CN101968340A - End face runout and deflection measuring device and method - Google Patents
End face runout and deflection measuring device and method Download PDFInfo
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- CN101968340A CN101968340A CN 201010286622 CN201010286622A CN101968340A CN 101968340 A CN101968340 A CN 101968340A CN 201010286622 CN201010286622 CN 201010286622 CN 201010286622 A CN201010286622 A CN 201010286622A CN 101968340 A CN101968340 A CN 101968340A
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Abstract
The invention discloses a double-inductance minimeter-based end face runout and deflection measuring device and a double-inductance minimeter-based end face runout and deflection measuring method to realize online end face runout and deflection measurement of a rotary motion platform. The device comprises two inductance minimeters, a mounting plate, an X direction motion guide rail, a Y direction motion guide rail, a Z direction guide rail, a motion control card, a data acquisition card and a computer, wherein the motion guide rails drive the two inductance minimeters to move to a measurement position to acquire position information of a detected position on a measured end face of the rotary motion platform; the acquired position information is transmitted to the computer through the data acquisition card; the computer combines the acquired position information with the guide rail information of an existing measurement direction to acquire an actual position information of the tested position on the rotary motion platform; the rotary motion platform at an initial position and at a working position is measured twice respectively; the acquired position information of the tested positions are compared and calculated so as to obtain the end face runout and deflection of the rotary motion platform at the working position.
Description
Technical field
The invention belongs to accurate mounting technology field, relate to the measurement mechanism and the method for a kind of face runout and beat, be used for the on-line measurement of gyration platform rotating accuracy.
Background technology
In the assembling of accurate micro devices, when needs carry out precision indexing when assembling to pivoted member, inevitably can use the gyration platform, and the gyration platform beat and beat has material impact for the assembling attitude that is assembled element.Have the radial and axial index of beating when the gyration platform dispatches from the factory usually, in addition, do not overlap with the desirable axis of installing, can bring the assembling Run-out error thus because the gyration platform is installed axis.Beat and beat has significant impact to the precision of precision assembling, need measure so that compensate by simple effective method.
Usually, to solid of revolution such as revolving meber in the equipment such as lathe, precision movement platform and gear beat and beat is measured respectively.Aspect glitch detection, can realize that based on PSD and laser triangulation the runout error of induction type electric energy meter rotating disk detects.During detection, the light beam that semiconductor laser sends projects after lens converge on the surface of disk edge to be checked, and the part of diffuse reflection laser is collected by imaging len, and the incident point of light beam is imaged on the PSD photosurface.During dial rotation, its runout error signal can be by the detection [Sun Changjing, Dan Yuekang, electrical measurement and instrument, 2008 (6), 10-11] of PSD.This method can be measured beating of disk quickly and accurately.But there are system architecture and control algolithm complexity, the cost problem of higher.Be unfavorable for assembly system integratedly, carry out online detection.For this class rod-shaped elements of machine tool chief axis, the technology that can adopt electromagnetic force to suppress automatically, the magnetic coil gap of using the diameter run-out generation changes the electromagnetic torque that causes and changes, suppress beat and the radial displacement that the main shaft diameter run-out causes respectively with axial magnetic coil and radial magnetic force coil, thereby suppress main shaft diameter run-out [Chinese invention patent: Lathe initiative inhibition method and device of main axis bouncing, application (patent) number: 200610098079.1].This method can improve the main shaft precision.But this method is applicable to the run-out compensation of thin and long shafts element, is not suitable for the end pulsation measurement and the compensation of gyration platform.
In the beat context of detection, majority is measured based on clock gauge and detent mechanism.For example can adopt at beat measuring instrument seat one end handwheel is installed, cooperate V-type driving sheave and driven sheave, make the clock gauge seat to do linear reciprocating motion along guide rail, the error of having avoided manual promotion or tooth bar transmission to bring, improve accuracy of detection [Chinese utility model patent: multi-functional beat detector, application (patent) number: 200620031842.4].Another kind is applied to the radial beat measurement mechanism of closed hollow axial workpiece assembling usefulness, its measurement function is mainly realized by inside dial indicator, be applied to the installation [Chinese utility model patent: the radial beat measurement mechanism of closed hollow axial workpiece assembling usefulness, application (patent) number: 200720081711.1] of the high pressure and the low pressure rotor axle of aircraft engine.Above-mentioned two kinds of methods adopt the clock gauge reading, and are difficult integrated with computer-controlled assembly system.In addition, such device all is specialized equipment usually, with the non-one design of the assembly unit of assembly system, also can introduce measuring error, influences assembly precision.
In sum, existing beat and the beat detection method be difficult to online to gyration platform class device face runout and beat carries out fast and accurate the detection, and with the signal input computer control system that collects so that carry out subsequent treatment.
Summary of the invention
The technical problem to be solved in the present invention provides a kind of face runout and beat measurement mechanism and method based on two inductance amesdials, realizes the face runout of gyration platform and the on-line measurement of beat.
Technical scheme of the present invention is as follows:
This face runout and beat measurement mechanism comprise first inductance amesdial, second inductance amesdial, directions X motion guide rail, Y direction motion guide rail, Z direction motion guide rail, installing plate, motion control card, data collecting card and computing machine composition.First inductance amesdial, second inductance amesdial and operation unit are installed on the installing plate, and computing machine comes mobile installing plate by motion control card control directions X motion guide rail, Y direction motion guide rail and Z direction motion guide rail; Computing machine writes down the positional information of two inductance amesdials and operation unit simultaneously, by data collecting card input computing machine.
Its using method is as follows:
The center conllinear of the measuring position of two inductance amesdials and gyration platform, and about gyration platform central axis symmetry.Two inductance amesdials and operation unit are installed on the same installing plate, and the position of this installing plate is controlled by motion guide rail.
At gyration platform initial position, drive motion guide rail earlier, inductance amesdial is moved to the measuring position.This moment, the line center of two inductance amesdial location points overlapped with the axis of rotation of gyration platform.The surface to be measured of inductance amesdial contact gyration platform, the read signal that obtains is imported computing machine through data collecting card, existing direction of measurement in the signal of inductance amesdial and the computing machine (after going up the positional information stack of motion guide rail, obtains the initial position message of gyration platform end face to be measured measured point.
Then, the gyration platform is turned back to the angle that fittage sets.Repeat above-mentioned measuring operation afterwards, the actuation movement guide rail, inductance amesdial is moved to the detection position, obtain the positional information of gyration platform measuring end face measured point this moment, with tested 2 the positional information comparison of gyration platform revolution fore-and-aft survey end face, can calculate and obtain the tested location variation Δ in gyration platform revolution front and back at 2
1And Δ
2Because: Δ
1=Ltan θ+δ/cos θ, Δ
2=Ltan θ-δ/cos θ, L is the radial distance of measured point apart from the gyration platform centre of gyration in the formula, δ, θ are respectively face runout and the deflection angle that rotates front and back gyration platform of asking.So can calculate the deflection angle that obtains gyration platform rotation front and back be according to above-mentioned formula
Face runout is
Effect of the present invention and benefit are: utilize inductance amesdial to carry out face runout and beat measurement, can realize quick reading, precision is better than clock gauge; The installing plate one of the installing plate of inductance amesdial and operation unit has reduced the different measuring error of introducing of measuring basis; Adopt two inductance amesdials to measure, and the measuring position symmetry of inductance amesdial is positioned at gyration platform both sides, can records face runout and beat information simultaneously; The measuring position of inductance amesdial can be changed by the movable information of conversion motion guide rail, thereby can corresponding a plurality of different measuring positions, and need not to reinstall change hardware, and is convenient, flexible; Inductance amesdial is driven by motion guide rail, and the data of inductance amesdial and the positional information of motion guide rail can in time be imported computer control system and carry out computational analysis and record.
Description of drawings
Fig. 1 is that face runout of the present invention and beat measurement mechanism are formed synoptic diagram.
Fig. 2 is a measuring method synoptic diagram of the present invention.
Among the figure: 1X direction motion guide rail; 2Y direction motion guide rail; 3Z direction motion guide rail; 4 installing plates; 5 first inductance amesdials; 6 second inductance amesdials; 7 operation units; 8 motion control cards; 9 data collecting cards; 10 computing machines; 11 gyration platforms.
Embodiment
Be described in detail the specific embodiment of patent of the present invention below in conjunction with technical scheme and accompanying drawing.
Face runout and beat measuring system be by directions X motion guide rail 1, Y direction motion guide rail 2, and Z direction motion guide rail 3, installing plate 4, the first inductance amesdials 5, the second inductance amesdials 6, operation unit 7, motion control card 8, data collecting card 9 and computing machine 10 are formed.Said apparatus is used for measuring face runout and the beat that the gyration platform 11 of automatic assembly system occurs in rotation process.
At first, at gyration platform 11 initial positions, directions X motion guide rail 1, Y direction motion guide rail 2 and Z direction motion guide rail 3 drive the initial position that two inductance amesdials 5,6 that are installed on the installing plate 4 accurately move to the gyration platform, and guarantee that the central point of the line of two inductance amesdials this moment overlaps with the axis of rotation of gyration platform 11.Two inductance amesdials 5,6 contact with the measurement end face of gyration platform 11, the displacement signal that obtains is by data collecting card 9 input computing machines 10, the positional information of existing direction of measurement upper rail stack in displacement signal that two inductance amesdials 5,6 are recorded and the computing machine then, the positional information of acquisition gyration this moment platform 11 end face to be measured measured points.Gyration platform 11 is turned back to the angle that fittage sets; Repeat above-mentioned measuring operation, obtain the positional information of gyration platform 11 measurement end face measured points this moment,, can calculate the location variation Δ that obtains measured point, gyration platform 11 revolution front and back with the initial position message comparison of gyration platform 11
1And Δ
2Because: Δ
1=Ltan θ+δ/cos θ, Δ
2=Ltan θ-δ/cos θ, wherein L is the radial distance of measured point apart from the gyration platform centre of gyration, δ, θ are respectively the face runout amount and the deflection angle value of rotating front and back gyration platform of asking.Can calculate the deflection angle that obtains gyration platform rotation front and back according to above-mentioned formula is
Face runout is
Claims (2)
1. face runout and beat measurement mechanism based on two inductance amesdials is characterized in that:
This face runout and beat measurement mechanism comprise directions X motion guide rail (1), Y direction motion guide rail (2), Z direction motion guide rail (3), installing plate (4), first inductance amesdial (5), second inductance amesdial (6), motion control card (8), data collecting card (9) and computing machine (10) composition; First inductance amesdial (5), second inductance amesdial (6) and operation unit (7) are installed on the installing plate (4), and computing machine (10) comes mobile installing plate (4) by motion control card (8) control directions X motion guide rail (1), Y direction motion guide rail (2) and Z direction motion guide rail (3); Two inductance amesdials (5), (6) detected positional information are by data collecting card (9) input computing machine (10), and the positional information of motion guide rail is by motion control card (8) input computing machine (10).
2. use the method for the described device of claim 1, it is characterized in that following steps,
The center conllinear of the measuring position of (1) two inductance amesdial (5), (6) and gyration platform (11), and about gyration platform (11) central axis symmetry, simultaneously, pick-up unit and operation unit (7) are installed on the same installing plate (4);
(2) at gyration platform (11) initial position, drive motion guide rail (1), (2), (3) earlier, inductance amesdial (5), (6) are moved to the measuring position; The central point of the line of two inductance amesdials (5), (6) overlaps with the axis of rotation of gyration platform (11) at this moment; The surface to be measured of inductance amesdial (5), (6) contact gyration platforms (11), the read signal that obtains is through data collecting card (9) input computing machine (10), after the positional information of motion guide rail superposes on the existing direction of measurement in the signal of inductance amesdial (5), (6) and the computing machine (10), obtain the positional information of gyration platform (11) this moment end face to be measured measured point;
(3) gyration platform (11) is turned back to the angle that fittage sets; Repeat above-mentioned measuring operation, actuation movement guide rail (1), (2), (3), inductance amesdial (5), (6) are moved to the measuring position, obtain the positional information of the end face of gyration platform (11) measurement this moment measured point, with the comparison of gyration platform (11) revolution initial position message, can calculate the location variation Δ that obtains measured point, gyration platform revolution front and back
1And Δ
2, the deflection angle that can calculate gyration platform rotation front and back then is
Face runout is
Wherein L is the radial distance of measured point apart from the gyration platform centre of gyration.
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| CN2010102866227A CN101968340B (en) | 2010-09-19 | 2010-09-19 | End face runout and deflection measuring device and method |
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| CN2010102866227A CN101968340B (en) | 2010-09-19 | 2010-09-19 | End face runout and deflection measuring device and method |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103091041A (en) * | 2011-10-28 | 2013-05-08 | 中国科学院沈阳自动化研究所 | Measuring system and measuring method of static balance based on position-restoring principle |
| CN103743331A (en) * | 2013-12-31 | 2014-04-23 | 哈尔滨工程大学 | Large-amplitude motion follow-up five-degree-of-freedom airworthiness instrument |
| CN104596455A (en) * | 2015-01-23 | 2015-05-06 | 中核(天津)科技发展有限公司 | Detecting device for sleeve |
| CN105466343A (en) * | 2014-09-09 | 2016-04-06 | 上海微电子装备有限公司 | Planar movement measurement device and method thereof |
| CN106895805A (en) * | 2015-12-21 | 2017-06-27 | 天津市天传电气节能产业孵化器有限公司 | A kind of end face run-out detector |
| CN107449606A (en) * | 2017-09-17 | 2017-12-08 | 黄石盛鼎自动化科技有限公司 | A kind of vehicle clutch driven disc assembly beat detection means |
| CN107941144A (en) * | 2017-12-27 | 2018-04-20 | 青岛雷沃工程机械有限公司 | Excavator boom rotating angle measurement apparatus |
| CN116197795A (en) * | 2023-02-10 | 2023-06-02 | 无锡市明鑫数控磨床有限公司 | Vertical grinder based on fixed bearing ring of electromagnetic centerless fixture |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103091041A (en) * | 2011-10-28 | 2013-05-08 | 中国科学院沈阳自动化研究所 | Measuring system and measuring method of static balance based on position-restoring principle |
| CN103091041B (en) * | 2011-10-28 | 2015-05-20 | 中国科学院沈阳自动化研究所 | Measuring system and measuring method of static balance based on position-restoring principle |
| CN103743331A (en) * | 2013-12-31 | 2014-04-23 | 哈尔滨工程大学 | Large-amplitude motion follow-up five-degree-of-freedom airworthiness instrument |
| CN103743331B (en) * | 2013-12-31 | 2016-05-04 | 哈尔滨工程大学 | One is motion trailing type five degree of freedom seaworthiness instrument significantly |
| CN105466343A (en) * | 2014-09-09 | 2016-04-06 | 上海微电子装备有限公司 | Planar movement measurement device and method thereof |
| CN105466343B (en) * | 2014-09-09 | 2019-02-05 | 上海微电子装备（集团）股份有限公司 | Measurement of in-plane motion devices and methods therefor |
| CN104596455A (en) * | 2015-01-23 | 2015-05-06 | 中核(天津)科技发展有限公司 | Detecting device for sleeve |
| CN106895805A (en) * | 2015-12-21 | 2017-06-27 | 天津市天传电气节能产业孵化器有限公司 | A kind of end face run-out detector |
| CN107449606A (en) * | 2017-09-17 | 2017-12-08 | 黄石盛鼎自动化科技有限公司 | A kind of vehicle clutch driven disc assembly beat detection means |
| CN107941144A (en) * | 2017-12-27 | 2018-04-20 | 青岛雷沃工程机械有限公司 | Excavator boom rotating angle measurement apparatus |
| CN116197795A (en) * | 2023-02-10 | 2023-06-02 | 无锡市明鑫数控磨床有限公司 | Vertical grinder based on fixed bearing ring of electromagnetic centerless fixture |
| CN116197795B (en) * | 2023-02-10 | 2023-12-19 | 无锡市明鑫数控磨床有限公司 | Vertical grinder based on fixed bearing ring of electromagnetic centerless fixture |
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