CN101916049B - Workbench - Google Patents
Workbench Download PDFInfo
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- CN101916049B CN101916049B CN2010102493664A CN201010249366A CN101916049B CN 101916049 B CN101916049 B CN 101916049B CN 2010102493664 A CN2010102493664 A CN 2010102493664A CN 201010249366 A CN201010249366 A CN 201010249366A CN 101916049 B CN101916049 B CN 101916049B
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- platform
- accommodation space
- worktable
- worktable according
- loading end
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Abstract
The invention discloses a workbench, comprising a platform, a plurality of supporting pieces and an airflow diversion unit, wherein the platform is provided with a bearing surface and a back surface which are opposite and a plurality of accommodating holes penetrating through the back from the bearing surface; the supporting pieces are respectively arranged in the accommodating holes; the airflow diversion unit is connected with the accommodating holes from the back of the platform; besides, each supporting piece comprises a shell and a rolling piece; the shell is provided with an accommodating groove; and the rolling piece is arranged in the accommodating groove and locally protrudes out of the accommodating groove. When the plates on the bearing surface are changed, the airflow can be used for pushing the supporting pieces to enable the rolling pieces of the supporting pieces to locally protrude out of the bearing surface to support the plates, thus the workbench can effectively reduce the friction caused by pushing the plates and further ensure the plates to be easily moved or changed.
Description
Technical field
The present invention relates to a kind of worktable, and relate in particular to a kind of worktable that drives support member with air-flow.
Background technology
Fig. 1 is the synoptic diagram of the worktable of existing a kind of exposure sources.Please with reference to Fig. 1, the worktable 100 of existing exposure sources comprises platform 110 and metal cover board 120.Platform 110 has loading end 112, and metal cover board 120 is arranged on the loading end 112 of platform 110.
Above-mentioned metal cover board 120 is in order to carrying substrate to be made public, and the thickness approximate number of metal cover board 120 centimetre.Metal cover board 120 is provided with protective finish (figure does not show), and is impaired because of friction metal cover board 120 to prevent substrate.In addition, the size of metal cover board 120 is the sizes that cooperate substrate.In other words, when the size of substrate was changed, metal cover board 120 also need be changed.In addition, when protective finish wore and tore, the metal cover board 120 that also need more renew was to prevent the substrate wearing and tearing.
When changing metal cover board 120, need the application of force (like thrust F) in metal cover board 120, metal cover board 120 is pushed away the loading end 112 of platform 110.Yet,,, cause the friction force between metal cover board 120 and the loading end 112 bigger so metal cover board 120 is bigger with the contact area of loading end 112 because metal cover board 120 is whole contact loading ends 112.And, because of the thinner thickness of metal cover board 120, cause the application of force to be difficult for.Therefore, the worktable 100 of existing exposure sources has the not easily changeable shortcoming of metal cover board 120.In addition, because metal cover board 120 is difficult for replacing, thus when changing metal cover board 120, cause metal cover board 120 and platform 110 scratch each other easily, and metal cover board 120 also is out of shape because of the application of force is improper easily.
Summary of the invention
The present invention provides a kind of worktable, so that the sheet material on the worktable is easier to move.
For reaching above-mentioned advantage, the present invention proposes a kind of worktable, and it comprises platform, a plurality of support member and air-flow guide unit.A plurality of containing holes that platform has relative loading end and the back side and is through to the back side from loading end.Support member is arranged in the containing hole respectively, and the air-flow guide unit is connected to containing hole from the back side of platform.In addition, each support member comprises housing and rolling member, and its middle shell has storage tank, and rolling member is arranged in the storage tank, and the rolling member part is protruding to outside the storage tank.
In one embodiment of this invention, each above-mentioned support member more comprises sleeve, and housing is arranged in the sleeve.
In one embodiment of this invention; The bottom of above-mentioned sleeve is provided with flange; Each containing hole comprises first accommodation space and second accommodation space that is connected, and first accommodation space passes to loading end, and second accommodation space is arranged between first accommodation space and the back side.The internal diameter of first accommodation space is less than the internal diameter of second accommodation space, and the junction of first accommodation space and second accommodation space is provided with retaining wall.This retaining wall is for providing flange one spacing height.
In one embodiment of this invention, each above-mentioned support member more comprises sealing ring, around the outside that is arranged at flange.
In one embodiment of this invention, above-mentioned flange is provided with ring groove, and sealing ring is fixed in the ring groove, and the part sealing ring protrudes from outside the ring groove.
In one embodiment of this invention, above-mentioned rolling member is universal ball or roller.
In one embodiment of this invention, above-mentioned worktable more comprises a plurality of connection gaskets, be arranged in the containing hole respectively, and in abutting connection with the back side.The air-flow guide unit comprises a plurality of arms, is connected to connection gasket respectively.And each connection gasket has a connecting hole.
In one of the present invention embodiment, above-mentioned worktable more comprises cover plate, is disposed at the loading end of platform, to hide containing hole.
In one embodiment of this invention, above-mentioned worktable more comprises pedestal, with carrying platform.
In one embodiment of this invention, above-mentioned worktable more comprises heat-conducting plate, is disposed between pedestal and the platform, wherein is provided with the flow channel for liquids unit in the heat-conducting plate.
In one embodiment of this invention, more be provided with a plurality of supporting pins in the above-mentioned platform, and supporting pin is suitable for stretching out outside the loading end of platform.
In one embodiment of this invention, be provided with limiting section in each above-mentioned containing hole, provide corresponding shell one spacing height.
During the sheet material of worktable of the present invention on changing loading end; Because of promoting support member, make the rolling member Local Convex of support member start from loading end to support sheet material, therefore through air-flow; Can effectively reduce the friction force when promoting sheet material, and then sheet material is moved or replacing easily.
Describe the present invention below in conjunction with accompanying drawing and specific embodiment, but not as to qualification of the present invention.
Description of drawings
Fig. 1 is the synoptic diagram of the worktable of existing a kind of exposure sources;
Fig. 2 is the synoptic diagram of a kind of worktable of one embodiment of the invention;
Fig. 3 is the support member of Fig. 2 and the three-dimensional exploded view of connection gasket;
Fig. 4 A is the synoptic diagram of the worktable of Fig. 2 when being used to carry sheet material;
Fig. 4 B is the synoptic diagram that the application of force promotes the sheet material on the worktable of Fig. 2;
Fig. 5 is the synoptic diagram of the rolling member of another embodiment of the present invention;
Fig. 6 is the synoptic diagram of the worktable of another embodiment of the present invention;
Fig. 7 is the synoptic diagram of the worktable of another embodiment of the present invention;
Fig. 8 is the three-dimensional exploded view of the support member of Fig. 7;
Fig. 9 is the synoptic diagram of the worktable of another embodiment of the present invention;
Figure 10 is the synoptic diagram of the worktable of another embodiment of the present invention.
Wherein, Reference numeral:
100: worktable
110: platform
112: loading end
120: metal cover board
200,200a, 200b, 200c: worktable
210,210b, 210c: platform
211: supporting pin
212: loading end
213,216,216c: containing hole
214: the back side
217: the first accommodation spaces
218: the second accommodation spaces
219: retaining wall
220,220 ', 220 ", 220c: support member
221: ring groove
222: housing
223: storage tank
224,224 ': rolling member
225: end face
226: sleeve
227,227 ": flange
228: sealing ring
230: the air-flow guide unit
232: arm
240: connection gasket
242: connecting hole
250: cover plate
260: pedestal
270: heat-conducting plate
300: sheet material
A: air-flow
D1, D2: internal diameter
F: thrust
P: spacing place
Embodiment
Fig. 2 is the synoptic diagram of a kind of worktable of one embodiment of the invention, and Fig. 3 is the support member of Fig. 2 and the three-dimensional exploded view of connection gasket.Please with reference to Fig. 2 and Fig. 3, the worktable 200 of present embodiment comprises platform 210, a plurality of support member 220 and air-flow guide unit 230.Platform 210 has relative loading end 212 is through to the back side 214 with the back side 214 and from loading end 212 a plurality of containing holes 216.Support member 220 is arranged at respectively in the containing hole 216, and air-flow guide unit 230 is connected to containing hole 216 from the back side 214 of platform 210.This air-flow guide unit 230 can be connected to gas supply device (scheming not formula).In addition, each support member 220 comprises housing 222 and rolling member 224, and its middle shell 222 has storage tank 223, and rolling member 224 is arranged in the storage tank 223, and rolling member 224 parts are protruding to outside the storage tank 223.
Each above-mentioned support member 220 for example also comprises sleeve 226, and housing 223 is arranged in the sleeve 226, and the bottom of sleeve 226 for example is provided with flange 227.The rolling member 224 of each support member 220 for example is universal ball.In addition, each containing hole 216 for example comprises first accommodation space 217 and second accommodation space 218 that is connected.First accommodation space 217 passes to loading end 212, and second accommodation space 218 is arranged between first accommodation space 217 and the back side 214.The inside diameter D 1 of first accommodation space 217 for example is the inside diameter D 2 less than second accommodation space 218, and the junction of first accommodation space 217 and second accommodation space 218 is provided with retaining wall 219.This retaining wall 219 provides flange 227 1 spacing height.In addition, the worktable 200 of present embodiment can more comprise a plurality of connection gaskets 240, be arranged at respectively in the containing hole 216, and the back side 214 of abutment platforms 210.Air-flow guide unit 230 comprises a plurality of arms 232, and these arms 232 are connected to connection gasket 240 respectively.Particularly, each connection gasket 240 has a connecting hole 242, and arm 232 is connected to these connecting holes 242 respectively.Connection gasket 240 is except supplying arm 232 connects, also can be with the bottom seals of second accommodation space 218 of containing hole 216.
Fig. 4 A is the synoptic diagram of the worktable of Fig. 2 when being used to carry sheet material, and the synoptic diagram of the sheet material on the worktable of Fig. 4 B to be the application of force promote Fig. 2.Please earlier with reference to Fig. 4 A, when not feeding air-flow to air-flow guide unit 230, support member 220 is in the bottom of containing hole 216 because of the relation of gravity, and rolling member 224 does not protrude from the loading end 212 of platform 210.At this moment, sheet material 300 can be positioned over the loading end 212 of platform 210, to carry out operation.
Please with reference to Fig. 4 B, when desire moves sheet material 300 or sheet material 300 moved away from platform 210, can provide in air current A to the air-flow guide unit 230 through gas supply device.Air current A can feed in the containing hole 216 via the arm 232 of air-flow guide unit 230, to promote support member 220, makes the loading end 212 of rolling member 224 Local Convex from platform 210.So, can support sheet material 300, so that sheet material 300 separates with the loading end 212 of platform 210 through support member 220.In addition, because the junction of first accommodation space 217 and second accommodation space 218 is provided with retaining wall 219, so when the flange of sleeve 226 227 was pushed to retaining wall 219 by air current A, retaining wall 219 can prop up flange 227.Therefore, retaining wall 219 can provide flange 227 1 spacing height, is released outside the storage tank 216 by air current A to prevent support member 220.
Hold above-mentioned; Be different from the face way of contact of prior art, present embodiment is that the rolling member 224 through support member 220 supports sheet material 300 when moving sheet material 300; So can significantly reduce the contact area of sheet material 300 and worktable 200, the friction force when moving sheet material 300 to reduce.And, when moving sheet material 300,,, make sheet material 300 be easier to be moved so can significantly reduce the friction force between sheet material 300 and the rolling member 224 because rolling member 224 can roll.Therefore, the worktable 200 of present embodiment has the advantage that is easy to move sheet material 300 and changes sheet material 300.
In addition, because the rolling member 224 of present embodiment is universal ball, so can promote sheet material 300 from the different direction application of forces.In another embodiment shown in Figure 5, the rolling member 224 ' of support member 220 ' also can be roller.Roller also has the advantage that makes sheet material be easy to be pushed, but owing to the rotating direction of roller is fixed, so can be used to limit the moving direction of sheet material.The visual demand of rolling member of the present invention and select roller or universal ball for use, both exceed but rolling member of the present invention is not with this.
In addition, like Fig. 6 and shown in Figure 7, for prevent gas leakage, each support member 220 " can more comprise sealing ring 228, it is around being arranged at sleeve 226 " flange 227 " the outside.In more detail, flange 227 " be provided with ring groove 221, and sealing ring 228 is fixed in the ring groove 221, and part sealing ring 228 protrudes from outside the ring groove 221, and is resisted against the sidewall of second accommodation space 218.So, the effect of sealing can be provided, further to prevent gas leakage.
Fig. 8 is the synoptic diagram of the worktable of another embodiment of the present invention.Please with reference to Fig. 8, the worktable 200a of present embodiment is similar with above-mentioned worktable 200, and difference is in worktable 200a and more comprises cover plate 250, is disposed at the loading end 212 of platform 210, to hide containing hole 216.When worktable 200a was applied to exposure sources, substrate to be made public was to be arranged on the cover plate 250.Present embodiment produces defective because of hiding containing hole 216 through cover plate 250 so can prevent exposure technology from receiving the influence of containing hole 216.
Above-mentioned cover plate 250 for example is a sheet metal, but not as limit.The size of cover plate 250 for example cooperates the size of substrate to be made public.When need are changed cover plate 250 plates of different size, can promote support member 220 through air-flow guide unit 230 air-guidings, to support cover plate 250, make cover plate 250 be easy to change through support member 220.So, can prevent cover plate 250 and platform 210 scratch each other, and avoid cover plate 250 to be out of shape because of the application of force is improper.
The worktable 200a of present embodiment for example more comprises the pedestal 260 in order to carrying platform 210.In addition, worktable 200a can more comprise heat-conducting plate 270, is disposed between pedestal 260 and the platform 210.When this worktable 200a is used for exposure technology, heat-conducting plate 270 can with the heat interchange of carrying out of cover plate 250, overheated with the substrate of avoiding cover plate 250 and be arranged on the cover plate 250.In addition, can be provided with flow channel for liquids unit (figure does not show) in the heat-conducting plate 270, for the feeding liquid coolant, and then the radiating efficiency of lifting heat-conducting plate 270.
Fig. 9 is the synoptic diagram of the worktable of another embodiment of the present invention.Please with reference to Fig. 9, the worktable 200b of present embodiment is similar with above-mentioned worktable 200, and difference is in and in the platform 210b of worktable 200b, more is provided with a plurality of supporting pins 211.These supporting pins 211 are suitable for stretching out outside the loading end 212 of platform 210b.In more detail, in the time will sheet material being placed the loading end 212 of platform 210b, the supporting pin 211 that is placed in the containing hole 213 is stretched out outside the loading end 212 of platform 210b, to accept sheet material.Then, supporting pin 211 is regained in the containing hole 213 of platform 210b, so that sheet material is placed on the loading end 212 of platform 210b.
Figure 10 is the synoptic diagram of the worktable of another embodiment of the present invention.Please with reference to Figure 10, the worktable 200c of present embodiment is similar with advantage with the structure of above-mentioned worktable 200, below only describes to the main difference place of its structure.Be provided with limiting section 215 in each containing hole 216c of the platform 210c of the worktable 200c of present embodiment, and support member 220c for example comprises housing 222 and rolling member 224.Limiting section 215 for example is the shank that the hole wall from containing hole 216c extends internally, with the spacing height of the housing 222 that provides support part 220c.Also promptly, when feeding air current A to air-flow guide unit 230 with promotion support member 220c, the end face 225 of the housing 222 of support member 220c can prop up for limited 215, is pushed out outside the containing hole 216c to prevent support member 220c.
In sum; In worktable of the present invention, because the air-flow guide unit is connected to containing hole from the back side of platform, so in the time will moving the sheet material that is positioned at loading end; Air-flow can feed in the containing hole via the air-flow guide unit; To promote support member, make the rolling member Local Convex from loading end, and then support sheet material.So, when moving sheet material, because the friction force between sheet material and the rolling member is less, so be easier to move sheet material or change sheet material.
Certainly; The present invention also can have other various embodiments; Under the situation that does not deviate from spirit of the present invention and essence thereof; Those of ordinary skill in the art can make various corresponding changes and distortion according to the present invention, but these corresponding changes and distortion all should belong to the protection domain of claim of the present invention.
Claims (12)
1. a worktable is characterized in that, comprising:
One platform, a plurality of containing holes that have a relative loading end and a back side and be through to this back side from this loading end;
A plurality of support members are arranged at respectively in those containing holes, and each support member comprises:
One housing has a storage tank;
One rolling member is arranged in this storage tank, and this rolling member part is protruding to outside this storage tank; And
One air-flow guide unit is connected to those containing holes from this back side of this platform.
2. worktable according to claim 1 is characterized in that each support member also comprises a sleeve, and this housing is arranged in this sleeve.
3. worktable according to claim 2; It is characterized in that; One bottom of this sleeve is provided with a flange, and each containing hole comprises one first accommodation space and one second accommodation space that is connected, and this first accommodation space passes to this loading end; This second accommodation space is arranged between this first accommodation space and this back side; The internal diameter of this first accommodation space is less than the internal diameter of this second accommodation space, and the junction of this first accommodation space and this second accommodation space is provided with a retaining wall, for this flange one spacing height is provided.
4. worktable according to claim 3 is characterized in that each support member also comprises a sealing ring, around the outside that is arranged at this flange.
5. worktable according to claim 4 is characterized in that this flange is provided with a ring groove, and the sealing ring is fixed in this ring groove, and part sealing ring protrudes from outside this ring groove.
6. worktable according to claim 1 is characterized in that, those rolling members are universal ball or roller.
7. worktable according to claim 1 is characterized in that, also comprises a plurality of connection gaskets; Be arranged at respectively in those containing holes, and in abutting connection with this back side, this air-flow guide unit comprises a plurality of arms; Be connected to those connection gaskets respectively, each connection gasket has a connecting hole.
8. worktable according to claim 1 is characterized in that, also comprises a cover plate, is disposed at this loading end of this platform, to hide those containing holes.
9. worktable according to claim 1 is characterized in that, also comprises a pedestal, to carry this platform.
10. worktable according to claim 9 is characterized in that, also comprises a heat-conducting plate, is disposed between this pedestal and this platform, wherein is provided with a flow channel for liquids unit in this heat-conducting plate.
11. worktable according to claim 1 is characterized in that, more is provided with a plurality of supporting pins in this platform, and those supporting pins are suitable for stretching out outside this loading end of this platform.
12. worktable according to claim 1 is characterized in that, is provided with a limiting section in each containing hole, for this corresponding housing one spacing height is provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010102493664A CN101916049B (en) | 2010-08-02 | 2010-08-02 | Workbench |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010102493664A CN101916049B (en) | 2010-08-02 | 2010-08-02 | Workbench |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101916049A CN101916049A (en) | 2010-12-15 |
| CN101916049B true CN101916049B (en) | 2012-04-25 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010102493664A Active CN101916049B (en) | 2010-08-02 | 2010-08-02 | Workbench |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101916049B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104834188B (en) * | 2015-05-25 | 2019-02-01 | 南京中电熊猫液晶显示科技有限公司 | A kind of supporting pin and baking board |
| CN104851187A (en) * | 2015-06-08 | 2015-08-19 | 广州御银自动柜员机技术有限公司 | Movement limiting structure |
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| JP2000286185A (en) * | 1999-03-31 | 2000-10-13 | Nec Kansai Ltd | Spin chuck |
| KR20010059483A (en) * | 1999-12-30 | 2001-07-06 | 서성원 | Apparatus for loading semi-conductor wafer |
| JP2006245302A (en) * | 2005-03-03 | 2006-09-14 | Fuji Photo Film Co Ltd | Sheet body holding mechanism and drawing device using the same |
| CN1841202A (en) * | 2005-03-28 | 2006-10-04 | 株式会社Orc制作所 | Exposure worktable and exposure device |
| CN101162367A (en) * | 2006-10-11 | 2008-04-16 | 优志旺电机株式会社 | Stage device |
| KR20080035155A (en) * | 2006-10-18 | 2008-04-23 | 주성엔지니어링(주) | Substrate holder, vacuum treatment system having it and cluster system |
| JP2009272370A (en) * | 2008-05-01 | 2009-11-19 | Speedfam Co Ltd | Vacuum adsorption device for works comprising cooling liquid feeding mechanism |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5063520B2 (en) * | 2008-08-01 | 2012-10-31 | 東京エレクトロン株式会社 | Plasma processing method and plasma processing apparatus |
-
2010
- 2010-08-02 CN CN2010102493664A patent/CN101916049B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000286185A (en) * | 1999-03-31 | 2000-10-13 | Nec Kansai Ltd | Spin chuck |
| KR20010059483A (en) * | 1999-12-30 | 2001-07-06 | 서성원 | Apparatus for loading semi-conductor wafer |
| JP2006245302A (en) * | 2005-03-03 | 2006-09-14 | Fuji Photo Film Co Ltd | Sheet body holding mechanism and drawing device using the same |
| CN1841202A (en) * | 2005-03-28 | 2006-10-04 | 株式会社Orc制作所 | Exposure worktable and exposure device |
| CN101162367A (en) * | 2006-10-11 | 2008-04-16 | 优志旺电机株式会社 | Stage device |
| KR20080035155A (en) * | 2006-10-18 | 2008-04-23 | 주성엔지니어링(주) | Substrate holder, vacuum treatment system having it and cluster system |
| JP2009272370A (en) * | 2008-05-01 | 2009-11-19 | Speedfam Co Ltd | Vacuum adsorption device for works comprising cooling liquid feeding mechanism |
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| Publication number | Publication date |
|---|---|
| CN101916049A (en) | 2010-12-15 |
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