CN101928920B - Multilayer composite wire rotary preparation device and preparation method - Google Patents
Multilayer composite wire rotary preparation device and preparation method Download PDFInfo
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- CN101928920B CN101928920B CN2010102622877A CN201010262287A CN101928920B CN 101928920 B CN101928920 B CN 101928920B CN 2010102622877 A CN2010102622877 A CN 2010102622877A CN 201010262287 A CN201010262287 A CN 201010262287A CN 101928920 B CN101928920 B CN 101928920B
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Abstract
The invention provides a multilayer composite wire rotary preparation device and a preparation method. The multilayer composite wire rotary preparation device comprises a fine wire fixing component, a rotating shaft fixing component, a rotary disc and a straight bevel gear B, wherein the fine wire fixing component comprises a straight bevel gear A, a bearing bracket A, a deep groove ball bearing A, a bearing cover A, a bearing cover B, a deep groove ball bearing B, a bearing bracket B, a straight toothed spur gear B, a straight toothed spur gear A, a wire clamping shaft A, a wire clamping shaft B, a wire clamping block A and a wire clamping block B; and the rotating shaft fixing component comprises a straight toothed spur gear C, a bearing bracket C, a deep groove ball bearing C, a bearing cover C, a rotating shaft, a bearing cover D, a deep groove ball bearing D, a bearing bracket D and a straight toothed spur gear D. The multilayer composite wire rotary preparation device can realize rotation and revolution of the fine wire, has an adjustable rotation speed and is suitable for preparing the composite wires of wires with different diameters; and the composite wire prepared by the device has the advantages of uniform coating and high combinability.
Description
Technical field
The invention belongs to the material processing technique technical field, be specifically related to a kind of multilayer composite wire rotary and be equipped with device and preparation method.
Background technology
Physical gas phase deposition technology is meant under vacuum condition; Adopt the arc-discharge technique of low voltage, big electric current; Utilize geseous discharge to make target evaporation and make and be evaporated material and ionization all takes place gas; By the booster action of electric field, make to be evaporated material and reaction product is deposited on the process of surface treatment on the workpiece.Simply say; Physical gas phase deposition technology is to utilize physical process to realize substance transfer; With atom or the molecular transfer process to the substrate surface; This technology can be sprayed on the particulate of some ability (intensity height, wear resistance, thermal diffusivity or rotproofness etc.) that has specific characteristics on the lower parent of performance, makes parent have better properties.
Physical gas phase deposition technology comprises three kinds of vacuum-evaporation, sputter and ion platings, and wherein ion plating comprises hallow cathode deposition, HCD, hot cathode ion plating, arc ion plating, activated reactive evaporation, RF ion plating and direct-current discharge ion plating.Physical gas phase deposition technology comes across later 1970s, and the film of preparation has high firmness, low-friction coefficient, advantage such as wear resistance and chemicalstability preferably.Initial successful Application in the speedy steel cutting-tool field has caused the manufacturing great attention in countries in the world, and people have also carried out more deep coatings applications research in wimet, ceramic-like cutter in exploitation high-performance, high reliability coating apparatus.Compare with chemical vapor deposition method, physical gas phase deposition technology has the low characteristics of treatment temp, the bending strength of cutter material is not had influence below 600 ℃ the time; Film internal stress state is a stress, is more suitable for wimet sophisticated cutter is prepared coating; And physical gas phase deposition technology has no adverse effect to environment, meets the developing direction of modern green manufacturing.Physical gas phase deposition technology has been widely used in the coating processing of carbide end mill, drill bit, step drill, oil-hole drill, reamer, screw tap, indexable milling cutter sheet, special-shaped cutter and brazed shank tool etc. at present.
Physical gas phase deposition technology is mainly used in the coating prepn direction of big-and-middle-sized workpiece; In the micron-sized flexible filaments of preparation on the coating direction; Physical gas phase deposition technology can cause the sample surfaces coating film thickness inhomogeneous usually, and defective such as the magnetic structure of sample surfaces plated film is asymmetric.Limited physical gas phase deposition technology prepares direction in flexible filaments widespread use.Like reference L.Jiang, L.S.Tan, J.Z.Ruan, et al., Physica B, 403 (2008) 3054.:2008 L.Jiang etc. have prepared Ni through magnetron sputtering technique
80Fe
20/ Cu composite structure silk in order on copper wire, to realize ring-type coating, has been made by oneself a kind of from swing frame; Thisly can drive copper wire from swing frame and accomplish spin, but can not revolve round the sun, even in the middle of coating can not guarantee with two-end thickness; And maximum shortcoming is, is driving in the copper wire rotary course from swing frame, and the target of sputter is understood some and blocked from swing frame and can't be splashed on the copper wire; So the film that this mode is plated has a dead zone, can not guarantee the homogeneity of plated film.
Summary of the invention
To the problem that exists in the prior art; The present invention proposes a kind of multilayer composite wire rotary and is equipped with device and preparation method; This preparation method is the basis with the physical gas phase deposition technology, utilizes multilayer composite wire rotary to be equipped with device, is implemented in the magnetron sputtering coating process; The uniform coating of deposit multilayer on the micron order flexible filaments, final preparation has the composite filament of multilayer coating.
Multilayer composite wire rotary provided by the invention is equipped with device and comprises filament fixed assembly, rotation axis fixation kit, rotating disk and spur bevel gear B; Described filament fixed assembly comprises straight spur gear A, support of bearing A, deep groove ball bearing A, bearing door A, bearing door B, deep groove ball bearing B, support of bearing B, straight spur gear B, spur bevel gear A, silk axis A, silk axis B, card silk piece A and Ka Si piece B.Described rotation axis fixation kit comprises straight spur gear C, support of bearing C, deep groove ball bearing C, bearing door C, rotation axis, bearing door D, deep groove ball bearing D, support of bearing D and straight spur gear D.
Described support of bearing A is a L type structure; The center of long limit one side has a large diameter through hole A; Deep groove ball bearing A is fixed among this through hole A; Have the through hole F of four small dias that disperse to be symmetrically distributed around the through hole A, there is the through hole B of two small dias at a lateral edges place of the minor face of L type structure, and screw can pass through hole B support of bearing A is fixed on the rotating disk; Described bearing door A is the square sheet structure; The center has through hole C; Through hole C is more smaller than the through hole A diameter of support of bearing A; Be used to block deep groove ball bearing A; Four little through hole D are arranged around the bearing door A; The size of four through hole D and distribution distance each other are corresponding with four through hole F on the support of bearing A, and screw passes through hole D and through hole F is fixed on the support of bearing A bearing door A, and the structure of described support of bearing B, support of bearing C and support of bearing D and the structure of support of bearing A are identical; The structure of described bearing door B, bearing door C and bearing door D and the structure of bearing door A are identical, and the fixed relationship between fixed relationship between fixed relationship between fixed relationship between support of bearing B, bearing door B and the rotating disk and support of bearing C, bearing door C and the rotating disk and support of bearing D, bearing door D and the rotating disk and support of bearing A, bearing door A and the rotating disk is identical.
Described rotation axis is used to transmit the rotation between straight spur gear D and the straight spur gear C; The two ends of rotation axis have helicitic texture; One end of rotation axis passes the through hole C of bearing door C, the endoporus of deep groove ball bearing C and the endoporus of straight spur gear C in order; And tightening fixingly at the screw thread place of rotation axis with nut, the through hole C of its centre bearer door C is running fit between bearing door C and the rotation axis than the somewhat larger in diameter of rotation axis; The endoporus of deep groove ball bearing C is suitable with the diameter of rotation axis, makes to be shrink-fit between deep groove ball bearing C and the rotation axis.There is a keyway at the endoporus place of straight spur gear C, and also there is a corresponding keyway at the respective threaded place of rotation axis, fixes with key, makes between straight spur gear C and the rotation axis to cooperate for key.The other end of rotation axis is connected with bearing door D, deep groove ball bearing D and straight spur gear D with identical method of attachment in order.
Described silk axis A one end is a helicitic texture, and the other end is a sheet structure, and the centre is a cylindrical-shaped structure, and an end of sheet structure has two threaded holes, and the structure of silk axis B is identical with the structure of silk axis A.Described card silk piece A is a sheet structure, has two through hole E, and the structure of card silk piece B is identical with the structure of card silk piece A.
One end of the helicitic texture of described silk axis A passes the through hole C of bearing door A, the endoporus of deep groove ball bearing A, the endoporus of straight spur gear A and the endoporus of spur bevel gear A in order, tightens fixing with nut at the screw thread edge place of silk axis A at last.The through hole C of bearing door A is than the somewhat larger in diameter of silk axis A; Be running fit, the endoporus of deep groove ball bearing A is suitable with the diameter of silk axis A, is shrink-fit between deep groove ball bearing A and the silk axis A; There is a keyway at spur bevel gear A and straight spur gear A endoporus place; The helicitic texture of corresponding silk axis A also has a corresponding keyway, fix with key, spur bevel gear A and straight spur gear A respectively with silk axis A between to cooperate be the key cooperation; Silk axis A is along with after spur bevel gear A rotates; Drive straight spur gear A and rotate, straight spur gear A and straight spur gear D are meshed simultaneously, and straight spur gear D can rotate with straight spur gear A.Sheet structure one end of described silk axis A is through screw Connection Card silk piece A; Screw passes two through hole E of card silk piece A and two threaded holes of the sheet structure of silk axis A respectively; And then fixing catch silk piece A; One end of the filament that will prepare is clamped between the sheet structure of card silk piece A and silk axis A, makes the filament fastening clamp between card silk piece A and silk axis A through trip bolt.
One end of the helicitic texture of described silk axis B passes the through hole C of bearing door B, the endoporus of deep groove ball bearing B and the endoporus of straight spur gear B in order, tightens fixing with nut at the screw thread edge place of silk axis B at last.The through hole C of bearing door B is running fit than the somewhat larger in diameter of silk axis B, and the endoporus of deep groove ball bearing B is suitable with the diameter of silk axis B; Between deep groove ball bearing B and the silk axis B is shrink-fit; There is a keyway at straight spur gear B endoporus place, and the helicitic texture of corresponding silk axis B also has a corresponding keyway, fixes with key; Cooperate for key between straight spur gear B and the silk axis B; Silk axis B rotates with straight spur gear B, and guarantees that straight spur gear B and straight spur gear C are meshed, and straight spur gear B rotates along with the rotation of straight spur gear C.Sheet structure one end of described silk axis B22 is through screw Connection Card silk piece B; Screw passes two through hole E of card silk piece B and two threaded holes of the sheet structure of silk axis B respectively; And then fixing catch silk piece B; The other end with filament fixedly the time is clamped between the sheet structure of card silk piece B and silk axis B, makes the filament fastening clamp between card silk piece A and silk axis A through trip bolt, and through transferring the silk axis A and the nut at silk axis B two ends that filament is tightened;
Described rotating disk is incomplete disc-shaped structure; The center has through hole; Disk has bulge-structure below the bottom surface of lead to the hole site; This bulge-structure is connected with the motor output shaft bolt of the sputter Vakuumkammer of magnetron sputtering plating appearance, and the rotation through motor output shaft drives rotating disk and rotates around motor output shaft;
The straight-tooth cone angle of described spur bevel gear B is outside; Be arranged in rotating disk around form an awl rack rails road, described straight-tooth cone angle is meshed with spur bevel gear A, on the base plate of the sputter Vakuumkammer through being bolted to the magnetron sputtering plating appearance; Spur bevel gear B and rotating disk concentric; Motor output shaft rotates when driving the rotating disk rotation, and the rotation axis fixation kit and the filament fixed assembly that are fixed on the rotating disk rotate thereupon, and spur bevel gear A is the engaged transmission rotation on the awl rack rails road of spur bevel gear B; The rotation of spur bevel gear A drives straight spur gear A co-axial with it and rotates; Straight spur gear D and straight spur gear A engagement are rotated, and will rotate transmission through rotation axis and give straight spur gear C, and straight spur gear B is because of rotating with straight spur gear C engagement; Thereby realized the synchronous rotation of straight spur gear B8 and straight spur gear A, guaranteed that filament does not have the spiral rotation.
A kind of multilayer composite wire rotary of using is equipped with the method that device prepares multilayer composite wire, comprises following step:
Step 1: the substrate in the sputter Vakuumkammer of magnetron sputtering plating appearance is pulled down, spur bevel gear B is installed in through bolt on the base plate of sputter Vakuumkammer, rotating disk is connected with motor output shaft in the sputter Vakuumkammer through bolt;
A: open phonomoter, the driven rotary armor horizontally rotates around motor output shaft, makes the spur bevel gear A rotation synchronously in the same way on the rotating disk, and the transmission of organizine axis A, and the rotation of spur bevel gear A is delivered on straight spur gear A and the Ka Si piece A;
B: the rotation of straight spur gear A is delivered on the straight spur gear D; And the transmission of process rotation axis; The rotation of straight spur gear D is delivered on the straight spur gear C,, drives a card silk piece B and rotate then through the rotation of the straight spur gear B that is meshed with straight spur gear C; Make card silk piece B and Ka Si piece A keep rotation synchronously, make the fastening filament not have the spin of spiral and center on the synchronous revolution of motor output shaft;
Step 5: utilize magnetron sputtering equipment to prepare multilayer composite wire:
(a) open the magnetron sputtering plating appearance, adopt the d.c. sputtering method, 10～15 rev/mins of the revolution speed of setting rotating disk, power 100～500w selects target A, and sputtering time is set to 3～120 minutes;
(b) magnetron sputtering finishes, and target A is replaced by target B, 10～15 rev/mins of the revolution speed of setting rotating disk, power 100～500w, sputtering time 3～120 minutes;
(c) magnetron sputtering finishes, and target B is changed target C, 10～15 rev/mins of the revolution speed of setting rotating disk, power 100～500w, sputtering time 3～120 minutes; Accomplish until spraying.
The invention has the advantages that:
1, the multilayer composite wire rotary of the present invention's proposition is equipped with rotation and the revolution that device can be realized required spraying filament or silk material, and the speed of rotation adjustable, the composite filament preparation of the silk material of applicable different diameter.
2, the multilayer composite wire rotary of the present invention's proposition is equipped with the composite filament of device preparation, and coating is even, and associativity is good between layer and the layer.
3, the multilayer composite wire rotary that proposes of the present invention is equipped with the preparation method of device and multilayer composite wire material, can realize the surperficial homogeneous coating of circle configurations and erratic composition, overcome vapour deposition can only be on two dimensional structure the defective of coating.
Description of drawings
Fig. 1: multilayer composite wire rotary provided by the invention is equipped with the device front view;
Fig. 2: multilayer composite wire rotary provided by the invention is equipped with the device vertical view;
Fig. 3: multilayer composite wire rotary provided by the invention is equipped with device A-A sectional view;
Fig. 4-A: multilayer composite wire rotary provided by the invention is equipped with the front view of the support of bearing A of device;
Fig. 4-B: multilayer composite wire rotary provided by the invention is equipped with the vertical view of the support of bearing A of device;
Fig. 4-C: multilayer composite wire rotary provided by the invention is equipped with the left view of the support of bearing A of device;
Fig. 5-A: multilayer composite wire rotary provided by the invention is equipped with the silk axis A of device and the front view of silk axis B;
Fig. 5-B: multilayer composite wire rotary provided by the invention is equipped with the silk axis A of device and the vertical view of silk axis B;
Fig. 5-C: multilayer composite wire rotary provided by the invention is equipped with the silk axis A of device and the left view of silk axis B;
Fig. 6-A: multilayer composite wire rotary provided by the invention is equipped with the front view of the bearing door A of device;
Fig. 6-B: multilayer composite wire rotary provided by the invention is equipped with the vertical view of the bearing door A of device;
Fig. 6-C: multilayer composite wire rotary provided by the invention is equipped with the left view of the bearing door A of device;
Fig. 7-A: multilayer composite wire rotary provided by the invention is equipped with the card silk piece A of device and the front view of Ka Si piece B;
Fig. 7-B: multilayer composite wire rotary provided by the invention is equipped with the card silk piece A of device and the vertical view of Ka Si piece B;
Fig. 7-C: multilayer composite wire rotary provided by the invention is equipped with the card silk piece A of device and the left view of Ka Si piece B;
Fig. 8-A: multilayer composite wire rotary provided by the invention is equipped with the front view of the rotating disk of device;
Fig. 8-B: multilayer composite wire rotary provided by the invention is equipped with the vertical view of the rotating disk of device;
Fig. 8-C: multilayer composite wire rotary provided by the invention is equipped with the left view of the rotating disk of device;
Fig. 9: multilayer composite wire rotary provided by the invention is equipped with device and is installed on the simplified schematic diagram on the magnetron sputtering plating appearance;
Figure 10: the surface topography map of plain metal copper wire;
Figure 11: the scan image on metal copper wire surface behind the spraying non-crystalline material powder;
Figure 12: scan image with copper wire outermost layer silverskin of silver layer-copper layer-silver layer triple-layer coating;
Figure 13: low power scan image with copper wire transverse section of silver layer-copper layer-silver layer triple-layer coating;
Figure 14: high power scan image with copper wire transverse section of silver layer-copper layer-silver layer triple-layer coating.
Among the figure:
1-straight spur gear A; 2-support of bearing A; 3-deep groove ball bearing A; 4-bearing door A;
5-bearing door B; 6-deep groove ball bearing B; 7-support of bearing B; 8-straight spur gear B;
9-straight spur gear C; 10-support of bearing C; 11-deep groove ball bearing C; 12-bearing door C;
The 13-rotation axis; 14-bearing door D; 15-deep groove ball bearing D; 16-support of bearing D;
17-straight spur gear D; 18-spur bevel gear A; 19-silk axis A; 20-spur bevel gear D;
The 21-rotating disk; 22-silk axis B; 23-card silk piece A; 24-card silk piece B;
The 25-motor output shaft; The 26-filament; The 27-base plate; 201-through hole A;
401-through hole C; 402-through hole D; 1901, the 2201-threaded hole
2301,2401-through hole E; 203-through hole F.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is elaborated.
The present invention proposes a kind of multilayer composite wire rotary and is equipped with device, like Fig. 1, Fig. 2 and shown in Figure 3, mainly comprises: filament fixed assembly, rotation axis fixation kit, rotating disk 21 and spur bevel gear B20; Described filament fixed assembly comprises straight spur gear A1, support of bearing A2, deep groove ball bearing A3, bearing door A4, bearing door B5, deep groove ball bearing B6, support of bearing B7, straight spur gear B8, spur bevel gear A18, silk axis A19, silk axis B22, card silk piece A23 and Ka Si piece B24.Described rotation axis fixation kit comprises straight spur gear C9, support of bearing C10, deep groove ball bearing C11, bearing door C12, rotation axis 13, bearing door D14, deep groove ball bearing D15, support of bearing D16 and straight spur gear D17.
One end of described rotation axis 13 passes bearing door C12, deep groove ball bearing C11 and straight spur gear C9 and fixing in order; The other end passes bearing door D14, deep groove ball bearing D15 and straight spur gear D17 and fixing in order, forms the rotation axis fixation kit; The end of described silk axis A19 passes bearing door A4, deep groove ball bearing A3, straight spur gear A1 and spur bevel gear A18 in order and nut thread is fixed, and the other end is connected with card silk piece A23; The end of described silk axis B22 passes endoporus and straight spur gear B8 and the nut thread of through hole C401, the deep groove ball bearing B6 of bearing door B5 in order and fixes, and the other end is connected composition filament fixed assembly with a card silk piece B24; Described support of bearing A2, support of bearing B7 support of bearing C10 and support of bearing D16 pass through screw retention on rotating disk 21 with bearing door A4, bearing door B5, bearing door C10 and bearing door D14 respectively, and rotating disk 21 central rotating shafts are connected with motor output shaft 25; Said spur bevel gear B20 is fixed on the base plate 27 of sputter Vakuumkammer, and the straight-tooth cone angle of spur bevel gear B20 is outside, and what be arranged in rotating disk 21 forms an awl rack rails road all around, and described straight-tooth cone angle is meshed with spur bevel gear A18.Motor output shaft 25 rotates when driving rotating disk 21 rotations; The rotation axis fixation kit and the filament fixed assembly that are fixed on the rotating disk 21 rotate thereupon; Spur bevel gear A18 is the engaged transmission rotation on the awl rack rails road of spur bevel gear B20; The rotation of spur bevel gear A18 drives straight spur gear A1 co-axial with it and rotates; Straight spur gear D17 and straight spur gear A1 engagement are rotated, and will rotate transmission through rotation axis and give straight spur gear C9, and straight spur gear B8 is because of rotating with straight spur gear C9 engagement; Thereby realized the synchronous rotation of straight spur gear B8 and straight spur gear A1, guaranteed filament 26 no spiral rotations.
Described support of bearing A2 is a L type structure; The center of long limit one side has a large diameter through hole A201; Like Fig. 4 A, Fig. 4 B and Fig. 4 C, deep groove ball bearing A3 is fixed among this through hole A201, has the through hole F203 of four small dias that disperse to be symmetrically distributed around the through hole A201; There is the through hole B202 of two small dias at one lateral edges place of the minor face of L type structure, and screw can pass through hole B202 support of bearing A2 is fixed on the rotating disk 21; Described bearing door A4 structure is shown in Fig. 6 A, Fig. 6 B figure and 6C; Be the square sheet structure; The center has through hole C401; Through hole C401 is more smaller than the through hole A201 diameter of support of bearing A2; Be used to block deep groove ball bearing A3; Four little through hole D402 are arranged around the bearing door A4; The size of four through hole D402 and each other distribution distance are identical with four through hole F203 on the support of bearing A2, and screw passes through hole D402 and through hole F203 is fixed on the support of bearing A2 bearing door A4, and the structure of described support of bearing B7, support of bearing C10 and support of bearing D16 and the structure of support of bearing A2 are identical; The structure of described bearing door B5, bearing door C10 and bearing door D14 and the structure of bearing door A4 are identical, and the fixed relationship between fixed relationship between fixed relationship between fixed relationship between support of bearing B7, bearing door B5 and the rotating disk 21 and support of bearing C10, bearing door C12 and the rotating disk 21 and support of bearing D16, bearing door D14 and the rotating disk 21 and support of bearing A2, bearing door A4 and the rotating disk 21 is identical;
The two ends of described rotation axis 13 have helicitic texture; One end of rotation axis 13 passes the through hole C401 of bearing door C12, the endoporus of deep groove ball bearing C11 and the endoporus of straight spur gear C9 in order; And tighten fixing at the screw thread place of rotation axis 21 with nut; The through hole C401 of its centre bearer door C12 is than the somewhat larger in diameter of rotation axis 21; Be running fit between bearing door C12 and the rotation axis 21, the diameter of the endoporus of deep groove ball bearing C11 and rotation axis 21 is suitable, makes to be shrink-fit between deep groove ball bearing C11 and the rotation axis 21.There is a keyway at the endoporus place of straight spur gear C9, and also there is a corresponding keyway at the respective threaded place of rotation axis 21, fixes with key, makes between straight spur gear C9 and the rotation axis 21 to cooperate for key.The other end of rotation axis 21 is connected with bearing door D14, deep groove ball bearing D15 and straight spur gear D17 with identical method of attachment in order.
Described silk axis A19 one end is a helicitic texture; The other end is a sheet structure, and the centre is a cylindrical-shaped structure, and an end of sheet structure has two threaded holes 1901; Shown in Fig. 5 A, Fig. 5 B and Fig. 5 C, the structure of silk axis B22 is identical with the structure of silk axis A19.Described card silk piece A23 is a sheet structure, like Fig. 7 A, Fig. 7 B and Fig. 7 C, has two through hole E2301, and the structure of card silk piece B24 is identical with the structure of card silk piece A23.
One end of the helicitic texture of described silk axis A19 passes the through hole C401 of bearing door A4, the endoporus of deep groove ball bearing A3, the endoporus of straight spur gear A1 and the endoporus of spur bevel gear A18 in order, tightens fixing with nut at the screw thread edge place of silk axis A19 at last.Sheet structure one end of described silk axis A19 is through screw Connection Card silk piece A23; Screw passes two through hole E2301 of card silk piece A23 and two threaded holes 1901 of the sheet structure of silk axis A19 respectively; And then fixing catch silk piece A23; One end of the filament 26 that fixedly the time, will prepare is clamped between the sheet structure of card silk piece A23 and silk axis A19, makes filament 26 fastening clamps between card silk piece A23 and silk axis A19 through trip bolt.The through hole C401 of bearing door A4 is running fit than the somewhat larger in diameter of silk axis A19, and the endoporus of deep groove ball bearing A3 is suitable with the diameter of silk axis A19; Between deep groove ball bearing A3 and the silk axis A19 is shrink-fit; There is a keyway at the endoporus place of spur bevel gear A18, and the helicitic texture part of corresponding silk axis A19 also has a corresponding keyway, fixes with key; For key cooperates, an axis A19 is rotated with straight spur gear A18 between straight-tooth circular cone stud wheel A18 and the silk axis A19.There is a keyway at straight spur gear A1 endoporus place; The helicitic texture part of corresponding silk axis A19 also has a corresponding keyway; Fix with key, for key cooperates, straight spur gear A1 is rotated with the rotation of silk axis A19 between straight spur gear A1 and the silk axis A19; Described straight spur gear A also with straight spur gear D be meshed, and then straight spur gear D is rotated along with the rotation of straight spur gear A.
One end of the helicitic texture of described silk axis B22 passes the through hole C401 of bearing door B5, the endoporus of deep groove ball bearing B6 and the endoporus of straight spur gear B8 in order, tightens fixing with nut at the screw thread edge place of silk axis B22 at last.Sheet structure one end of described silk axis B22 is through screw Connection Card silk piece B24; Screw passes two through hole E2401 of card silk piece B24 and two threaded holes 2201 of the sheet structure of silk axis B22 respectively, and then will block a piece B24 and be fixed on the sheet structure of axis B22.The other end of filament 26 is clamped between the sheet structure of card silk piece B24 and silk axis B22, and with the nut at silk axis B22 two ends filament 26 is tightened through adjustment silk axis A19.The through hole C401 of bearing door B5 is running fit than the somewhat larger in diameter of silk axis B22, and the endoporus of deep groove ball bearing B6 is suitable with the diameter of silk axis B22; Between deep groove ball bearing B6 and the silk axis B22 is shrink-fit; There is a keyway at straight spur gear B8 endoporus place, and the helicitic texture of corresponding silk axis B22 also has a corresponding keyway, fixes with key; For key cooperates, an axis B22 is rotated with straight spur gear B8 between straight spur gear B8 and the silk axis B22; And guarantee that straight spur gear B8 and straight spur gear C9 are meshed, and make straight spur gear B8 rotate along with the rotation of straight spur gear C9.
Described rotating disk is incomplete disc-shaped structure; Structure is shown in Fig. 8-A, 8-B and 8-C; The central position has through hole; Disk has bulge-structure below the bottom surface of lead to the hole site, the motor output shaft 25 of this bulge-structure and the sputter Vakuumkammer of magnetron sputtering plating appearance uses bolts to be connected, and the rotation through motor output shaft 25 drives rotating disk 21 and rotates around motor output shaft 25;
The material of described support of bearing A2, support of bearing B7, support of bearing 10C and support of bearing D16 is 1Cr18Ni9Ti; The material of described bearing door A4, bearing door B5, bearing door C12 and bearing door D14 is LY12; The material of described silk axis A19, silk axis B22, card silk piece A23, card silk piece B24, rotating disk 21, rotation axis 13, spur bevel gear A18 and spur bevel gear B20 is 1Cr18Ni9Ti.
It is 60000 types that the specification of described deep groove ball bearing A3, deep groove ball bearing B6, deep groove ball bearing C11 and deep groove ball bearing D15 is.
The gauge size of described straight spur gear A1, straight spur gear B8, straight spur gear C9 and straight spur gear D17 is all identical, is preferably dimensioned to be: the number of teeth: 18, and tip diameter: 20mm; Root diameter: 15.6mm, tooth depth: 4.4mm, modulus: 1; Tooth profile angle: 17 °, reference diameter 18mm, tooth addendum: 1mm; Height of teeth root: 1.25mm, width between centers: 16mm, function is rotated for transmitting.
The number of teeth of described spur bevel gear A18 is 4～6 times of spur bevel gear B20.The number of teeth of described spur bevel gear B20 is 4～6 times of spur bevel gear A18, and then realizes that rotational velocity is 4～6 times of revolution speed, and described spur bevel gear A18 is preferably dimensioned to be: the number of teeth: 16, and tip diameter: 26mm; Tooth profile angle: 15 °, reference cone angle: 9.2 °, hold modulus greatly: 1.5; Big end reference diameter: 24mm, outer cone distance: 75mm, tooth addendum: 1; 5mm, height of teeth root: 1.8mm, dedendum angle: 1.4 °; Addendum angle: 1.4 °, tip angle: 10.6 °, root angle: 7.8 °.
A kind of multilayer composite wire rotary of using is equipped with the method that device prepares multilayer composite wire, comprises following step:
Step 1: the substrate in the sputter Vakuumkammer of magnetron sputtering plating appearance is pulled down; Be installed in spur bevel gear B20 on the base plate 27 of sputter Vakuumkammer through bolt; Like Fig. 9, rotating disk 21 is connected with motor output shaft 25 in the sputter Vakuumkammer through bolt.
A: open phonomoter; Driven rotary dish 21 is along horizontally rotating around motor output shaft 25; Make spur bevel gear A18 and rotating disk 21 rotation synchronously in the same way on the rotating disk 21; And the transmission of organizine axis A19, the rotation of spur bevel gear A18 is delivered on straight spur gear A1 and the Ka Si piece A23;
B: the rotation of straight spur gear A1 is delivered on the straight spur gear D17; And the transmission of process rotation axis 13; The rotation of straight spur gear D17 is delivered on the straight spur gear C9,, drives a card silk piece B24 and rotate then through the rotation of the straight spur gear B8 that is meshed with straight spur gear C9; Make card silk piece B24 and Ka Si piece A23 keep rotation synchronously, make the spin of fastening filament 26 no spirals and center on the synchronous revolution of motor output shaft;
Step 5: utilize magnetron sputtering equipment to prepare multilayer composite wire:
(a) open the magnetron sputtering plating appearance, adopt the d.c. sputtering method, 10～15 rev/mins of the revolution speed of setting rotating disk 21, power 100～500w selects target A, and sputtering time is set to 3～120 minutes;
(b) after magnetron sputtering finishes, target A is replaced by target B, 10～15 rev/mins of the revolution speed of setting rotating disk 21, power 100～500w, sputtering time 3～120 minutes;
(c) after magnetron sputtering finishes, target B is changed target C, 10～15 rev/mins of the revolution speed of setting rotating disk 21, power 100～500w, sputtering time 3～120 minutes; Accomplish until spraying.
Can be according to actual needs and magnetron sputtering equipment target commonly used select suitable target A, target B and target C, and select the required spraying number of plies.
Described filament comprises flexible filaments and inflexibility silk.
Embodiment 1:
Step 1: the substrate in the sputter Vakuumkammer of magnetron sputtering plating appearance is pulled down; Be installed in spur bevel gear B31 on the base plate 27 of sputter Vakuumkammer through bolt; Rotating disk 21 is connected with motor output shaft 25 in the sputter Vakuumkammer through bolt, and then fixedly multilayer composite wire rotary is equipped with device.
A: open phonomoter; Driven rotary dish 21 horizontally rotates around motor output shaft 25; Make spur bevel gear A18 and rotating disk 21 rotation synchronously in the same way on the rotating disk 21; And the transmission of organizine axis A19, the rotation of spur bevel gear A18 is delivered on straight spur gear A1 and the Ka Si piece A23;
B: the rotation of straight spur gear A1 is delivered on the straight spur gear D17; And the transmission of process rotation axis 13; The rotation of straight spur gear D17 is delivered on the straight spur gear C9,, drives a card silk piece B24 and rotate then through the rotation of the straight spur gear B8 that is meshed with straight spur gear C9; Make card silk piece B24 and Ka Si piece A23 keep rotation synchronously, make the fastening copper wire not have the spin of spiral and center on the synchronous revolution of motor output shaft;
Step 5: utilize magnetron sputtering equipment to prepare multilayer composite wire:
Open the magnetron sputtering plating appearance, adopt the d.c. sputtering method, 15 rev/mins of the revolution speed of setting rotating disk 21, power 250w selects the copper target, and sputtering time is set to accomplish after 3～10 minutes.
Carry out the scanning electron microscopic observation surface topography respectively with the plain metal copper wire and through the surface of metal copper wire behind the spraying non-crystalline material powder of said process preparation; Like Figure 10 and shown in Figure 11; Common metal copper wire smooth surface; Do not have amorphous powder, and be stained with a large amount of amorphous powders, and surface adhering is well-balanced through the metal copper wire surface behind the magnetron sputtering.
Embodiment 2:
Step 1: the substrate in the sputter Vakuumkammer of magnetron sputtering plating appearance is pulled down; Be installed in spur bevel gear B31 on the base plate 27 of sputter Vakuumkammer through bolt; Rotating disk 21 is connected with motor output shaft 25 in the sputter Vakuumkammer through bolt, and then fixedly multilayer composite wire rotary is equipped with device.
A: open phonomoter; Driven rotary dish 21 horizontally rotates around motor output shaft 25; Make spur bevel gear A18 and rotating disk 21 rotation synchronously in the same way on the rotating disk 21; And the transmission of organizine axis A19, the rotation of spur bevel gear A18 is delivered on straight spur gear A1 and the Ka Si piece A23;
B: the rotation of straight spur gear A1 is delivered on the straight spur gear D17; And the transmission of process rotation axis 13; The rotation of straight spur gear D17 is delivered on the straight spur gear C9,, drives a card silk piece B24 and rotate then through the rotation of the straight spur gear B8 that is meshed with straight spur gear C9; Make card silk piece B24 and Ka Si piece A23 keep rotation synchronously, make the fastening copper wire not have the spin of spiral and center on the synchronous revolution of motor output shaft;
Step 5: utilize magnetron sputtering equipment to prepare multilayer composite wire:
(a) open the magnetron sputtering plating appearance, adopt the d.c. sputtering method, 15 rev/mins of the revolution speed of setting rotating disk 21, power 500w selects silver-colored target, and sputtering time is set to 3 minutes.
(b) after magnetron sputtering finishes, silver-colored target is replaced by the copper target, 15 rev/mins of the revolution speed of setting rotating disk 21, power 500w, sputtering time 3 minutes.
(c) after magnetron sputtering finishes, once more the copper target is replaced by silver-colored target, 15 rev/mins of the revolution speed of setting rotating disk 21, power 500w, sputtering time 3 minutes; The beginning magnetron sputtering is accomplished until spraying.Completion outwards sprays all processes of silver layer, copper layer and silver layer three-decker successively from the lining on the copper wire surface.
The metal copper wire with silver layer, copper layer and silver layer three-decker behind the magnetron sputtering is carried out the scanning electron microscopic observation pattern, and like the secondary electron phase of the ESEM of the silver layer on the top layer of the copper wire of Figure 12 after for spraying, magnification is about 6000 times; Can find out that surface topography is more even, be the ESEM secondary electron phase in the copper wire transverse section behind the magnetron sputtering like Figure 13, and the film that copper wire is coated with has carried out certain peeling off; Can obviously see each thin film layer that is coated with, wherein Figure 14 is the high power magnified sweep electromicroscopic photograph of the circle ring area among Figure 13, about 15000 times of magnification; Can find out that a position of pointing out is the copper wire sandwich layer, diameter is about 140 μ m, is enclosed with three layers of b, c and d successively on the surface of copper wire sandwich layer a; Wherein b is a silver layer; The about 0.64 μ m of thickness, c is the copper layer, the about 0.44 μ m of thickness; D is a silver layer, the about 0.71 μ m of thickness.
Embodiment 3:
Step 1: the substrate in the sputter Vakuumkammer of magnetron sputtering plating appearance is pulled down; Be installed in spur bevel gear B31 on the base plate 27 of sputter Vakuumkammer through bolt; Rotating disk 21 is connected with motor output shaft 25 in the sputter Vakuumkammer through bolt, and then fixedly multilayer composite wire rotary is equipped with device.
A: open phonomoter; Driven rotary dish 21 horizontally rotates around motor output shaft 25; Make spur bevel gear A18 and rotating disk 21 rotation synchronously in the same way on the rotating disk 21; And the transmission of organizine axis A19, the rotation of spur bevel gear A18 is delivered on straight spur gear A1 and the Ka Si piece A23;
B: the rotation of straight spur gear A1 is delivered on the straight spur gear D17; And the transmission of process rotation axis 13; The rotation of straight spur gear D17 is delivered on the straight spur gear C9,, drives a card silk piece B24 and rotate then through the rotation of the straight spur gear B8 that is meshed with straight spur gear C9; Make card silk piece B24 and Ka Si piece A23 keep rotation synchronously, make the fastening copper wire not have the spin of spiral and center on the synchronous revolution of motor output shaft;
Step 5: utilize magnetron sputtering equipment to prepare multilayer composite wire:
(a) open the magnetron sputtering plating appearance, adopt the d.c. sputtering method, 15 rev/mins of the revolution speed of setting rotating disk 21, power 100w selects the silicon-dioxide target, and sputtering time is set to 10 minutes, the beginning magnetron sputtering.
(b) after magnetron sputtering finishes, silver-colored target is replaced by the copper target, 15 rev/mins of the revolution speed of setting rotating disk 21, power 100w, sputtering time 10 minutes, the beginning magnetron sputtering is until completion.
Magnetron sputtering is accomplished, and prepares the composite filament with skin-core structure, and this composite filament has high giant magnetoresistance effect, and the impedance ratio improves more than 5 times, can be used for the novel sensor that Weak magentic-field detects.
Embodiment 4:
Step 1: the substrate in the sputter Vakuumkammer of magnetron sputtering plating appearance is pulled down; Be installed in spur bevel gear B31 on the base plate 27 of sputter Vakuumkammer through bolt; Rotating disk 21 is connected with motor output shaft 25 in the sputter Vakuumkammer through bolt, and then fixedly multilayer composite wire rotary is equipped with device.
A: open phonomoter; Driven rotary dish 21 horizontally rotates around motor output shaft 25; Make spur bevel gear A18 and rotating disk 21 rotation synchronously in the same way on the rotating disk 21; And the transmission of organizine axis A19, the rotation of spur bevel gear A18 is delivered on straight spur gear A1 and the Ka Si piece A23;
B: the rotation of straight spur gear A1 is delivered on the straight spur gear D17; And the transmission of process rotation axis 13; The rotation of straight spur gear D17 is delivered on the straight spur gear C9,, drives a card silk piece B24 and rotate then through the rotation of the straight spur gear B8 that is meshed with straight spur gear C9; Make card silk piece B24 and Ka Si piece A23 keep rotation synchronously, make the amorphous thin ribbon of fastening CoFeSiB not have the spin of spiral and center on the synchronous revolution of motor output shaft;
Step 5: utilize magnetron sputtering equipment to prepare multilayer composite wire:
Open magnetron sputtering equipment, adopt the d.c. sputtering method, 15 rev/mins of the revolution speed of setting rotating disk 21, power 250w selects the aluminium target, and sputtering time is set to 3 minutes, the beginning magnetron sputtering, sputter is accomplished after 3 minutes.
ThroughThe surface of the amorphous thin ribbon of the CoFeSiB thin layer of aluminizing plays tangible preservative activity.Can the aluminium target be replaced by other metal or nonmetal the spraying accordingly.
Claims (7)
1. a multilayer composite wire rotary is equipped with device, it is characterized in that: comprise filament fixed assembly, rotation axis fixation kit, rotating disk and spur bevel gear B; Described filament fixed assembly comprises straight spur gear A, support of bearing A, deep groove ball bearing A, bearing door A, bearing door B, deep groove ball bearing B, support of bearing B, straight spur gear B, spur bevel gear A, silk axis A, silk axis B, card silk piece A and Ka Si piece B; Described rotation axis fixation kit comprises straight spur gear C, support of bearing C, deep groove ball bearing C, bearing door C, rotation axis, bearing door D, deep groove ball bearing D and support of bearing D and straight spur gear D;
Described support of bearing A is a L type structure, and the center of long limit one side has through hole A, and deep groove ball bearing A is fixed among this through hole A, has four through hole F around the through hole A; There are two through hole B at the minor face one lateral edges place of L type structure, and screw passes through hole B and support of bearing A is fixed on the disc surfaces of rotating disk;
Described bearing door A is the square sheet structure; The center has through hole C; Have four through hole D around the through hole C, the size of through hole D and distribution distance each other are identical with four through hole F on the support of bearing A, and screw passes through hole D and through hole F is fixed on the support of bearing A bearing door A;
The structure of described support of bearing B, support of bearing C and support of bearing D and the structure of support of bearing A are identical; The structure of described bearing door B, bearing door C and bearing door D and the structure of bearing door A are identical, and the fixed relationship between fixed relationship between fixed relationship between fixed relationship between support of bearing B, bearing door B and the rotating disk and support of bearing C, bearing door C and the rotating disk and support of bearing D, bearing door D and the rotating disk and support of bearing A, bearing door A and the rotating disk is identical;
Described rotation axis is used to transmit the rotation between straight spur gear D and the straight spur gear C; The two ends of rotation axis all have helicitic texture; Wherein an end of rotation axis passes the through hole C of bearing door C, the endoporus of deep groove ball bearing C and the endoporus of straight spur gear C in order, and tightens fixing with nut at the helicitic texture place of rotation axis; The other end of rotation axis is connected in order with bearing door D, deep groove ball bearing D and straight spur gear D with identical method of attachment and is fixing;
The end of described silk axis A is a helicitic texture, and the other end is a sheet structure, and the centre is a cylindrical-shaped structure, and an end of sheet structure has two threaded holes, and the structure of silk axis B is identical with the structure of silk axis A; Described card silk piece A is a sheet structure, has two through hole E, and the structure of card silk piece B is identical with the structure of card silk piece A;
One end of the helicitic texture of described silk axis A passes the through hole C of bearing door A, the endoporus of deep groove ball bearing A, the endoporus of straight spur gear A and the endoporus of spur bevel gear A in order, and tightens fixing through nut in the edge of the helicitic texture of silk axis A; For key cooperates, an axis A rotates with straight spur gear A between described straight-tooth circular cone stud wheel A and the silk axis A, and for key cooperates, straight spur gear A rotates with the rotation of silk axis A between described straight spur gear A and the axis A; Described straight spur gear A also with straight spur gear D be meshed, straight spur gear D rotates along with the rotation of straight spur gear A; One end of the sheet structure of described silk axis A is through screw Connection Card silk piece A; Screw passes two through hole E of card silk piece A and two threaded holes of the sheet structure of silk axis A respectively; And then fixing catch silk piece A; And an end of filament is clamped between the sheet structure of card silk piece A and silk axis A, make the filament fastening clamp between card silk piece A and silk axis A through trip bolt;
One end of the helicitic texture of described silk axis B passes the through hole C of bearing door B, the endoporus of deep groove ball bearing B and the endoporus of straight spur gear B in order; And tighten fixing at the screw thread edge place of silk axis B with nut; For key cooperates, an axis B rotates with straight spur gear B between described straight spur gear B and the silk axis B; Described straight spur gear B also is meshed with straight spur gear C, and straight spur gear B rotates along with the rotation of straight spur gear C; One end of the sheet structure of described silk axis B is through screw Connection Card silk piece B; Screw passes two through hole E of card silk piece B and two threaded holes of the sheet structure of silk axis B respectively; And then fixing catch silk piece B; And the other end of filament is clamped between the sheet structure of card silk piece B and silk axis B, and with the nut at silk axis B two ends filament is tightened through adjustment silk axis A;
Described rotating disk is connected with the motor output shaft bolt of the sputter Vakuumkammer of magnetron sputtering plating appearance, and the rotation through motor output shaft drives rotating disk and rotates around motor output shaft;
The straight-tooth cone angle of described spur bevel gear B is outside; Be arranged in rotating disk around form an awl rack rails road, described straight-tooth cone angle is meshed with spur bevel gear A, on the base plate of the sputter Vakuumkammer through being bolted to the magnetron sputtering plating appearance; Spur bevel gear B and rotating disk concentric; Motor output shaft rotates when driving the rotating disk rotation, and the rotation axis fixation kit and the filament fixed assembly that are fixed on the rotating disk rotate thereupon, and spur bevel gear A is the engaged transmission rotation on the awl rack rails road of spur bevel gear B; The rotation of spur bevel gear A drives straight spur gear A co-axial with it and rotates; Straight spur gear D and straight spur gear A engagement are rotated, and will rotate transmission through rotation axis and give straight spur gear C, and straight spur gear B is because of rotating with straight spur gear C engagement; Thereby realized the synchronous rotation of straight spur gear B and straight spur gear A, guaranteed that filament does not have the spiral rotation.
2. multilayer composite wire rotary according to claim 1 is equipped with device, it is characterized in that: the through hole C of described bearing door C is bigger than the diameter of rotation axis, is running fit between bearing door C and the rotation axis; The endoporus of described deep groove ball bearing C is suitable with the diameter of rotation axis, makes to be shrink-fit between deep groove ball bearing C and the rotation axis; There is a keyway at the endoporus place of described straight spur gear C, and also there is a corresponding keyway at the respective threaded place of rotation axis, fixes with key, makes between straight spur gear C and the rotation axis to cooperate for key;
The through hole C of described bearing door B is bigger than the diameter of silk axis B; Be connected to running fit between bearing door B and the silk axis B; The endoporus of described deep groove ball bearing B is suitable with the diameter of silk axis B, is connected to shrink-fit between deep groove ball bearing B and the axis B; There is a keyway at described straight spur gear B endoporus place, and the helicitic texture of corresponding silk axis B has a corresponding keyway, fixes with key;
The through hole C of described bearing door A is bigger than the diameter of silk axis A, is connected to running fit between bearing door A and the axis A; The endoporus of described deep groove ball bearing A is suitable with the diameter of silk axis A, is shrink-fit between deep groove ball bearing A and the silk axis A; There is a keyway at described spur bevel gear A and straight spur gear A endoporus place, and the helicitic texture of corresponding silk axis A also has corresponding keyway, fixes with key.
3. multilayer composite wire rotary according to claim 1 is equipped with device, it is characterized in that: the number of teeth of described spur bevel gear A is 4～6 times of spur bevel gear B.
4. a kind of multilayer composite wire rotary according to claim 1 is equipped with device, it is characterized in that: the material of described support of bearing A, support of bearing B, support of bearing C and support of bearing D is 1Cr18Ni9Ti;
The material of described bearing door A, bearing door B, bearing door C and bearing door D is LY12;
The material of described silk axis A, silk axis B, card silk piece A, card silk piece B, rotating disk, rotation axis, spur bevel gear A and spur bevel gear B is 1Cr18Ni9Ti.
5. a kind of multilayer composite wire rotary according to claim 1 is equipped with device, and its characteristic mainly is: the gauge size of described straight spur gear A, straight spur gear B, straight spur gear C and straight spur gear D is all identical.
6. a kind of multilayer composite wire rotary according to claim 1 is equipped with device, it is characterized in that: said filament is flexible filaments or inflexibility silk.
7. an application rights requires 1 said multilayer composite wire rotary to be equipped with the method that device prepares multilayer composite wire, comprises following step:
Step 1: the substrate in the sputter Vakuumkammer of magnetron sputtering plating appearance is pulled down, spur bevel gear B is installed in through bolt on the base plate of sputter Vakuumkammer, rotating disk is connected with motor output shaft in the sputter Vakuumkammer through bolt;
Step 2 is chosen the filament that diameter is 20～200 μ m, and length 8cm～8.5cm is immersed in it in Hydrogen chloride, removes surperficial dirt, and in the ultrasonic cleaning appearance, adopts the acetone soaking and washing;
Step 3; One end of filament is clamped between the sheet structure of card silk piece A and silk axis A; The other end is clamped between the sheet structure of card silk piece B and silk axis B; The fastening coupling screw that blocks on silk piece A and the Ka Si piece B is tightened the nut at an axis A and silk axis B two ends simultaneously, filament is tightened exceptionally straight back fix;
Step 4, multilayer composite wire rotary are equipped with device and rotarily open:
A: open phonomoter; Motor output shaft driven rotary armor horizontally rotates around motor output shaft; Make the spur bevel gear A rotation synchronously in the same way on the rotating disk, and the transmission of organizine axis A, the rotation of spur bevel gear A is delivered on straight spur gear A and the Ka Si piece A;
B: the rotation of straight spur gear A is delivered on the straight spur gear D; And the transmission of process rotation axis; The rotation of straight spur gear D is delivered on the straight spur gear C, drives the rotation of the straight spur gear B that is meshed with straight spur gear C then, rotate thereby drive card silk piece B; Make card silk piece B and Ka Si piece A keep rotation synchronously, make the fastening filament not have the spin of spiral and center on the synchronous revolution of motor output shaft;
Step 5: magnetron sputtering equipment prepares multilayer composite wire:
A: open the magnetron sputtering plating appearance, adopt the d.c. sputtering method, 10～15 rev/mins of the revolution speed of setting rotating disk, power 100～500w selects target A, and sputtering time is set, the beginning magnetron sputtering;
B: magnetron sputtering is replaced by target B with target A after finishing, 10～15 rev/mins of the revolution speed of setting rotating disk, and power 100～500w is provided with sputtering time, the beginning magnetron sputtering;
C: after magnetron sputtering finishes, target B is changed target C, 10～15 rev/mins of the revolution speed of setting rotating disk, power 100～500w is provided with sputtering time, and the beginning magnetron sputtering is accomplished until spraying.
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| CN110965038A (en) * | 2019-12-26 | 2020-04-07 | 北京大学深圳研究院 | Clamping and rotating device for physical deposition coating on surface of thin bar |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN2174480Y (en) * | 1993-09-08 | 1994-08-17 | 龙口市真空金钛公司 | Combined vacuum ion coating equipment |
| CN1359110A (en) * | 2001-12-24 | 2002-07-17 | 夏登峰 | Method for preparing composite conductive material |
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|---|---|---|---|---|
| CN2174480Y (en) * | 1993-09-08 | 1994-08-17 | 龙口市真空金钛公司 | Combined vacuum ion coating equipment |
| CN1359110A (en) * | 2001-12-24 | 2002-07-17 | 夏登峰 | Method for preparing composite conductive material |
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