CN101867860A - Condenser microphone having split electrodes - Google Patents
Condenser microphone having split electrodes Download PDFInfo
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- CN101867860A CN101867860A CN201010205395A CN201010205395A CN101867860A CN 101867860 A CN101867860 A CN 101867860A CN 201010205395 A CN201010205395 A CN 201010205395A CN 201010205395 A CN201010205395 A CN 201010205395A CN 101867860 A CN101867860 A CN 101867860A
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Abstract
The invention provides a condenser microphone having split electrodes. The condenser microphone comprises two micro capacitor polar plates and two electrodes, wherein any of the electrodes is symmetrically equally split into n independent electrode units with the same shape and area along the radial direction. The n independent electrode units are mutually insulated and are central symmetrical about the geometric center of the micro capacitor polar plate, wherein n is more than 1. The n independent electrode units respectively lead out a signal to a follow-up circuit for summation. When the two electrodes are equally split into n sections, the upper and lower electrodes have the same dividing manner, the split electrode units corresponding to the two polar plates are completely just opposite and have the same shape and size, and the n electrode units on the upper and lower two polar plates are serially connected one by one. The split electrodes of the invention can promote the sensitivity and SNR (signal to noise ratio) of the microphone without increasing the technique complexity.
Description
Technical field
The present invention relates to the micro electro mechanical device technical field, specifically, the present invention relates to a kind of condenser microphone of cutting apart electrode that has.
Background technology
MEMS condenser microphone (also claiming silicon micro capacitor microphone) is a kind of novel microphone that adopts bulk silicon process to make.Compare with traditional electret microphone, it have volume little, be easy to advantages such as batch process, high conformity and suitable surface mount.Can be used for also can being used for high-end acoustic instruments such as hearing aids in the various consumption electronic products such as mobile phone, digital camera, voice earphone.
The MEMS condenser microphone is grouped into by the silicon part and the peripheral circuit portion that form silicon micro capacitor.Wherein the silicon micro capacitor chip partly is the core of microphone, silicon micro capacitor chip part usually by silicon substrate and on vibrating membrane, separator, air-gap, the backboard that has acoustic holes and metal electrode form.A kind of typical silicon micro capacitor chip cross-sectional structure is seen accompanying drawing 1.Silicon micro capacitor is reached to go up by vibrating membrane 10, air-gap 3 to be made up of the back pole plate 20 of acoustic holes 29, vibrating membrane 10 and back pole plate 20 are two pole plates of electric capacity, vibrating membrane 10 is a silicon nitride film, need make little capacitance electrode 11 in the above to collect electric charge and to draw signal, back pole plate 20 is a conductive polysilicon film, have conductivity, can only make pad 21 thereon and draw signal.If back pole plate 20 also is an insulating material, then need to make electrode 21 equally.
Vibrating membrane 10 is generally centrosymmetric image, as circle or regular polygon.In order to realize the highest sensitivity, the electrode of electric capacity generally has shape consistent with its place pole plate and geometric center, and should cover polar board surface as far as possible on the basis of satisfying basic demands such as insulation, isolation.
During the work of MEMS condenser microphone, between vibrating electrode membrane 11 and back pole plate electrode 21, add bias voltage, vibrating membrane 10 picks up sound wave and produces vibration, the distance of 20 of itself and back pole plates is changed, changed the capacitance of little electric capacity, and then making the voltage between electrode 11 and 21 that small change take place, subsequent conditioning circuit is by detecting amplitude and the frequency that this change in voltage detects incident acoustic wave.
The subject matter that present MEMS condenser microphone faces is that its sensitivity is compared still on the low side with signal to noise ratio with traditional electret microphone.Main cause has: the size of MEMS condenser microphone is less, and structure is complicated, has some restrictions on the technology, and the method that film residual stress is controlled is still waiting to strengthen, or the like.In a word, design a model at present and process conditions under, the sensitivity that further improve the MEMS condenser microphone has certain difficulty.
Chinese patent (application number: proposed a kind of silicon micro piezoelectric sensor chip and manufacture method thereof 200510086861.7) with partition type series connection electrode.In the method, do not change the acoustic construction of transducer and just introduce and cut apart electrode, solved the problem that sensitivity reduces under the direct capacitance high frequency, make the sensitivity of piezoelectric transducer improve n doubly, wherein n is the electrode block quantity that transducer is cut apart electrode.But this method only be fit to can spontaneous polarization piezoelectric transducer, can not satisfy other transducers, especially the needs of capacitance type sensor.
Summary of the invention
Purpose of the present invention is, be output sensitivity and the lower shortcoming of signal to noise ratio that overcomes existing MEMS condenser microphone, do not change the basic acoustic construction of MEMS condenser microphone, when not increasing the complex process degree, and then proposing a kind of condenser microphone of cutting apart electrode that has.
For achieving the above object, a kind of condenser microphone of cutting apart electrode that has provided by the invention, this condenser microphone comprises two little capacitor plates and two electrodes, described two electrodes lay respectively on described two little capacitor plates, it is characterized in that, in described two electrodes any one is divided into n shape and the identical independently electrode unit of area by the radial symmetric five equilibrium, described n electrode unit mutually insulated and be centrosymmetric about the geometric center of little capacitor plate at its place; Wherein, n＞1;
Each electrode in the described n electrode is drawn signal and external identical current potential separately, the output signal of n electrode unit is connected respectively to the input port of a signal summing circuit then, realizes the stack of all n electrode output signals by a summation operation circuit; Another not divided electrode in described two electrodes is as public electrode ground connection.
In the technique scheme, described little capacitor plate is vibrating membrane and back pole plate, and this vibrating membrane or back pole plate adopt circle or regular polygon.
In the technique scheme, the described electrode of cutting apart adopts deposition, photoetching and corrosion or photoetching in the standard MEMS condenser microphone technology, deposits and peel off mode and make.
In the technique scheme, described divided vibrating membrane or back pole plate all adopt insulating nitride silicon to make.
The present invention also proposes a kind of condenser microphone of cutting apart electrode that has, this condenser microphone comprises two little capacitor plates and two electrodes, described two electrodes lay respectively on described two little capacitor plates, it is characterized in that, described two electrodes all are divided into n shape and the identical independently electrode unit of area by the radial symmetric five equilibrium, described n electrode unit mutually insulated and be centrosymmetric about the geometric center of little capacitor plate at its place; Wherein, n＞1;
Described two electrodes are all cut apart by the n five equilibrium, partitioning scheme is identical, and after cutting apart, on the two-plate each correspondence cut apart electrode unit must be fully over against and the shape size identical, first of top crown is cut apart electrode unit and is cut apart second of electrode unit, top crown over against first of bottom crown and cut apart electrode unit and cut apart electrode unit over against second of bottom crown, by that analogy; Distinguish in sequential series between n electrode unit on described up and down two battery lead plates, first of top crown is cut apart electrode unit and is connected to external circuit, first of bottom crown is cut apart electrode unit and is cut apart electrode unit with second of top crown and be connected, second of bottom crown is cut apart electrode unit and is cut apart electrode unit with the 3rd of top crown and be connected, by that analogy, last of bottom crown cut apart another port that electrode unit is connected to external circuit, and two ports by external circuit provide bias voltage and draw signal.
In the technique scheme, described little capacitor plate is vibrating membrane and back pole plate, and this vibrating membrane or back pole plate adopt circle or regular polygon.
In the technique scheme, described divided vibrating membrane or back pole plate all adopt insulating nitride silicon to make.Must guarantee divided vibrating membrane or back pole plate, except that two electrodes, not have other electrodes interconnected with it, so divided vibrating membrane and back pole plate can not use the conductive polycrystalline silicon material with wire interconnection.
In the technique scheme, the described electrode of cutting apart adopts deposition, photoetching and corrosion or photoetching in the standard MEMS condenser microphone technology, deposits and peel off mode and make.
In the technique scheme, when described two electrodes were all cut apart, the bias voltage of the bias voltage of circuit electrode when not cutting apart was used to obtain higher sensitivity.
In the technique scheme, it is relevant with the shape and the symmetry of little capacitor plate that described cutting unit is counted n.Generally require residing each cell configuration of electrode and area on little capacitor plate identical, and be centrosymmetric about the geometric center of pole plate.In general, n is no more than this little capacitor plate can wherein, can be depended on the symmetry of this pole plate by the maximum number of five equilibrium by the maximum number of five equilibrium, waits timesharing also to need to consider the influence that the edge effect of electric field causes little electric capacity.If promptly pole plate is a circle, then it can be by unlimited five equilibrium, if pole plate is a square, then it can be 8 by the maximum number of five equilibrium.
In the technique scheme, in order to make the output sensitivity maximum, the electrode on described each subdivision such as grade satisfies under the situation of basic demands such as mutually insulated in assurance, all covers the subdivision that waits at its place as far as possible, or the projection of vibrating membrane on these subdivisions.
The invention has the advantages that:
(1) electrode configuration provided by the invention has improved the output sensitivity and the signal to noise ratio of MEMS condenser microphone greatly, is particularly useful for the bigger low frequency condenser microphone of vibrating membrane.Adopt n to cut apart electrode, can improving nearly compared with original electrode sensitivity, n doubly improves n nearly with signal to noise ratio
2Doubly; And this electrode configuration can also be used on other microphones of imitative MEMS microphone construction except being used in the MEMS condenser microphone.
(2) the present invention does not change the basic acoustic construction of microphone when increasing substantially output sensitivity, and the manufacturing process of microphone is not had too much change yet.Based on These characteristics, the present invention has applicability preferably, can be used for nearly all MEMS condenser microphone.
Description of drawings
Fig. 1 is the cross sectional representation of the little electric capacity chip of a kind of existing MEMS condenser microphone;
Fig. 2 (a) is that a vibrating electrode membrane with the MEMS condenser microphone of the present invention is used as the cross sectional representation when cutting apart electrode;
Fig. 2 (b) is that a vibrating electrode membrane with the MEMS condenser microphone of the present invention is used as the vertical view when cutting apart electrode;
Fig. 3 (a) is the present invention with the back pole plate electrode of the MEMS condenser microphone cross sectional representation when cutting apart electrode;
Fig. 3 (b) is the present invention with the back pole plate electrode of the MEMS condenser microphone upward view when cutting apart electrode;
Fig. 4 be of the present invention with the MEMS condenser microphone vibrating membrane and the back pole plate of back pole plate electrode when cutting apart electrode on cut apart the vertical view of electrode.
The accompanying drawing sign:
1, monocrystalline substrate 2, shading ring 3, air-gap
10, the original electrode on vibrating membrane 11, the vibrating membrane
12, first on the vibrating membrane cut apart electrode unit
13, second on the vibrating membrane cut apart electrode unit
14, the 3rd on the vibrating membrane cut apart electrode unit
15, the 4th on the vibrating membrane cut apart electrode unit
20, the original electrode on back pole plate 21, the back pole plate
22, first on the back pole plate cut apart electrode unit
23, second on the back pole plate cut apart electrode unit
24, the 3rd on the back pole plate cut apart electrode unit
25, the 4th on the back pole plate cut apart electrode unit
29, the acoustic holes on the back pole plate
Embodiment
In conjunction with the accompanying drawings, will be better understood the detailed description of aforesaid abstract of invention part and following invention example.The purpose of accompanying drawing is the reasonable embodiment that provides in order to help to understand the present invention better.The present invention has more than and is limited to material and the device that uses in these embodiments and these schemes.
The invention provides a kind of MEMS condenser microphone of cutting apart electrode configuration that has.It has improved the sensitivity and the signal to noise ratio of MEMS condenser microphone on the basis of the acoustic construction that does not change the MEMS condenser microphone, be applicable to the MEMS condenser microphone of various structures.In following case description, adopted the concrete structure of certain MEMS condenser microphone, but it is to be noted, the present invention is not limited in this MEMS condenser microphone, and the signal processing circuit of use also is not limited to the circuit that example proposes, as long as its performance satisfies instructions for use.
Below in conjunction with the drawings and specific embodiments the present invention is done and to describe in further detail.
Embodiment 1:
Fig. 2 shows the embodiment that the present invention is used to improve the sensitivity of MEMS condenser microphone.The structure of MEMS condenser microphone and the microphone among Fig. 1 are similar in this example, and slightly different is to have adopted on the vibrating membrane 10 of this microphone and cut apart the sensitivity that electrode configuration improves microphone.When only cutting apart a little capacitor plate, the above-mentioned identical current potential of output termination of respectively cutting apart electrode, and pass through the stack that a summation operation circuit is realized output signal.The undivided electrode of another of little electric capacity is as public electrode ground connection.Because it is identical with the level of sensitivity of original electrode respectively to cut apart the electrode output sensitivity, so n the signal stack back of cutting apart electrode just can obtain original electrode n output signal doubly, that is, adopt the n five equilibrium to cut apart electrode, the sensitivity of microphone can be brought up to original n doubly.
MEMS condenser microphone vibrating membrane 10 among Fig. 2 (a) is circular, adopts silicon nitride to make, and in order to improve sensitivity, has made on silicon nitride vibrating membrane 10 and has cut apart electrode 12 and 13, its vertical view such as Fig. 2 (b).The described electrode 12 and 13 of cutting apart is that described vibrating membrane 10 is carried out after radially 2 five equilibriums are cut apart, the electrode that is separated from each other and insulate two cut zone settings, their shape and area are identical, and complete geometric center center symmetry about vibrating membrane 10, electrode 12 and 13 is drawn signal separately, and external identical current potential.
Another pole plate of silicon micro capacitor is a back pole plate 20, and it is as public electrode ground connection.Back pole plate 20 is a conductive polycrystalline silicon, need not make metal electrode on it, only needs to form a metal pad 21 and gets final product.It is described that to cut apart electrode 12 identical with the manufacture method of other electrodes of MEMS condenser microphone with 13 manufacture method, for example can on vibrating membrane 10, deposit layer of metal film earlier, photoetching subsequently, corrosion form electrode, also can adopt and peel off the making of (lift-off) technology.
Electrode 12 has identical dc offset voltage with 13 pairs of back pole plates 20, they are connected to the input port of a signal summing circuit simultaneously, through summation and signal condition, output sensitivity is a sensitivity sum on electrode 12 and 13, that is becomes 2 times of original electrode configuration.
Present embodiment does not change other structures of this MEMS microphone, only original electrode configuration has been changed into and cut apart electrode configuration, so output sensitivity is being improved in 2 times, is not increasing the manufacturing technology steps and the process complexity of this MEMS condenser microphone.
Embodiment 2:
Fig. 3 shows another embodiment that the present invention is used to improve the sensitivity of MEMS condenser microphone, as Fig. 3 (a).The microphone construction of the structure of MEMS condenser microphone and embodiment 1 is similar in this example.Different is, the vibrating membrane 10 of microphone all adopts the insulating nitride silicon materials to make with back pole plate 20 in this example, and on back pole plate 20, adopt and cut apart electrode configuration and made and cut apart electrode 22,23,24 and 25, its upward view such as Fig. 3 (b), wherein the acoustic holes on the back pole plate 29 is not shown.
The back pole plate 20 of MEMS condenser microphone is circular among Fig. 3 (a), is that symmetrical centre is carried out 4 five equilibriums with it with the center of circle radially, utilize above-mentioned 4 to wait the branch radius to determine 4 unit that shape is all identical with area with the border of back pole plate 20, and in described each unit, arrange the electrode that disconnected from each other, insulation and shape and area equate, their shape and area are identical, and complete geometric center center symmetry about back pole plate 20, electrode 22,23,24 and 25 is drawn signal separately, and external identical current potential.
Identical with embodiment 1, the electrode of cutting apart in the present embodiment adopts the deposition-photoetching-corrosion or the photoetching-deposition-stripping technology of standard to make, and can not increase extra processing step and process complexity in MEMS condenser microphone manufacture process.
Embodiment 3:
Fig. 4 is another embodiment that the present invention is used to improve the sensitivity of MEMS condenser microphone, show the vibrating membrane of MEMS condenser microphone and back pole plate electrode concrete execution mode when cutting apart electrode, show the vertical view of cutting apart electrode on the back pole plate especially, wherein the acoustic holes on the back pole plate 29 is not shown.When two little capacitor plates are all cut apart up and down, the partitioning scheme of two-plate is identical, and after cutting apart, on the two-plate each correspondence cut apart electrode unit must be fully over against, be that first of top crown is cut apart electrode unit and cut apart second of electrode unit, top crown over against first of bottom crown and cut apart electrode unit and cut apart electrode unit over against second of bottom crown, by that analogy.In sequential series between last bottom crown electrode, be that first of top crown is cut apart electrode unit and is connected to external circuit, first of bottom crown is cut apart electrode unit and is cut apart electrode unit with second of top crown and be connected, second of bottom crown is cut apart electrode unit and is cut apart electrode unit with the 3rd of top crown and be connected, by that analogy, last of bottom crown cut apart another port that electrode unit is connected to external circuit, and two ports by external circuit provide bias voltage and draw signal.This partitioning scheme does not need summing circuit, but the capacitance sensor internal driving increases, and needs bigger bias voltage, and each cuts apart electrode just can reach sensitivity identical when not cutting apart.Vibrating membrane 10 of MEMS condenser microphone in this example (being positioned under the back pole plate 20, not shown) and back pole plate 20 are square, all adopt the insulating material silicon nitride to make, and all will form metal electrode on vibrating membrane 10 and back pole plate 20.Present embodiment all adopts the quartering provided by the invention to cut apart electrode configuration on vibrating membrane 10 and back pole plate 20, promptly respectively from foursquare geometric center, 4 five equilibriums are radially cut apart vibrating membrane 10 and back pole plate 20, shape and equal and opposite in direction are set respectively on vibrating membrane 10, about vibrating membrane geometric center symmetry, and be separated from each other insulation, draw first of signal separately, second, the 3rd, the 4th cuts apart electrode 12,13,14,15 (all not shown), on back pole plate 20, be provided with first respectively by the same way, second, the 3rd, the 4th cuts apart electrode 22,23,24,25, cut apart electrode 22,23,24,25 with vibrating membrane 10 on cut apart electrode 12,13,14,15 shape, the size identical and one by one over against, promptly first cut apart electrode 12 and 22 mutually over against, second cut apart electrode 13 and 23 mutually over against, by that analogy.
In the present embodiment, also can select other modes to cut apart the electrode setting, for example the center from square vibrating membrane 10 and back pole plate 20 is divided into equal and opposite in direction and centrosymmetric 4 equal portions along diagonal with it, shape and equal and opposite in direction is set again, about vibrating membrane geometric center symmetry and be separated from each other insulation, draw the electrode of cutting apart of signal separately thereon.
In the present embodiment, n on the back pole plate 20 is cut apart electrode to be cut apart electrode with the n+1 on the vibrating membrane 10 and is connected, cutting apart second on electrode 22 and the vibrating membrane 10 as first on the back pole plate 20 cuts apart electrode 13 and is connected, on the back pole plate 20 second cut apart the 3rd on electrode 23 and the vibrating membrane 10 and cut apart electrode 14 and be connected, by that analogy.Dc offset voltage is cut apart the 4th on electrode 12 and the back pole plate 20 by first on the vibrating membrane 10 and is cut apart electrode 25 and be added on the whole silicon micro capacitor.The kind electrode configuration has only two ports to be connected with testing circuit, and does not need summation.Owing to adopted the quartering to cut apart electrode configuration, the MEMS condenser microphone that present embodiment provides can improve four times on the basis of original microphone.
Identical with embodiment 1, the electrode of cutting apart in the present embodiment adopts the deposition-photoetching-corrosion or the photoetching-deposition-stripping technology of standard to make, only need carry out some changes, can in MEMS condenser microphone manufacture process, not increase extra processing step and difficulty the electrode mutual contact mode of cutting apart on vibrating membrane 10 and the back pole plate 20.
But in this embodiment, cut apart electrode capacitance series connection and make its internal driving increase, need bigger bias voltage, each cuts apart electrode just can reach sensitivity identical when not cutting apart.
It should be noted last that above embodiment is only unrestricted in order to technical scheme of the present invention to be described.Although the present invention is had been described in detail with reference to embodiment, those of ordinary skill in the art is to be understood that, technical scheme of the present invention is made amendment or is equal to replacement, do not break away from the spirit and scope of technical solution of the present invention, it all should be encompassed in the middle of the claim scope of the present invention.
Claims (9)
1. one kind has the condenser microphone of cutting apart electrode, this condenser microphone comprises two little capacitor plates and two electrodes, described two electrodes lay respectively on described two little capacitor plates, it is characterized in that, any one radially symmetrical five equilibrium in described two electrodes is divided into n shape and the identical independently electrode unit of area, described n electrode unit mutually insulated and be centrosymmetric about the geometric center of little capacitor plate at its place; Wherein, n＞1;
Each electrode in the described n electrode is drawn signal and external identical current potential separately, the output signal of n electrode unit is connected respectively to the input port of a signal summing circuit then, realizes the stack of all n electrode output signals by a summation operation circuit; Another not divided electrode in described two electrodes is as public electrode ground connection.
2. according to claim 1 have a condenser microphone of cutting apart electrode, it is characterized in that described little capacitor plate is vibrating membrane and back pole plate, and this vibrating membrane or back pole plate adopt circle or regular polygon.
3. according to claim 1 have a condenser microphone of cutting apart electrode, it is characterized in that, the described electrode of cutting apart adopts deposition, photoetching and corrosion or photoetching in the standard MEMS condenser microphone technology, deposits and peel off mode and make.
4. according to claim 1 have a condenser microphone of cutting apart electrode, it is characterized in that described divided vibrating membrane or back pole plate all adopt insulating nitride silicon to make.
5. one kind has the condenser microphone of cutting apart electrode, this condenser microphone comprises two little capacitor plates and two electrodes, described two electrodes lay respectively on described two little capacitor plates, it is characterized in that, the all radially symmetrical five equilibrium of described two electrodes is divided into n shape and the identical independently electrode unit of area, described n electrode unit mutually insulated and be centrosymmetric about the geometric center of little capacitor plate at its place; Wherein, n＞1;
Described two electrodes are all cut apart by the n five equilibrium, partitioning scheme is identical, and after cutting apart, on the two-plate each correspondence cut apart electrode unit must be fully over against and the shape size identical, first of top crown is cut apart electrode unit and is cut apart second of electrode unit, top crown over against first of bottom crown and cut apart electrode unit and cut apart electrode unit over against second of bottom crown, by that analogy; Distinguish in sequential series between n electrode unit on described up and down two battery lead plates, first of top crown is cut apart electrode unit and is connected to external circuit, first of bottom crown is cut apart electrode unit and is cut apart electrode unit with second of top crown and be connected, second of bottom crown is cut apart electrode unit and is cut apart electrode unit with the 3rd of top crown and be connected, by that analogy, last of bottom crown cut apart another port that electrode unit is connected to external circuit, and two ports by external circuit provide bias voltage and draw signal.
6. according to claim 5 have a condenser microphone of cutting apart electrode, it is characterized in that described little capacitor plate is vibrating membrane and back pole plate, and this vibrating membrane or back pole plate adopt circle or regular polygon.
7. according to claim 5 have a condenser microphone of cutting apart electrode, it is characterized in that, described divided vibrating membrane or back pole plate all adopt insulating nitride silicon to make.
8. according to claim 5 have a condenser microphone of cutting apart electrode, it is characterized in that, the described electrode of cutting apart adopts deposition, photoetching and corrosion or photoetching in the standard capacitor microphone technology, deposits and peel off dual mode and make.
9. according to claim 5 have a condenser microphone of cutting apart electrode, it is characterized in that, the bias voltage of described bias voltage electrode when not cutting apart is used to obtain higher sensitivity.
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| CN2010102053950A CN101867860B (en) | 2010-06-11 | 2010-06-11 | Condenser microphone having split electrodes |
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| CN101867860B CN101867860B (en) | 2012-12-12 |
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| CN105957959A (en) * | 2016-06-14 | 2016-09-21 | 上海应用技术学院 | Preparation method for micro-piezoelectric actuator array structure |
| CN113709641A (en) * | 2021-08-27 | 2021-11-26 | 歌尔微电子股份有限公司 | Microphone |
| CN115778002A (en) * | 2023-01-05 | 2023-03-14 | 苏州敏芯微电子技术股份有限公司 | Electronic cigarette sensing assembly, preparation method and electronic cigarette |
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| CN113709641A (en) * | 2021-08-27 | 2021-11-26 | 歌尔微电子股份有限公司 | Microphone |
| CN115778002A (en) * | 2023-01-05 | 2023-03-14 | 苏州敏芯微电子技术股份有限公司 | Electronic cigarette sensing assembly, preparation method and electronic cigarette |
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| CN101867860B (en) | 2012-12-12 |
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