CN101930084B - Coating influence resistant external detecting device and sputtering device - Google Patents
Coating influence resistant external detecting device and sputtering device Download PDFInfo
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- CN101930084B CN101930084B CN 200910149501 CN200910149501A CN101930084B CN 101930084 B CN101930084 B CN 101930084B CN 200910149501 CN200910149501 CN 200910149501 CN 200910149501 A CN200910149501 A CN 200910149501A CN 101930084 B CN101930084 B CN 101930084B
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Abstract
The invention relates to a coating influence resistant external detecting device arranged on two paired glass windows of a cavity of a sputtering device. The device comprises an emitter and a receiver which are respectively arranged outside the cavity and correspond to the positions of the glass windows, wherein the glass windows comprise two anti-sputtering pipes which are arranged in the cavity and used for respectively shielding the two glass windows; the emitter is used for emitting output light into the cavity, and the light is propagated to the receiver through the two anti-sputtering pipes; and the anti-sputtering pipes can be used for effectively shielding corresponding glass windows when the sputtering device is in a sputtering process to ensure that material particles cannot sputtered on the glass windows, thereby the use convenience of the sputtering device is improved, and the maintenance cost is reduced.
Description
Technical field
The present invention is a kind of detection device, especially a kind of applicable outside detection device that is installed on the coating influence resistant of film deposition apparatus.
Background technology
Progress and development along with science and technology, the product of electronic industry makes rapid progress, vacuum coating technology replaces the plated film mode of tradition spray conductive paint or metallide gradually in recent years, and is widely used in manufacture of semiconductor, photoelectricity and 3C industry, becomes important plated film production technology.
The filming equipment that present industry is used mostly is greatly the work flow of continous way (In-Line) Multicarity (multi-chambers), compare with conventional batch type (batch type) or wafer type (wafertype) mode of production, can significantly reduce equipment cost and factory building space, have volume production economic worth and inter-industry competition.Take the filming equipment of continous way Multicarity as example, this continous way Multicarity inside comprises a carrier (or being commonly called as chassis) can advance in each inside cavity, in order to detect the advanced positions of this carrier, often is provided with a pick-up unit in this continous way Multicarity.
Please refer to Fig. 7 A, 7B and Fig. 8, it is the schematic diagram of a detection device 73 of the existing filming equipment 72 that is installed on the continous way Multicarity, this filming equipment 72 comprises a plurality of paired sight windows 722, and paired two these sight windows 722 are located at respectively the outside surface of this filming equipment 72.This detection device 73 comprises two paired optical detection assemblies 732, two these optical detection assemblies 732 fixedly are placed in respectively two paired sight window 722 outsides, and make two these optical detection assemblies 732 respectively as a smooth output precision and an optical fiber receive module, wherein, whether two paired these optical detection assemblies 732 can be blocked in the carrier 75 that this filming equipment 72 is advanced by one according to therebetween light transmission path and judge the position (as shown in Fig. 7 A, 7B) of this carrier 75.
In the sputter process, attached by the material particle pollution of sputter for fear of this sight window 722, this detection device 73 comprises a shield 733 and is fixed at the inside of this filming equipment 72 in the correspondence position of this sight window 722.Yet, the effect of the barrier material particle of this shield 733 is not good, the material particle still can pass the opening of this shield 733 and be sputtered at the inside surface of this sight window 722, when the inside surface of this sight window 722 attaches too much material particle and then affects the light transmission path of this optical detection assembly 732, and aforesaid measuring ability is greatly affected, even have no function; The user must often maintain, remove material particle or the film on this sight window 722, to protect the function of aforementioned detection, therefore cause the problem of using inconvenience and maintenance cost to increase.
Summary of the invention
The not good technical matters of barrier properties for the shield that solves the existing detection device of being located at the sputtering equipment outside; the present invention replaces this shield with a body; allow the light transmission path of this detection device obtain good shielding protection, reach the purpose that promotes ease of use and reduce maintenance cost.
Coordinate aforesaid technical matters and goal of the invention, the invention provides a kind of outside detection device of coating influence resistant, it comprises:
One signal output module, it comprises a transmitter and an output module anti-plated tube, and this transmitter produces an output light; This output module anti-plated tube is the body of hollow and both ends open, and it fixedly is placed on the transmission path of this output light; And
One signal receiving module, it comprises a receiver and a receiver module anti-plated tube, and this receiver is relative with this transmitter; This receiver module anti-plated tube is the body of hollow and both ends open, and it is placed on the transmission path of this output light and receives this output light.
Wherein, this signal output module and this signal receiving module comprise respectively an adjusting seat, and two these adjusting seats are connected respectively this transmitter and this receiver.
Wherein, the material of this output module anti-plated tube and this receiver module anti-plated tube is a metal or a Teflon or engineering plastics class.
Wherein, this output light is infrared ray or laser light ray.
The present invention provides again a kind of sputtering unit, and it comprises:
The cavity of a plurality of continuous joints, each cavity comprises a base, a upper cover and a drive mechanism, this upper cover is covered on an open surface of this base, this drive mechanism is fixed at an inside surface of this base, wherein, this base comprises more than one glass window group, and each glass window group comprises two paired glass windows, and a side chamber wall of this base and relative with paired another glass window position is fixed in each glass window driving fit;
More than one carrier, this more than one carrier moves between each cavity in this drive mechanism transmission, and the mobile route of this carrier is corresponding with the position of this glass window group;
More than one outside detection device, each outside detection device comprises a signal output module and a signal receiving module, and its secure bond is in this base and corresponding with the position of two paired these glass windows respectively, wherein:
This signal output module comprises a transmitter and an output module anti-plated tube, and this transmitter is fixed at the outside surface of this base, and it produces an output light towards this glass window of correspondence; This output module anti-plated tube is the body of hollow and both ends open, and it is placed in this cavity and covers this glass window and the position is coaxial with the transmission path of this output light; And
This signal receiving module comprises a receiver and a receiver module anti-plated tube, and this receiver is fixed at the outside surface of this base, and it is relative with this transmitter and receive this output light; This receiver module anti-plated tube is the body of hollow and both ends open, and it is placed in this cavity and covers this glass window and the position is coaxial with the transmission path of this output light.
Wherein, this signal output module and this signal receiving module comprise respectively an adjusting seat, and two these adjusting seats are connected respectively this transmitter and this receiver, and two these adjusting seats also are fixedly connected with this housing surface respectively.
Wherein, the material of this output module anti-plated tube and this receiver module anti-plated tube is a metal or a Teflon or engineering plastics class.
Wherein, this output light is infrared ray or laser light ray.
Description of drawings
Because this anti-plated tube of the present invention can effectively cover this glass window and the transmitter of glass window outside and the output light bang path of receiver are provided, make sputtering unit in the sputter process, the sputter material particle can be blocked or only be sputtered at this anti-plated tube and can not be sputtered at this glass window surface, therefore reach the good anti-technique effect that plates of shielding, therefore promote the ease of use of sputtering equipment and can reduce maintenance cost.
Fig. 1 is the partial perspective view of the embodiment of the present invention.
Fig. 2 is the partial exploded view of the embodiment of the present invention.
Fig. 3 is the part sectioned view of the embodiment of the present invention.
Fig. 4 is the local amplification decomposition figure of the embodiment of the present invention.
Fig. 5 is the local amplification profile of the embodiment of the present invention.
Fig. 6 A, 6B are the use schematic diagram of the embodiment of the present invention.
Fig. 7 A, 7B are that the detection device of existing filming equipment uses schematic diagram.
Fig. 8 is the amplification profile of the detection device of existing filming equipment.
The primary clustering symbol description
10 cavity 12 bases
122 glass window 1221 connecting supports
1223 glass sheet 1225 fixed caps
14 upper cover 15 drive mechanisms
16 carrier 17 targets
The outside detection device of 20 coating influence resistants
22 signal output module 222 transmitters
223 adjusting seat 224 anti-plated tubes
26 signal receiving module 262 receivers
263 adjusting seat 264 anti-plated tubes
72 filming equipments 722 are seen window
73 detection device 732 optical detection assemblies
733 shield 75 carriers
Embodiment
Please refer to Fig. 1 and Fig. 2, it is the embodiment of the outside detection device 20 of coating influence resistant of the present invention, cavity 10 secure bond of itself and a sputtering unit, wherein, this sputtering unit can combine according to the cavity 10 of a plurality of continuous joints of demand utilization, makes this sputtering unit can carry out a continous way sputter job.
This cavity 10 comprises a base 12, a upper cover 14 and a drive mechanism 15, this upper cover 14 is covered on an open surface of this base 12, this drive mechanism 15 is fixed at an inside surface of this base 12, one carrier 16 of these drive mechanism 15 these sputtering units of transmission moves, advances between each cavity 10, reaches the work of aforesaid continous way sputter.
This base 12 comprises more than one glass window group, and each glass window group comprises two paired glass windows 122, and a side chamber wall of this base 12 and relative with another glass window 122 positions is fixed in each glass window 122 driving fit.The mode that this glass window 122 is incorporated into this base 12 does not limit, and for example, it can be the window assembly that is embedded in this base 12 and comprises the light-permeable zone, and wherein this transmission region can be general glass or quartz glass etc.
Please refer to Fig. 3～Fig. 5, each glass window 122 of the present embodiment comprises a connecting support 1221, a glass sheet 1223 and a fixed cap 1225, and this connecting support 1221 is tubular, and its axle center comprises the perforation that two ends connect; For allow this connecting support 1221 can the driving fit secure bond in this base 12, the outside surface of this connecting support 1221 can be provided with flank of thread, closely is locked on this base 12 in the screw lock mode.This glass sheet 1223 fixedly is placed in this connecting support 1221, and covers rear and these connecting support 1221 secure bond with these fixed cap 1225 sealings, and gland bonnet is should an outer end of the perforation of connecting support 1221.
Please refer to Fig. 4 to Fig. 5, the outside detection device 20 of this coating influence resistant comprises a signal output module 22 and a signal receiving module 26, it is incorporated into respectively the correspondence position of two these paired glass windows 122, this signal output module 22 comprises a transmitter 222, this transmitter 222 is fixed at this base 12 outer surface atmospheric environment sides, and can launch an output light (for example infrared ray, laser light ray or other light that can detect ... etc.), this signal receiving module 26 of another glass window 122 of output light directive of this transmitter 222.This signal receiving module 26 comprises a receiver 262, this receiver 262 is fixed in these base 12 outer surfaces and receives this output light, whether this signal receiving module 26 can receive this output light according to its receiver 262, judges that this carrier 16 is in the position of this drive mechanism 15.This signal output module 22 comprises respectively an anti-plated tube 224,264 with this signal receiving module 26, these two anti-plated tubes 224,264 both ends open and be hollow, and driving fit is inserted in the perforation of two these connecting supports 1221 respectively, this anti-plated tube 224,264 is made with the material that is suitable for vacuum environment, can be metal tube, Teflon pipe etc. such as this anti-plated tube, this anti-plated tube 224 of the present embodiment, 264 for have connect runner and with metal (stainless steel, aluminium ... etc.) body made.After two these anti-plated tubes 224,264 are installed on respectively this connecting support 1221, two these anti-plated tubes 224,264 runner are relative, make this output light of this transmitter 222 can be through two these anti-plated tubes 224,264 runner and to this receiver 262 of this signal receiving module 26.
as shown in Figure 3, due to this glass sheet 1223 this anti-plated tube 224 of an inner surface socket towards this cavity 10 inside, 264, therefore, when this sputtering unit begins to carry out sputter work, the material particle that is sputtered out by a target 17 will can not be plated on the inner surface of this glass sheet 1223, due to this anti-plated tube 224, 264 cover this corresponding glass sheet 1223 and the effect of a good barrier material particle are provided, make the material particle in this anti-plated tube 224, after 264 multiple impacts, kinetic energy slows down and is sputtered at this anti-plated tube 224, on 264, therefore, this glass sheet 1223 between this transmitter 222 and this receiver 262 can not polluted in the sputter process, affect the location sensitive function of light transmission therebetween and this carrier 16.
Further, in order to fix the position of this transmitter 222 and this receiver 262, this signal output module 22 and this signal receiving module 26 of the present embodiment comprise respectively an adjusting seat 223,263, two these adjusting seats 223,263 can be any external form and be individually fixed in these base 12 surfaces and lay respectively near two these paired glass windows 122, wherein, this adjusting seat 223,263 makes this transmitter 222 and this receiver 262 can be coaxial relative with this transmitter 222 and this receiver 262 secure bond respectively.
Each cavity 10 of this sputtering unit can in the correspondence position of the mobile route of this carrier 16, be provided with the outside detection device 20 of a plurality of glass window groups and coating influence resistant in the surface of this base 12; During use, please refer to Fig. 6 A, 6B, as not (as Fig. 6 A) during this carrier 16 on this drive mechanism 15 of a certain cavity 10, the output light of the signal output module 22 of the outside detection device 20 of the coating influence resistant of this cavity 10 do not stopped the light bang path and can arrive at smoothly this signal receiving module 26 by this carrier 16, allows this signal receiving module 26 can use in this cavity 10 of judgement not this carrier 16; Otherwise, if this carrier 16 has entered in this cavity 10, therefore, a certain or this signal output module 22 that some is paired and the output light transmission between this signal receiving module 26 are subject to this carrier 16 and stop, make this signal receiving module 26 can judge accordingly the position of this carrier 16.
Claims (4)
1. the outside detection device of a coating influence resistant, it comprises:
One signal output module, it comprises a transmitter and an output module anti-plated tube, and this transmitter produces an output light; This output module anti-plated tube is the body of hollow and both ends open, and it fixedly is placed on the transmission path of this output light; And
One signal receiving module, it comprises a receiver and a receiver module anti-plated tube, and this receiver is relative with this transmitter; This receiver module anti-plated tube is the body of hollow and both ends open, and it is placed on the transmission path of this output light and receives this output light.
2. the outside detection device of coating influence resistant as claimed in claim 1, it is characterized in that: this signal output module and this signal receiving module comprise respectively an adjusting seat, and two these adjusting seats are connected respectively this transmitter and this receiver.
3. the outside detection device of coating influence resistant as claimed in claim 1 or 2, it is characterized in that: the material of this output module anti-plated tube and this receiver module anti-plated tube is a metal or a Teflon.
4. the outside detection device of coating influence resistant as claimed in claim 3, it is characterized in that: this output light is infrared ray or laser light ray.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910149501 CN101930084B (en) | 2009-06-25 | 2009-06-25 | Coating influence resistant external detecting device and sputtering device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910149501 CN101930084B (en) | 2009-06-25 | 2009-06-25 | Coating influence resistant external detecting device and sputtering device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101930084A CN101930084A (en) | 2010-12-29 |
| CN101930084B true CN101930084B (en) | 2013-05-15 |
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| CN 200910149501 Active CN101930084B (en) | 2009-06-25 | 2009-06-25 | Coating influence resistant external detecting device and sputtering device |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN207793418U (en) * | 2018-01-30 | 2018-08-31 | 北京铂阳顶荣光伏科技有限公司 | A kind of filming equipment |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101270467A (en) * | 2007-03-22 | 2008-09-24 | 深圳豪威真空光电子股份有限公司 | Product line for producing AR film |
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- 2009-06-25 CN CN 200910149501 patent/CN101930084B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101270467A (en) * | 2007-03-22 | 2008-09-24 | 深圳豪威真空光电子股份有限公司 | Product line for producing AR film |
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| Publication number | Publication date |
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| CN101930084A (en) | 2010-12-29 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CI01 | Correction of invention patent gazette |
Correction item: Inventor Correct: Liu Zhongjiong|Cai Ming| Lai Qinghua|Huang Taiyuan| Wei Muyuan|Chen Wei Lin False: Liu Zhongjiong|Cai Mingzhan| Lai Qinghua| Huang Taiyuan|Wei Muyuan| Pu Weichen Number: 52 Volume: 26 |
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| CI02 | Correction of invention patent application |
Correction item: Inventor Correct: Liu Zhongjiong|Cai Ming| Lai Qinghua|Huang Taiyuan| Wei Muyuan|Chen Wei Lin False: Liu Zhongjiong|Cai Mingzhan| Lai Qinghua| Huang Taiyuan| Wei Muyuan| Pu Weichen Number: 52 Page: The title page Volume: 26 |
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| ERR | Gazette correction |
Free format text: CORRECT: INVENTOR; FROM: LIU ZHONGJIONG; CAI MINGZHAN, LAI QINGHUA, HUANG TAIYUAN, WEI MUYUAN, PIAOWEICHEN TO: LIU ZHONGJIONG; CAI MINGZHAN, LAI QINGHUA, HUANG TAIYUAN, WEI MUYUAN, LIN WEICHEN |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |