CN101893568B - 环境洁净度监测设备 - Google Patents
环境洁净度监测设备 Download PDFInfo
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- CN101893568B CN101893568B CN 200910084610 CN200910084610A CN101893568B CN 101893568 B CN101893568 B CN 101893568B CN 200910084610 CN200910084610 CN 200910084610 CN 200910084610 A CN200910084610 A CN 200910084610A CN 101893568 B CN101893568 B CN 101893568B
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- 238000012544 monitoring process Methods 0.000 title claims abstract description 71
- 230000003287 optical effect Effects 0.000 claims description 53
- 238000004140 cleaning Methods 0.000 claims description 21
- 230000005540 biological transmission Effects 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 abstract description 16
- 239000004973 liquid crystal related substance Substances 0.000 abstract description 7
- 239000010409 thin film Substances 0.000 abstract description 3
- 239000000428 dust Substances 0.000 description 40
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- 238000002834 transmittance Methods 0.000 description 6
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- 238000009825 accumulation Methods 0.000 description 1
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN 200910084610 CN101893568B (zh) | 2009-05-19 | 2009-05-19 | 环境洁净度监测设备 |
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CN 200910084610 CN101893568B (zh) | 2009-05-19 | 2009-05-19 | 环境洁净度监测设备 |
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CN101893568A CN101893568A (zh) | 2010-11-24 |
CN101893568B true CN101893568B (zh) | 2013-04-24 |
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CN 200910084610 Expired - Fee Related CN101893568B (zh) | 2009-05-19 | 2009-05-19 | 环境洁净度监测设备 |
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Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102722042B (zh) * | 2012-06-06 | 2014-12-17 | 深圳市华星光电技术有限公司 | 液晶生产设备的内部环境检测***及方法 |
CN108292465B (zh) * | 2015-10-05 | 2021-02-19 | 创业X有限公司 | 卫生推动*** |
CN107817224A (zh) * | 2017-09-28 | 2018-03-20 | 保定立中东安轻合金部件制造有限公司 | 泡沫过滤网检测仪器及其检测方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101109704A (zh) * | 2007-08-03 | 2008-01-23 | 聚光科技(杭州)有限公司 | 一种应用新型滤光片的激光粉尘仪的检测和标定方法 |
CN201034933Y (zh) * | 2007-05-18 | 2008-03-12 | 北京中检康安科技有限公司 | 光电检测器 |
CN201210132Y (zh) * | 2008-06-04 | 2009-03-18 | 太原中绿环保技术有限公司 | 激光后向散射测尘仪 |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201034933Y (zh) * | 2007-05-18 | 2008-03-12 | 北京中检康安科技有限公司 | 光电检测器 |
CN101109704A (zh) * | 2007-08-03 | 2008-01-23 | 聚光科技(杭州)有限公司 | 一种应用新型滤光片的激光粉尘仪的检测和标定方法 |
CN201210132Y (zh) * | 2008-06-04 | 2009-03-18 | 太原中绿环保技术有限公司 | 激光后向散射测尘仪 |
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CN101893568A (zh) | 2010-11-24 |
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Owner name: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY Effective date: 20150626 Owner name: JINGDONGFANG SCIENCE AND TECHNOLOGY GROUP CO., LTD Free format text: FORMER OWNER: BEIJING BOE PHOTOELECTRICITY SCIENCE + TECHNOLOGY CO., LTD. Effective date: 20150626 |
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Effective date of registration: 20150626 Address after: 100015 Jiuxianqiao Road, Beijing, No. 10, No. Patentee after: BOE TECHNOLOGY GROUP Co.,Ltd. Patentee after: BEIJING BOE OPTOELECTRONICS TECHNOLOGY Co.,Ltd. Address before: 100176 No. 8 West Central Road, Beijing economic and Technological Development Zone, Beijing Patentee before: BEIJING BOE OPTOELECTRONICS TECHNOLOGY Co.,Ltd. |
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