CN101930088A - Surface-vitrified beryllium metal flat reflector and special glass - Google Patents

Surface-vitrified beryllium metal flat reflector and special glass Download PDF

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CN101930088A
CN101930088A CN 201010244865 CN201010244865A CN101930088A CN 101930088 A CN101930088 A CN 101930088A CN 201010244865 CN201010244865 CN 201010244865 CN 201010244865 A CN201010244865 A CN 201010244865A CN 101930088 A CN101930088 A CN 101930088A
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beryllium
special glass
beryllium metal
metal flat
glass
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CN101930088B (en
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高祀建
关铭
朱永昌
滕伟峰
王晓霞
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China Building Materials Academy CBMA
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China Building Materials Academy CBMA
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Abstract

The invention discloses a light-weight surface-vitrified beryllium metal flat reflector which comprises a beryllium metal substrate, a special glass layer and a reflecting film layer, wherein the beryllium metal substrate is of a flat plate structure and is subject to a lightweight design or is of a honeycomb structure the back side of which is provided with lightening holes, and such structure enables the reflector to have high enough strength and rigidity and simultaneously reduces the mass of the reflector; the special glass layer is special glass with a thickness of 0.2-3.0mm, wherein the special glass comprises 10-25wt% of SiO2, 10-25wt% of B2O3, 40-60wt% of PbO4, 8-15wt% of R2O, 0.2-1.0wt% of As2O3 and 0.3-2.0wt% of CeO2, R is K and Na, the expansion factor is 110*10<-7>/DEG C and is highly matched with the beryllium metal, and the softening point is 450-580 DEG C; and the reflecting film layer is a high-reflectance reflecting film coated on the glass layer. The invention has the advantages of simple reflector structure, light weight, good optical processability and stable surface shape quality, and is applicable to optical systems of multiple satellite aerospace remote sensors.

Description

A kind of surface vitrification beryllium metal flat reflector and a kind of special glass
Technical field
The present invention relates to optical component, be specifically related to a kind of aperture lightweight surface vitrification beryllium metal flat reflector that is used for the Space Remote Sensors optical system, the invention still further relates to the special glass prescription that uses in this catoptron.
Background technology
In spacer remote sensing device optical system, scanister is the important component part of remote sensor, and wherein scanning reflection mirror is its critical component.Continuous development along with space application technologies such as spacer remote sensings, optical system requirements at the higher level have been proposed, require catoptron in the electromagnetic wave band scope of broad, to have favorable imaging quality and resolution height, except satisfying the optics requirement, also require to increase bore, alleviate mirror quality simultaneously and improve imaging stability.Current relatively effective measures are to adopt the heavy caliber scanning reflection mirror.
Be used for the space optical remote sensor catoptron at present and mainly contain glass reflector, metallic mirror and surface vitrification titanium catoptron.Wherein glass reflector, bonds on the metab with epoxy resin as catoptron with optical glass, causes device volume weight and inertia all bigger, debugs difficulty, is not suitable for the heavy caliber scanning reflection mirror in the spacer remote sensing device optical system; Metallic mirror is substrate with the beryllium metal, at beryllium surface chemical plating nickel alloy material, and last plating reflectance coating, because the nickel layer thickness of chemical nickel plating is very thin, optics processing is difficulty comparatively, face shape quality instability; Surface vitrification titanium catoptron, referring to the previous patent ZL200610114376.0 of applicant, this catoptron fuses a special glass on the titanium base, the special glass layer is carried out optics processing, and plating reflectance coating, this catoptron preparation is simple, debug conveniently, but because the internal stress of titanium alloy material is difficult to eliminate fully, make catoptron easily produce distortion, thereby influenced optical system stability, so such catoptron generally is used as the catoptron of the Space Remote Sensors optical system of size less (diameter or long axis length 200mm are following).
Summary of the invention
The objective of the invention is above problem, a kind of surface vitrification beryllium metal flat reflector is provided, be used for the large caliber reflecting mirror of spacer remote sensing device optical system at the prior art existence.
Surface vitrification beryllium metal flat reflector of the present invention is made of beryllium metallic substrates, special glass layer and reflective coating, and wherein said special glass expansion coefficient is 110 * 10 -7/ ℃, softening point is 450-580 ℃, its composition is SiO 210-25wt%, B 2O 310-25wt%, PbO 40-60wt%, R 2O 8-15wt%, As 2O 30.2-1.0wt%, CeO 20.3-2.0wt%, R are K and Na.The circular reflector diameter dimension is greater than 200mm, and the elliptic reflector minor axis dimension is greater than 200mm; In the prioritization scheme, elliptic reflector is of a size of major axis 380~650mm, minor axis 240~550mm.
Described special glass layer thickness is 0.2-3.0mm.It is 0.4-40 μ m that the beryllium metal substrate surface is handled rear surface roughness Ra in processing.
Another purpose of the present invention provides a kind of special glass that can be used in the above-mentioned catoptron.
Special glass of the present invention, its expansion coefficient are 110 * 10 -7/ ℃, softening point is 450-580 ℃; Its composition is SiO 210-25wt%, B 2O 310-25wt%, PbO 40-60wt%, R 2O 8-15wt%, As 2O 30.2-1.0wt%, CeO 20.3-2.0wt%, R are K and Na.
The present invention goes back the job operation that a purpose is to provide a kind of aperture lightweight surface vitrification beryllium metal flat reflector, adopts following steps:
1) the glass composition by claim 8 takes by weighing glass batch introducing thing, uses the melt cooling method, founds 10-12 hour at 1050-1450 ℃, and the casting melt temperature is 850-1050 ℃, and annealing temperature is a 400-500 ℃ of preparation special glass plate;
2), and roughness processing is carried out on its surface handled with machining process processing beryllium metallic substrates;
3) special glass plate and the applying of beryllium metallic substrates are together put into electric furnace, programming rate with 2 ℃/min rises to 250 ℃, and be incubated 4 hours, programming rate with 1.5 ℃/min rises to 550 ℃ again, and be incubated 6 hours, and the speed with 10 ℃/h is cooled to 390 ℃ again, and being incubated after 5 hours again, the speed with 10 ℃/h is cooled to 200 ℃, the blowing out cooling obtains glassy layer and the close-connected sintered body of beryllium metallic substrates;
4) glassy layer is milled to needs thickness and precise polished, silver-plated film in vacuum coating equipment at last, and add the monox protective seam and finally make catoptron.
Adopt above scheme, the invention has the advantages that catoptron is in light weight, the rigidity height, the special glass of the present invention preparation and beryllium metallicity coupling, reflecting mirror surface shape steady quality, simple in structure, debug the reliability height, possesses glass material good optical performance, it is little to possess the beryllium density metal simultaneously, the advantage that rigidity is high.Be suitable for the large caliber reflecting mirror of Space Optical System.
Description of drawings
Fig. 1 is the structural representation of lightweight surfaces vitrifacation titanium catoptron.
Embodiment:
The invention provides a kind of surface vitrification beryllium metal flat reflector, referring to shown in Figure 1, this catoptron is made of beryllium metallic substrates 1, special glass layer 2 and reflective coating 3.Described beryllium metallic substrates is plate-like structure and has horizontal lightening hole 11 (as shown in Figure 1), or for the back side has the cellular structure of lightening hole, this structure makes catoptron have sufficiently high strength and stiffness, has alleviated the quality of catoptron simultaneously; Described special glass layer 2 is that thickness is the special glass of 0.2-3.0mm, its expansion coefficient and beryllium metallic substrates 1 matched.Described reflective coating 3 is gold, silver, aluminium or other material reflectance coating of plating high reflectance on special glass layer 2.
In the surface vitrification beryllium metal flat reflector preparation process of the present invention, adopt machining process beryllium metallic substrates 1 surface to be processed processing, surfaceness 0.4-40 μ m.Glassy layer 2 is a special glass, its glass composition SiO 210-25wt%, B 2O 310-25wt%, PbO 40-60wt%, R 2O 8-15wt%, As 2O 30.2-1.0wt%, CeO 20.3-2.0wt%, R are K and Na (not having the portfolio ratio restriction).Its expansion coefficient is 110 * 10 -7/ ℃, with beryllium expansion of metal coefficient matched, softening point is 450-580 ℃.
Concrete grammar is: adopt the melt cooling method to prepare special glass, glass batch is introduced thing and be can be oxide, carbonate or nitrate, for example: K in the glass composition 2O and Na 2O adopts sal tartari, potassium nitrate, sodium carbonate and sodium nitrate to introduce, and the ratio of carbonate and nitrate is 3: 1, and all the other compositions are introduced with oxide.Batch fully stirs through batch mixer, mixes, and puts into silica crucible or platinum crucible, founds 10-12 hour at 1050-1450 ℃, and adopts continuous stirring to guarantee that glass has good homogeneous, and melt temperature is about 850-1050 ℃ during casting.Annealing temperature is about 400-500 ℃.The machine-shaping of beryllium metallic substrates is also processed processing, surfaceness 0.4-40 μ m on the surface.Special glass and beryllium metallic substrates are carried out fitting after the surface treatment and fusing through high-temperature technology.Glass and beryllium metallic substrates closely link into an integrated entity behind the sintering.Again the special glass layer is ground to 0.2-3.0mm and polishing, in vacuum coating equipment, plates highly reflecting films at last, can plate metal film or high reflecting medium films such as gold, silver, aluminium.The circular reflector diameter dimension of gained is greater than 200mm, and the elliptic reflector minor axis dimension is greater than 200mm; In the prioritization scheme, elliptic reflector is of a size of major axis 380~650mm, minor axis 240~550mm.
Embodiment 1:
The special glass composition is SiO 224.5wt%, B 2O 320wt%, PbO 40.5wt%, K 2O 8.4wt%, Na 2O 6.6wt%, As 2O 31.0wt%, CeO 20.3wt%, wherein, PbO Pb 3O 4Introduce Na 2O Na 2CO 3And NaNO 3Introduce (weight ratio of carbonate and nitrate is 3: 1) K 2O K 2CO 3And KNO 3Introduce (weight ratio of carbonate and nitrate is 3: 1).All the other compositions are introduced with oxide.Introduce thing and all adopt analysis pure chemistry reagent.
Raw material is all put into batch mixer to be mixed 30 minutes, be added to temperature and be in 1050 ℃ the platinum crucible, melting time is 10 hours, and continuous stirring guarantees good homogeneous, melt temperature is about 850 ℃ during casting, annealing temperature is 420 ℃, can obtain chunk glass, makes the 2mm glass plate through grinding, polishing again.Adopt industry standard that this example glass plate is detected, the expansion coefficient of this glass is 110 * 10 -7/ ℃, softening point is 500 ℃.
The machine-shaping of beryllium metallic substrates, the method that adopts machining is with the optical surface surface treatment, and making surfaceness is 0.4 μ m.
Glass plate and beryllium metal are cleaned residual greasy dirt when removing surperficial machining with alcohol and acetone.The beryllium metallic substrates placed 110 ℃ baking oven inner drying 5 hours.Put into atmosphere furnace at 200 ℃ of following aerating oxygens, carry out surface activation process, 5 hours time, cooling naturally, glass plate placed to the room temperature and together put into electric furnace on the beryllium metallic substrates, programming rate with 2 ℃/min rises to 250 ℃, and is incubated 4 hours, and the programming rate with 1.5 ℃/min rises to 550 ℃ again, and be incubated 6 hours, speed with 10 ℃/h is cooled to 390 ℃ again, is incubated after 5 hours again that the speed with 10 ℃/h is cooled to 200 ℃, the blowing out cooling.Take out sample when temperature is reduced to room temperature, the mirror glass layer behind the sintering is connected closely with the beryllium metal level.
Glassy layer is milled to 0.2mm and precise polished, and face shape reaches requirement.Gold-plated film in vacuum coating equipment at last, and add the monox protective seam, finally make catoptron.
The detection of catoptron:
1, size: adopt three coordinate measuring machine that catoptron is detected.Testing result: catoptron basic size: transverse 600mm, minor axis 500mm, gross thickness 45mm.Show that mirror size of the present invention is bigger, applicable to all kinds of scanning pendulum lens in the space flight optical remote sensor.
2, reflectivity: adopt spectrophotometer that the reflectivity of catoptron is detected by standard JB/T8226.3-1999.Testing result: R 2-10 μ m〉=97%.Show that the reflectivity of catoptron of the present invention reaches the standard figures of optical glass catoptron.
3, optical property: adopt laser interferometer that reflecting mirror surface shape is detected by standard GB2831-81.Testing result: PV≤0.5 λ, and Rms≤0.1 λ (λ=632.8nm).Show that the optical property of catoptron of the present invention reaches the standard figures of optical glass catoptron.This index shows the face shape flatness of catoptron.
4, optical stability: catoptron is carried out the warm circulation environmental experiment of height, and reflectivity and optical property are detected again.Testing result: reflectance varies rate≤1%, PV value rate of change≤2%.Show glass material and beryllium metal material excellent bonding performance among the present invention, catoptron is difficult for producing distortion, thereby has optical system stability preferably.
Embodiment 2:
The special glass composition is SiO 222.3wt%, B 2O 310wt%, PbO 59.8wt%, K 2O 3.6wt%, Na 2O 4.3wt%, As 2O 30.2wt%, CeO 22.0wt%, wherein, PbO Pb 3O 4Introduce Na 2O Na 2CO 3And NaNO 3Introduce K 2O K 2CO 3And KNO 3Introduce, the ratio of carbonate and nitrate is 3: 1.All the other compositions are introduced with oxide.Introduce thing and all adopt analysis pure chemistry reagent.
Raw material is all put into batch mixer to be mixed 30 minutes, be added to temperature and be in 1450 ℃ the platinum crucible, melting time is 12 hours, and continuous stirring guarantees good homogeneous, melt temperature is about 1050 ℃ during casting, annealing temperature is 500 ℃, can obtain chunk glass, makes the 2mm glass plate through grinding, polishing again.The expansion coefficient that records this glass is 110 * 10 -7/ ℃, softening point is 580 ℃.
The machine-shaping of beryllium metallic substrates, the method that adopts machining is with the optical surface surface treatment, and making surfaceness is 40 μ m.
Glass plate and beryllium metal are cleaned residual greasy dirt when removing surperficial machining with alcohol and acetone.The beryllium metallic substrates placed 110 ℃ baking oven inner drying 5 hours, and carry out surface activation process, naturally cooling is together put into electric furnace with beryllium metallic substrates and the glass plate on it to the room temperature, rises to 250 ℃ with the programming rate of 2 ℃/min, and be incubated 4 hours, programming rate with 1.5 ℃/min rises to 580 ℃ again, and is incubated 12 hours, and the speed with 10 ℃/h is cooled to 390 ℃ again, be incubated after 5 hours again that the speed with 10 ℃/h is cooled to 200 ℃, the blowing out cooling.Take out sample when temperature is reduced to room temperature, the mirror glass layer behind the sintering is connected closely with the beryllium metal level.
Glassy layer is milled to 0.2mm and precise polished, and face shape reaches requirement.Silver-plated film in vacuum coating equipment at last, and add the monox protective seam, finally make catoptron.
Adopt the method identical with embodiment 1 that catoptron is detected, result and embodiment 1 be the same all to be reached and is above standard:
1, size: transverse 380mm, minor axis 240mm, gross thickness 30mm.
2, reflectivity: R 3-12 μ m〉=97%.
3, optical property: PV≤0.33 λ, and Rms≤0.03 λ (λ=632.8nm).
4, optical stability: reflectance varies rate≤1%, PV value rate of change≤2%.
Embodiment 3:
The special glass composition is SiO 210wt%, B 2O 324.6wt%, PbO 50.4wt%, K 2O 8wt%, Na 2O 7wt%, As 2O 30.5wt%, CeO 20.7wt%, wherein, PbO Pb 3O 4Introduce Na 2O Na 2CO 3And NaNO 3Introduce K 2O K 2CO 3And KNO 3Introduce, the ratio of carbonate and nitrate is 3: 1.All the other compositions are introduced with oxide.Introduce thing and all adopt analysis pure chemistry reagent.
Raw material is all put into batch mixer to be mixed 30 minutes, be added to temperature and be in 1150 ℃ the platinum crucible, melting time is 12 hours, and continuous stirring guarantees good homogeneous, melt temperature is about 850 ℃ during casting, annealing temperature is 400 ℃, can obtain chunk glass, makes the 4mm glass plate through grinding, polishing again.The expansion coefficient that records this glass is 110 * 10 -7/ ℃, softening point is 450 ℃.
The machine-shaping of beryllium metallic substrates, the method that adopts machining is with the optical surface surface treatment, and making surfaceness is 16 μ m.
Glass plate and beryllium metal are cleaned residual greasy dirt when removing surperficial machining with alcohol and acetone.The beryllium metallic substrates placed 110 ℃ baking oven inner drying 5 hours, and carry out surface activation process, naturally cooling is together put into electric furnace with beryllium metallic substrates and the glass plate on it to the room temperature, rises to 250 ℃ with the programming rate of 2 ℃/min, and be incubated 4 hours, programming rate with 1.5 ℃/min rises to 500 ℃ again, and is incubated 6 hours, and the speed with 10 ℃/h is cooled to 390 ℃ again, be incubated after 5 hours again that the speed with 10 ℃/h is cooled to 200 ℃, the blowing out cooling.Take out sample when temperature is reduced to room temperature, the mirror glass layer behind the sintering is connected closely with the beryllium metal level.
Glassy layer is milled to 3.0mm and precise polished, and face shape reaches requirement.Aluminizer in vacuum coating equipment is finally made catoptron at last.
Adopt the method identical with embodiment 1 that catoptron is detected, result and embodiment 1 be the same all to be reached and is above standard:
1, size: transverse 400mm, minor axis 280mm, gross thickness 30mm.
2, reflectivity: R 0.4-0.8 μ m〉=93%.
3, optical property: PV≤0.3 λ, and Rms≤0.025 λ (λ=632.8nm).
4, optical stability: reflectance varies rate≤1%, PV value rate of change≤2%.
Embodiment 4:
The special glass composition is SiO 225wt%, B 2O 325wt%, PbO 40wt%, K 2O5wt%, Na 2O5wt%, As 2O 30.4wt%, CeO 21.6wt%, wherein, PbO Pb 3O 4Introduce Na 2O Na 2CO 3And NaNO 3Introduce K 2O K 2CO 3And KNO 3Introduce, the ratio of carbonate and nitrate is 3: 1.All the other compositions are introduced with oxide.Introduce thing and all adopt analysis pure chemistry reagent.
Raw material is all put into batch mixer to be mixed 30 minutes, be added to temperature and be in 1400 ℃ the platinum crucible, melting time is 11 hours, and continuous stirring guarantees good homogeneous, melt temperature is about 950 ℃ during casting, annealing temperature is 450 ℃, can obtain chunk glass, makes the 4mm glass plate through grinding, polishing again.The expansion coefficient that records this glass is 110 * 10 -7/ ℃, softening point is 550 ℃.
The machine-shaping of beryllium metallic substrates, the method that adopts machining is with the optical surface surface treatment, and making surfaceness is 4 μ m.
Glass plate and beryllium metal are cleaned residual greasy dirt when removing surperficial machining with alcohol and acetone.The beryllium metallic substrates placed 110 ℃ baking oven inner drying 5 hours, and carry out surface activation process, naturally cooling is together put into electric furnace with beryllium metallic substrates and the glass plate on it to the room temperature, rises to 250 ℃ with the programming rate of 2 ℃/min, and be incubated 4 hours, programming rate with 1.5 ℃/min rises to 580 ℃ again, and is incubated 10 hours, and the speed with 10 ℃/h is cooled to 390 ℃ again, be incubated after 5 hours again that the speed with 10 ℃/h is cooled to 200 ℃, the blowing out cooling.Take out sample when temperature is reduced to room temperature, the mirror glass layer behind the sintering is connected closely with the beryllium metal level.
Glassy layer is milled to 3.0mm and precise polished, and face shape reaches requirement.Silver-plated film in vacuum coating equipment at last, and add the monox protective seam, finally make catoptron.
Adopt the method identical with embodiment 1 that catoptron is detected, result and embodiment 1 be the same all to be reached and is above standard:
1, size: transverse 650mm, minor axis 550mm, gross thickness 55mm.
2, reflectivity: R 2-12 μ m〉=97%.
3, optical property: PV≤0.5 λ, and Rms≤0.05 λ (λ=632.8nm).
4, optical stability: reflectance varies rate≤1%, PV value rate of change≤2%.
Embodiment 5:
The special glass composition is SiO 212wt%, B 2O 315wt%, PbO 60wt%, K 2O 6wt%, Na 2O7wt%, As 2O 30.3wt%, CeO 20.7wt%, wherein, PbO Pb 3O 4Introduce Na 2O Na 2CO 3And NaNO 3Introduce K 2O K 2CO 3And KNO 3Introduce, the ratio of carbonate and nitrate is 3: 1.All the other compositions are introduced with oxide.Introduce thing and all adopt analysis pure chemistry reagent.
Raw material is all put into batch mixer to be mixed 30 minutes, be added to temperature and be in 1250 ℃ the platinum crucible, melting time is 11 hours, and continuous stirring guarantees good homogeneous, melt temperature is about 900 ℃ during casting, annealing temperature is 450 ℃, can obtain chunk glass, makes the 2mm glass plate through grinding, polishing again.The expansion coefficient that records this glass is 110 * 10 -7/ ℃, softening point is 510 ℃.
The machine-shaping of beryllium metallic substrates, the method that adopts machining is with the optical surface surface treatment, and making surfaceness is 25 μ m.
Glass plate and beryllium metal are cleaned residual greasy dirt when removing surperficial machining with alcohol and acetone.The beryllium metallic substrates placed 110 ℃ baking oven inner drying 5 hours, and carry out surface activation process, naturally cooling is together put into electric furnace with beryllium metallic substrates and the glass plate on it to the room temperature, rises to 250 ℃ with the programming rate of 2 ℃/min, and be incubated 4 hours, programming rate with 1.5 ℃/min rises to 550 ℃ again, and is incubated 6 hours, and the speed with 10 ℃/h is cooled to 390 ℃ again, be incubated after 5 hours again that the speed with 10 ℃/h is cooled to 200 ℃, the blowing out cooling.Take out sample when temperature is reduced to room temperature, the mirror glass layer behind the sintering is connected closely with the beryllium metal level.
Glassy layer is milled to 1.5mm and precise polished, and face shape reaches requirement.Silver-plated film in vacuum coating equipment at last, and add the monox protective seam, finally make catoptron.
Adopt the method identical with embodiment 1 that catoptron is detected, result and embodiment 1 be the same all to be reached and is above standard:
1, size: transverse 450mm, minor axis 360mm, gross thickness 33mm.
2, reflectivity: R 2-3 μ m〉=97%.
3, optical property: PV≤0.5 λ, and Rms≤0.1 λ (λ=632.8nm).
4, optical stability: reflectance varies rate≤1%, PV value rate of change≤2%.
Above embodiment explanation, because the present invention has adopted the special glass assembly, its expansion coefficient and beryllium metallic substrates matched, so glassy layer combines closely with the beryllium metal behind the sintering, need not to use other epoxy glue class glueing materials, makes mirror structure stable; On the other hand, the beryllium density metal of use is little, rigidity is big, and is not yielding as base material with it, thereby can add the size of large reflective mirror, makes large-aperture optical equipment; The beryllium metallic substrates adopts cellular light-weight design, has further alleviated the weight of catoptron, makes rigging equipment debug conveniently, rotate more flexible, is suitable in the scanister of all kinds of Space Remote Sensors.By using large scale lightweight surfaces vitrifacation beryllium metallic mirror that the image quality of Space Remote Sensors is improved.

Claims (10)

1. aperture lightweight surface vitrification beryllium metal flat reflector, the special glass layer and the reflective coating of combining closely by substrate, with substrate constitute, and it is characterized in that described substrate is the beryllium metallic substrates, and the expansion coefficient of described special glass is 110 * 10 -7/ ℃, softening point is 450-580 ℃, and described catoptron axial length size is greater than 200mm, and preferred dimensions is transverse 380~650mm, minor axis 240~550mm.
2. beryllium metal flat reflector according to claim 1 is characterized in that described special glass consists of SiO 210-25wt%, B 2O 310-25wt%, PbO 40-60wt%, R 2O 8-15wt%, As 2O 30.2-1.0wt%, CeO 20.3-2.0wt%, R are K and Na.
3. beryllium metal flat reflector according to claim 1 and 2 is characterized in that, described substrate is cellular structure dull and stereotyped or for having light-weight design.
4. beryllium metal flat reflector according to claim 3 is characterized in that, the beryllium metallic substrates of described mirror back surface has lightening hole.
5. according to claim 1 or 2 or 3 or 4 described beryllium metal flat reflectors, it is characterized in that described special glass layer thickness is 0.2-3.0mm.
6. special glass that is used for the arbitrary described aperture lightweight surface vitrification beryllium metal flat reflector glassy layer of claim 1 to 5.
7. according to the described special glass of claim 6, it is characterized in that the special glass expansion coefficient is 110 * 10 -7/ ℃, softening point is 450-580 ℃.
8. special glass according to claim 7 is characterized in that, consists of SiO 210-25wt%, B 2O 310-25wt%, PbO 40-60wt%, R 2O 8-15wt%, As 2O 30.2-1.0wt%, CeO 20.3-2.0wt%, R are K and Na.
9. the job operation of an aperture lightweight surface vitrification beryllium metal flat reflector is characterized in that, adopts following steps:
1) the glass composition by claim 8 takes by weighing glass batch introducing thing, uses the melt cooling method, founds 10-12 hour at 1050-1450 ℃, and the casting melt temperature is 850-1050 ℃, and annealing temperature is a 400-500 ℃ of preparation special glass plate;
2), and roughness processing is carried out on its surface handled with machining process processing beryllium metallic substrates;
3) special glass plate and the applying of beryllium metallic substrates are together put into electric furnace, programming rate with 2 ℃/min rises to 250 ℃, and be incubated 4 hours, programming rate with 1.5 ℃/min rises to 550 ℃ again, and be incubated 6 hours, and the speed with 10 ℃/h is cooled to 390 ℃ again, and being incubated after 5 hours again, the speed with 10 ℃/h is cooled to 200 ℃, the blowing out cooling obtains glassy layer and the close-connected sintered body of beryllium metallic substrates;
4) glassy layer is milled to needs thickness and precise polished, silver-plated film in vacuum coating equipment at last, and add the monox protective seam and finally make catoptron.
10. according to the described job operation of claim 9, it is characterized in that step 2) to handle rear surface roughness Ra in processing be 0.4-40 μ m to the beryllium metal substrate surface.
CN2010102448654A 2010-08-04 2010-08-04 Surface-vitrified beryllium metal flat reflector and special glass Active CN101930088B (en)

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CN105022108A (en) * 2015-07-17 2015-11-04 中国科学院长春光学精密机械与物理研究所 Bidirectional light-weighted high-stiffness double-faced beam splitter mirror
CN106019529A (en) * 2016-06-23 2016-10-12 中国科学院长春光学精密机械与物理研究所 Space aluminium-based reflector assembly
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CN103842887B (en) * 2011-07-29 2017-03-08 剑桥技术股份有限公司 The system and method that the mirror with the high rigidity relevant with chemical etching and low inertia is provided
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CN106019529B (en) * 2016-06-23 2018-11-02 中国科学院长春光学精密机械与物理研究所 A kind of space aluminium base mirror assembly
WO2020135297A1 (en) * 2018-12-24 2020-07-02 深圳光峰科技股份有限公司 Reflective structure, manufacturing method of reflective structure, and wavelength conversion device
CN114280702A (en) * 2021-11-12 2022-04-05 福建戴斯光电有限公司 Ultraviolet metal film layer protection process and protective layer of ultraviolet metal film
CN114280702B (en) * 2021-11-12 2024-04-30 福建戴斯光电有限公司 Ultraviolet metal film layer protection process and ultraviolet metal film protection layer

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