CN101887194A - Electrode equipment and detection method - Google Patents
Electrode equipment and detection method Download PDFInfo
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- CN101887194A CN101887194A CN2009100839839A CN200910083983A CN101887194A CN 101887194 A CN101887194 A CN 101887194A CN 2009100839839 A CN2009100839839 A CN 2009100839839A CN 200910083983 A CN200910083983 A CN 200910083983A CN 101887194 A CN101887194 A CN 101887194A
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
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- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 4
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Abstract
The invention relates to electrode equipment and a detection method. The electrode equipment comprises an upper electrode, a lower electrode and a voltage detection module, wherein the upper electrode and the lower electrode are arranged oppositely; a voltage-sensitive thin film is arranged on a surface that the lower electrode is opposite to the upper electrode; the voltage detection module is used for acquiring a corresponding voltage change value according to the resistance change generated by the pressure change born by the voltage-sensitive thin film and carrying out detection processing according to the voltage change value. In the detection method, the voltage detection module is used for detecting the voltage change generated by the pressure change born by the voltage-sensitive thin film and transmitting an alarm signal when the voltage change value exceeds a preset value. The invention puts an end to MURA, repeat defect and other phenomena caused by the blockage of the upper electrode, can detect whether a glass substrate placed on the voltage-sensitive thin film has damages or cracks or not, and reduces the production risk.
Description
Technical field
The present invention relates to a kind of electrode equipment and detection method, belong to LCD manufacturing technology field.
Background technology
Along with the continuous progress of semi-conductor industry, semiconductor fabrication is also fast-developing thereupon.Wherein, Thin Film Transistor-LCD (Thin Film Transistor Liquid Crystal Display, hereinafter to be referred as: TFT-LCD) be widely used owing to having characteristics such as volume is little, low in energy consumption and radiationless.
In the manufacturing process of existing TFT-LCD or semiconductor devices, flat-type plasma strengthens chemical vapour deposition technique (PECVD) and is widely used in nonmetal film forming procedure, and corresponding plasma-etching method is widely used in the etching process of nonmetal rete.In film forming procedure, substrate is placed on the lower electrode with attemperating unit, and pressure remains on about 133 handkerchiefs usually, and radio-frequency voltage is added between upper electrode and the lower electrode, so the gas discharge of capacitance coupling type between the electrode of top and the bottom, will occur, and produce plasma.These plasmas have high reaction activity, are easy to be adsorbed on the substrate surface of lower temperature, and nonequilibrium chemical reaction takes place, thus the deposition film former.It is the glow discharge of the specific gas (or mixed gas) of 10～1000 handkerchiefs that etching process at first utilizes air pressure, generation can with the molecule or the molecular radical of film generation ion chemistry reaction, the reaction product of generation is volatile.It is taken away in hypobaric vacuum chamber, thereby realizes etching.But in film forming procedure and etching process, the reacting gas complexity, the hole that is arranged on the upper electrode stops up easily, and the situation that upper electrode stops up only just can be found at the terminal detection-phase of product.And testing process need stop the production equipment operation targetedly, opens the cavity of encapsulation upper electrode and lower electrode and just can finish.
Hence one can see that, and in the prior art, the situation that upper electrode takes place to stop up can not in time be found, light then influence the characteristic of TFT-LCD, cause MURA, repeated defective phenomenons such as (repeat defect), heavy then whole glass breakage brought great loss to production.
Summary of the invention
The invention provides a kind of electrode equipment and detection method, in order to solve in the prior art owing to be arranged on the problem that the hole on the upper electrode obstruction takes place and can not in time be found, stopped the MURA that causes to take place to stop up because of upper electrode, phenomenons such as repeat defect, and can further detect the glass substrate that is placed on the pressure-sensitive film and whether have breakage or crackle, reduced production risk.
For achieving the above object, the invention provides a kind of electrode equipment, comprise: upper electrode, lower electrode and voltage detection module, described upper electrode and described lower electrode are oppositely arranged, described lower electrode and described upper electrode facing surfaces are provided with pressure-sensitive film, described voltage detection module, is obtained the correspondent voltage changing value, and is detected processing according to described voltage change because of the pressure that bears changes the resistance variations that produces according to described pressure-sensitive film.
For achieving the above object, the present invention also provides a kind of detection method, comprise: voltage detection module detects the pressure-sensitive film that is arranged on the lower electrode surface and changes the change in voltage that produces because of the pressure that bears, obtain voltage change, and when described voltage change surpasses preset value, send alerting signal.
The present invention is by laying pressure-sensitive film on the surface of lower electrode, can be when being subjected to the air-flow that from the hole of upper electrode, feeds according to this pressure-sensitive film, whether the pressure that is born changes and detects upper electrode and stop up, thereby can find in time whether upper electrode stops up, stopped the MURA that causes to take place to stop up because of upper electrode, repeatability defective phenomenons such as (repeat defect) has reduced production risk; And present embodiment can also detect glass substrate by this pressure-sensitive film and fragmentation or crackle whether occur in transport process, thereby has improved production efficiency, has reduced loss.In addition, the present invention does not need to stop the operation of production equipment in implementation process, does not more need to open the cavity of encapsulation upper electrode and lower electrode, and is therefore simple to operate, can not influence normal production procedure and efficient height.
Below by drawings and Examples, technical scheme of the present invention is described in further detail.
Description of drawings
Fig. 1 is the structural representation of electrode equipment first embodiment of the present invention;
Fig. 2 is the plan structure synoptic diagram of the electrode equipment second embodiment middle and lower part electrode of the present invention;
Fig. 3 is the process flow diagram of detection method embodiment of the present invention.
Embodiment
Electrode equipment of the present invention comprises: upper electrode, lower electrode and voltage detection module, described upper electrode and described lower electrode are oppositely arranged, lower electrode and upper electrode facing surfaces are provided with pressure-sensitive film, voltage detection module changes the resistance variations that produces according to this pressure-sensitive film because of the pressure that bears, obtain the correspondent voltage changing value, and detect processing according to this voltage change.
Electrode equipment of the present invention is provided with one deck pressure-sensitive film on the lower electrode of PECVD/ etching machines.According to the air pressure sensing principle, the pressure that bear on the pressure-sensitive film surface changes can produce change in voltage.Detect this change in voltage, can in time monitor PECVD/ etching machines upper electrode stopping state, perhaps whether glass substrate fragmentation or crackle occur in transport process.
When whether monitoring PECVD/ etching machines upper electrode stops up, for example can adopt from the hole of upper electrode and be provided with mode that the surface of pressure-sensitive film charges into gas to this pressure-sensitive film pressurization to lower electrode, this gas can produce pressure to the pressure-sensitive film surface.If certain on the upper electrode or some hole have stopped up, it is then less then to be in the pressure that locational pressure-sensitive film bore corresponding with this hole, and therefore, the situation whether hole stops up can be reflected in the variation of the pressure that pressure-sensitive film bears.When the pressure that bears when pressure-sensitive film changed, the resistance of itself also changed, and corresponding, the voltage of pressure-sensitive film will change, and obtains this voltage change by the voltage detecting Equipment Inspection.Can preset a magnitude of voltage when whether having the hole obstruction on the upper electrode specifically judging, the voltage change that obtains when detection is during greater than the predeterminated voltage value, and promptly obstruction has taken place the hole of this upper electrode of decidable.
The situation that whether has fragmentation or crackle for the monitoring glass baseplate surface; when equipment normally moves; glass substrate is above this pressure-sensitive film; thereby played the effect of protective film; when the moment that glass substrate is put into reaction chamber by transmission cavity, if glass substrate has produced fragmentation or crackle, then glass substrate will produce difference to the pressure of pressure-sensitive film; this moment, the resistance of pressure-sensitive film will change, thereby was reflected in the variation of voltage.This voltage change is obtained in the voltage detecting Equipment Inspection, can judge this glass baseplate surface and whether have fragmentation or crackle.If glass baseplate surface exists fragmentation or crackle, then can report to the police, if all are normal, then equipment normally moves.
With specific embodiment electrode equipment of the present invention is described in detail below.Following embodiment is that example describes with the PECVD/ etching machines only, is understandable that, following embodiment also can be used for the miscellaneous equipment of the semiconductor manufacturing of TFT-LCD.
Fig. 1 is the structural representation of electrode equipment first embodiment of the present invention, as shown in Figure 1, the electrode equipment of present embodiment comprises: upper electrode 10, lower electrode 11 and voltage detection module, upper electrode 10 is oppositely arranged with lower electrode 11, lower electrode 11 is provided with pressure-sensitive film 13 with upper electrode 10 facing surfaces, voltage detection module changes the resistance variations that produces according to this pressure-sensitive film 13 because of the pressure that bears, obtain the correspondent voltage changing value, and detect processing according to this voltage change.
Further, the electrode equipment of present embodiment comprises charger 14, and this charger 14 is used for charging into air-flow by the hole that is arranged on the upper electrode 10 to the surface that lower electrode 11 is provided with pressure-sensitive film 13.In concrete production run, this air-flow can be inert gas, as nitrogen.This voltage detection module can comprise: the voltage input end 121 that is connected with pressure-sensitive film 13, voltage output end 122 and the detection module 123 that is connected with voltage output end 122.
Particularly, this charger 14 can be arranged on the top of upper electrode 10, charges into nitrogen downwards.Nitrogen arrives lower electrode 11, thereby exerts pressure to the pressure-sensitive film 13 that is arranged on the lower electrode 11 by the hole on the upper electrode 10.
Before whether the voltage of measuring pressure-sensitive film 13 is normal value, can apply voltage for earlier this pressure-sensitive film 13, this voltage input end 121 can be imported the detection voltage of 0～10V.If the hole of upper electrode 10 does not stop up, the pressure that then is applied to pressure-sensitive film 13 surfaces is uniform, can preestablish this moment detection module 123 to detect the magnitude of voltage obtain at voltage output end 122 places be normal value, promptly this moment pressure-sensitive film 13 itself resistance also be normal value.And if certain or some holes stop up, then just can not bear the nitrogen applied pressure on the position corresponding on the pressure-sensitive film 13 with these holes, at this moment, the pressure that pressure-sensitive film 13 is born changes with respect to normal condition, pressure-sensitive film 13 resistance own also correspondingly change, the magnitude of voltage that this moment, detection module 123 obtained in the detection of voltage output end 122 places changes with respect to normal value, thereby obtain voltage change, this detection module 123 can judge further whether this voltage change has exceeded a default magnitude of voltage, and whether the stopping state that is equivalent to the hole on the upper electrode 10 has exceeded the scope that can bear.Detection module 123 can also send alerting signal when voltage change surpasses default magnitude of voltage, thereby the arrestment operation has reduced loss.
Need to prove that voltage input end 121 in the present embodiment and voltage output end 122 can be arranged on the optional position on the pressure-sensitive film 13 selectively, thereby can realize local detection and whole detection neatly upper electrode 10.And the material of this pressure-sensitive film 13 can be selected arbitrarily as required, only needs this pressure-sensitive film 13 pressure that bears can be changed the resistance variations that is converted to self and gets final product.The structure of this pressure-sensitive film 13 also can be selected arbitrarily as required, only needs size with lower electrode 11 to be complementary and gets final product.
Further, the middle part and of the lower electrode 11 of present embodiment is used for the pivotally connected of this lower electrode 11 of overturning.
Particularly, in the electrode equipment of present embodiment, can adopt magnetron sputtering to send out deposition pressure-sensitive film 13 in the one side of the lower electrode of prior art, and another side remain unchanged, and promptly still adopts the oxide quality of aluminium of the prior art.In actual production process, pivot is provided with the operation that pressure-sensitive film 13 is turned to towards upper electrode 10 with lower electrode 11 and can be used as a regular monitoring operation in the employing.When the electrode equipment that does not need to use present embodiment carried out above-mentioned monitoring, this lower electrode 11 can be with the one side of oxide that scribbles aluminium towards upper electrode 10, thus the normal operation of the equipment of assurance.And when the electrode equipment that needs the use present embodiment carries out above-mentioned monitoring, reach regular monitoring during the time, pivot carries out 180 degree upsets with this lower electrode 11 in can adopting, thereby the direction that the feasible one side that deposits pressure-sensitive film 13 enters towards air-flow, thereby whether exist obstruction to detect to this upper electrode 10.Should the electrode equipment of present embodiment be switched middle pivot flexibly between production status and detected state.
Similarly, adopt the electrode equipment of present embodiment also to can be used for detecting glass substrate whether fragmentation or crackle take place in transport process.In this testing process, do not need charger 14 inflation, only need voltage detecting equipment that the voltage change of the pressure-sensitive film 13 that gets access to and default magnitude of voltage are compared and get final product.Its principle is identical with the principle whether hole of above-mentioned detection upper electrode 10 stops up, and repeats no more.
Whether present embodiment can detect upper electrode and stop up by lay pressure-sensitive film on lower electrode, thereby has stopped because of upper electrode takes place to stop up the MURA that causes, and repeated defective phenomenons such as (repeat defect) has reduced production risk; And present embodiment can also detect glass substrate by this pressure-sensitive film and fragmentation or crackle whether occur in transport process, thereby has improved production efficiency, has reduced loss.In addition, present embodiment is by being arranged on voltage input end and voltage output end selectively the optional position on the pressure-sensitive film, thereby can realize local detection and whole detection to upper electrode or glass substrate neatly; By middle pivot the electrode equipment of present embodiment is switched flexibly between production status and detected state.In addition, the present invention does not need to stop the operation of production equipment in implementation process, does not more need to open the cavity of encapsulation upper electrode and lower electrode, and is therefore simple to operate, can not influence normal production procedure and efficient height.
Fig. 2 is the plan structure synoptic diagram of the electrode equipment second embodiment middle and lower part electrode of the present invention, as shown in Figure 2, present embodiment has carried out further improvement to the structure of the pressure-sensitive film on the lower electrode 11 13 on the basis of electrode equipment first embodiment of the present invention.
The pressure-sensitive film 13 of present embodiment comprises a plurality of pressure-sensitive film bars 131 that be arranged in parallel and connect successively, and voltage input end 121 is connected with an end of pressure-sensitive film 13, and voltage output end 122 is connected with the other end of pressure-sensitive film 13.Preferably, the quantity of this pressure-sensitive film bar 131 can be in 50～190.The quantity of this pressure-sensitive film bar 131 can be selected as required, and the structure of this pressure-sensitive film 13 also is not limited to the described structure of present embodiment.Therefore, in the electrode equipment of present embodiment, pressure-sensitive film 13 S-shaped distributions.In actual use, according to measuring needs, this pressure-sensitive film 13 can be other distribution shape, convert resistance variations to as long as it can change the pressure that bears, and distribution shape help the positioning instant of measurement point can.
The carbon/silicon heterojunction material that this pressure-sensitive film 13 can adopt magnetron sputtering method will have the air pressure sensitlzing effect is deposited on the lower electrode 11 and forms.Particularly, it is that 99.9% graphite target is splashed on the silicon chip of polishing and forms with purity that this pressure-sensitive film 13 can adopt magnetron sputtering method, perhaps adopt iron-graphite hybrid target that magnetron sputtering method will contain the iron of 0～10% massfraction to be splashed on the silicon chip of polishing and form, and the thickness that forms is in 20 nanometers～200 nanometer range.
In practical operation, can also be provided with frame 15 and a plurality of support pin 16 on the lower electrode 11.
The testing process of the testing process of present embodiment and electrode equipment of the present invention first embodiment is similar, repeats no more.
Present embodiment passes through voltage input end, to the pressure-sensitive film input voltage, obtain the output voltage of pressure-sensitive film by voltage output end, whether the voltage of judging this voltage output end output by detection module is normal value, whether the voltage change that is voltage output end is in the scope of normal value, the pressure that thereby the change in voltage codomain pressure-sensitive film of voltage output end can be born is mapped, further whether the hole according to pressure change-detection upper electrode stops up, and whether the glass substrate that perhaps is placed on the pressure-sensitive film fragmentation or crackle take place.
Whether the hole that detection method of the present invention can utilize above-mentioned checkout equipment to detect upper electrode stops up, and whether the glass substrate that perhaps is placed on the pressure-sensitive film fragmentation or crackle take place.
Particularly, detection method of the present invention comprises: voltage detection module detects the pressure-sensitive film that is arranged on the lower electrode surface and changes the change in voltage that produces because of the pressure that bears, obtain voltage change, and when described voltage change surpasses preset value, send alerting signal.
When whether monitoring PECVD/ etching machines upper electrode stops up, for example can adopt from the hole of upper electrode and be provided with mode that the surface of pressure-sensitive film charges into gas to this pressure-sensitive film pressurization to lower electrode, this gas can produce pressure to the pressure-sensitive film surface.If all or part of obstruction of certain hole on the upper electrode, it is then less then to be in the pressure that locational pressure-sensitive film bore corresponding with this hole, and therefore, the situation whether hole stops up can be reflected in the variation of the pressure that pressure-sensitive film bears.When the pressure that bears when pressure-sensitive film changed, the resistance of itself also changed, and corresponding, the voltage of pressure-sensitive film will change, and obtains this voltage change by the voltage detecting Equipment Inspection.Specifically judging when whether having the hole obstruction on the upper electrode, can preset a magnitude of voltage, the voltage change that obtains when detection is during greater than the predeterminated voltage value, and promptly obstruction has taken place the hole of this upper electrode of decidable, send alerting signal then, prompting need be cleaned this upper electrode.
The situation that whether has fragmentation or crackle for the monitoring glass baseplate surface; when equipment normally moves; glass substrate is above this pressure-sensitive film; thereby played the effect of protective film; when the moment that glass substrate is put into reaction chamber by transmission cavity, if glass substrate has produced fragmentation or crackle, then glass substrate will produce difference to the pressure of pressure-sensitive film; this moment, the resistance of pressure-sensitive film will change, thereby was reflected in the variation of voltage.This voltage change is obtained in the voltage detecting Equipment Inspection, can judge this glass baseplate surface and whether have fragmentation or crackle.If glass baseplate surface exists fragmentation or crackle, then can report to the police, if all are normal, then equipment normally moves.
Present embodiment detects in voltage detection module before the change in voltage that the pressure-sensitive film be arranged on the lower electrode surface produces because of the pressure variation of bearing, and can comprise: charger charges into air-flow by the hole that is arranged on the upper electrode to the surface that lower electrode is provided with pressure-sensitive film.
Charger also comprises by being arranged on hole on the upper electrode before the surface that lower electrode is provided with pressure-sensitive film charges into air-flow:
Use pivot in the control panel control, by middle pivot lower electrode is turned over turnback, the direction that the surface that makes lower electrode be provided with pressure-sensitive film enters towards air-flow.
Voltage detection module detects the pressure-sensitive film that is arranged on the lower electrode surface and changes the change in voltage that produces because of the pressure that bears, and be specially: voltage input end is to described pressure-sensitive film input voltage; Voltage output end detects the output voltage of pressure-sensitive film; Detection module is output voltage and normal voltage value relatively, obtains voltage change, and at voltage change during greater than the predeterminated voltage changing value, the transmission alerting signal.
Whether the present invention can detect upper electrode and stop up by lay pressure-sensitive film on lower electrode, thereby has stopped because of upper electrode takes place to stop up the MURA that causes, and repeated defective phenomenons such as (repeat defect) has reduced production risk; And present embodiment can also detect glass substrate by this pressure-sensitive film and fragmentation or crackle whether occur in transport process, thereby has improved production efficiency, has reduced loss.In addition, present embodiment is by being arranged on voltage input end and voltage output end selectively the optional position on the pressure-sensitive film, thereby can realize local detection and whole detection to upper electrode or glass substrate neatly; By middle pivot the electrode equipment of present embodiment is switched flexibly between production status and detected state.
With a specific embodiment process whether hole of using detection method detection upper electrode of the present invention stops up is elaborated below.Use detection method of the present invention and detect and whether exist the process of damaged and crackle similar on the glass substrate, repeat no more.
Fig. 3 is the process flow diagram of detection method embodiment of the present invention, and as shown in Figure 3, the method for present embodiment comprises:
The normal operation of step 101, arrestment, and stop radio-frequency voltage.
When equipment does not detect, can run well, when needs detect, normal operation that then can first arrestment, and stop radio-frequency voltage, thus the equipment that makes enters detected state.
When the electrode equipment that does not need to use present embodiment carried out above-mentioned monitoring, this lower electrode can be with the one side of oxide that scribbles aluminium towards upper electrode, thus the normal operation of the equipment of assurance.And when the electrode equipment that needs the use present embodiment carries out above-mentioned monitoring, pivot carries out 180 degree upsets with this lower electrode in can adopting, thereby the direction that the feasible one side that deposits pressure-sensitive film enters towards air-flow, thereby whether exist obstruction to detect to this upper electrode.Should the electrode equipment of present embodiment be switched middle pivot flexibly between production status and detected state.
Need to prove not have sequencing between step 101 and the step 102.
In concrete production run, this air-flow can be inert gas, for example nitrogen.This air-flow can arrive lower electrode, thereby exert pressure to the pressure-sensitive film that is arranged on the lower electrode by the hole on the upper electrode.When hole did not stop up, this air-flow can arrive the surface of pressure-sensitive film equably.When certain or some holes stop up, then need just can not arrive the surface of pressure-sensitive film, thereby the pressure that makes the pressure-sensitive film surface to bear changes by the air-flow of these holes.
This voltage input end can be imported the detection voltage of 0～10V.
Need to prove not have sequencing between step 103 and the step 104.
If the hole of upper electrode does not stop up, the pressure that then is applied to the pressure-sensitive film surface is uniform, can preestablish this moment detection module to detect the magnitude of voltage obtain at the voltage output end place be normal value, promptly this moment pressure-sensitive film itself resistance also be normal value.And if certain or some holes stop up, then just can not bear the nitrogen applied pressure on the position corresponding on the pressure-sensitive film with these holes, at this moment, the pressure that pressure-sensitive film bore changes with respect to normal condition, the resistance of pressure-sensitive film itself also correspondingly changes, and the magnitude of voltage that this moment, detection module obtained in the detection of voltage output end place changes with respect to normal value
When obtaining output voltage, owing to there is interference problem such as noise, this output voltage might exist with the normal voltage value comes in and goes out.Therefore, need further obtain the voltage change of output voltage with respect to the normal voltage value.
Judge that whether this voltage change is equivalent to judge greater than the process of predeterminated voltage changing value whether the stopping state of the hole on the upper electrode has exceeded the scope that can bear.Detection module can also send alerting signal when voltage change surpasses default voltage change, thereby the arrestment operation has reduced loss.
Whether present embodiment can detect upper electrode and stop up by lay pressure-sensitive film on lower electrode, thereby has stopped because of upper electrode takes place to stop up the MURA that causes, and repeated defective phenomenons such as (repeat defect) has reduced production risk.By middle pivot the electrode equipment of present embodiment is switched flexibly between production status and detected state.
It should be noted that at last: above embodiment is only in order to technical scheme of the present invention to be described but not limit it, although the present invention is had been described in detail with reference to preferred embodiment, those of ordinary skill in the art is to be understood that: it still can make amendment or be equal to replacement technical scheme of the present invention, and these modifications or be equal to replacement and also can not make amended technical scheme break away from the spirit and scope of technical solution of the present invention.
Claims (14)
1. electrode equipment, comprise: upper electrode, lower electrode and voltage detection module, described upper electrode and described lower electrode are oppositely arranged, it is characterized in that, described lower electrode and described upper electrode facing surfaces are provided with pressure-sensitive film, described voltage detection module, is obtained the correspondent voltage changing value, and is detected processing according to described voltage change because of the pressure that bears changes the resistance variations that produces according to described pressure-sensitive film.
2. electrode equipment according to claim 1 is characterized in that, also comprises charger, is used for charging into air-flow by the hole that is arranged on the described upper electrode to the surface that described lower electrode is provided with described pressure-sensitive film.
3. electrode equipment according to claim 2 is characterized in that, described air-flow is an inert gas.
4. electrode equipment according to claim 1 is characterized in that the middle part of described lower electrode and is used for the pivotally connected of described lower electrode of overturning.
5. according to the described electrode equipment of arbitrary claim in the claim 1～4, it is characterized in that described voltage detection module comprises voltage input end, voltage output end that is connected with described pressure-sensitive film and the detection module that is connected with described voltage output end.
6. electrode equipment according to claim 5, it is characterized in that, described pressure-sensitive film comprises a plurality of pressure-sensitive film bars that be arranged in parallel and connect successively, and described voltage input end is connected with an end of described pressure-sensitive film, and described voltage output end is connected with the other end of described pressure-sensitive film.
7. electrode equipment according to claim 6 is characterized in that, described pressure-sensitive film comprises 50～190 pressure-sensitive film bars that be arranged in parallel.
8. electrode equipment according to claim 5 is characterized in that, the carbon/silicon heterojunction material that described pressure-sensitive film adopts magnetron sputtering method will have the air pressure sensitlzing effect is deposited on the described lower electrode and forms.
9. electrode equipment according to claim 8, it is characterized in that, it is that 99.9% graphite target is splashed on the silicon chip of polishing and forms with purity that described pressure-sensitive film adopts magnetron sputtering method, perhaps adopts iron-graphite hybrid target that magnetron sputtering method will contain the iron of 0～10% massfraction to be splashed on the silicon chip of polishing and forms.
10. electrode equipment according to claim 9 is characterized in that, the thickness of described pressure-sensitive film is in 20 nanometers～200 nanometer range.
11. a detection method is characterized in that, comprising:
The voltage detection module detection is arranged on the pressure-sensitive film on lower electrode surface because of the pressure that bears changes the change in voltage that produces, and obtains voltage change, and send alerting signal when described voltage change surpasses preset value.
12. detection method according to claim 11 is characterized in that, described voltage detection module detects before the change in voltage that the pressure-sensitive film that is arranged on the lower electrode surface produces because of the pressure variation of bearing, and comprising:
Charger charges into air-flow by the hole that is arranged on the upper electrode to the surface that described lower electrode is provided with described pressure-sensitive film.
13. detection method according to claim 12 is characterized in that, described charger also comprises by being arranged on hole on the upper electrode before the surface that described lower electrode is provided with described pressure-sensitive film charges into air-flow:
Use pivot in the control panel control, described lower electrode is turned over turnback, the direction that the surface that makes described lower electrode be provided with described pressure-sensitive film enters towards described air-flow by pivot in described.
14., it is characterized in that described voltage detection module detection is arranged on the pressure-sensitive film on lower electrode surface because of the pressure that bears changes the change in voltage that produces, and is specially according to the described detection method of arbitrary claim in the claim 11～13:
Voltage input end is to described pressure-sensitive film input voltage;
Voltage output end detects the output voltage of described pressure-sensitive film;
More described output voltage of detection module and normal voltage value are obtained voltage change, and during greater than the predeterminated voltage changing value, send alerting signal at described voltage change.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN2009100839839A CN101887194B (en) | 2009-05-13 | 2009-05-13 | Electrode equipment and detection method |
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| CN2009100839839A CN101887194B (en) | 2009-05-13 | 2009-05-13 | Electrode equipment and detection method |
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| CN101887194A true CN101887194A (en) | 2010-11-17 |
| CN101887194B CN101887194B (en) | 2012-07-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009100839839A Expired - Fee Related CN101887194B (en) | 2009-05-13 | 2009-05-13 | Electrode equipment and detection method |
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| Country | Link |
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| CN (1) | CN101887194B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106768513A (en) * | 2016-11-30 | 2017-05-31 | 北京大学 | A kind of pressure sensor and preparation method thereof |
| CN110346669A (en) * | 2019-08-07 | 2019-10-18 | 重庆臻宝实业有限公司 | Lower electrode detection system |
| CN114152648A (en) * | 2021-12-15 | 2022-03-08 | 无锡市智控科技有限公司 | Glass lining online damage detection device and detection method thereof |
-
2009
- 2009-05-13 CN CN2009100839839A patent/CN101887194B/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106768513A (en) * | 2016-11-30 | 2017-05-31 | 北京大学 | A kind of pressure sensor and preparation method thereof |
| CN106768513B (en) * | 2016-11-30 | 2019-11-01 | 北京大学 | A kind of pressure sensor and preparation method thereof |
| CN110346669A (en) * | 2019-08-07 | 2019-10-18 | 重庆臻宝实业有限公司 | Lower electrode detection system |
| CN114152648A (en) * | 2021-12-15 | 2022-03-08 | 无锡市智控科技有限公司 | Glass lining online damage detection device and detection method thereof |
| CN114152648B (en) * | 2021-12-15 | 2022-09-09 | 无锡市智控科技有限公司 | Online breakage detection device and detection method for glass lining |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101887194B (en) | 2012-07-18 |
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