CN101881779A - Ultrasonic standing wave type micro-fluidic chip and preparation method thereof - Google Patents
Ultrasonic standing wave type micro-fluidic chip and preparation method thereof Download PDFInfo
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- CN101881779A CN101881779A CN 201010192151 CN201010192151A CN101881779A CN 101881779 A CN101881779 A CN 101881779A CN 201010192151 CN201010192151 CN 201010192151 CN 201010192151 A CN201010192151 A CN 201010192151A CN 101881779 A CN101881779 A CN 101881779A
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Abstract
The invention discloses an ultrasonic standing wave type micro-fluidic chip and a preparation method thereof. The ultrasonic standing wave type micro-fluidic chip comprises a glass slide, a micro-fluidic chip, a printed circuit board (a PCB board), a piezoelectric ceramic and a control circuit. The micro-fluidic chip comprises a standing wave reaction chamber and is formed through curing of liquid polydimethylsiloxane (PDMS) prepolymer with a male template, the glass slide is arranged on the micro-fluidic chip prior to curing, and the mold is released after curing the glass slide and the micro-fluidic chip as a whole; the front face of the PCB board is plated with a conductive layer and is connected with the micro-fluidic chip as a whole through the conductive layer and the non-slide surface of the micro-fluidic chip, hole sites corresponding to the micro-fluidic chip are also arranged on the front face of the PCB board, and the piezoelectric ceramic is arranged in a hole site corresponding to the standing wave reaction chamber; and the control circuit is arranged on the back face of the PCB board. The invention has the advantages of simple manufacture, low cost, high controllability, high maneuverability and high degree of integration, and can easily realize the separation, capture and manipulation of cells and samples of other biological living bodies.
Description
Technical field
The invention belongs to the micro-total analysis system field.Be particularly related to a kind of ultrasonic standing wave type micro-fluidic chip and preparation method thereof.
Background technology
The micro-fluidic chip technology is to grow up in the analytical chemistry field nineties in 20th century, it is architectural feature with the micronetwork, with life science is main research object, whole breadboard function is comprised that print pre-service, reaction, separation, detection etc. are integrated on the microchip, analysis speed is greatly improved, having very extensive applicability and application prospect, is the emphasis of current micro-total analysis system research.
Meanwhile, because Acoustic detection and method of operating make it become another focus of research to the non-destructive of living body biological pattern detection.At present, in microfluidic system,, on hard materials such as silicon chip, etch the micronetwork structure generally by wet etching method, again by the anode key and mode, with the glass sheet key with to the silicon chip that is etched with microstructure, make the sound wave chip with this.This sound wave chip manufacture effect is better, and still, it need use millions of anode key and the equipment of being worth, thereby makes that the chip cost of preparation is very high, is unfavorable for the marketization.In addition, present sound wave chip also just rests on laboratory stage, also lacks the research to chip operability and controllability aspect.
Summary of the invention
Purpose of the present invention is exactly that situation at above-mentioned prior art provides ultrasonic standing wave type micro-fluidic chip that a kind of manufacturing process is simple, cost of manufacture is low and integrated level is high and preparation method thereof.
Realize that the technical scheme that the object of the invention adopts is:
Ultrasonic standing wave type micro-fluidic chip is made of microslide, micro-fluidic chip, printed circuit board (PCB) (pcb board), piezoelectric ceramics and control circuit.Include the standing wave reaction chamber in the microfluidic chip structure, pass through the moulding of formpiston template, and before its liquid prepolymer is solidified, described microslide is placed on it, treat its back demoulding that is cured as a single entity by dimethyl silicone polymer (PDMS) liquid prepolymer; Has one deck conductive layer on the front of pcb board, its non-microslide face and micro-fluidic chip by this conductive layer and micro-fluidic chip fuses, and be provided with and position, the corresponding hole of microfluidic chip structure in the front of pcb board, the position, hole of its corresponding standing wave reaction chamber is equipped with piezoelectric ceramics; Control circuit is laid in the back side of pcb board.
In the practical application, the number of the standing wave reaction chamber on the above-mentioned micro-fluidic chip can 〉=1, and the position, hole that above-mentioned PCB analyses is corresponding with it with piezoelectric ceramics; Corresponding with it control circuit is one group of on-off circuit, and the input end of switch connects together, and its output terminal links to each other respectively with each piezoelectric ceramics.
The preparation method of ultrasonic standing wave type micro-fluidic chip is made of following step:
1, the method with soft lithographic prepares the formpiston template that the required micro-fluidic chip that contains reaction chamber in the glass is used;
2, on the surface has conductor planes on the printed circuit board (PCB) (pcb board) of one deck conductive layer, process with micro-fluidic chip in position, the corresponding hole of structure, and, then on the non-conductive aspect of pcb board, lay correspondent control circuits piezoelectric ceramic piece being installed with the corresponding Kong Weili of ultrasonic standing wave reaction chamber;
3, dimethyl silicone polymer (PDMS) liquid prepolymer is inserted on the formpiston template of micro-fluidic chip of preparation, and microslide is placed on the PDMS liquid prepolymer on the formpiston template, after treating that the reaction of PDMS liquid prepolymer is solidified, the demoulding together, the micro-fluidic chip of formation and microslide one punches with card punch;
4, will with the micro-fluidic chip of microslide one by non-microslide aspect on it and conductor planes and the system on the pcb board
The pcb board that is equipped with links together accordingly.
In the practical application, the formpiston template that above-mentioned preparation micro-fluidic chip is used can be selected the silicon mold template for use; The Kong Weili that piezoelectric ceramics is installed on the above-mentioned pcb board can fill the epoxy resin of encapsulation piezoelectric ceramics.
The sound source of ultrasonic standing wave of the present invention is from the piezoelectric ceramics that is installed in PCB hole the inside, and its frequency of operation is by himself character decision.According to the difference of the resonance frequency of each piezoelectric ceramics, by regulating the intensity and the frequency of input signal, can realize pair cell and so on the biological living sample separation and catch.
The method of the present invention by embedding realized ultrasonic standing wave integrated in micro-fluidic chip.Compare with existing method, have following advantage: this device process is simple, need not complex steps such as wet etching; Cost is low, does not need expensive anode key and equipment in the manufacturing process; The generation of ultrasonic standing wave field and regulate controlled; Can be by the littler piezoelectric ceramic piece of use size so that device has higher integrated level.Utilize the present invention can realize at an easy rate biological living samples such as pair cell separation, catch and handle.In view of the above, the present invention can be widely used in fields such as life science, pharmaceutical science and medical science.
Description of drawings:
Fig. 1 is the cross section structure synoptic diagram of ultrasonic standing wave type micro-fluidic chip of the present invention.
Fig. 2 is the vertical view of the embodiment of the invention 1 product.
Fig. 3 is the vertical view of the embodiment of the invention 2 products.
Fig. 4 is the vertical view of the embodiment of the invention 3 products.
In the accompanying drawing: 1---pcb board, 2---PDMS, 3---microslide, 4---the ultrasonic standing wave reaction chamber, 5---the PZT piezoelectric ceramic piece, 6---the epoxy resin of encapsulation PZT, 7---advancing/fluid hole of chip.
Embodiment:
1, produce the silicon mold template that the ultrasonic standing wave micro-fluidic chip is used with the method for soft lithographic, only designing in this template has a standing wave reaction chamber (4), forms 1 * 1 standing wave reaction chamber array;
2, on the surface is coated with the pcb board (1) of layer of copper, process one with micro-fluidic chip in position, the corresponding hole of structure, install and fix PZ26 piezoelectric ceramic piece (5) at the Kong Weili of ultrasonic standing wave reaction chamber, sound source as ultrasonic standing wave, connect up at the back side of pcb board (1) simultaneously, piezoelectric ceramic piece (5) input signal is connected to the output terminal of control circuit;
3, PDMS liquid prepolymer (2) is poured on the formpiston template, again a microslide (3) is put on the PDMS liquid prepolymer (2) on the formpiston template, after question response solidifies, stripping forming together, make the micro-fluidic chip with the microslide one, punch with card punch;
What 4, make more than the general is fixed together with screw with the micro-fluidic chip of microslide one and the pcb board of above preparation (1), promptly obtains being integrated with the micro-fluidic chip of a ultrasonic standing wave reaction chamber (4).
1, produce the glass mold plungers template that the ultrasonic standing wave micro-fluidic chip is used with the method for soft lithographic, design has three standing wave reaction chambers (4) in this template, forms 1 * 3 standing wave reaction chamber array;
2, on the surface is coated with the pcb board (1) of one deck platinum, process with micro-fluidic chip in position, the corresponding hole of structure, installing and fixing three PZ26 piezoelectric ceramic pieces (5) with the corresponding Kong Weili of ultrasonic standing wave reaction chamber, sound source as ultrasonic standing wave, connect up at the back side of pcb board (1) simultaneously, all piezoelectric ceramic pieces (5) input signal is connected to the output terminal of three-way switch circuit, and the circuit board that will be welded with three-way switch is fixed on the both sides of pcb board (1), as support;
3, PDMS liquid prepolymer (2) is poured on the formpiston template, again a microslide (3) is put on the PDMS liquid prepolymer (2) on the formpiston template, after question response solidifies, stripping forming together, make the micro-fluidic chip with the microslide one, punch with card punch;
4, will more than make with the micro-fluidic chip of microslide one and standoff pcb board (1) be installed be fixed together with screw, promptly obtain being integrated with the micro-fluidic chip of three standing wave reaction chambers (4).
1, produce the silicon mold template that the ultrasonic standing wave micro-fluidic chip is used with the method for soft lithographic, design has 9 standing wave reaction chambers (4) in this template, forms 3 * 3 arrays and distributes;
2, on the surface is coated with the pcb board (1) of one deck gold, process with micro-fluidic chip in position, the corresponding hole of structure, install and fix last nine PZ26 piezoelectric ceramic pieces (5) at the Kong Weili of ultrasonic standing wave reaction chamber (4), sound source as ultrasonic standing wave, connect up at the back side of pcb board (1) simultaneously, all piezoelectric ceramic pieces (5) input signal is connected to the output terminal of nine path switching circuits, and the circuit board that will be welded with nine way switch is fixed on the both sides of pcb board (1), as support;
3, PDMS liquid prepolymer (2) is poured on the formpiston template, again a microslide (3) is put on the PDMS liquid prepolymer (2) on the formpiston template, after question response solidifies, stripping forming together, make the micro-fluidic chip with the microslide one, punch with card punch;
4, will more than make with the micro-fluidic chip of microslide one and standoff pcb board (1) be installed be fixed together, promptly obtain being integrated with one 3 * 3 micro-fluidic chip of totally 9 standing wave reaction chambers (4) with screw.
Claims (6)
1. a ultrasonic standing wave type micro-fluidic chip is made of microslide, micro-fluidic chip, printed circuit board (PCB) (pcb board), piezoelectric ceramics and control circuit, it is characterized in that:
1) includes the standing wave reaction chamber in the described microfluidic chip structure, pass through the moulding of formpiston template by dimethyl silicone polymer (PDMS) liquid prepolymer, and before its liquid prepolymer is solidified, described microslide is placed on it, treat its back demoulding that is cured as a single entity;
2) has one deck conductive layer on the front of described pcb board, its non-microslide aspect and micro-fluidic chip by this conductive layer and micro-fluidic chip fuses, and the front of pcb board is provided with and position, the corresponding hole of microfluidic chip structure, and the position, hole of its corresponding standing wave reaction chamber is equipped with piezoelectric ceramics;
3) described control circuit is laid in the back side of pcb board.
2. a kind of ultrasonic standing wave type micro-fluidic chip according to claim 1 is characterized in that: number 〉=1 of the standing wave reaction chamber on the described micro-fluidic chip.
3. a kind of ultrasonic standing wave type micro-fluidic chip according to claim 1 and 2 is characterized in that: described control circuit is one group of on-off circuit; The input end of its switch connects together, and the output terminal of its switch links to each other respectively with each piezoelectric ceramics.
4. the preparation method of a ultrasonic standing wave type micro-fluidic chip is characterized in that being made of following step:
1) method with soft lithographic prepares the formpiston template that the required micro-fluidic chip that contains reaction chamber in the glass is used;
2) on the surface has conductor planes on the pcb board of one deck conductive layer, process with micro-fluidic chip in position, the corresponding hole of structure, and, then on the non-conductive aspect of pcb board, lay correspondent control circuits piezoelectric ceramic piece being installed with the corresponding Kong Weili of ultrasonic standing wave reaction chamber;
3) dimethyl silicone polymer (PDMS) liquid prepolymer is inserted on the formpiston template of micro-fluidic chip of preparation, and microslide is placed on the PDMS liquid prepolymer on the formpiston template, after treating that the reaction of PDMS liquid prepolymer is solidified, the demoulding together, the micro-fluidic chip of formation and microslide one punches with card punch;
4) will link together accordingly by the non-microslide aspect on it and the conductor planes on the pcb board and the pcb board of preparation with the micro-fluidic chip of microslide one.
5. the preparation method of a kind of ultrasonic standing wave type micro-fluidic chip according to claim 4, it is characterized in that: the formpiston template that described preparation micro-fluidic chip is used is the silicon mold template.
6. according to the preparation method of claim 4 or 5 described a kind of ultrasonic standing wave type micro-fluidic chips, it is characterized in that the Kong Weili that piezoelectric ceramics is installed on the described pcb board is filled with the epoxy resin that encapsulates piezoelectric ceramics.
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| CN105289767A (en) * | 2015-11-11 | 2016-02-03 | 南京理工大学 | Micro-fluidic chip |
| CN106076444A (en) * | 2016-06-14 | 2016-11-09 | 东华大学 | A kind of ultrasonic standing wave type micro-fluidic chip and preparation method thereof |
| CN106153931A (en) * | 2015-03-11 | 2016-11-23 | 宁波大学 | The controller used in syphilis diagnosis micro fluidic device that liquid stream driving adapter is easily-disassembled |
| CN106153930A (en) * | 2015-03-11 | 2016-11-23 | 宁波大学 | The controller used in syphilis diagnosis device that a kind of sample driving adapter can fast remove |
| CN106153932A (en) * | 2015-03-11 | 2016-11-23 | 宁波大学 | For the cholera diagnosis micro fluidic device driving the adnexa of liquid stream fast to remove |
| CN106290856A (en) * | 2015-05-26 | 2017-01-04 | 宁波大学 | Four-way and the AIDS diagnosis micro fluidic device of Dual Drive coupling running |
| CN106290857A (en) * | 2015-05-26 | 2017-01-04 | 宁波大学 | Multichannel and the cholera diagnosis micro flow control chip device of Dual Drive coupling running |
| CN106290933A (en) * | 2015-05-26 | 2017-01-04 | 宁波大学 | Double-unit system drives the cholera diagnosis micro flow control chip device of coupling running |
| CN106290932A (en) * | 2015-05-26 | 2017-01-04 | 宁波大学 | Comprise the AIDS diagnosis Multichannel device of the Dual Drive coupling of hydrophobic substrate |
| CN106290492A (en) * | 2015-05-11 | 2017-01-04 | 宁波大学 | Driving component is easily-disassembled and cholera diagnosis device more capable of circulation |
| CN106290930A (en) * | 2015-05-26 | 2017-01-04 | 宁波大学 | The hypotype swine flue multi-channel testing device of the Dual Drive coupling containing hydrophobic substrate |
| CN106290931A (en) * | 2015-05-26 | 2017-01-04 | 宁波大学 | The hypotype swine flue detection Multichannel device of substrate is made with cheap hydrophobic material |
| CN106556708A (en) * | 2015-09-24 | 2017-04-05 | 宁波大学 | The micro flow control chip device containing hydrophobic substrate of two kinds of type of drive coupling runnings |
| CN106556709A (en) * | 2015-09-24 | 2017-04-05 | 宁波大学 | The micro flow control chip device comprising hydrophobic substrate of coupling Dual Drive pattern |
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| CN110333286A (en) * | 2019-07-24 | 2019-10-15 | 中山大学 | Apparatus and method based on ultrasonic standing wave acoustic field cell integral, flexible modulus |
| CN111389473A (en) * | 2020-03-25 | 2020-07-10 | 武汉大学 | Vertical channel tunable high-flux acoustic flow control sorting chip and preparation method thereof |
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| CN106153932A (en) * | 2015-03-11 | 2016-11-23 | 宁波大学 | For the cholera diagnosis micro fluidic device driving the adnexa of liquid stream fast to remove |
| CN106153931A (en) * | 2015-03-11 | 2016-11-23 | 宁波大学 | The controller used in syphilis diagnosis micro fluidic device that liquid stream driving adapter is easily-disassembled |
| CN106153930A (en) * | 2015-03-11 | 2016-11-23 | 宁波大学 | The controller used in syphilis diagnosis device that a kind of sample driving adapter can fast remove |
| CN106290492A (en) * | 2015-05-11 | 2017-01-04 | 宁波大学 | Driving component is easily-disassembled and cholera diagnosis device more capable of circulation |
| CN106290932A (en) * | 2015-05-26 | 2017-01-04 | 宁波大学 | Comprise the AIDS diagnosis Multichannel device of the Dual Drive coupling of hydrophobic substrate |
| CN106290857A (en) * | 2015-05-26 | 2017-01-04 | 宁波大学 | Multichannel and the cholera diagnosis micro flow control chip device of Dual Drive coupling running |
| CN106290933A (en) * | 2015-05-26 | 2017-01-04 | 宁波大学 | Double-unit system drives the cholera diagnosis micro flow control chip device of coupling running |
| CN106290856A (en) * | 2015-05-26 | 2017-01-04 | 宁波大学 | Four-way and the AIDS diagnosis micro fluidic device of Dual Drive coupling running |
| CN106290930A (en) * | 2015-05-26 | 2017-01-04 | 宁波大学 | The hypotype swine flue multi-channel testing device of the Dual Drive coupling containing hydrophobic substrate |
| CN106290931A (en) * | 2015-05-26 | 2017-01-04 | 宁波大学 | The hypotype swine flue detection Multichannel device of substrate is made with cheap hydrophobic material |
| CN106556708A (en) * | 2015-09-24 | 2017-04-05 | 宁波大学 | The micro flow control chip device containing hydrophobic substrate of two kinds of type of drive coupling runnings |
| CN106556709A (en) * | 2015-09-24 | 2017-04-05 | 宁波大学 | The micro flow control chip device comprising hydrophobic substrate of coupling Dual Drive pattern |
| CN105289767A (en) * | 2015-11-11 | 2016-02-03 | 南京理工大学 | Micro-fluidic chip |
| CN106076444A (en) * | 2016-06-14 | 2016-11-09 | 东华大学 | A kind of ultrasonic standing wave type micro-fluidic chip and preparation method thereof |
| CN106076444B (en) * | 2016-06-14 | 2019-02-26 | 东华大学 | A kind of ultrasonic standing wave type micro-fluidic chip and preparation method thereof |
| CN107159332A (en) * | 2017-06-22 | 2017-09-15 | 武汉大学 | A kind of micro-fluidic bulk wave sorting chip preparation method based on silica gel bonded layer |
| CN110333286A (en) * | 2019-07-24 | 2019-10-15 | 中山大学 | Apparatus and method based on ultrasonic standing wave acoustic field cell integral, flexible modulus |
| CN111389473A (en) * | 2020-03-25 | 2020-07-10 | 武汉大学 | Vertical channel tunable high-flux acoustic flow control sorting chip and preparation method thereof |
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