CN101895055A - Folded-cavity transversely excited atmospheric pressure carbon dioxide laser - Google Patents

Folded-cavity transversely excited atmospheric pressure carbon dioxide laser Download PDF

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Publication number
CN101895055A
CN101895055A CN2009100841627A CN200910084162A CN101895055A CN 101895055 A CN101895055 A CN 101895055A CN 2009100841627 A CN2009100841627 A CN 2009100841627A CN 200910084162 A CN200910084162 A CN 200910084162A CN 101895055 A CN101895055 A CN 101895055A
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laser
folded
mirror
carbon dioxide
cavity
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CN2009100841627A
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Chinese (zh)
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万重怡
谭荣清
吴谨
刘世明
王东蕾
周锦文
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Institute of Electronics of CAS
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Institute of Electronics of CAS
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Priority to CN2009100841627A priority Critical patent/CN101895055A/en
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Abstract

The invention discloses a folded-cavity transversely excited atmospheric pressure carbon dioxide laser and relates to a laser technique. The carbon dioxide laser comprises a main discharge electrode, a preionization device, a laser resonator, a fan, a deflector, a cooler, a sealed cylinder, an inflation and exhaust system, a pulse power supply and the like, wherein the section of a main discharge area is a rectangle; and the laser resonator matched with the rectangular discharge section is a folded resonator and consists of an output coupling mirror, a folding mirror and a rear total reflector group. The laser of the invention can meet the needs for high repetition frequency, high average output power, wide later pulse width, high light beam quality and wavelength turning in use, and has wide applications in fields of laser processing, laser radars, atmosphere environment monitoring, laser chemical and the like.

Description

Folded-cavity transversely excited atmospheric pressure carbon dioxide laser
Technical field
The present invention relates to the laser technique field, particularly a kind of transverse excitation atmosphere carbon dioxide laser (TEACO that adopts collapsible laserresonator 2Laser).
Background technology
Collapsible laserresonator has been widely used in the straight pipe type DISCHARGE CO 2In the laser.By folded resonator a plurality of discharge tubes are together in series on light path, swash the volume and the gain length multiplication of penetrating medium, reach the purpose that improves power output thereby make.Yet for TEACO 2Laser someone as yet adopts folded resonator.In order to improve TEACO 2The output energy of pulse of laser and power output, common way are the areas that increases square discharge cross section, promptly increase spacing and electrode width between the sparking electrode simultaneously.TEACO 2The gain coefficient of laser (gain of unit length) is very high, need not to make by folded resonator the overall gain multiplication in chamber usually.In fact,, form self-oscillation easily in gain region, cause troubles such as power loss and eyeglass damage if a plurality of turning mirrors are set.
Along with TEACO 2The range of application of laser constantly enlarges, to the also variation day by day of requirement of the output parameter of laser.For example, pulse-width just has different requirements.Typical TEACO 2The pulse output waveform of laser is made up of the spike of about 0.1 microsecond and the hangover of 1 microsecond.But, under many application conditions, requiring to have the pulse duration of broad, this just must cause gain coefficient correspondingly to descend.And for example, TEACO 2Though laser has the tuning ability (line tunable) of nearly hundred spectral lines in 9 to 11 micron wave length scopes, for different spectral lines, the gain coefficient difference is very big.For those lower spectral lines of gain coefficient, the energy extraction efficiency of laserresonator descends, thereby power output is further reduced.In addition, common heavy caliber TEACO 2The output beam quality of laser is not high.Even adopt astable chamber, often also be difficult to obtain desirable hot spot.
Summary of the invention
The purpose of this invention is to provide a kind of folded-cavity transversely excited atmospheric pressure carbon dioxide laser (TEACO 2Laser), have high repetition frequency, high-average power, it is that the region of discharge of rectangle is provided with collapsible laserresonator in the cross section, makes the gain length multiplication, and this has improved the output energy and the power of laser, and improves the beam quality of laser.
For achieving the above object, technical solution of the present invention is:
A kind of folded-cavity transversely excited atmospheric pressure carbon dioxide laser comprises main discharge electrode, preionization device, laserresonator, blower fan, baffler, cooler, sealed cylindrical, inflating and exhausting system, the pulse power; The cross section in its main discharge district is a rectangle, the height of square-section is H, and width is W, and depth-width ratio H/W is greater than 1 or less than 1, the laserresonator that is complementary with rectangle discharge cross section is a folded resonator, and refrative cavity comprises output coupling mirror, turning mirror and back completely reflecting mirror.
Described folded-cavity transversely excited atmospheric pressure carbon dioxide laser, the ratio of the H/W of its described main discharge square-section are 2 or 1/2 o'clock, and the folding times of the refrative cavity that is complementary with rectangle discharge cross section is 3, and the turning mirror number is 2.
Described folded-cavity transversely excited atmospheric pressure carbon dioxide laser, the ratio of the H/W of its described main discharge square-section are 3 or 1/3 o'clock, and the folding times of the refrative cavity that is complementary with rectangle discharge cross section is 5, and the turning mirror number is 4.
Described folded-cavity transversely excited atmospheric pressure carbon dioxide laser, the output coupling mirror of its described refrative cavity are concave spherical mirror, and turning mirror is level crossing or concave spherical mirror, and back completely reflecting mirror is level crossing or concave spherical mirror or reflective diffraction gratings.
Described folded-cavity transversely excited atmospheric pressure carbon dioxide laser, the output coupling mirror of its described refrative cavity are level crossing, have at least one to be concave spherical mirror in turning mirror and the back completely reflecting mirror, and all the other are level crossing.
Described folded-cavity transversely excited atmospheric pressure carbon dioxide laser, its described back completely reflecting mirror or be reflective diffraction gratings.
Described folded-cavity transversely excited atmospheric pressure carbon dioxide laser, when the back completely reflecting mirror of its described refrative cavity adopted reflective diffraction gratings, laser output wavelength can be tuning.
Described folded-cavity transversely excited atmospheric pressure carbon dioxide laser, its laser gas are CO 2, N 2With the mist of He, or at CO 2, N 2With supported by the arm small amount of H in the mist of He 2With CO gas, total gas pressure is between 50~1200mbar.
Folded-cavity transversely excited atmospheric pressure carbon dioxide laser of the present invention, can satisfy in using demand simultaneously, have wide practical use in fields such as laser processing, laser radar, atmospheric environment monitoring, laser chemistries to laser pulse width, high light beam quality and the tunable wave length of high average output power, broad.
Description of drawings
Fig. 1 is a kind of refrative cavity TEACO of the present invention 2The laser structure schematic diagram;
Fig. 2 is the folded resonator schematic diagram;
Fig. 3 is tunable folded resonator schematic diagram.
Embodiment
For further specifying feature of the present invention and structure, the present invention is described in detail below in conjunction with accompanying drawing.
See also Fig. 1, be a kind of refrative cavity TEACO 2Laser, and have high repetition frequency, high-average power, comprise main discharge electrode 1, following main discharge electrode 2, preionization device 3, laserresonator 4, blower fan 5, baffler 6, cooler 7, vacuum seal urceolus 8, inflating and exhausting system 9 and high-voltage pulse power source 10.Wherein main discharge electrode 1 and 2 is a shaped electrode, and electrode surface face type and electrode spacing design guarantee to form the even region of discharge of a square-section between electrode, and the height of square-section is H, and width is W.The H value is exactly the spacing between the main discharge electrode basically.The H/W ratio of square-section is 2 among the figure.Blower fan 5 conducts by baffler 6 and cooler 7 at the heat of region of discharge generation high velocity air with Pulsed Discharge, laser can be turned round under high repetition frequency produce high average output power.Laserresonator 4 is folded resonator (an abbreviation refrative cavity), as shown in Figure 2.Folded resonator is by output coupling mirror 41, and turning mirror 42,43 and back completely reflecting mirror 44 are formed.Adopt specific alignment method to make four mirrors form N shape three refrative cavities.The employing of refrative cavity has increased the overall gain in chamber widely, and make the pulse duration of laser output can do broad.Typical TEACO 2The impulse waveform of laser is made up of the spike of about 0.1 microsecond and the hangover of 1 microsecond.But when requiring the output laser pulse waveform of broad, the gas component of laser medium and discharge parameter also must be adjusted, and corresponding gain coefficient also descends thereupon, causes the energy extraction efficiency in chamber significantly to reduce.The employing of refrative cavity makes the gain length multiplication, can guarantee that the energy extraction efficiency of resonant cavity maintains very high level.The H/W ratio in the folding times of refrative cavity and rectangle discharge cross section is complementary, and the mode volume in the chamber is overlapped mutually with discharge gain region volume as far as possible.But folding times too much will make structure complicated.Getting folding times and be 3 or 5 is advisable.In addition, the H/W ratio in rectangle discharge cross section also can be taken as 1/2 or 1/3, i.e. the width in rectangle discharge cross section is 2 or 3 times of height, equally also corresponding three folding chambeies and five folding chambeies.
The output coupling mirror of refrative cavity is a concave mirror, and turning mirror and back completely reflecting mirror are level crossing or concave spherical mirror, form a stable cavity, and parameter is selected to make low-order mode overlapping with region of discharge as far as possible, guarantees that laser beam has high optical quality.Output coupling mirror also can be level crossing, and in the case, turning mirror and back have at least in the completely reflecting mirror one to be concave spherical mirror, and all the other be level crossing, and the parameter selection should be in the stable region, and makes low-order mode overlapping with region of discharge as far as possible.
The back completely reflecting mirror of refrative cavity also can adopt reflective diffraction gratings according to demand, as shown in Figure 3.Among the figure 45 is reflective diffraction gratings.In the case, the output wavelength of laser can be tuning.
Laser gas is CO 2, N 2With the mist of He, or at CO 2, N 2With supported by the arm small amount of H in the mist of He 2With CO gas, total gas pressure is between 50mbar and 1200mbar.

Claims (8)

1. a folded-cavity transversely excited atmospheric pressure carbon dioxide laser comprises main discharge electrode, preionization device, laserresonator, blower fan, baffler, cooler, sealed cylindrical, inflating and exhausting system, the pulse power; It is characterized in that: the cross section in main discharge district is a rectangle, the height of square-section is H, and width is W, and depth-width ratio H/W is greater than 1 or less than 1, the laserresonator that is complementary with rectangle discharge cross section is a folded resonator, and refrative cavity comprises output coupling mirror, turning mirror and back completely reflecting mirror.
2. folded-cavity transversely excited atmospheric pressure carbon dioxide laser as claimed in claim 1, it is characterized in that: the ratio of the H/W of described main discharge square-section is 2 or 1/2 o'clock, the folding times of the refrative cavity that is complementary with rectangle discharge cross section is 3, and the turning mirror number is 2.
3. folded-cavity transversely excited atmospheric pressure carbon dioxide laser as claimed in claim 1, it is characterized in that: the ratio of the H/W of described main discharge square-section is 3 or 1/3 o'clock, the folding times of the refrative cavity that is complementary with rectangle discharge cross section is 5, and the turning mirror number is 4.
4. folded-cavity transversely excited atmospheric pressure carbon dioxide laser as claimed in claim 1, it is characterized in that: the output coupling mirror of described refrative cavity is a concave spherical mirror, turning mirror is level crossing or concave spherical mirror, and back completely reflecting mirror is level crossing or concave spherical mirror or reflective diffraction gratings.
5. folded-cavity transversely excited atmospheric pressure carbon dioxide laser as claimed in claim 1 is characterized in that: the output coupling mirror of described refrative cavity is a level crossing, has at least one to be concave spherical mirror in turning mirror and the back completely reflecting mirror, and all the other are level crossing.
6. folded-cavity transversely excited atmospheric pressure carbon dioxide laser as claimed in claim 5 is characterized in that: described back completely reflecting mirror or be reflective diffraction gratings.
7. as claim 4 or 6 described folded-cavity transversely excited atmospheric pressure carbon dioxide lasers, it is characterized in that: when the back completely reflecting mirror of described refrative cavity adopted reflective diffraction gratings, laser output wavelength can be tuning.
8. folded-cavity transversely excited atmospheric pressure carbon dioxide laser as claimed in claim 1 is characterized in that: its laser gas is CO 2, N 2With the mist of He, or at CO 2, N 2With supported by the arm small amount of H in the mist of He 2With CO gas, total gas pressure is between 50~1200mbar.
CN2009100841627A 2009-05-20 2009-05-20 Folded-cavity transversely excited atmospheric pressure carbon dioxide laser Pending CN101895055A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102480099A (en) * 2010-11-30 2012-05-30 中国科学院电子学研究所 Transverse excitation atmosphere CO2 laser with high repetition frequency
CN104064952A (en) * 2013-03-22 2014-09-24 中国科学院大连化学物理研究所 Acousto-optic Q-adjusting airflow chemical laser apparatus
CN104617474A (en) * 2013-11-05 2015-05-13 中国科学院大连化学物理研究所 Resonant cavity for pulse and line selection output of airflow hydrogen fluoride laser
CN111969402A (en) * 2020-07-31 2020-11-20 山东师范大学 Intermediate infrared narrow linewidth solid pulse laser applied to trolley and method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102480099A (en) * 2010-11-30 2012-05-30 中国科学院电子学研究所 Transverse excitation atmosphere CO2 laser with high repetition frequency
CN104064952A (en) * 2013-03-22 2014-09-24 中国科学院大连化学物理研究所 Acousto-optic Q-adjusting airflow chemical laser apparatus
CN104617474A (en) * 2013-11-05 2015-05-13 中国科学院大连化学物理研究所 Resonant cavity for pulse and line selection output of airflow hydrogen fluoride laser
CN111969402A (en) * 2020-07-31 2020-11-20 山东师范大学 Intermediate infrared narrow linewidth solid pulse laser applied to trolley and method

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Open date: 20101124