CN101949969A - Sensing head of optical current transformer and sensing method - Google Patents
Sensing head of optical current transformer and sensing method Download PDFInfo
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- CN101949969A CN101949969A CN2010102769369A CN201010276936A CN101949969A CN 101949969 A CN101949969 A CN 101949969A CN 2010102769369 A CN2010102769369 A CN 2010102769369A CN 201010276936 A CN201010276936 A CN 201010276936A CN 101949969 A CN101949969 A CN 101949969A
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Abstract
The invention relates to a sensing head of an optical current transformer, comprising an optical waveguide substrate and a magneto-optical sensing film layer arranged on the optical waveguide substrate, wherein the magneto-optical sensing film layer is formed by compounding a surface plasma excimer metal material with a magnetic material and has the nano structural characteristics of the surface plasma excimer metal material. The invention also provides a current sensing method which ensures that a magneto-optical effect is generated by the magneto-optical sensing film layer under a magnetic field by utilizing the interaction of polarized light with the surface plasma excimer metal material with the nano structural characteristics, thus the characteristic parameter of optical waves emitted onto the magneto-optical sensing film layer through the optical waveguide substrate is modulated by the change of an external current magnetic field, thus the changes of the intensity, the polarization state, the phase or the wavelength before and after optical waves pass through the sensing head can be detected so as to realize the optical sensing of the current.
Description
Technical field
The present invention relates to the optical current mutual inductor field, particularly a kind of optical current sensing head and method for sensing thereof.
Background technology
Along with improving constantly of line voltage grade in the electric system, capacity constantly increases, and current transformer is had higher requirement.Traditional electromagnetic current transducer has exposed serious defective gradually, mainly comprise: (1) when system is short-circuited, when current anomaly increases, mutual inductor is unshakable in one's determination saturated serious, it is limited that it measures dynamic range, and transient performance worsens, make secondary current can not correctly reflect primary current, cause relay protection tripping or malfunction; (2) transient signal and harmonic measure ability, its linearity and dynamic perfromance all can not satisfy the requirement of quick failure response; (3) along with the raising of electric pressure, rely on oil-insulation, gas isolated insulation system to become increasingly complex, cost height, Heavy Weight, volume is big and explosion danger is arranged; (4) can not directly provide digital signal, incompatibility electric-power metering and the demand for development of protecting digital informationization.Given this, the better electronic current mutual inductor of transient performance and insulating property becomes the emphasis that further develops.
At present, electronic current mutual inductor mainly is divided into two big classes: optical current mutual inductor and hollow coil current transformer (claiming Rogowski coil type current transformer again).Comparatively speaking, the latter's degree of being practical is higher at present, but still exists a lot of difficult problems to overcome.The sensing head of hollow coil current transformer often evenly is wound on the ring skeleton by enameled wire, and skeleton adopts nonferromagnetic materials such as plastics or pottery, and its relative permeability is identical with airborne relative permeability.Hollow coil current transformer is subject to outside electromagnetic interference owing to be not with iron core; Its coil winding shape and technological requirement are very high, and the temperature stability of coil rack is not high, especially take place under the situation of distortion at current waveform, and its accuracy of measurement is not high enough; Its output signal is the differential of tested electric current, and the analog-and digital-integrating circuit that utilizes can't be realized having limited its transient performance by accurate integrating function on broadband at present; Because its high-side signal treatment circuit needs power supply reliably and with long-term, stablizing energy supply design and low power dissipation design is its difficult point and key of development at present, has also limited its insulating property simultaneously.Though occurred the printed circuit board air core coil in recent years, improved the precision and the dirigibility of wiring, and the temperature stability of coil rack, as active electronic transformer, need introduce power supply and ground in the high-pressure side, make whole device very complicated.So using the ideal form of mutual inductor in electric system should be the optical current mutual inductor of passive, to reduce insulating requirements greatly.
At present, the kind of optical current mutual inductor has a lot, can be divided into several big classes such as block magneto-optic memory technique type, magnetostriction materials type and full fiber type by the sensitive material type.Block magneto-optic memory technique comprises magneto-optic glass and magneto-optical crystal etc., can be processed into strip or uses around the closed hoop sensing head of current.For the ring-type magneto-optic glass is the optics mutual inductor of sensing head, and tested electric current passes from the hole at main body glass ring center by straight line conductor, and polarized light centers on one week of conductor through the repeatedly total reflection of reflecting surface.The weak point of this sensing head is passing in time, and the character of reflecting surface can change, the precision of measurement and reliability worse and worse, long-time stability are bad, and difficulty of processing is big, install inconvenient.Magneto-optical crystal (is representative with the garnet crystal) also is studied the current measurement field that is applied to, but its Verdet constant temperature influence is bigger, and magnetic history has randomness, make measuring stability and precision not high, and cost is higher.Magnetostriction materials combine with optical fiber can realize current sense, but because the restriction of the magnetic saturation of the load effect of optical fiber and magnetostriction materials coupling, magnetostriction materials itself and magnetic effect and material have all restricted the practical application of such sensing head in the optics mutual inductor to the susceptibility of environmental factors such as temperature and vibration.Full optical fiber sensor head directly is wound on optical fiber exactly and realizes current sense on the current, and light channel structure is simple.Because environmental factors such as temperature, stress can cause the birefringent random variation of inside of optical fibre, have influenced measuring accuracy and stability based on the all-fiber current transformator of Polarization Detection greatly.Though the Sagnac all-fiber current transformator based on interference detection method has obtained enough attention in recent years, the model machine of linked network trial run has also appearred, and this scheme is difficult to distinguish the influence to sensing detection of the optical circulator effect that caused by vibration.
In recent years, along with the development of function film technology, the trend of the also oriented filming development of the sensing head of optical current mutual inductor.U.S. Pat 0103380 discloses a kind of current sensing based on magneto-optic memory technique film and optical waveguide resonant structure.It is the magnetic field sensor of sensitive element with ferromagnetic material or ferrimagnetic material film that U.S. Pat 5736856 discloses a kind of Kerr magnetooptical effect of utilizing.Chinese patent CN101672870 discloses a kind of current sensor, and its sensing unit is the stacked growth structure of protective seam, permanent magnetic thin film and magneto-optic memory technique.Chinese patent CN101672865 discloses a kind of fibre optic current sensor, scribbles the magnetostriction materials rete on the sensor fibre.But because technique scheme still is subjected to the restriction of magnetic material performance, so there are many problems in actual applications.
Along with the in-depth to microworld understanding that develops rapidly of nanometer technology, be that remarkable progress has been obtained in the nanophotonics field of representative with the surface plasmons with people.Surface plasma excimer is meant non-radiative " local " electromagnetic mode that the metal surface free electron intercouples and forms with incident photon, the metal surface free electron is collective's coherent oscillation under the excitation of incident field, luminous energy is accumulated in the spatial dimension of hundreds of nanometer on the interface of metal and medium, produce huge local electromagnetic field enhancement effect, greatly strengthened the interaction between light and the material, can significantly strengthen the magneto-optical property of metallic diaphragm, thereby strengthen its light sensing response ability of changes of magnetic field to external world.
Exciting of surface plasmons can be by total reflection phenomenon, utilize modes such as optical fiber and planar optical waveguide to realize.Except exciting the surface plasmons at metallic film list interface, by appropriate design metal and dielectric multi-layer film structure, the surface plasmons at two interfaces can be realized coupling about metallic diaphragm, be called the long-distance surface plasmon, can be implemented in the longer propagation at interface.Utilize metal micro-nanostructures such as optical grating construction, cycle nano-pore structure and nano metal particles can produce stronger local High-Field and strengthen effect, be called as the resonance of local surface plasma excimer.
Summary of the invention
It is more weak and be subject to environmental factor and disturb to the objective of the invention is to overcome the transducing signal that exists in the present optical current mutual inductor practicability, temperature stability difference and have randomness and problem such as can't effectively compensate proposes a kind of novel optical current sensing head and method for sensing thereof of the nano effect based on surface plasmons.
Optical current mutual inductor sensing head of the present invention comprises the optical waveguide substrate and is positioned at this suprabasil magneto-optic sensor film.The magneto-optic sensor film comprises surface plasmons metal material and magnetic material.Wherein said magneto-optic sensor film has surface plasmons metal material nanostructured feature.
The magneto-optic sensor film can be folded layer by layer by one or several surface plasmons metal material rete and one or several magnetic material film and constitute.Further, the magneto-optic sensor film also can be a kind of sandwich structure, and promptly a surface plasmons metal material rete is clipped between two magnetic material retes; Perhaps, the magneto-optic sensor film is made of a surface plasmons metal material rete and a magnetic material rete, and wherein the magnetic material rete is clipped between optical waveguide substrate and the surface plasmons metal material rete.
Preferably, above-mentioned surface plasmons metal material rete has periodically or the aperiodicity nanoscale features except that thicknesses of layers.
Preferably, above-mentioned surface plasmons metal material rete has nanometer grating or nanohole array periodic structure; Described surface plasmons metal material rete has island nanostructured non-periodic.
The magneto-optic sensor film also can be material dopedly to be gone into the magnetic material rete and constitute by what contain surface plasmons metal material nanostructured.
The magneto-optic sensor film also can be that the nano composite material by surface plasmons metal material and magnetic material is doped into the nonmagnetic substance rete and constitutes.
Described surface plasmons metal material is one or more among Au, Ag, Cu or the Al.
Described optical waveguide substrate utilizes total reflection phenomenon to realize the conduction of light in material, comprises optical fiber and planar optical waveguide.
Context layer in the middle of existing between described optical waveguide substrate and described magneto-optic sensor film, middle context layer can increase the firm degree that is connected between optical waveguide substrate and the described magneto-optic sensor film.
On described magneto-optic sensor film, there is protective seam, to reduce of the influence of external environment factor to the magneto-optic sensor film.
Described surface plasmons material nano structure feature is meant the thickness of surface plasmons metal material nanometer rete, or the particle diameter of surface plasmons metal material nano particle, or in nano composite material the nanostructured form of surface plasmons metal material.
The size of described nanostructured feature preferably in 500nm, more preferably 1-500nm, more preferably 10-100nm.
Described nonmagnetic substance is used for the conduction of light wave and adjusts the shooting conditions of surface plasmons, to realize surveying the abundant interaction of light wave and surface plasmons material.Comprise and be not limited to following material: polymetylmethacrylate, SU-8 photoresist etc.
The optical current method for sensing that the present invention is based on above-mentioned sensing head is:
(1) light wave that sends of light source has p wave polarization component, or makes it have p wave polarization component by the Polarization Control device;
(2) light wave of the described p of having wave polarization component is incident on the suprabasil magneto-optic sensor film of described optical waveguide by the optical waveguide substrate of optical current mutual inductor sensing head of the present invention, interacts with surface plasmons metal material in the described magneto-optic sensor film;
(3) light wave of the described p of having wave polarization component produces in the magnetic field at extraneous electric current by described interaction and produces magneto-optic effect, and intensity, polarization state, phase place or the wavelength of described light wave are changed;
(4) by detecting described light wave, obtain the information of described electric current by intensity, polarization state, phase place or wavelength change before and after the described magneto-optic sensor film.
The invention has the beneficial effects as follows:
(1) sensitive element of sensing head of the present invention is a nano thin-film, and the material range of choice is wide, the preparation simple and flexible, and the sensing head structure is convenient to be connected with existing fiber sensing technology and integrated light guide technology.
(2) method for sensing of the present invention is based on the magneto-optic effect of surface plasmon resonance enhancing, energy carrier and two kinds of functions of signal vehicle of light wave have been utilized simultaneously, overcome in the existing optical current detection scheme transducing signal weak, be subject to disturb and be difficult for problems such as compensation, can be based on multiple light wave characteristic parameter realization sensing detection.
Description of drawings
The invention will be further described below in conjunction with accompanying drawing and embodiment:
Fig. 1 is the structural representation of the embodiment 1 to 10 of sensing head of the present invention, among the figure: 1 optical fiber, 2V type raceway groove, 3 fiber cores, 4 magneto-optic sensor films;
Fig. 2 is the structural representation of the embodiment 11 to 20 of sensing head of the present invention, among the figure: 5 substrate of glass, 6 ducting layers;
Fig. 3 is the structural representation of the embodiment 21 to 30 of sensing head of the present invention, among the figure: 7 flat waveguides;
Fig. 4 is the embodiment of the present invention's employing based on the detection method of Strength Changes;
Fig. 5 adopts the embodiment of the detection method that changes based on polarization state for the present invention;
Fig. 6 is the embodiment of the present invention's employing based on the detection method of phase change;
Fig. 7 is the embodiment of the present invention's employing based on the detection method of wavelength variations.
Embodiment
Optical current mutual inductor sensing head of the present invention comprises the optical waveguide substrate and is positioned at this suprabasil magneto-optic sensor film.The magneto-optic sensor film comprises surface plasmons metal material and magnetic material, and wherein said magneto-optic sensor film has surface plasmons metal material nanostructured feature.
The surface plasmons metal material nanometer rete that constitutes by the surface plasmons metal material and can adopt physics and chemical vapour deposition technique, epitaxial film deposition technology and the preparation of surface adsorption technology etc. by the magnetic material rete that magnetic material constitutes.
The periodicity nanoscale features structure that described surface plasmons metal material rete has except that thicknesses of layers can realize by micro-nano process technologies such as photoetching, electron beam exposure and focused-ion-beam lithographies.
The aperiodicity nanoscale features that described surface plasmons metal material rete has except that thicknesses of layers can realize by methods such as thermal treatment or surface nano-structure absorption.
Surface plasmons metal material nanostructured in described magnetic material and the nonmagnetic substance rete can mode synthetic by original position or that ex situ is synthetic prepare.
Described surface plasmons metal material is used for producing magneto-optic effect with the incident light interaction, can be among Au, Ag, Cu or the Al one or more.
Described nonmagnetic substance is used for the conduction of light wave and adjusts the shooting conditions of surface plasmons, and realizes surveying the abundant interaction of light wave and surface plasmons material, comprises being not limited to following material: PMMA, SU-8 photoresist etc.
Between optical waveguide substrate and magneto-optic sensor film, there is the middle context layer that increases the degree that is connected firmly between the two, can takes any materials according to circumstances, as long as this material is little to the conduction of the light wave between optical waveguide substrate and magneto-optic sensor film influence.
On described magneto-optic sensor film, there is protective seam, to reduce of the influence of external environment factor, can takes any materials according to circumstances, as long as this material does not influence the response of magneto-optic sensor film to external magnetic field to the magneto-optic sensor film.
Fig. 1 is the structural representation of the embodiment 1 to 10 of sensing head of the present invention, and as shown in Figure 1, magneto-optic sensor film 4 is on the fiber core 3 of optical fiber 1, and V-type raceway groove 2 is used for fixing optical fiber 1.
Embodiment 1: the optical waveguide substrate of described sensing head is a silica fibre, at the suprabasil magneto-optic sensor film of the optical waveguide of silica fibre is multilayer film, being the thick Cu film of 10nm in the optical waveguide substrate, is the thick Fe film of 10nm on the Cu film, is the thick Ag film of 50nm on the Fe film.The method for making of optical fiber substrate: as shown in Figure 1, optical fiber 1 is fixed in the V-type raceway groove 2, removes the external packets coating, expose fiber core 3, polish out a plane, preparation magneto-optic sensor film 4 on this plane.The preparation method of magneto-optic sensor film: the optical waveguide substrate utilizes magnetron sputtering method successively to plate thick Fe film of 10nm thick Cu film, 10nm and the thick Ag film of 50nm on its polished surface after cleaning and drying.Utilize the PECVD method on the Ag film, to prepare the SiO2 protective seam of thickness 5nm again.The incident light of certain pattern can interact with the surface plasmons of magneto-optic sensor film through fiber optic conduction and the coupling of magneto-optic sensor film, produces magneto-optic effect in current field.
Embodiment 2: the optical waveguide substrate of described sensing head is a silica fibre, is multilayer film at the suprabasil magneto-optic sensor film of the optical waveguide of silica fibre, is the thick Co film of 15nm in the optical waveguide substrate, is the thick Al film of 500nm on the Co film.The method for making of optical fiber substrate is identical with embodiment 1.The preparation method of magneto-optic sensor film: the optical waveguide substrate utilizes the magnetron sputtering method Co film of plating 15nm on its polished surface earlier, again the Al film of plating 500nm on the Co film after cleaning and drying.The incident light of certain pattern can interact with the surface plasmons of magneto-optic sensor film through fiber optic conduction and the coupling of magneto-optic sensor film, produces magneto-optic effect in current field.
Embodiment 3: the optical waveguide substrate of described sensing head is a silica fibre, at the suprabasil magneto-optic sensor film of the optical waveguide of silica fibre is multilayer film, being the thick Au film of 20nm in the optical waveguide substrate, is the thick Co film of 10nm on the Au film, is the Au film of thickness 30nm on the Co film.The Au film that wherein contacts with air has optical grating construction.The method for making of optical fiber substrate is identical with embodiment 1.The preparation method of magneto-optic sensor film: the optical waveguide substrate is after cleaning and drying, utilize vacuum vapour deposition thick middle context layer Cr film, thickness of priority evaporation 3nm on its polished surface to be the Au film of 20nm, the Co film of 10nm and the Au film of 30nm, utilize photoetching technique on the Au film that contacts with air, to prepare the Au grating, wherein grating parameter is 600nm, the grating fill factor, curve factor is 0.5, and the grating degree of depth is 25nm.The Cr film can be strengthened the firm degree that the magneto-optic sensor film is connected with substrate.The incident light of certain pattern can interact with the surface plasmons of magneto-optic sensor film through fiber optic conduction and the coupling of magneto-optic sensor film, produces magneto-optic effect in current field.
Embodiment 4: the optical waveguide substrate of described sensing head is a silica fibre, at the suprabasil magneto-optic sensor film of the optical waveguide of silica fibre is multilayer film, being the thick Ag film of 200nm in the optical waveguide substrate, is the thick Ni film of 10nm on the Ag film, is the thick Ag film of thickness 50nm on the Ni film.Wherein the Ag of the superiors film has nano-pore array structure, and employing SiO2 layer is that protective seam is to prevent the oxidation of Ag film.The method for making of optical fiber substrate is identical with embodiment 1.The preparation method of magneto-optic sensor film: the optical waveguide substrate is after cleaning and drying, utilize magnetron sputtering method on its polished surface, successively to plate thick Ni film of 200nm thick Ag film, 10nm and the Ag film of 50nm, utilize focused ion beam technology on the Ag film that contacts with air, to prepare nano-pore array structure, its median pore diameter is 60nm, the degree of depth is 10nm, and pitch of holes is 100nm.For preventing the Ag oxidation, utilize the SiO2 protective seam of PECVD technology at nanohole array surface deposition 5nm.The incident light of certain pattern can interact with the surface plasmons of magneto-optic sensor film through fiber optic conduction and the coupling of magneto-optic sensor film, produces magneto-optic effect in current field.
Embodiment 5: the optical waveguide substrate of described sensing head is a silica fibre, at the suprabasil magneto-optic sensor film of the optical waveguide of silica fibre is multilayer film, in the optical waveguide substrate the thick Bi:YIG film of 50nm, the Au film for having island nanostructured non-periodic on the Bi:YIG film.The method for making of optical fiber substrate is identical with embodiment 1.The preparation method of magneto-optic sensor film: the optical waveguide substrate is after cleaning and drying, utilize magnetron sputtering method on its polished surface, to plate the Bi:YIG film of 50nm, with its polished surface silanization, making granularity is that the Au nano particle absorption of 20nm is fixed to and forms the Au nano particle rete of average thickness about 40nm on the Bi:YIG surface, the incident light of certain pattern is through fiber optic conduction and the coupling of magneto-optic sensor film, can interact with the surface plasmons of magneto-optic sensor film, in current field, produce magneto-optic effect.
Embodiment 6: the optical waveguide substrate of described sensing head is a silica fibre, is YIG (yttrium iron garnet) rete that contains the Au nano particle at the suprabasil magneto-optic sensor film of the optical waveguide of silica fibre.The method for making of optical fiber substrate is identical with embodiment 1.The preparation method of magneto-optic sensor film: the optical waveguide substrate through clean and drying after, on its polished surface, utilize radiofrequency magnetron sputtering technology sputter Au and YIG simultaneously, and the ratio of control Au in rete be about 10%, controlling the integral membrane layer thickness is 50nm; Then under N2 with the composite film of preparation 900 ℃ of annealing, making and forming mean grain size in the rete is Au nano particle about 15nm.The incident light of certain pattern can interact with the surface plasmons of magneto-optic sensor film through fiber optic conduction and the coupling of magneto-optic sensor film, produces magneto-optic effect in current field.
Embodiment 7: the optical waveguide substrate of described sensing head is a silica fibre, is the polymetylmethacrylate rete that contains the composite nanoparticle of Fe3O4 and Au at the suprabasil magneto-optic sensor film of the optical waveguide of silica fibre.The method for making of optical fiber substrate is identical with embodiment 1.The preparation method of magneto-optic sensor film: the optical waveguide substrate through clean and drying after, the toluene solution of PMMA that is dissolved with the composite nanoparticle of Fe3O4 and Au is coated on its polished surface, treat acquisition magneto-optic sensor film after the solvent evaporation, thicknesses of layers is controlled at 500nm.Wherein the composite nanoparticle of Fe3O4 and Au is formed by the connection of hydrosulphonyl silane molecule by the Fe3O4 particle of 10nm and the Au nano particle of 30nm.The incident light of certain pattern can interact with the surface plasmons of magneto-optic sensor film through fiber optic conduction and the coupling of magneto-optic sensor film, produces magneto-optic effect in current field.
Embodiment 8: the optical waveguide substrate of described sensing head is a silica fibre, is the PMMA rete that contains the nuclear shell structure nano particle of magnetic oxide-Jin at the suprabasil magneto-optic sensor film of the optical waveguide of silica fibre.The method for making of optical fiber substrate is identical with embodiment 1.The preparation method of magneto-optic sensor film: the optical waveguide substrate is after cleaning and drying, the toluene solution of PMMA that is dissolved with the nuclear shell structure nano particle of magnetic oxide-Jin is coated on its polished surface, treat to obtain the magneto-optic sensor film after the solvent evaporation, thicknesses of layers is controlled at 500nm.Wherein the nuclear shell structure nano particle of magnetic oxide-Jin adopts the method for sodium citrate and the reaction of golden chloric acid, prepares in the grow mode of Au shell of crystal seed magnetic oxide surface heterogeneous medium, and grain diameter is 8.5nm, and the Au shell thickness is 2nm.The incident light of certain pattern can interact with the surface plasmons of magneto-optic sensor film through fiber optic conduction and the coupling of magneto-optic sensor film, produces magneto-optic effect in current field.
Embodiment 9: the optical waveguide substrate of described sensing head is a silica fibre, is the SU-8 photoresist rete that contains the composite nanoparticle of Fe3O4 and Au at the suprabasil magneto-optic sensor film of the optical waveguide of silica fibre.The method for making of optical fiber substrate is identical with embodiment 1.The preparation method of magneto-optic sensor film: the optical waveguide substrate is coated in the SU-8 photoresist that is dissolved with the composite nanoparticle of Fe3O4 and Au on its polished surface after cleaning and drying, treats to obtain the magneto-optic sensor film after the solvent evaporation, and thicknesses of layers is controlled at 500nm.Wherein the composite nanoparticle of Fe3O4 and Au is formed by the connection of hydrosulphonyl silane molecule by the Fe3O4 particle of 10nm and the Au nano particle of 30nm.The incident light of certain pattern can interact with the surface plasmons of magneto-optic sensor film through fiber optic conduction and the coupling of magneto-optic sensor film, produces magneto-optic effect in current field.
Embodiment 10: the optical waveguide substrate of described sensing head is a silica fibre, at the suprabasil magneto-optic sensor film of the optical waveguide of silica fibre is multilayer film, being the thick Co film of 15nm in the optical waveguide substrate, is the thick Cu film of 100nm on the Co film, is the thick Au film of 1nm on the Cu film.The method for making of optical fiber substrate is identical with embodiment 1.The preparation method of magneto-optic sensor film: the optical waveguide substrate utilizes the magnetron sputtering method Co film of plating 15nm on its polished surface earlier, again the Cu film of plating 100nm on the Co film, the Au film of plating 1nm on the Cu film then after cleaning and drying.The incident light of certain pattern can interact with the surface plasmons of magneto-optic sensor film through fiber optic conduction and the coupling of magneto-optic sensor film, produces magneto-optic effect in current field.
Fig. 2 is the structural representation of the embodiment 11 to 20 of sensing head of the present invention, and among the figure: magneto-optic sensor film 4 is at Ag
+-Na
+On the glass planar optical waveguide, comprise substrate of glass 5 and ducting layer 6.
Embodiment 11: as shown in Figure 2, the optical waveguide substrate of described sensing head is the Ag that utilizes ion exchange process to make
+-Na
+The glass planar thin film optical wave-guide, described optical waveguide substrate comprises substrate of glass 5 and the ducting layer on substrate of glass 6.The magneto-optic sensor film is a multilayer film, is the thick Cu film of 10nm in the optical waveguide substrate, is the thick Fe film of 10nm on the Cu film, is the thick Ag film of 50nm on the Fe film; Has the SiO2 protective seam.Its preparation method is identical with embodiment 1.
Embodiment 12: the optical waveguide substrate of described sensing head is identical with embodiment 11, and the magneto-optic sensor film is a multilayer film, is the thick Co film of 15nm in the optical waveguide substrate, is the thick Al film of 500nm on the Co film.Its preparation method is identical with embodiment 2.
Embodiment 13: the optical waveguide substrate of described sensing head is identical with embodiment 11, and the magneto-optic sensor film is a multilayer film, is the thick Au film of 20nm in the optical waveguide substrate, is the thick Co film of 10nm on the Au film, is the Au film of thickness 30nm on the Co film; Context layer Cr film in the middle of between substrate and magneto-optic sensor film, existing; The Au film that contacts with air has optical grating construction; Its preparation method is identical with embodiment 3.
Embodiment 14: the optical waveguide substrate of described sensing head is identical with embodiment 11, and the magneto-optic sensor film is a multilayer film, is the thick Ag film of 200nm in the optical waveguide substrate, is the thick Ni film of 10nm on the Ag film, is the thick Ag film of thickness 50nm on the Ni film.Wherein the Ag of the superiors film has nano-pore array structure, and employing SiO2 layer is that protective seam is to prevent the oxidation of Ag film.Its preparation method is identical with embodiment 4.
Embodiment 15: the optical waveguide substrate of described sensing head is identical with embodiment 11, and the magneto-optic sensor film is a multilayer film, is the thick Bi:YIG film of 50nm in the optical waveguide substrate, the Au film for having island nanostructured non-periodic on the Bi:YIG film.Its preparation method is identical with embodiment 5.
Embodiment 16: the optical waveguide substrate of described sensing head is identical with embodiment 11, and the magneto-optic sensor film is the YIG film layer that contains the Au nano particle.Its preparation method is identical with embodiment 6.
Embodiment 17: the optical waveguide substrate of described sensing head is identical with embodiment 11, and the magneto-optic sensor film is the PMMA rete that contains the composite nanoparticle of Fe3O4 and Au.Its preparation method is identical with embodiment 7.
Embodiment 18: the optical waveguide substrate of described sensing head is identical with embodiment 11, and the magneto-optic sensor film is the PMMA rete that contains the nuclear shell structure nano particle of magnetic oxide-Jin.Its preparation method is identical with embodiment 8.
Embodiment 19: the optical waveguide substrate of described sensing head is identical with embodiment 11, and the magneto-optic sensor film is the SU-8 photoresist rete that contains the composite nanoparticle of Fe3O4 and Au.Its preparation method is identical with embodiment 9.
Embodiment 20: the optical waveguide substrate of described sensing head is identical with embodiment 11, and the magneto-optic sensor film is a multilayer film, is the thick Co film of 15nm in the optical waveguide substrate, is the thick Cu film of 100nm on the Co film, is the thick Au film of 1nm on the Cu film.Its preparation method is identical with embodiment 10.
Fig. 3 is the structural representation of the embodiment 21 to 30 of sensing head of the present invention, and among the figure: magneto-optic sensor film 4 is at the K that utilizes photoetching technique and ion exchange process to make
+-Na
+On the glass ribbon lightguide, comprise substrate of glass 5 and flat waveguide 7.
Embodiment 21: as shown in Figure 3, the optical waveguide substrate of described sensing head is to utilize photoetching technique to produce the band onto surface pattern earlier, the K that utilizes ion exchange process to make again
+-Na
+The glass ribbon lightguide comprises substrate of glass 5 and is embedded in wherein flat waveguide 7 with strips.The magneto-optic sensor film is a multilayer film, is the thick Cu film of 10nm in the optical waveguide substrate, is the thick Fe film of 10nm on the Cu film, is the thick Ag film of 50nm on the Fe film; Has the SiO2 protective seam.Its preparation method is identical with embodiment 1.
Embodiment 22: the optical waveguide substrate of described sensing head is identical with embodiment 21, and the magneto-optic sensor film is a multilayer film, is the thick Co film of 15nm in the optical waveguide substrate, is the thick Al film of 500nm on the Co film.Its preparation method is identical with embodiment 2.
Embodiment 23: the optical waveguide substrate of described sensing head is identical with embodiment 21, and the magneto-optic sensor film is a multilayer film, is the thick Au film of 20nm in the optical waveguide substrate, is the thick Co film of 10nm on the Au film, is the Au film of thickness 30nm on the Co film; Context layer Cr film in the middle of between substrate and magneto-optic sensor film, existing; The Au film that contacts with air has optical grating construction; Its preparation method is identical with embodiment 3.
Embodiment 24: the optical waveguide substrate of described sensing head is identical with embodiment 21, and the magneto-optic sensor film is a multilayer film, is the thick Ag film of 200nm in the optical waveguide substrate, is the thick Ni film of 10nm on the Ag film, is the thick Ag film of thickness 50nm on the Ni film.Wherein the Ag of the superiors film has nano-pore array structure, and employing SiO2 layer is that protective seam is to prevent the oxidation of Ag film.Its preparation method is identical with embodiment 4.
Embodiment 25: the optical waveguide substrate of described sensing head is identical with embodiment 21, and the magneto-optic sensor film is a multilayer film, is the thick Bi:YIG film of 50nm in the optical waveguide substrate, the Au film for having island nanostructured non-periodic on the Bi:YIG film.Its preparation method is identical with embodiment 5.
Embodiment 26: the optical waveguide substrate of described sensing head is identical with embodiment 21, and the magneto-optic sensor film is the YIG film layer that contains the Au nano particle.Its preparation method is identical with embodiment 6.
Embodiment 27: the optical waveguide substrate of described sensing head is identical with embodiment 21, and the magneto-optic sensor film is the PMMA rete that contains the composite nanoparticle of Fe3O4 and Au.Its preparation method is identical with embodiment 7.
Embodiment 28: the optical waveguide substrate of described sensing head is identical with embodiment 21, and the magneto-optic sensor film is the PMMA rete that contains the nuclear shell structure nano particle of magnetic oxide-Jin.Its preparation method is identical with embodiment 8.
Embodiment 29: the optical waveguide substrate of described sensing head is identical with embodiment 21, and the magneto-optic sensor film is the SU-8 photoresist rete that contains the composite nanoparticle of Fe3O4 and Au.Its preparation method is identical with embodiment 9.
Embodiment 30: the optical waveguide substrate of described sensing head is identical with embodiment 21, and the magneto-optic sensor film is a multilayer film, is the thick Co film of 15nm in the optical waveguide substrate, is the thick Cu film of 100nm on the Co film, is the thick Au film of 1nm on the Cu film.Its preparation method is identical with embodiment 10.
Below be the embodiment of method for sensing of the present invention.In embodiment 31～34, sensing head can adopt any one in the previous embodiment.
Embodiment 31: Figure 4 shows that an embodiment of electric current sensing method of the present invention, present embodiment adopts the detection method based on Strength Changes.He-Ne laser instrument 8 sends monochromatic light and is transformed to the p polarized light through polaroid 9, light wave is coupled in the single-mode fiber 11 by lens 10, import to sensing head 12 of the present invention by optical fiber again, sensing head of the present invention places energising current 13 1 sides, the variation of electric current causes the variation of conductor surrounding magnetic field, changes of magnetic field changes catoptrical light intensity by the magneto-optic effect of the magneto-optic sensor film of described sensing head, emergent light is sent into Si photoelectric cell 14, through comprising preposition amplification filtering circuit, the signal processing unit 15 of A/D conversion and data acquisition process software obtains tested current information.
Embodiment 32: Figure 5 shows that an embodiment of electric current sensing method of the present invention, present embodiment adopts the detection method that changes based on polarization state.Laser diode 16 sends monochromatic light and is transformed to the p polarized light through Glan prism 17, and light wave is coupled in the polarization maintaining optical fibre 18 by lens 10, imports to sensing head 12 of the present invention again.Sensing head of the present invention places energising current 13 1 sides, and the variation of electric current causes the variation of conductor surrounding magnetic field, and changes of magnetic field makes the rotation of polarization polarization surface by the magneto-optic effect of the magneto-optic sensor film of described sensing head.The emergent light of described sensing head is coupled to Wollaston prism 19 by lens 10, prism will be imported light and be divided into the orthogonal two bundle polarized lights of direction of vibration, and deliver to Si photoelectric cell 14 respectively, the signal processing unit 15 through comprising preposition amplification filtering circuit, A/D conversion and data acquisition process software obtains tested current information.
Embodiment 33: Figure 6 shows that an embodiment of electric current sensing method of the present invention, adopt based on Mach-Zehnder type interference detection method.Distributed Feedback Laser 20 sends coherent light, through optoisolator 21, becomes the p polarized light partially by 22 of the optical fiber polarizers, be coupled into polarization maintaining optical fibre 18 again after, send into the polarization maintaining optical fibre 18 of two same length respectively by 3dB polarization-maintaining fiber coupler 23.Wherein an optical fiber is feeler arm, and string has sensing head 12 of the present invention, places energising current 13 1 sides; Another optical fiber is reference arm, the column PZT24 and the optical fiber polarization controller 25 that comprise wound fiber, the former is used to produce phase delay and further obtains the quadrature phase bias condition, to offset the phase fluctuation that produces because of variation of temperature, the latter controls the reference polarization state of light of propagating in the reference arm, and reference light and signal polarization state of light are mated mutually.Sensing head 12 of the present invention places energising current 13 1 sides, and the variation of electric current causes the variation of conductor surrounding magnetic field, and changes of magnetic field makes the phase change of polarized light by the magneto-optic effect of the magneto-optic sensor film of described sensing head.Enter three-dB coupler 23 from the two-beam of feeler arm and reference arm output, stack produces interference effect, and deliver to CCD photodetector 24 respectively, the signal processing unit 15 through comprising preposition amplification filtering circuit, A/D conversion and data acquisition process software obtains tested current information.
Embodiment 34: Figure 7 shows that an embodiment of electric current sensing method of the present invention, adopt the detection method based on wavelength variations.Halogen tungsten lamp 25 output wide range light are the p polarized light by 9 of polaroids partially, be coupled into the multimode optical fiber 26 that core diameter is 600 μ m through lens 10, import to sensing head 12 of the present invention again, sensing head of the present invention places energising current 13 1 sides, the variation of electric current causes the variation of conductor surrounding magnetic field, and changes of magnetic field moves the spectral absorption peak position by the magneto-optic effect of the magneto-optic sensor film of described sensing head.The emergent light of described sensing head is coupled to fiber spectrometer 27 and obtains spectral signal, and the signal processing unit 15 through comprising preposition amplification filtering circuit, A/D conversion and data acquisition process software obtains tested current information again.
Claims (18)
1. the sensing head of an optical current mutual inductor is characterized in that, described sensing head comprises the optical waveguide substrate and is positioned at the suprabasil magneto-optic sensor film of described optical waveguide; Described magneto-optic sensor film comprises surface plasmons metal material and magnetic material; Described magneto-optic sensor film has surface plasmons metal material nanostructured feature.
2. the sensing head of optical current mutual inductor according to claim 1 is characterized in that, described magneto-optic sensor film is by one or several surface plasmons metal material rete and one or several magnetic material film is folded layer by layer constitutes.
3. the sensing head of optical current mutual inductor according to claim 2 is characterized in that, described magneto-optic sensor film is a kind of sandwich structure, and promptly a surface plasmons metal material rete is clipped between two magnetic material retes.
4. the sensing head of optical current mutual inductor according to claim 2 is characterized in that, a magnetic material rete of described magneto-optic sensor film is clipped between described optical waveguide substrate and the described surface plasmons metal material rete.
5. according to the sensing head of each described optical current mutual inductor in the claim 2 to 4, it is characterized in that described surface plasmons metal material rete has periodically or the aperiodicity nanostructured except that thicknesses of layers.
6. the sensing head of optical current mutual inductor according to claim 5 is characterized in that, described periodic nano-structure is nanometer grating structure or nano-pore array structure; Described aperiodicity nanostructured is surperficial island nanostructured non-periodic.
7. the sensing head of optical current mutual inductor according to claim 1 is characterized in that, described magneto-optic sensor film is material dopedly gone into the magnetic material rete and constituted by what contain surface plasmons metal material nanostructured.
8. the sensing head of optical current mutual inductor according to claim 1 is characterized in that, described magneto-optic sensor film is doped into the nonmagnetic substance rete by the nano composite material of surface plasmons metal material and magnetic material and constitutes.
9. according to the sensing head of each described optical current mutual inductor in claim 1 to 5 or 7 to 8, it is characterized in that described surface plasmons material nano structure feature is meant the thickness of surface plasmons metal material nanometer rete, or the particle diameter of surface plasmons metal material nano particle, or in nano composite material the nanostructured form of surface plasmons metal material.
10. the sensing head of optical current mutual inductor according to claim 1 is characterized in that, described surface plasmons metal material is one or more among Au, Ag, Cu or the Al.
11. the sensing head of optical current mutual inductor according to claim 1 is characterized in that, described optical waveguide substrate utilizes total reflection phenomenon to realize the conduction of light in material.
12. the sensing head of optical current mutual inductor according to claim 11 is characterized in that, described optical waveguide substrate comprises optical fiber or planar optical waveguide.
13. the sensing head of optical current mutual inductor according to claim 1 is characterized in that, context layer in the middle of existing between described optical waveguide substrate and described magneto-optic sensor film.
14. the sensing head of optical current mutual inductor according to claim 1 is characterized in that, has protective seam on described magneto-optic sensor film.
15. the sensing head of optical current mutual inductor according to claim 1, the size that it is characterized in that described nanostructured feature is in 500nm.
16. the sensing head of optical current mutual inductor according to claim 1, the size that it is characterized in that described nanostructured feature is at 1-500nm.
17. the sensing head of optical current mutual inductor according to claim 1, the size that it is characterized in that described nanostructured feature is at 10-100nm.
18. a sensing head that utilizes the described optical current mutual inductor of claim 1 carries out the method for current sense, it is characterized in that:
(1) light wave that sends of light source has p wave polarization component, or makes it have p wave polarization component by the Polarization Control device;
(2) light wave of the described p of having wave polarization component is incident on the suprabasil magneto-optic sensor film of described optical waveguide by the optical waveguide substrate of described optical current mutual inductor sensing head, interacts with surface plasmons metal material in the described magneto-optic sensor film;
(3) light wave of the described p of having wave polarization component produces in the magnetic field at extraneous electric current by described interaction and produces magneto-optic effect, and intensity, polarization state, phase place or the wavelength of described light wave are changed;
(4) by detecting described light wave, obtain the information of described electric current by intensity, polarization state, phase place or wavelength change before and after the described magneto-optic sensor film.
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| CN101975880A (en) * | 2010-09-08 | 2011-02-16 | 中国科学院电工研究所 | Optical current transformer sensing head and sensing method |
| US20160322149A1 (en) * | 2013-06-28 | 2016-11-03 | Taiyuan Power Supply Company Of State Grid Shanxi Electric Power Company | Method for Controlling Load of Transformer Based on Hot Spot Temperature Measured by Using Fiber Grating Technology |
| CN115220153A (en) * | 2021-03-30 | 2022-10-21 | Tdk株式会社 | Optical device and optical system |
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| CN101975880B (en) * | 2010-09-08 | 2013-08-07 | 中国科学院电工研究所 | Optical current transformer sensing head and sensing method |
| US20160322149A1 (en) * | 2013-06-28 | 2016-11-03 | Taiyuan Power Supply Company Of State Grid Shanxi Electric Power Company | Method for Controlling Load of Transformer Based on Hot Spot Temperature Measured by Using Fiber Grating Technology |
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| CN115220153B (en) * | 2021-03-30 | 2024-03-19 | Tdk株式会社 | Optical device and optical system |
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