CN101900748B - Inspection fixture - Google Patents
Inspection fixture Download PDFInfo
- Publication number
- CN101900748B CN101900748B CN2010101940232A CN201010194023A CN101900748B CN 101900748 B CN101900748 B CN 101900748B CN 2010101940232 A CN2010101940232 A CN 2010101940232A CN 201010194023 A CN201010194023 A CN 201010194023A CN 101900748 B CN101900748 B CN 101900748B
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- Prior art keywords
- cylindrical shell
- section
- contact
- inspection
- pars contractilis
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06722—Spring-loaded
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
Abstract
The present invention provides an inspection fixture, capable of coping smallness and complication of a substrate, and having a simplification structure that the number of members is reduced. The inspection fixture, connecting an inspection body of an object to be inspected and an inspection device is characterized in that a contact includes an external cylinder having open parts on two ends, and an internal cylinder arranged on inner side of the external cylinder and projecting respectively from two ends of the external cylinder; the internal cylinder includes a first cylindrical part contacted with inspection points, a first telescopic part extending in a length direction of the internal cylinder, a second cylindrical part which end is conjoined to an electrode part, a second telescopic part extending in a length direction of the contact, and a third cylindrical part for communicating and connecting the first telescopic part and the second telescopic part; the first cylindrical part, the telescopic part, the third cylindrical part, the second telescopic part and the second cylindrical part are formed by a cylinder, and the third cylindrical part is provided with a connection part for fixing the external cylinder and the internal cylinder.
Description
Technical field
The present invention relates to be set in advance in the inspection fixture that checkpoint and the testing fixture of implementing this inspection in the inspection object section of checked property are electrically connected.
Background technology
Inspection fixture of the present invention, the inspection object section that has for checked property checks position supply capability or electric signal from testing fixture to regulation, and from checking that object section detects electric signal, can detect thus the electrical specification that checks object section, perhaps carry out action test.
This checked property can list the semiconductor device of various substrates, semiconductor wafer or semi-conductor chip, the CSP (Chip size package) etc. such as the base plate for packaging of the battery lead plate used such as printed circuit board, flexible base, board, ceramic multilayer circuit board, liquid crystal display or plasma display and semiconductor-sealing-purpose or membrane type carrier.
In this manual, the checked property that these are above-mentioned is referred to as " checked property ", and the inspection object section that is formed on checked property is called " inspection section ".
In the past, be formed with a plurality of wirings on the circuit substrate as an embodiment of checked property.This wiring is formed for supply capability or flows through electric signal, makes electric, the electronic unit that carry on circuit substrate have the function of expectation.Therefore, the bad meeting of wiring causes the action of circuit substrate bad.
In order to address this problem, the whether invention of good testing fixture of object section that a plurality of judgements are formed on the wiring of the checked properties such as circuit substrate, semiconductor device was proposed once.
Whether this testing fixture in order well to judge formed wiring on the substrate as checked property for example, use have be set in advance in wiring on the inspection of a plurality of probes (contact) of being connected respectively of a plurality of checkpoints implement to check with fixture.
This inspection is crimped on checkpoint in wiring with an end of the contact of fixture, and its other end is crimped on the electrode part with the base board checking device electrical connection.So, check by this and use fixture, be used for measuring electric current, the voltage of the electrical specification that connects up from the base board checking device supply, and send from the electric signal that connects up to base board checking device.
In recent years, due to the progress of technology, semiconductor device diminishes, substrate diminishes, and the wiring on substrate also forms more tinyly thereupon and be complicated.Along with cloth tinyization of alignment and the complicated development of this substrate, check that the contact that has with fixture also is required the graph thinning of contact own, narrow and smallization of contact pitch, simplification.
For example, with in fixture, utilize the contact that uses cartridge in the disclosed inspection of patent documentation 1, this contact forms the slit with spring function., the contact of tubular is inserted into has the holding member that keeps the hole section of this contact for guiding with in fixture in the inspection of this patent documentation 1, keep contact by the substantial middle section of this hole section.
Yet, with in fixture, for the contact that keeps growing, and have to form slotted hole section in the disclosed inspection of patent documentation 1, existing has increased the problem of making the required expense of holding member.Especially in order to tackle graph thinning, narrow and smallization of spacing, need to form slot section, there is the high problem of cost.
[patent documentation 1] Japanese kokai publication hei 10-288626 communique
Summary of the invention
The invention provides a kind of tinyization that can tackle substrate and complicated, and be endowed the inspection fixture of the structure that components number lowers and oversimplify.
The described invention of technical scheme 1 provides a kind of inspection fixture, its will become inspected object checked property, be electrically connected with the testing fixture that checks the electrical specification be formed at the inspection body on this checked property, it is characterized in that, possess: contact, the one end is crimped on the checkpoint of the regulation on the inspection body that is set in advance in this checked property, the other end and the electrode part crimping that is electrically connected in above-mentioned testing fixture; The first plate-shaped member, it has for an end guiding of above-mentioned contact the first bullport to above-mentioned checkpoint; The second plate-shaped member, its be configured to and above-mentioned the first plate-shaped member between have predetermined distance, and have for second bullport of the other end of above-mentioned contact guiding to above-mentioned electrode part; With the electrode body that is formed with a plurality of above-mentioned electrode parts, above-mentioned contact possesses: the outside cylindrical shell that has peristome at two ends; With the inboard cylindrical shell that is housed in the inboard of above-mentioned outside cylindrical shell and is configured to give prominence to respectively from the two ends of this outside cylindrical shell, above-mentioned inboard cylindrical shell has: first section, and the one end is connected to above-mentioned checkpoint and this first section is inserted in above-mentioned the first bullport by perforation; The first pars contractilis, it forms with above-mentioned first section and is coaxial shape and stretches on the length direction of this inboard cylindrical shell; Second section, its other end is connected to above-mentioned electrode part and this second section's perforation is inserted in above-mentioned the second bullport, the second pars contractilis, it forms with above-mentioned second section and is coaxial shape and stretches on the length direction of this contact; With the 3rd section, it is communicated with link with above-mentioned the first pars contractilis and above-mentioned the second pars contractilis, above-mentioned first section, above-mentioned the first pars contractilis, above-mentioned the 3rd section, above-mentioned the second pars contractilis and above-mentioned second section are formed by a cartridge unit, above-mentioned the 3rd section is formed with the connecting portion of fixing above-mentioned outside cylindrical shell and above-mentioned inboard cylindrical shell, and above-mentioned the first bullport forms to have larger than the footpath of above-mentioned inboard cylindrical shell and than the little aperture, footpath of above-mentioned outside cylindrical shell.
The described invention of technical scheme 2 provides a kind of inspection fixture on the basis of technical scheme 1, it is characterized in that, above-mentioned contact forms the center that has with respect to this contact and is symmetrical shape.
The described invention of technical scheme 3 provides a kind of inspection fixture on the basis of technical scheme 1 or 2, it is characterized in that, above-mentioned inboard cylindrical shell and above-mentioned outside cylindrical shell are formed by the alloy take nickel as major component.
Provide a kind of inspection fixture on the basis of the described invention of technical scheme 4 any one in technical scheme 1 to 3, it is characterized in that, the external diameter of above-mentioned outside cylindrical shell forms below 250 μ m.
Provide a kind of inspection fixture on the basis of the described invention of technical scheme 5 any one in technical scheme 1 to 4, it is characterized in that, above-mentioned outside cylindrical shell and above-mentioned inboard cylindrical shell wall thickness separately form roughly 5～50 μ m.
The described invention of technical scheme 6 provides a kind of inspection fixture on the basis of technical scheme 1, it is characterized in that, be arranged on the contact of fixture in above-mentioned inspection this inspection with fixture on and when not being used, above-mentioned the first pars contractilis is that nature is long, above-mentioned the second pars contractilis is in application of force state.
According to the present invention, a kind of tinyization of tackling substrate and complicated can be provided, and possess the inspection fixture of the simplification structure that components number lowers.
Description of drawings
Fig. 1 means the inspection involved in the present invention simple pie graph of one embodiment of fixture.
Fig. 2 illustrates the simple pie graph of contact involved in the present invention one embodiment, (a) sectional view of the inboard cylindrical shell of expression, (b) ground plan of the inboard cylindrical shell of expression, (c) sectional view of expression outside cylindrical shell, (d) ground plan of expression outside cylindrical shell.
Fig. 3 illustrates the simple pie graph of contact of the present invention, represents that inboard cylindrical shell is arranged on the sectional view of the state of outside cylindrical shell.
Fig. 4 means the pie graph that contact of the present invention is arranged on the state of holder, represents the first plate-shaped member and the second plate-shaped member with the cross section, with the installation site of explanation contact.
Fig. 5 means that inspection of the present invention with the pie graph of fixture, illustrates the state that contact is installed on electrode part, and for convenience of explanation, with the cross section, holder and electrode body is shown, and be represented by dotted lines the inboard cylindrical shell of contact and the inwall of outside cylindrical shell.
Symbol description is as follows
1... check and use fixture; 2... contact; 2a... inboard cylindrical shell; 2a1... first section; 2a2... second section; 2a3... the 3rd section; 2a4... the first pars contractilis; 2a5... the second pars contractilis; 2b... outside cylindrical shell; 2b3... connecting portion; 3... holder; 31... the first plate-shaped member; 32... the second plate-shaped member; 4... electrode body; 41... electrode part.
Embodiment
Describe being used for implementing mode of the present invention.
Fig. 1 means the inspection involved in the present invention simple pie graph of one embodiment of fixture.
Inspection involved in the present invention with fixture 1 have a plurality of contacts 2, with those contacts 2 be held in the spininess shape holder 3, support this holder 3 and have the connecting electrode body 4 that contacts with contact 2 and become the electrode part of conducting state, be set to extend out and the wire portion 5 of electrical connection with it from electrode part.
In addition, although as a plurality of contacts 2,3 contacts are shown in Fig. 1 and show 3 corresponding respectively wire portions 5, they can decide according to the checkpoint that the substrate that checks object sets, and are not limited to 3.
One side pressure of contact 2 is connected to the checkpoint of predefined regulation in the wiring of substrate, and the other end is crimped on the electrode part with testing fixture (not shown) electrical connection.
Fig. 2 is the simple pie graph of an embodiment of contact involved in the present invention, (a) sectional view of the inboard cylindrical shell of expression, (b) ground plan of the inboard cylindrical shell of expression, (c) sectional view of expression outside cylindrical shell, (d) ground plan of expression outside cylindrical shell.
Inboard cylindrical shell 2a has the length of regulation and is that cartridge forms by the cylindrical shape of hollow form.An end that forms the cartridge of inboard cylindrical shell 2a is contacted with the checkpoint, and the other end is contacted with electrode part described later, carries out thus the electrical connection between checkpoint and electrode part.
Inboard cylindrical shell 2a has first 2a1 of section, second 2a2 of section, the 3rd 2a3 of section, the first pars contractilis 2a4 and the second pars contractilis 2a5.This inboard cylindrical shell 2a be communicated with to link successively first 2a1 of section, the first pars contractilis 2a4, the 3rd 2a3 of section, the second pars contractilis 2a5, second 2a2 of section and forms as shown in Fig. 2 (a).
The end of first 2a1 of section is connected to the checkpoint, and perforation is inserted in the first bullport 311 described later (perhaps the first upper hole 311a of guiding).This first 2a1 of section forms the cylindrical shape of hollow form.The length of this first 2a1 of section forms that the length than the first bullport 311 is long at least, when first 2a1 of section is crimped on the checkpoint, can slide along the first bullport.
The end of second 2a2 of section is connected to electrode part, and is inserted in the second bullport 321 described later by outer side tube part 2b perforation.This second 2a2 of section forms the cylindrical shape of hollow form.The length of this second 2a2 of section is preferably formed as longlyer than the length of the second bullport, when second 2a2 of section is crimped on electrode part, can be inserted into along perforation the inwall slip of the outside cylindrical shell 2b in the second bullport 321.
In addition, first 2a1 of section and second 2a2 of section preferably have approximately uniform shape.
The first pars contractilis 2a4 forms with first 2a1 of section and is coaxial shape, and forms on the length direction of inboard cylindrical shell 2a and stretch.This first pars contractilis 2a4 has the volute spring shape section that forms the notch of shape of slit on cartridge.Flexible effect is played by this volute spring shape section.
The first pars contractilis 2a4 forms respectively with the other end of first 2a1 of section and the end of the 3rd 2a3 of section and links, with first 2a1 of section coaxial same footpath again.
The second pars contractilis 2a5 forms with second 2a2 of section and is coaxial shape, and forms on the length direction of inboard cylindrical shell 2a and stretch.This second pars contractilis 2a5 has the volute spring shape section that forms the notch of shape of slit on cartridge.Flexible effect is played by this volute spring shape section.
The second pars contractilis 2a5 forms respectively with the other end of second 2a2 of section and the other end of the 3rd 2a3 of section and links, with second 2a2 of section coaxial same footpath again.
The 3rd 2a3 of section forms and is communicated with the cylindric of the hollow form that links the first pars contractilis 2a4 and the second pars contractilis 2a5.The end of the 3rd 2a3 of section and the first pars contractilis 2a4 link, and the other end and the second pars contractilis 2a5 link.
The 3rd 2a3 of section forms with the first pars contractilis 2a4 and the second pars contractilis 2a5 has coaxial and same footpath, and forms also and have coaxial and same footpath with first 2a1 of section and second 2a2 of section.
The length that the length of the 3rd 2a3 of section forms the degree that can form the connecting portion that is connected with outside cylindrical shell 2b described later gets final product, and is not subjected to special restriction.In addition, Fig. 2 (a) although in the state that caves in slightly to the inside with the 3rd 2a3 of section represent, it is expressed as in the formed depression fixedly time the with outside cylindrical shell 2b described later.
First to the 3rd section and the first to second pars contractilis form coaxial and same footpath as mentioned above, and therefore above-mentioned cylinder section and pars contractilis can be formed by a cartridge.Like this, inboard cylindrical shell 2a is formed by a cartridge, can efficiently and easily form.
In addition, in the present embodiment, show centered by the 3rd 2a3 of section, 2 pars contractiliss of the first pars contractilis 2a4 and the second pars contractilis 2a5 are formed on symmetrical position, but can also the 3rd form the pars contractilis of desired amt centered by the 2a3 of section.
This inboard cylindrical shell 2a can be formed by the cartridge of an electric conductivity as mentioned above, can form external diameter 20～250 μ m, internal diameter 10～230 μ m, wall thickness 5～50 μ m.By forming such size, for checked properties such as the wiring that has been endowed tinyization and complicated substrate, semiconductor devices, also can tackle with the testing fixture of the structure oversimplified.
In the example of this inboard cylindrical shell 2a, the mode that is point symmetry or line symmetry with relative its center forms each position.This is due to by forming such symmetric shape, can be when installing to the holder of jig for inspecting substrate described later, supreme lower minute utilize contact 2.
The end in contact checkpoint of inboard cylindrical shell 2a, its other end contact electrode section realizes electrically conducting between checkpoint and electrode part by this inboard cylindrical shell 2a, therefore inboard cylindrical shell 2a forms with the material of electric conductivity.As this material, be not subjected to special restriction so long as have the material of electric conductivity, for example can list nickel, nickel alloy, palldium alloy.
This inboard cylindrical shell 2a as mentioned above, form with the material with electric conductivity, but contact 2 also must form according to tinyization and the complicated enforcement graph thinning of checked property itself.Especially stretch perpendicular to the direction of holding plate for the edge, must make contact 2 itself have Telescopic, and use the inspection at the helical spring position that coiling is arranged with in fixture in formation in the past, the size that will depend on the diameter of spiral self, very difficult formation has the coil of the diameter less than 4 times of left and right of spiral diameter, the extremely difficult volute spring of external diameter below 100 μ m that form.Namely allow to form, use 2000～4000 inspections also too expensive with fixture on assembleability and manufacturing cost, have lunar politics.
Yet the present application can more cheap and easily produce tiny contact by utilizing following manufacture method.
Following two kinds of manufacture methods can be disclosed about inboard cylindrical shell 2a.
[method for making example 1]
(1) at first, prepare the heart yearn (not shown) of the hollow bulb of the inboard cylindrical shell 2a of formation.Wherein this heart yearn uses the SUS line of the expectation thickness (for example, diameter 30 μ m) of the internal diameter that limits inboard cylindrical shell 2a.
(2) afterwards, heart yearn (SUS line) is applied the photoresist tunicle, coat the side face of this heart yearn.The part of the expectation of this photoresist is imposed exposure, development, heat treated form spiral helicine mask.At this moment, heart yearn is rotated along central shaft, exposed by laser, can form spiral helicine mask.In order to form inboard cylindrical shell 2a of the present invention, has predetermined distance (distance suitable with the Length Quantity of the 3rd cylindrical shell 2a3) and form between 2 pars contractiliss (the first pars contractilis 2a4 and the second pars contractilis 2a5).
(3) afterwards, this heart yearn is implemented nickel plating.At this moment, because heart yearn has electric conductivity, therefore the position that does not form the photoresist mask is by nickel plating.
(4) afterwards, remove the photoresist mask, extract heart yearn out, cut off cylindrical shell according to the length of expectation, thereby form inboard cylindrical shell 2a.Can certainly cut off cylindrical shell before extracting heart yearn out fully.
In addition, inboard cylindrical shell 2a also can make according to following method.
[method for making example 2]
At first, preparation forms the heart yearn (not shown) of the hollow bulb of inboard cylindrical shell 2a as described above.
This heart yearn nickel plating is reached the thickness of expectation, thereby form nickel coating at the side face of heart yearn.
Afterwards, the surface of this nickel coating applied photoresist.Thereby the part of the expectation of this photoresist is imposed exposure, development, heat treated form spiral helicine mask.At this moment, heart yearn is rotated along central shaft, by laser explosure, can form spiral helicine mask.In order to form inboard cylindrical shell 2a of the present invention, has predetermined distance (distance suitable with the Length Quantity of the 3rd cylindrical shell 2a3) and form between 2 pars contractiliss (the first pars contractilis 2a4 and the second pars contractilis 2a5).
(3) afterwards, nickel plating is removed in etching.At this moment, the nickel plating that does not form the position of photoresist mask is removed.
(4) afterwards, remove the photoresist mask, extract heart yearn out, cut off cylindrical shell according to the length of expectation, thereby form inboard cylindrical shell 2a.Can certainly cut off cylindrical shell before extracting heart yearn out fully.
Use in the past has the volute spring mode of coiling to depend on the diameter of the material that winds the line, and very difficult formation has the coil of the diameter less than 4 times of left and right of this diameter, the extremely difficult following volute spring of 100 μ m that is formed on.The of the present invention inboard cylindrical shell 2a that makes based on above-mentioned method for making, to heart yearn nickel plating and after forming the shape of expectation, make by the extraction heart yearn and draw, compare with the situation of the volute spring mode of in the past use coiling, wall thickness that can the attenuate spring material simultaneously can high precision and make in the lump freely tiny external diameter and internal diameter.
Outside cylindrical shell 2b forms the cylindrical shape that has with the hollow bulb 2b2 of specified length.This outside cylindrical shell 2b can form for example external diameter 20～250 μ m, internal diameter 10～230 μ m, wall thickness 5～50 μ m.Be endowed tinyization and complicated substrate by forming this size, can tackling.
Inboard cylindrical shell 2a is disposed at the hollow bulb 2b2 of outside cylindrical shell 2b coaxially.At this moment, first of inboard cylindrical shell 2a 2a1 of section and second 2a2 of section are configured to respectively from the peristome of outside cylindrical shell 2b extend out (with reference to Fig. 3).
The length of outside cylindrical shell 2b as mentioned above, forms first 2a1 of section and second length that the 2a2 of section can extend out from its peristome respectively with inboard cylindrical shell 2a.In addition, this outside cylindrical shell 2b preferably has the length of the first pars contractilis 2a4 and the hollow bulb 2b2 that the second pars contractilis 2a5 is accommodated in outside cylindrical shell 2b all the time of inboard cylindrical shell 2a.This be due to, be housed in all the time outside cylindrical shell 2b by two pars contractiliss with inboard cylindrical shell 2a inner, can play the guiding function of the flexible direction of two pars contractiliss when stretching motion, can improve the permanance of pars contractilis.
Outside cylindrical shell 2b shown in Fig. 2 (c) locate in the central to be formed with for the fixing connecting portion 2b3 of inboard cylindrical shell 2a.This connecting portion 2b3, when inboard cylindrical shell 2a is housed in the hollow bulb 2b2 of outside cylindrical shell 2b and inboard cylindrical shell 2a and extends out from two openends of outside cylindrical shell 2b, as shown in Figure 3, push the substantial middle place of (ca(u)lk) outside cylindrical shell 2b by outside-in, thus inboard cylindrical shell 2a and outside cylindrical shell 2b are fixed, thereby connecting portion 2b3 is formed on outside cylindrical shell 2b.Therefore, this connecting portion 2b3 just begins to form after accommodating inboard cylindrical shell 2a.
In addition, as shown in Fig. 2 (d), outside cylindrical shell 2b is in order to fix with inboard cylindrical shell 2a, and the internal diameter of its connecting portion 2b3 part forms littlely than other parts.
In addition, as long as can be fixedly connected with the part of the 2b3 of section, certainly also can be for outside cylindrical shell 2b other fixing meanss with inboard cylindrical shell 2a employing laser bonding, arc welding, cementing agent etc.
As shown in Figure 3, in contact 2 of the present invention, inboard cylindrical shell 2a is configured in the hollow bulb 2b2 of outside cylindrical shell 2b, and first 2a1 of section and second 2a2 of section of inboard cylindrical shell 2a are configured to extend out from two openends of outside cylindrical shell 2b.
This contact 2 is preferably formed in appearance as being point symmetry.
It is more than the explanation to the formation of contact 2.
This inspection has for a plurality of contacts 2 being remained the holder 3 of spininess shape with fixture 1.
As shown in Figure 4, this holder 3 has the first plate-shaped member 31 and the second plate-shaped member 32.Above-mentioned plate-shaped member is formed by the material of insulativity.
The first plate-shaped member 31 has for an end guiding of contact 2 the first bullport 311 to the checkpoint.
As shown in Figure 4, the first bullport 311 forms the first upper hole 311a of guiding that external diameter is different and the lower hole 311b of the first guiding and is communicated with and links.
It is slightly large and than the slightly little aperture of external diameter of outside cylindrical shell 2b that the first upper hole 311a of guiding forms the external diameter that has than inboard cylindrical shell 2a.
The lower hole 311b of the first guiding forms the slightly large aperture of external diameter that has than outside cylindrical shell 2b.
Therefore, contact 2 can not deviate from from the first bullport 311 of the first plate-like portion 31.
This first bullport 311 is formed by 2 external diameter different holes as mentioned above, and the difference of this external diameter can be by the thickness poor institute engaging of the inboard cylindrical shell 2a of contact 2 and outside cylindrical shell 2b.Especially the thickness that inboard cylindrical shell 2a and outside cylindrical shell 2b produce is poor, and all to form hardness by the nickel electroformed layer higher because of cylinder section, even and if repeat the slips of tens thousand of times, hundreds thousand of times between the checkpoint, still can have good permanance.
The second plate-shaped member 32 is configured to and 31 of the first plate-shaped members have predetermined distance, and has for second bullport 321 of the other end of contact 2 guiding to electrode part.
The predetermined distance d1 that this second plate-shaped member 32 and the first plate-shaped member are 31 sets for shorter than the length of outside cylindrical shell 2b, and the thickness poor (border) of inboard cylindrical shell 2a and outside cylindrical shell 2b is disposed in the first bullport 311 of the first plate-shaped member 31.
The second bullport 321 forms the slightly large aperture of external diameter that has than the outside cylindrical shell 2b of contact 2.Therefore, when contact 2 is installed on holder 3, will insert contact 2 from these the second bullport 321 sides.
Electrode body 4 shown in Figure 5 is formed with a plurality of electrode parts 41.Electrode body 4 is formed by insulating material, keeps the electrode part 41 that is formed by conductive material.
The holder 3 of contact 2 has been installed, as shown in Figure 5, has been installed on electrode body 4.At this moment, position in the mode of electrode part 41 butts of the other end of second 2a2 of section of the inboard cylindrical shell 2a of contact 2 and electrode body 4, thereby holder 3 releasably is fixed in electrode body 4.
When holder 3 was fixed in electrode body 4, the outside cylindrical shell 2b of contact 2 can push to electrode body 4 sides from the first plate-shaped member 31 of holder 3.Therefore, the second pars contractilis 2a5 of inboard cylindrical shell 2a can be compressed, and under the effect of this force of compression, second 2a2 of section can push electrode part 41.That is to say, inboard cylindrical shell 2a and the electrode part 41 of contact 2 are in stable contact condition.In addition, have nature long length for the first pars contractilis 2a4 is not applied the state of physical force this moment.That is to say, with in fixture 1, when contact 2 was installed, the first plate-shaped member 31 pushed outside cylindrical shell 2b to electrode part 41 sides in this inspection.At this moment, because outside cylindrical shell 2b and inboard cylindrical shell 2a are fixed by connecting portion 2b, therefore the second pars contractilis 2a5 can be crimped to electrode part 41.
In addition, actual at contact 2 (first 2a1 of section of inboard cylindrical shell 2a) when contacting with the checkpoint, the first pars contractilis 2a4 can be according to this contact and compressed, thereby utilizes this force of compression relative checkpoint stably to contact.
That is to say, utilize the situation of the first pars contractilis 2a4 and the second pars contractilis 2a5 by differentiation, can improve the permanance of contact 2, life-extending.
Wire portion 5 is with electrode part 41 and testing fixture electrical connection.As long as this wire portion 5 can be electrically connected with testing fixture, its size is not done being particularly limited.
In addition, in Fig. 1, wire portion 5 is configured to can be connected with testing fixture from checking the lower side with fixture 1 from checking that the lower aspect with fixture 1 extends out.
Claims (6)
1. inspection fixture, its will become inspected object checked property, be electrically connected with the testing fixture that checks the electrical specification that is formed at the inspection body on this checked property, it is characterized in that possessing:
Contact, one end are crimped on the checkpoint of the regulation on the inspection body that is set in advance in this checked property, the other end and the electrode part crimping that is electrically connected in described testing fixture;
The first plate-shaped member, it has for an end guiding of described contact the first bullport to described checkpoint;
The second plate-shaped member, its be configured to and described the first plate-shaped member between have predetermined distance, and have for second bullport of the other end of described contact guiding to described electrode part; With
Be formed with the electrode body of a plurality of described electrode parts,
Described contact possesses:
The outside cylindrical shell that has peristome at two ends; With
The inboard cylindrical shell that is housed in the inboard of described outside cylindrical shell and is configured to give prominence to respectively from the two ends of this outside cylindrical shell,
Described inboard cylindrical shell has:
First section, the one end is connected to described checkpoint and this first section is inserted in described the first bullport by perforation;
The first pars contractilis, it forms with described first section and is coaxial shape and stretches on the length direction of this inboard cylindrical shell;
Second section, its other end is connected to described electrode part and this second section's perforation is inserted in described the second bullport,
The second pars contractilis, it forms with described second section and is coaxial shape and stretches on the length direction of this contact; With
The 3rd section, it is communicated with link with described the first pars contractilis and described the second pars contractilis,
Described first section, described the first pars contractilis, described the 3rd section, described the second pars contractilis and described second section are formed by a cartridge unit,
Described the 3rd section is formed with the connecting portion of fixing described outside cylindrical shell and described inboard cylindrical shell,
Described the first bullport forms to have larger than the footpath of described inboard cylindrical shell and than the little aperture, footpath of described outside cylindrical shell.
2. inspection fixture according to claim 1 is characterized in that:
Described contact forms the center that has with respect to this contact and is symmetrical shape.
3. inspection fixture according to claim 1 and 2 is characterized in that:
Described inboard cylindrical shell and described outside cylindrical shell are formed by the alloy take nickel as major component.
4. inspection fixture according to claim 1 and 2 is characterized in that:
The external diameter of described outside cylindrical shell forms below 250 μ m.
5. inspection fixture according to claim 1 and 2 is characterized in that:
Described outside cylindrical shell and described inboard cylindrical shell wall thickness separately form roughly 5～50 μ m.
6. inspection fixture according to claim 1 is characterized in that:
Be arranged on the contact of fixture in described inspection this inspection with fixture on and when not being used, described the first pars contractilis is that nature is long, described the second pars contractilis is in application of force state.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009-130335 | 2009-05-29 | ||
| JP2009130335A JP2010276510A (en) | 2009-05-29 | 2009-05-29 | Inspection jig |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101900748A CN101900748A (en) | 2010-12-01 |
| CN101900748B true CN101900748B (en) | 2013-05-08 |
Family
ID=43226450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010101940232A Expired - Fee Related CN101900748B (en) | 2009-05-29 | 2010-05-28 | Inspection fixture |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2010276510A (en) |
| KR (1) | KR101141206B1 (en) |
| CN (1) | CN101900748B (en) |
| TW (1) | TWI422831B (en) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5776687B2 (en) * | 2010-04-19 | 2015-09-09 | 日本電産リード株式会社 | Inspection contact and inspection jig |
| KR101795836B1 (en) * | 2011-02-10 | 2017-11-08 | 니혼덴산리드가부시키가이샤 | Test jig |
| JP5845678B2 (en) * | 2011-07-21 | 2016-01-20 | 日本電産リード株式会社 | Inspection contact and inspection jig |
| JP5821432B2 (en) * | 2011-09-05 | 2015-11-24 | 日本電産リード株式会社 | Connection terminal and connection jig |
| JP2013190270A (en) * | 2012-03-13 | 2013-09-26 | Nidec-Read Corp | Probe and connection jig |
| JP2015021726A (en) * | 2013-07-16 | 2015-02-02 | 日置電機株式会社 | Probe unit and substrate inspection device |
| JP6484137B2 (en) * | 2014-11-26 | 2019-03-13 | 株式会社日本マイクロニクス | Probe and contact inspection device |
| CN104714059A (en) * | 2015-03-19 | 2015-06-17 | 东莞鸿爱斯通信科技有限公司 | Test joint |
| JP6527762B2 (en) * | 2015-06-19 | 2019-06-05 | 日本電子材料株式会社 | probe |
| JP6484136B2 (en) * | 2015-07-27 | 2019-03-13 | 株式会社日本マイクロニクス | Contact inspection device |
| KR101869335B1 (en) * | 2016-01-29 | 2018-06-20 | 최선영 | Probe pin and manufacturing method thereof |
| JP6432017B2 (en) * | 2016-11-30 | 2018-12-05 | 日本電産リード株式会社 | Contact terminal, inspection jig, and inspection device |
| WO2020039969A1 (en) * | 2018-08-23 | 2020-02-27 | 日本電産リード株式会社 | Inspection jig, inspection device, and contact terminal |
| CN114402207A (en) * | 2019-09-30 | 2022-04-26 | 三菱电机株式会社 | Inspection jig |
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| JP2003194849A (en) * | 2001-12-27 | 2003-07-09 | Takashima Sangyo Kk | Contact probe |
| JP2004219282A (en) * | 2003-01-16 | 2004-08-05 | Toyo Denshi Giken Kk | Probe and contact device using the same |
| CN2833600Y (en) * | 2005-07-06 | 2006-11-01 | 颜鸿杰 | Probe structure improvement of testing jig |
| CN200956035Y (en) * | 2006-08-24 | 2007-10-03 | 中国探针股份有限公司 | Replaceable probe structure |
| CN201110927Y (en) * | 2007-11-02 | 2008-09-03 | 振展科技股份有限公司 | Tooth hole detecting probe structure |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3166028B2 (en) * | 1995-09-28 | 2001-05-14 | 三菱マテリアル株式会社 | Resistance measurement device |
| KR100877243B1 (en) * | 2001-02-19 | 2009-01-07 | 니혼 덴산 리드 가부시끼가이샤 | A circuit board testing apparatus and method for testing a circuit board |
| JP2005049163A (en) * | 2003-07-31 | 2005-02-24 | Yokowo Co Ltd | Test jig and probe for test apparatus of device for high frequency and high speed |
| JP4031007B2 (en) | 2005-07-15 | 2008-01-09 | 日本電子材料株式会社 | Vertical coil spring probe and probe unit using the same |
| WO2007116963A1 (en) * | 2006-04-07 | 2007-10-18 | Nidec-Read Corporation | Contact for inspecting substrate and method for manufacturing the contact |
| JP2007304008A (en) * | 2006-05-12 | 2007-11-22 | Nidec-Read Corp | Contact and tool for board inspection, and board inspection apparatus |
| JP4625480B2 (en) * | 2007-03-30 | 2011-02-02 | 日本電産リード株式会社 | Inspection jig |
| KR100975808B1 (en) * | 2007-04-17 | 2010-08-13 | 니혼덴산리드가부시키가이샤 | The fixture for circuit board inspection |
-
2009
- 2009-05-29 JP JP2009130335A patent/JP2010276510A/en active Pending
-
2010
- 2010-05-27 TW TW099117058A patent/TWI422831B/en not_active IP Right Cessation
- 2010-05-28 CN CN2010101940232A patent/CN101900748B/en not_active Expired - Fee Related
- 2010-05-28 KR KR1020100050044A patent/KR101141206B1/en not_active IP Right Cessation
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003194849A (en) * | 2001-12-27 | 2003-07-09 | Takashima Sangyo Kk | Contact probe |
| JP2004219282A (en) * | 2003-01-16 | 2004-08-05 | Toyo Denshi Giken Kk | Probe and contact device using the same |
| CN2833600Y (en) * | 2005-07-06 | 2006-11-01 | 颜鸿杰 | Probe structure improvement of testing jig |
| CN200956035Y (en) * | 2006-08-24 | 2007-10-03 | 中国探针股份有限公司 | Replaceable probe structure |
| CN201110927Y (en) * | 2007-11-02 | 2008-09-03 | 振展科技股份有限公司 | Tooth hole detecting probe structure |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2010276510A (en) | 2010-12-09 |
| TW201102662A (en) | 2011-01-16 |
| KR101141206B1 (en) | 2012-05-04 |
| KR20100129218A (en) | 2010-12-08 |
| CN101900748A (en) | 2010-12-01 |
| TWI422831B (en) | 2014-01-11 |
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