CN101907758B - Eccentricity adjusting and assembling method, and eccentricity adjusting and assembling device of optical element - Google Patents
Eccentricity adjusting and assembling method, and eccentricity adjusting and assembling device of optical element Download PDFInfo
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- CN101907758B CN101907758B CN201010200107.2A CN201010200107A CN101907758B CN 101907758 B CN101907758 B CN 101907758B CN 201010200107 A CN201010200107 A CN 201010200107A CN 101907758 B CN101907758 B CN 101907758B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0221—Testing optical properties by determining the optical axis or position of lenses
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
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- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
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Abstract
The invention provides an eccentric adjusting and assembling method and adjusting and assembling device of optical element. The method includes: only mounting a first lens located most against the incident side of the measuring light S1; secondly, measuring the eccentric amount of the first lens S2, and calculating the position adjusting amount of the first lens based on the measured value S3; subsequently adjusting the eccentric amount of the first lens to make the eccentric amount close to 0 S5, measuring the eccentric amount of the first lens again S5, to judge whether it is below the critical value S6; returning to step 3 if it is larger than the critical value, adhering the first lens to the inside of the lens barrel 61 if it is below the critical value S7; and then judging whether a next lens needed to mount exists S8, if so, repeating the steps 1 to 7 to the lens. Therefore, when the optical element group to be detected is a coaxial group configured with a plurality of optical elements, as an integral system, the eccentric adjusting and assembling method and adjusting and assembling device of optical element can be effectively performed at high accuracy.
Description
Technical field
The bias that the present invention relates to a kind of optical element is adjusted assemble method and the eccentric apparatus for assembling of adjusting, the coordinate data of the index picture (censuring picture) that it forms based on light is measured in the tested surface irradiation of optical elements such as group lens etc. is measured the offset of tested optical element, and adjusts this and assemble tested optical element group body eccentric the time.
Background technology
Known in the past have, and in the operation of making the device that uses lens, measures the offset of each lens, based on this measured value, bias alleviated so that lens remain on the method in lens frame (lens barrel).Wherein, have as the method for the offset of measuring lens is known, use the method (with reference to following patent documentation 1～3) of the measuring method that is called autocollimation method.
In these offset measuring methods, shine the measurement light of the index pattern of projection regulation shape at tested surface when tested optical element is rotated centered by regulation (institute decided) axle, and the index that is formed by reflected light or transmitted light from tested surface is looked like on the shooting face that images in.This index picture is taken at the position of rotation of each tested surface, and obtains the coordinate of this inconocenter point at each position of rotation.If tested surface is eccentric, each inconocenter point of the index picture of taking at this each position of rotation is scattered in along 1 circle in the coordinate system of setting with respect to shooting face, so can obtain from its branch's situation the offset of tested surface.
Particularly, obtain the circle (hereinafter referred to as " approximate circle ") that is suitable for each inconocenter point and this center is set as datum mark, distance or approximate radius of a circle till from this datum mark to inconocenter point arbitrarily can be obtained as the offset of tested surface.
And the offset of tested lens calculates based on the central point distance each other of the above-mentioned circle of obtaining for each face in this table.
Utilize this method to measure the offset of tested lens, and adjust the processing of the position of tested lens based on this measured value, so that offset becomes 0.
Patent documentation 1: Japanese Patent Publication 2005-55202 communique
Patent documentation 2: Japanese Patent Publication 2007-17431 communique
Patent documentation 3: Japanese Patent Publication 2007-327771 communique
Yet, in said method, tested lens become signal-lens situation be illustrated, but in various lens combinations, also known have the multi-disc lens configuration in coaxial, the method group lens type.But in these group lens, how to carry out the measurement of lens deviations amount, the adjustment of bias and assembling ability high precision and the effective this point of lens at each each lens, do not establish clear and definite method.
Summary of the invention
The present invention completes in light of this situation, its purpose is, provide a kind of at tested optical element when the multi-disc optical element is disposed at coaxial element, but adjust assemble method and the eccentric apparatus for assembling of adjusting as entire system high precision and the bias of optical element of effectively carrying out the assembling of the measurement of the offset of optical element, eccentric adjustment and optical element.
the bias of optical element involved in the present invention is adjusted assemble method, arrange in the tested lens combination body that forms on a plurality of lens are coaxial in lens barrel, utilize projection set quota pattern measurement light irradiation and measure these lens offset separately, and carry out the assembling of this tested lens combination body while adjusting this offset, wherein, at first, in should consisting of each lens of above-mentioned tested lens combination body, the 1st lens configuration that only should be disposed at any one party end in orientation above-mentioned coaxial on, and measure the offset of the 1st lens, the mode that diminishes with the offset of the 1st lens based on this measured value is adjusted the desired location of the 1st lens, and the position after this adjustment makes the 1st lens remain in lens barrel, then, should be with respect to the 1st lens and in abutting connection be disposed at the 2nd lens configuration of the light incident side opposition side of above-mentioned measurement light above-mentioned coaxial on, and measure the offset of the 2nd lens, adjust the desired location of the 2nd lens so that the offset of the 2nd lens diminishes based on this measured value, position after this adjustment makes the 2nd lens remain in lens barrel, after, similarly, for should be in abutting connection with the lens that are disposed at the light incident side opposition side of above-mentioned measurement light, adjust above-mentioned desired location while measuring above-mentioned offset successively, and make it remain on lens barrel, the measurement of the offset of said lens is carried out in the following way, namely to the face of the light incident side that is positioned at described measurement light in said lens be positioned at and each of the face of the light incident side opposition side of described measurement light, the circle of index picture of specific each each anglec of rotation by regulation, and obtain the coordinate of central point of specific this circle, afterwards, to what obtain, about each face of said lens, the coordinate difference of the central point of above-mentioned circle is calculated, this value that calculates is made as the offset of said lens.
After, similarly, for should in abutting connection with the optical element that is disposed at the light incident side opposition side of above-mentioned measurement light, adjusting above-mentioned desired location while measure successively above-mentioned offset, and make it remain on lens barrel.
and, the measurement of preferred above-mentioned offset is undertaken by following, namely shine the measurement light of projection set quota pattern at tested surface, when above-mentioned tested surface is rotated centered by the regulation axle, take at each at least 3 different position of rotation or 2 position of rotation of each 180 degree of being separated by the index picture that is formed at shooting face by reflected light or transmitted light from this tested surface, the coordinate of the inconocenter point of specific each index picture in each this position of rotation shooting respectively in the coordinate system of setting with respect to above-mentioned shooting face, measure the offset of above-mentioned tested surface based on the coordinate data of this specific each inconocenter point.
And the measurement of the offset of preferred above-mentioned optical element is following to be carried out, namely to the table of above-mentioned optical element the inside separately, and the circle of specific These parameters picture by each each anglec of rotation of afore mentioned rules, and obtain the coordinate of the central point of specific this circle,
Afterwards, calculate obtain, to the coordinate difference of the central point of the table the inside above-mentioned circle separately of above-mentioned optical element, this value that calculates is made as the offset of above-mentioned optical element.
On the other hand, the bias of optical element involved in the present invention is adjusted apparatus for assembling, arrange in the tested optical element group body that forms on a plurality of optical elements are coaxial in lens barrel, measure this optical element offset separately, and carry out the assembling of this tested optical element group body when adjusting this offset, it is characterized in that possessing:
The optical element collocation mechanism successively configures each optical element that should consist of above-mentioned tested optical element group body from the light incident side of above-mentioned measurement light above-mentioned on coaxial;
The offset measuring mechanism, when at every turn above-mentioned coaxial on configuration during above-mentioned optical element, uses the offset of the above-mentioned optical element that above-mentioned measurement photo measure should configure;
The desired location adjusting mechanism is adjusted the desired location of this optical element, so that the offset of this optical element diminishes according to this measurement result;
The optical element maintaining body makes this optical element remain on lens barrel in the position of this adjustment.
And preferred above-mentioned optical element collocation mechanism possesses the above-mentioned optical element of conveying optical element adsorbing mechanism is separately arranged.
And, preferred above-mentioned optical element collocation mechanism possess a plurality of be disposed at above-mentioned optical element around and be the offset of adjusting this optical element, the piezoelectric element of only pressing the side small quantity of this optical element.
In addition, preferred above-mentioned a plurality of piezoelectric elements consist of relatively same optical element and work in coordination with the group of adjusting, possess above-mentioned piezoelectric element is moved to and each self-corresponding position of this optical element, so that can be successively to the PZT travel mechanism of above-mentioned each self-adjusting offset of a plurality of optical elements, this PZT travel mechanism possesses to be made above-mentioned piezoelectric element to PZT upper and lower travel mechanism that the orientation of above-mentioned optical element is moved and carries out to the PZT horizontal direction travel mechanism of the operation of the above-mentioned piezoelectric element of radially coming in and going out of above-mentioned optical element.
the bias of optical element involved in the present invention is adjusted in assemble method, be set as follows, namely in each optical element that should consist of tested optical element group body, only should be disposed in the optical element orientation the 1st optical element of any one party end be configured in above-mentioned coaxial on, and measure the offset of the 1st optical element, adjust the desired location of the 1st optical element based on this measured value, so that the offset of the 1st optical element diminishes, make the 1st optical element remain on lens barrel in the position of this adjustment, then, should be with respect to the 1st optical element and in abutting connection be disposed at the 2nd optical element with the light incident side opposition side of above-mentioned measurement light be configured in above-mentioned coaxial on, and measure the offset of the 2nd optical element, adjust the desired location of the 2nd optical element based on this measured value, so that the offset of the 2nd optical element diminishes, make the 2nd optical element remain on lens barrel in the position of this adjustment, after, similarly, for should be in abutting connection with the optical element that configures with the light incident side opposition side of above-mentioned measurement light, adjust above-mentioned desired location when measuring above-mentioned offset successively and make it remain on lens barrel.
Thereby, because becoming, each optical element remains in lens barrel when the light incident side of measuring light is adjusted offset successively, so for example, when measuring the offset of the 2nd optical element, also can not consider the offset of the 1st optical element that kept, the offset of measuring this moment can be used as and results from the offset of the 2nd optical element and use.In the same manner, afterwards, the optical element of measured offset need not considered the impact of the offset of the optical element of adjusted, maintenance so far, and can be only as the offset of this optical element.
Thereby assembly object is when the tested optical element group body of arranged coaxial multi-disc optical element, but as the entire system high precision and effectively carry out the measurement of the offset of optical element, eccentric adjustment and the assembling of optical element.
And the bias of optical element involved in the present invention is adjusted in apparatus for assembling, possesses: the optical element collocation mechanism should consist of each optical element of tested optical element group body successively from the light incident side of measuring light in coaxial configuration; The offset measuring mechanism, above-mentioned coaxial when upper when above-mentioned optical element is disposed at, use the offset of the above-mentioned optical element that above-mentioned measurement photo measure should configuration; The desired location adjusting mechanism is adjusted the desired location of this optical element, so that the offset of this optical element diminishes according to this measurement result; The optical element maintaining body makes this optical element remain on lens barrel in the position of this adjustment.Thereby assembly object is when the tested optical element group body of arranged coaxial multi-disc optical element, but as the entire system pinpoint accuracy and effectively carry out the measurement of the offset of optical element, eccentric adjustment and the assembling of optical element.
Description of drawings
Fig. 1 means that the bias of the optical element that one embodiment of the present invention is related adjusts the process flow diagram of the order of assemble method.
Fig. 2 is used in bias shown in Figure 1 for explanation to adjust the concise and to the point figure that the bias of assemble method is adjusted apparatus for assembling.
Fig. 3 is at embodiment method shown in Figure 1 concise and to the point figure ((A) is that 2 adjustment methods, (B) are 3 adjustment methods) for the method for carrying out eccentric adjusting operation for explanation.
Fig. 4 is be used to the concise and to the point figure of the major part that embodiment method shown in Figure 1 is described (from the measurement of below).
Fig. 5 is be used to the concise and to the point figure of the major part that embodiment method shown in Figure 1 is described (from the measurement of top).
Fig. 6 is the concept map for the PZT travel mechanism of explanation present embodiment device.
Fig. 7 means and carries out from the measurement of top, the eccentric concise and to the point figure that adjusts apparatus for assembling.
in figure: 1, eccentric apparatus for assembling, 5 adjusted of 201-, 5A, 5B, the tested lens combination body of 205-, 10, the 210-measuring head, 11, the 211-light source, 12, 212-reticule (レ チ Network Le) plate, 13, 213-beam separator (PVC one system ス プ リ ッ タ), 14, the 214-collimation lens, 15, the 215-object lens, 16, the 216-imaging apparatus, 17, the 217-video camera, 20, 220-base (base station), 21, 221-loads member, 22, 222-XY axle objective table (ス テ one ジ), 23, the 223-rotatable stage, 30, 230-analytic operation section, 31, 231-analyzes mounting, 32, the 232-image display device, 33, the 233-input media, 40, 240-Z axle objective table, 41, the 241-support, 41A-horizontal direction travel mechanism, 41B-above-below direction travel mechanism, 42, the 242-guide part, 43, the 243-movable part, 51, 51A～C, 52, 251, the 252-lens, 51a, 51b, 52a, 52b, 251a, 251b, 252a, the 252b-lens face, 53, 61A, 61B, 253-lens barrel (lens frame), 62A～E-PZT (piezoelectric element), 62Aa～Ea-presses leading section, 63-spaced ring, F-light convergent point, Z, the L-optical axis, the E-turning axle.
Embodiment
Below, with reference to accompanying drawing, embodiment involved in the present invention is elaborated.Fig. 2 is the brief configuration figure that the bias that is used in the related optical element of one embodiment of the present invention is adjusted the device of assemble method.
Namely, this bias is adjusted the offset that apparatus for assembling 1 is measured each tested lens of tested lens combination body 5, and the offset that is adjusted to this measurement roughly becomes 0, possesses following formation under this state: measuring head 10, rotatably keep tested lens combination body 5 base 20, carry out for various computings of calculating offset etc. analytic operation section 30, above-below direction keeps the Z axis objective table 40 of measuring head 10 movably in the drawings.
Above-mentioned measuring head 10 possesses: output be radiated at the light beam of above-mentioned tested lens combination body 5 light source 11, make from the light beam of light source 11 output and pass through, such as the reticule plate 12 with criss-cross gap (hereinafter referred to as " reticule "), will from the beam separator 13 of light beam top reflection in figure of reticule plate 12, with the light beam of incident be made as parallel beam collimation lens 14, make parallel beam converge at light convergent point F object lens 15, carry the video camera 17 of the imaging apparatuss 16 such as CCD or CMOS.
On the other hand, above-mentioned tested lens combination body 5 remains on 2 lens 51,52 in lens barrel 53 and consists of (in the present embodiment, for convenience of description, and group body 5 is described by the situation that 2 lens consist of, but can be processed too by the situation that the lens more than 3 consist of group body 5), and constitute at these lens 51,52 each lens face 51a, 51b, in 52a, 52b, (the focus of lens face 52a (the paraxial center of curvature) C of the focus face of the lens face 52a of downside in the figure of lens 52
3Residing; Omit diagram) be arranged in lens face 51a than the figure downside of lens 51 more by the figure below.
Above-mentioned base 20 possesses following formation: load above-mentioned tested lens combination body 5 mounting member 21, support XY axle objective table 22 and the rotatable stage 23 of this mounting member 21.XY axle objective table 22 is the objective tables that use when the position of the mounting tested lens combination body 5 of member 21 and measuring head 10 is adjusted loading, and constitutes and can move to the direction vertical with the optical axis L of this tested lens combination body 5 the tested lens combination body 5 that loads in mounting member 21.And rotatable stage 23 constitutes the tested lens combination body 5 that loads in mounting member 21 is rotated as the center with illustrated turning axle E.And, be equipped with at each central portion of XY axle objective table 22 and rotatable stage 23 through hole that continues in mounting member 21, can carry out the incident outgoing of the light beam between measuring head 10 and tested lens 51,52 by this through hole.
And above-mentioned analytic operation section 30 possesses following formation: the image display device 32 of analytical equipment 31, display analysis result or each image etc. each graphical analysis of taking when measuring etc., that be made of computing machine etc., be used for carrying out the input media 33 to the various inputs of analytical equipment 31.
And, consist of tested lens combination body 5 each tested lens 51,52 lens barrel 53 interior coaxial on configuration successively, carry out this each tested lens 51,52 conveying and setting but preferably constitute by aut.eq..In this case, preferred aut.eq. possesses, for example can pass through flexible (Off レ キ シ Block Le な) sucker vacuum suction lens surface, the lens adsorbing mechanism.And, preferably possess and keep the lens adsorbing mechanism and make it mobile transfer arm mechanism etc.
And tested lens combination body 5 carries out bias adjustment by the offset adjusting mechanism shown in Fig. 3 (A) or Fig. 3 (B), so that the offset of above-mentioned measurement is near 0 (preferably making it to become 0).
Namely, Fig. 3 (A) means that the outer peripheral face configuration of the lens barrel 61 that consists of along each lens 51,52 are remained in assigned position has flexual columniform adjustment instrument 65 for the figure of the mode of 2 adjustment methods implementing to use 2 PZT to carry out eccentric adjustment.Corresponding to each lens equipping position of lens barrel 61, be provided with the hole section 66 of running through wall section at every 90 degree of its all direction, be provided with these hole sections 66 chimeric and be connected to lens 51,52 protuberance 67 at adjustment instrument 65.In addition, be provided with and have PZT62A, the B that presses leading section 62Aa, Ba, to allow to press 2 protuberances 67 of adjacency in these protuberances 67.
And, Fig. 3 (B) means for implementing and uses 3 PZT to carry out the figure that eccentric 3 of adjusting adjust the mode of method, the all direction of each of the lens barrel 61A that each lens 51,52 is remained in assigned position and consist of 120 degree are provided with the hole 66A of section that runs through wall section, and be provided with these holes 66A of section separately chimeric and be connected to the side of lens 51 PZT62C, D, E press leading section 62Ca, Da, Ea.
And, even in the arbitrary mode shown in Fig. 3 (A) and Fig. 3 (B), PZT62A, B, C, D, E also can arrange at each each tested lens 51 that consists of tested lens combination body 5,52 respectively, can make: with 1 tested lens 51,52 corresponding amounts (dividing), PZT62A, B, C, D, E being set, and possessing and make it the PZT above-below direction travel mechanism that moves to the lens arrangement direction.And the control of the movement of these PZT62A, B, C, D, E, driving etc. gets final product according to the program that is stored in and is located at the control part of above-mentioned analytical equipment 31.And, as above-mentioned, when the PZT above-below direction travel mechanism that setting makes that PZT62A, B, C, D, E move to the lens arrangement direction, because needs make PZT62A, B, C, D, E along the operation of the radially discrepancy (go out and enter れ) of lens by PZT horizontal direction travel mechanism for the time being, so preferably constitute the related control of the operation that is taken into of this PZT62A, B, C, D, E, also carry out according to the program that is stored in and is located at the control part of above-mentioned analytical equipment 31.
Below, adjust assemble method with the bias of the related optical element of the flowchart text present embodiment of Fig. 1.
The bias of this optical element is adjusted assemble method, at first, only is positioned at the 1st lens (S1) by the measurement light incident side.
Secondly, use eccentric adjusting apparatus for assembling shown in Figure 21 to measure the offset (S2) of the 1st lens.
Secondly, based on the offset of measuring, calculate the position adjustment amount (S3) of the 1st lens with formula described later (A), (B) etc. in above-mentioned steps 2 (S2).
Secondly, use the eccentric adjustment shown in Fig. 3 (A), (B) etc. etc., adjust the bias of the 1st lens, so that this offset is near 0 (S4).
Secondly, with the measurement of the offset of above-mentioned steps 2 (S2) in the same manner, again measure the offset (S5) of the 1st lens.
Secondly, whether the offset that judgement is measured in above-mentioned steps 5 (S5) becomes below the critical value of regulation (decide), that is, for example judging has become the less value (S6) that can ignore degree.
Secondly, the result of the judgement of above-mentioned steps 6 (S6), if judge into below the critical value of regulation, enter step 7 (S7), if judge into the critical value greater than regulation, return to step 3 (S3), with the calculating of position adjustment amount in above-mentioned steps 3 (S3) in the same manner, make it calculate the position adjustment amount (S3) of the 1st lens based on the offset of measuring.
On the other hand, the result of the judgement of above-mentioned steps 6 (S6) is if judge into below the critical value of regulation, enter step 7 (S7), as shown in Figure 4, in this step 7 (S7), remain in the inside of lens barrel 61 with the state bonding (following) of position adjustment the 1st lens.
Afterwards, judge whether to exist the next lens that to install, if this judged result is not have next lens, finish this routine (Le one チ Application), if also there are on the other hand next lens, make it carry out the processing of step 1～7 (S1～7) for these lens.
As a result, all lens that consist of tested lens combination body 5 are carried out successively eccentric adjustment and to the interior bonding maintenance of lens barrel 61, finish assembling.
Below, with Fig. 4, the adjustment of each lens 51A, B, C is sequentially described.
In addition, consist of tested lens combination body 5 by 3 lens in this example.
As shown in the concept map of Fig. 4, sequentially carry out by the equipping position of lens 51A, lens 51B, lens 51C from the measurement light of the object lens 15 of the measuring head 10 that is disposed at the below.
In the method for present embodiment, by the offset that the order of measuring light incident is carried out lens 51A, B, C measure, eccentric adjust and the lens barrel 61 of lens 51A, B, C in a series of processing (in Fig. 4, (A), the order of (B), (C)) of bonding maintenance.In addition, the processing between each lens is switched by Z axis objective table 40 above-below direction in the figure is driven and again carries out in alignment with the position of the measuring basis that becomes each lens.That is, for example by with the focal position F of object lens 15 in alignment with the focal position of the lens face that should measure (C for example
3) and carry out.
With this order assembling lens, carry out carrying out after the bias adjustment of lens 51A the offset of lens 51B and measure, do not get final product based on the bias adjustment that this measured value only carries out lens 51B so substantially do not comprise the offset of lens 51A in the offset of measuring this moment.And secondly,, carry out the offset of lens 51C and measure, but roughly do not comprise the offset of lens 51A or 51B in the offset of measuring this moment and get final product based on the bias adjustment that the measured value of this moment only carries out lens 51C.In addition, when so measuring head 10 being disposed at the below, spaced ring 63 as shown in Figure 5, interval maintenance use can be set also.
And, contrary to the above, if with the offset that carries out lens 51A, B, C with the order of the reversed in order of measuring light incident measure, eccentric adjust and the lens barrel 61 of lens 51A, B, C in bonding maintenance, even carry out for the time being the eccentric lens of adjusting, when the offset that carries out next lens is measured, also cause measuring into and have bias, it is extremely complicated that the bias adjustment of each lens of formation group lens or entirety of lens package become, so not preferred.
And, ultraviolet curing (sclerosis) type bonding agent etc. is preferably used in bonding maintenance in the lens barrel 61A of said lens 51A, B, C, at this moment, preferably set ultraviolet radiation source near lens barrel 61A, and only be controlled at moment driving light source that needs are adhesively fixed.In addition, the control of preferred this moment also constitutes according to the program that is stored in and is located at the control part of above-mentioned analytical equipment 31 and carries out.
According to the present embodiment method, measurement by will carry out the offset of lens, eccentric adjust and the order of the lens of a succession of processing of the bonding maintenance of lens from measuring the light incident side setting of light, can simply and effectively carry out bias adjustment and the bonding maintenance of tested lens.
In addition, the inventive method is not limited to the situation that measuring head 10 is configured in the below as shown in Figure 4, for example as shown in Figure 5, measuring head 10 can be configured in the top, utilization also can be carried out from the measurement light of object lens 15 outgoing of this measuring head 10, can embody roughly the same action effect.In addition, this moment, importantly configuration space kept the known spaced ring of use between each lens 51A, B, C.
And, in above-mentioned situation, by the order of measuring light incident, namely as lens 51A, lens 51B, lens 51C, from figure upper side carry out successively offset measure, eccentric adjust and the lens barrel 61 of lens 51 in each of bonding maintenance process (in Fig. 5, with the order of (A), (B), (C)).
And, as shown in Figure 6, the present embodiment device possesses as PZT travel mechanism and makes the PZT above-below direction 41B of travel mechanism that PZT62A, B, C, D, E move to the lens arrangement direction and make PZT62A, B, C, D, E along the PZT horizontal direction 41A of travel mechanism of the operation of radially coming in and going out of lens.Fig. 6 is the concise and to the point figure for the concrete working method that these mechanisms are described.In addition, in fact, from lens 51A, B, C around 3 directions, the figure that as shown in Fig. 3 (B), PZT62C, D, E is worked with respect to each lens 51A, B, C, but in Fig. 6 for convenience of description, the operation that mainly is conceived to PZT62C describes.
Namely, as shown in Fig. 6 (A), the PZT62C that faces mutually with the side of the lens 51A that is positioned at the hypomere of lens barrel 61A presses the hole 66A of section that leading section (head) 62Ca is inserted into lens barrel 61A, this pressing position adjusting operation with respect to lens 51A of pressing leading section 62Ca was stored in and was located at the control part of above-mentioned analytical equipment 31 by basis program make press leading section 62Ca only mobile small quantity carry out so that these lens 51A is set in accurately the position of regular (regular).In addition, press leading section (head) 62Da, Ea for PZT62D, E (with reference to Fig. 3 (B)), also carry out the operation identical with pressing leading section 62Ca, leading section 62Ca, 62Da are pressed in utilization, Ea carries out the position adjustment of lens 51A from 3 directions around it so result becomes.
If so the pressing position adjusting operation of lens 51A finishes, then carry out successively the same pressing position adjusting operation of lens 51B, lens 51C.Situation when Fig. 6 (B) means the pressing position adjusting operation that carries out lens 51B, this pressing position adjusting operation itself carries out in the same manner with the pressing position adjusting operation of said lens 51A, but from the state of Fig. 6 (A) to the move operation of the PZT62C of the state of Fig. 6 (B), due to being moved, PZT62C along continuous straight runs (for example directions X) can't make it mobile along upper direction (Z direction in drawing) with original state, so possess the PZT horizontal mobile mechanism 41A that PZT62C is moved to horizontal direction.That is, mobile to horizontal direction (scheming left direction) by made PZT62C by PZT horizontal mobile mechanism 41A from the state shown in Fig. 6 (A), thus press leading section 62Ca from what the hole 66A of section of lens barrel 61A extracted PZT62C.Make only mobile predetermined predetermined distance of PZT62C upward direction (Z direction) with this state by the PZT above-below direction 41B of travel mechanism, the leading section 62Ca that presses of PZT62C moves to the position of facing mutually with the hole 66A of section corresponding to lens 51B.Then, by by the PZT horizontal direction 41A of travel mechanism, PZT62C is moved to the direction close to lens 51B, the leading section 62Ca that presses of PZT62C is inserted into the hole section 66A corresponding with lens 51B, thereby sets the state of Fig. 6 (B) for.
So, in the present embodiment device, make PZT62C, D, E along the PZT horizontal direction 41A of travel mechanism of the operation of radially coming in and going out of lens owing to possessing, and the PZT above-below direction 41B of travel mechanism that PZT62C, D, E are moved to the lens arrangement direction, so can simply and carry out smoothly the adjustment of multi-disc lens by 1 lens position adjusting mechanism.
In addition, afterwards, the position that the position that PZT62C is moved to carry out lens 51C is adjusted, but the move operation of the lens position adjusting mechanism of this moment also can similarly carry out with aforesaid operations.And, even under the mode as shown in Fig. 3 (A), make it by utilizing the PZT horizontal direction 41A of travel mechanism and the PZT above-below direction 41B of travel mechanism to move for each PZT62A, B (respectively pressing leading section 62Aa, Ba), can carry out in the same manner move operation.and, be connected to each lens 51A being provided with as shown in Fig. 3 (A), B, during the protuberance 67 of C, perhaps as be equivalent to the above-mentioned leading section 62Ca that presses, Da, bar-shaped member of the part of Ea is inserted in respectively and each lens 51A independently, B, when the hole section 66 that C is corresponding is interior, pass through PZT62A, B, C, D, E presses raised part 67 from foreign side, the foreign side end of above-mentioned bar-shaped member gets final product, so in this case, might not need the above-mentioned PZT horizontal direction 41A of travel mechanism, according to PZTA, B, C, D, the stroke of E, also can only consist of PZT travel mechanism by the PZT above-below direction 41B of travel mechanism.
In addition, in embodiment shown in Figure 6, the adjustment that makes lens is carried out successively from the lens of below, but the adjustment that can certainly make lens is carried out successively from the lens of top.
And Fig. 7 means the figure of the bias adjustment apparatus for assembling 201 that possesses measuring head 210 as shown in Figure 5, measure light from the upper side irradiation.In addition, to the member corresponding with member shown in Figure 2 to add 200 symbolic representation at symbol shown in Figure 2, for these each member detailed.
At this, to the measurement of the offset that uses each lens that device shown in Figure 21 carries out, enumerate an example and remark additionally.
And at following each lens face 51a, 51b, the 52a that enumerates at above-mentioned tested lens combination body 5, in 52b, the example that lens face 52a is measured the situation of this offset as tested surface describes.At this moment, prepare as measuring, use Z axis objective table 40 carries out the height control of measuring head 10, so that the light convergent point F of measuring head 10 is positioned at the focus face of lens face 52a.The position of the tested lens combination body 5 after this adjustment is finished is set as initial position.
＜1〉at first, (N is the integer arbitrarily more than 3 to the setting measurement points N.N=18 for example).
＜2〉secondly, take initial image from measuring head 10 for the measuring beam of tested lens combination body 5 irradiation projection set quota patterns (by the criss-cross pattern of reticule), after shooting, use rotatable stage 23 to make tested lens combination body 5 (lens face 52a) rotate 360/N degree (being 20 degree in the situation of N=18) centered by turning axle E.
＜3〉then, obtain the coordinate of the inconocenter point of captured index picture (referring to the Standard picture) in the coordinate system (can suitably be set as orthogonal coordinate system or polar coordinate system etc.) of setting with respect to the shooting face of imaging apparatus 16.The coordinate of this inconocenter point ask method (ad hoc approach of the coordinate of the central point of cross curve) for example can be set as with above-mentioned patent documentation 3 record ask method identical.
＜4〉judge whether tested surface (lens face 52a) amounts to rotating 360 degrees from initial position centered by turning axle E, if be judged to be no, repeat said sequence＜1 〉～＜3, obtain the coordinate of the inconocenter point of the index picture of taking at each position of rotation.In addition, carry out processing exclusive disjunction be used to the required image of the coordinate of asking each inconocenter point and process in analytical equipment 31, and the coordinate of each inconocenter point that will obtain is stored in the reservoir of analytical equipment 31 successively.
Afterwards, ask the approximate circle that is suitable for each image center and this central point is set as datum mark, distance or approximate radius of a circle till will be from this datum mark to inconocenter point be arbitrarily obtained as the offset of tested surface.In addition, the calculation process of this moment is also carried out in analytical equipment 31.
Secondly, with above-mentioned Fig. 3 (A), (B) when adjusting bias, each computing method add a supplementary explanation.
That is, as shown in Fig. 3 (A), can adjust the bias of directions X and Y-direction to use the adjustment instrument of 2 PZT (piezoelectric element), utilize mathematical expression to calculate the eccentric adjustment amount of this moment.
That is, the misalignment measurement value is made as (e
x, e
y), the eccentric adjustment amount L of 2 PZT62A, B that mutually arrange with the angles of 90 degree
P1, L
P2For example by calculating (P1 represents the direction consistent with Y-direction, and P2 represents the direction consistent with directions X) with following formula (A).
[mathematical expression 1]
And, as shown in Fig. 3 (B), can use 3 PZT to adjust the bias of directions X and Y-direction, the eccentric adjustment amount of this moment also can utilize numerical expression to calculate.
That is, the misalignment measurement value is made as (e
x, e
y), 3 PZT62A, B that mutually arrange with 120 angles of spending, the eccentric adjustment amount L of C
P1, L
P2, L
P3, for example by calculate (P1 represents the direction consistent with Y-direction, and P2 represents to rotate in a counter-clockwise direction direction after 120 degree from Y-direction, and P3 represents to rotate in a counter-clockwise direction direction after 240 degree from Y-direction) with following formula (B).
[mathematical expression 2]
Above, the embodiment of the bias of optical element of the present invention being adjusted assemble method is illustrated, but the present invention is not limited to the form of above-mentioned embodiment, various forms can be set as embodiment.for example, in the above-described embodiment, when above-mentioned tested surface is rotated centered by the regulation axle, take by the reflected light from tested surface at each at least 3 different position of rotation (for example each position of rotation of 120 degree of being separated by) and be formed on index picture on shooting face, based on the coordinate at the image center of each captured index picture of this each position of rotation, obtain datum mark (central point of the approximate circle that is formed by each image center), but in the inventive method, also can replace this, take by the reflected light from tested surface by 2 position of rotation of 180 degree of being separated by at each and be formed on index picture on shooting face, obtain coordinate average of the image center of each captured index picture, thereby obtain above-mentioned datum mark.
And, the piezoelectric element of 1 lens of adjustment more than 4 also can be set.
And, as above-mentioned mounting member 21, can use the columniform member of the tested lens combination body 5 of the supporting of end surface side edge above it, but also can use as aforementioned patent document 3 shown in Figure 3, by the chuck mechanism of V piece (V Block ロ ッ Network) and armature formation.
And, in above-mentioned embodiment, enumerated tested lens as tested optical element, but the group body of multi-disc being arranged the various optical elements (for example, optical filter or prism etc.) that form on coaxial can be used also.
And, in above-mentioned embodiment, for projection index pattern has used criss-cross reticule, but also can replace this, the reticule of other shapes such as pin hole (ピ Application ホ one Le) is used in the index pattern is carried out projection.
And, the device of the measurement offset that uses in the above-described embodiment is the device of observing the light reflection type of the index picture that is formed by the reflected light from tested surface, but when measuring offset with the device of the light transmission-type of observing the index picture that is formed by the transmitted light from tested surface, also can use the present invention.
Claims (6)
1. the bias of lens is adjusted assemble method, arrange in the tested lens combination body that forms on a plurality of lens are coaxial in lens barrel, utilize projection set quota pattern measurement light irradiation and measure these lens offset separately, and carry out the assembling of this tested lens combination body while adjusting this offset, it is characterized in that
At first, in should consisting of each lens of above-mentioned tested lens combination body, the 1st lens configuration that only should be disposed at any one party end in orientation above-mentioned coaxial on, and measure the offset of the 1st lens, the mode that diminishes with the offset of the 1st lens based on this measured value is adjusted the desired location of the 1st lens, and the position after this adjustment makes the 1st lens remain in lens barrel
Then, should be with respect to the 1st lens and in abutting connection be disposed at the 2nd lens configuration of the light incident side opposition side of above-mentioned measurement light above-mentioned coaxial on, and measure the offset of the 2nd lens, adjust the desired location of the 2nd lens so that the offset of the 2nd lens diminishes based on this measured value, position after this adjustment makes the 2nd lens remain in lens barrel
After, similarly, for should adjust above-mentioned desired location while measure successively above-mentioned offset, and make it remain on lens barrel in abutting connection with the lens that are disposed at the light incident side opposition side of above-mentioned measurement light,
The measurement of the offset of said lens is carried out in the following way, namely to the face of the light incident side that is positioned at described measurement light in said lens be positioned at and each of the face of the light incident side opposition side of described measurement light, the circle of index picture of specific each each anglec of rotation by regulation, and obtain the coordinate of central point of specific this circle
Afterwards, to obtain, calculate about the coordinate difference each face, central point above-mentioned circle of said lens, this value that calculates is made as the offset of said lens.
2. the bias of lens as claimed in claim 1 is adjusted assemble method, it is characterized in that,
the measurement of above-mentioned offset is carried out in the following manner, namely at the above-mentioned measurement light of tested surface irradiation, make on one side above-mentioned tested surface by above-mentioned coaxial centered by rotation, take at each at least 3 different position of rotation or 2 position of rotation of each 180 degree of being separated by the index picture that is formed at shooting face by reflected light or transmitted light from this tested surface on one side, at the coordinate system of setting for the above-mentioned shooting face coordinate of the inconocenter point of specific each index picture of taking at each this position of rotation respectively, and based on the coordinate data of this specific each inconocenter point, measure the offset of above-mentioned tested surface.
3. the bias of lens is adjusted apparatus for assembling, arranges in the tested lens combination body that forms on a plurality of lens are coaxial in lens barrel, measures these lens offset separately, while and adjust the assembling that this offset carries out this tested lens combination body, it is characterized in that,
Possess following mechanism:
Lens configuration mechanism, it successively configures each lens that should consist of above-mentioned tested lens combination body from the light incident side of the measurement light of projection set quota pattern above-mentioned on coaxial;
The offset measuring mechanism, its when at every turn above-mentioned coaxial on configuration during said lens, uses the offset of the said lens after above-mentioned measurement photo measure should configure;
The desired location adjusting mechanism, its according to the result of this measurement so that the mode that the offset of these lens diminishes is adjusted the desired location of these lens;
The lens maintaining body, its position after this adjustment makes these lens remain on lens barrel,
Above-mentioned offset measuring mechanism is to the face of the light incident side that is positioned at above-mentioned measurement light in said lens and be positioned at and each of the face of the light incident side opposition side of above-mentioned measurement light, the circle of index picture of specific each each anglec of rotation by regulation, and obtain the coordinate of central point of specific this circle
Afterwards, to obtain, calculate about the coordinate difference each face, central point above-mentioned circle of said lens, this value that calculates is made as the offset of said lens.
4. the bias of lens as claimed in claim 3 is adjusted apparatus for assembling, it is characterized in that,
The said lens collocation mechanism also possesses the lens adsorbing mechanism of carrying each said lens.
5. adjust apparatus for assembling as the bias of claim 3 or 4 described lens, it is characterized in that,
The said lens collocation mechanism also possess a plurality of be configured in said lens around, only press the piezoelectric element of the side of these lens with small quantity for the offset of adjusting these lens.
6. the bias of lens as claimed in claim 5 is adjusted apparatus for assembling, it is characterized in that,
Above-mentioned a plurality of piezoelectric element consists of works in coordination with to same lens the group of adjusting,
The above-mentioned eccentric apparatus for assembling of adjusting also possesses: piezoelectric element travel mechanism, and it makes above-mentioned piezoelectric element move to each corresponding position with these lens, so that can adjust successively offset to each of above-mentioned a plurality of lens,
This piezoelectric element travel mechanism possesses: make above-mentioned piezoelectric element along the piezoelectric element above-below direction travel mechanism that the orientation of said lens is moved, and make above-mentioned piezoelectric element along the piezoelectric element horizontal direction travel mechanism of the operation of radially coming in and going out of said lens.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009137585A JP5222796B2 (en) | 2009-06-08 | 2009-06-08 | Optical element eccentricity adjustment assembly method and eccentricity adjustment assembly apparatus |
| JP2009-137585 | 2009-06-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101907758A CN101907758A (en) | 2010-12-08 |
| CN101907758B true CN101907758B (en) | 2013-11-06 |
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|---|---|---|---|
| CN201010200107.2A Expired - Fee Related CN101907758B (en) | 2009-06-08 | 2010-06-08 | Eccentricity adjusting and assembling method, and eccentricity adjusting and assembling device of optical element |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP5222796B2 (en) |
| KR (1) | KR101299509B1 (en) |
| CN (1) | CN101907758B (en) |
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|---|---|---|---|---|
| TWI636291B (en) * | 2017-02-03 | 2018-09-21 | 國立虎尾科技大學 | Lens installation device |
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| CN104406547B (en) * | 2014-12-09 | 2017-11-07 | 上海新跃仪表厂 | The eccentric measuring device and its measuring method of a kind of optical element |
| PL3037800T3 (en) * | 2014-12-24 | 2018-11-30 | Trioptics Gmbh | Measurement of the positions of curvature midpoints of optical areas of a single or multi-lens optical system |
| CN105445885B (en) * | 2015-10-30 | 2019-06-18 | 宁波舜宇光电信息有限公司 | Adjustable optical camera lens and camera module and its manufacturing method |
| CN105445888B (en) | 2015-12-21 | 2020-04-03 | 宁波舜宇光电信息有限公司 | Adjustable optical lens, camera module and calibration method thereof |
| CN109541774B (en) * | 2015-12-02 | 2021-01-29 | 宁波舜宇光电信息有限公司 | Camera module adopting split type lens and assembling method thereof |
| US10732376B2 (en) | 2015-12-02 | 2020-08-04 | Ningbo Sunny Opotech Co., Ltd. | Camera lens module and manufacturing method thereof |
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| CN109916299A (en) * | 2019-03-11 | 2019-06-21 | 东莞市凯融光学科技有限公司 | A kind of method of contact type measurement free form surface infrastructure product bias |
| CN113064264A (en) * | 2019-12-31 | 2021-07-02 | 长春长光华大智造测序设备有限公司 | Image quality compensation method and device for microscopic optical system |
| CN113093399A (en) * | 2020-01-08 | 2021-07-09 | 三营超精密光电(晋城)有限公司 | Lens assembling device and lens assembling method |
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| CN101907758A (en) | 2010-12-08 |
| JP2010282151A (en) | 2010-12-16 |
| KR20100131945A (en) | 2010-12-16 |
| KR101299509B1 (en) | 2013-08-29 |
| JP5222796B2 (en) | 2013-06-26 |
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