poor.

2. testing fixture as claimed in claim 1 is characterized in that,

Described two-dimentional picture pick-up device, described first illuminating equipment and described second illuminating equipment with produce on the image of obtaining by described two-dimentional picture pick-up device result from described first scattering of light first highlights, result from second highlights of described second scattering of light and between described first highlights and described second highlights and the mode of the low dark portion of described first highlights of brightness ratio and described second highlights dispose.

3. testing fixture as claimed in claim 1 is characterized in that,

According to the operation result of described arithmetical organ, by described light intensity control gear so that the brightness of the preassigned point on the described image becomes described preassigned brightness or the mode that becomes in the described preassigned brightness range is controlled described first light and/or described second light intensity.

4. testing fixture as claimed in claim 2 is characterized in that,

Preassigned point on the described image comprises at least one point and at least one the interior point of described second highlights in described first highlights.

5. testing fixture as claimed in claim 2 is characterized in that,

So that showing the mode of maximum brightness in described image, described first highlights controls described first light intensity by described light intensity control gear.

6. testing fixture as claimed in claim 2 is characterized in that,

Whether there is bright spot and/or in described second highlights, whether has dim spot in the described dark portion side end zone of described first highlights by detecting, detect having or not of described concavity defect and/or described convex defective.

7. testing fixture as claimed in claim 2 is characterized in that,

Central point T and the straight line parallel with the optical axis of described two-dimentional picture pick-up device by the zone corresponding with described dark portion on described die surface are straight line M, with straight line M angulation be that 2 α and the straight line by central point T are when being straight line N, wherein, α (°) be the normal and the straight line M angulation of the face behind the zone leveling of illuminated described first light on the described die surface

Described first illuminating equipment satisfies following formula (1) to be configured under the situation in the region R that is limited by straight line M and straight line N, be configured in the mode that satisfies following formula (2) under the outer situation of region R disposes,

θ _E1≤2α-2x (1)

θ _E1≥2α+2x (2)

θ in the formula _E1(°) be the some L on the straight line N side end in straight line M and binding first illuminating equipment _E1With the straight line angulation of central point T, x (°) for having the minimum value of the angle of the defective that should detect in the maximum inclination angle that can be present in each concavity defect on the described die surface.

8. testing fixture as claimed in claim 2 is characterized in that,

Central point T ' and the straight line parallel with the optical axis of described two-dimentional picture pick-up device by the zone corresponding with described second highlights on described die surface are straight line M ', with straight line M ' angulation be that 2 α ' and the straight line by central point T ' they are straight line N ' time, wherein, α ' (°) be the normal and the straight line M ' angulation of the face behind the zone leveling of illuminated described second light on the described die surface

Described second illuminating equipment is configured on the straight line N ' in the mode that satisfies following formula (3) and (4),

θ′ _E1＞2α′-2x′(3)

θ′ _E2＜2α′+2x′(4)

θ ' in the formula _E1(°) be straight line M ' with the straight line M ' side end that links in second illuminating equipment on some L ' _E1With the straight line angulation of central point T ', θ ' _E2(°) be straight line M ' and the some L ' that links in second illuminating equipment and end straight line M ' side opposition side _E2With the straight line angulation of central point T ', x ' (°) for having the minimum value of the angle of the defective that should detect in the maximum inclination angle that can be present in each the convex defective on the described die surface.

9. testing fixture as claimed in claim 1 is characterized in that,

Also has the travel mechanism that move the position of zone on described die surface that make illuminated described first light and described second light.

10. testing fixture as claimed in claim 9 is characterized in that,

Described travel mechanism comprises the unit that described two-dimentional picture pick-up device, described first illuminating equipment and described second illuminating equipment are moved with respect to mould under the state of keeping the relation of position toward each other.

11. testing fixture as claimed in claim 1 is characterized in that,

Also have and be used for the image of being obtained by described two-dimentional picture pick-up device is carried out the Flame Image Process mechanism that Image Speckle is adjusted.