CN101859722B - Processing device - Google Patents
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- CN101859722B CN101859722B CN201010164020.4A CN201010164020A CN101859722B CN 101859722 B CN101859722 B CN 101859722B CN 201010164020 A CN201010164020 A CN 201010164020A CN 101859722 B CN101859722 B CN 101859722B
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- 238000003754 machining Methods 0.000 claims description 3
- 230000007246 mechanism Effects 0.000 abstract description 19
- 238000003860 storage Methods 0.000 abstract description 9
- 238000000034 method Methods 0.000 abstract description 2
- 230000000903 blocking effect Effects 0.000 abstract 3
- 238000005520 cutting process Methods 0.000 description 25
- 238000007689 inspection Methods 0.000 description 8
- 238000004140 cleaning Methods 0.000 description 6
- 230000007723 transport mechanism Effects 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- 230000003028 elevating effect Effects 0.000 description 4
- 230000000630 rising effect Effects 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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Abstract
The present invention provides a processing device which reliably prevents flying-out of the processed object from a storage unit when a sliding mechanism is used for storing the processed object. In the processing device which conveys out the processed object (W1) from the storage unit (31) by a conveying unit to a holding unit and processes the processed object that is held at the holding unit, the storage unit comprises the following components: a frame (32) which is provided with a first conveying opening (320) that is opened to the conveying unit side and a second conveying opening (321) that is opened to an operator side; a processed object carrying frame (33) which can be drawn out from the frame through the second conveying opening; and a blocking part (334) which prevents the flying-out of the processed object that is carried on the processed object carrying frame because of inertia force with a preset force, wherein the inertia force is the inertia force when the processed object carrying frame is pushed into the frame with a state of being pulled out through the second conveying opening. When the processed object is conveyed in and out through the first conveying opening, the blocking realized through the blocking part is released.
Description
Technical field
The present invention relates to have the processing unit (plant) of the housing unit that can receive machined object.
Background technology
In the processing unit (plant) of the various machined objects of processing, there is the housing unit of storage machined object.For example, the machined objects such as semiconductor wafer being carried out in the topping machanism of cut, machined object is accommodated in the housing unit that is called as box, machined object is taken out and cut from loading in the box of box carrying mechanism, and machined object after cutting is completed is received in box again.In addition, also there is such situation: below the box of the multiple machined objects of storage, be placed with storage and check the housing unit (for example, with reference to patent documentation 1) of the machined object of use and the finishing board of finishing (dressing) use etc.
The machined object that is accommodated in housing unit is configured to by the structure that transport mechanism takes out and conveyance to holding table is processed, and housing unit is to transport mechanism side and this both-side opening of operator's side.Pick and place machined object for the ease of operator with respect to housing unit, also proposed to make the incorporating section of machined object to mechanism's (for example, with reference to patent documentation 2) of operator's Slideslip.
But, in the time the incorporating section of machined object being received into device side by pushing slide mechanism, the situation that exists machined object to fly out to transport mechanism side due to this pushing impetus.In the time that machined object flies out to transport mechanism side like this, there is the possibility of box carrying mechanism or transport mechanism and semiconductor wafer collision.Therefore, proposed with inferior countermeasure: be provided for detecting the transducer that machined object is about to fly out at housing unit, or be provided as stopper ladder so that machined object can not fly out.
Patent documentation 1: TOHKEMY 2006-74004 communique
Patent documentation 2: No. 2997766 communique of Japanese Patent
But, in the situation that using transducer, only stay in detection and fly out, but cannot prevent from flying out.In addition, even if be provided with ladder, exist at machined object in the situation etc. of warpage, also have the problem that flies out of can not preventing fully.
Summary of the invention
The present invention completes in view of these facts, and its main technical task is: in the time utilizing slide mechanism storage machined object, prevent that reliably machined object from flying out from housing unit.
The present invention relates to a kind of processing unit (plant), this processing unit (plant) has: holding unit, and it keeps machined object, machining cell, it is processed the machined object that is held in holding unit, housing unit, it receives machined object, and conveyance unit, it is taken out of machined object from housing unit, and conveyance is to holding unit, housing unit has: framework, and it has to the first conveyance mouth of conveyance cell side opening and opposed and to the second conveyance mouth of operator's side opening with the first conveyance mouth, machined object mounting frame, it can pull out from framework through the second conveyance mouth, and engaging portion, it prevents that with the power of being scheduled to the machined object loading in machined object mounting frame from flying out from the first conveyance mouth due to inertia force, described inertia force is that machined object is loaded to frame from the inertia force in the time that the state of the second conveyance mouth pull-out is pushed into framework, described predetermined force rate acts on the power of engaging portion and wants large in the time that the first conveyance mouth direction moves due to inertia force at machined object, and less than the power that acts on engaging portion in the time utilizing conveyance unit the first conveyance mouth that machined object is taken out of and moved into, in conveyance unit by machined object in the time that the first conveyance mouth is taken out of and is moved into, the engaging realizing by engaging portion is disengaged.
As engaging portion, for example, can use leaf spring.
In the present invention, owing to thering is the engaging portion that prevents that machined object from flying out from the first conveyance mouth, so can avoid reliably transport mechanism that processing unit (plant) has etc. to collide with semiconductor wafer.In addition, the power that from engaging portion, the force rate of machined object effect is acted in the time that the first conveyance mouth direction moves engaging portion at machined object due to inertia force wants large, and less than the power that acts on engaging portion in the time utilizing conveyance unit the first conveyance mouth that machined object is taken out of and moved into, so can not hinder conveyance unit, taking out of of machined object moved into function.
In addition, in the time using leaf spring as engaging portion, shape by changing thickness of slab or change leaf spring is so that plate face and machined object or the contact-making surface angulation variation of supporting the parts of this machined object, can or support shape and size and the performance of conveyance unit etc. of the parts of this machined object according to machined object, easily regulate described predetermined power.
Brief description of the drawings
Fig. 1 is the stereogram that represents an example of topping machanism.
Fig. 2 is the stereogram that represents the internal structure of topping machanism.
Fig. 3 is the stereogram that represents an example of housing unit.
Fig. 4 is the exploded perspective view that represents an example of housing unit.
Fig. 5 is the stereogram that represents the postrotational state of machined object mounting frame of housing unit.
Fig. 6 represents that the machined object mounting frame of housing unit is back to the stereogram of the state after original state.
Fig. 7 is the stereogram that is illustrated in machined object mounting frame and is accommodated with the state of machined object.
Fig. 8 is the stereogram that represents to take out of from machined object mounting frame the state of machined object.
Fig. 9 is the stereogram of an example of the engaging portion that represents that machined object mounting frame has.
Figure 10 represents that machined object is supported on the vertical view of the state of framework through splicing tape.
Figure 11 is the vertical view that represents the state of the variation of engaging portion.
Figure 12 is the vertical view that represents the state that utilizes engaging portion scaffold.
Figure 13 is illustrated in the stereogram of receiving the state of machined object in the second example of machined object mounting frame.
Figure 14 is the stereogram that the machined object mounting frame that is illustrated in the same the second example is accommodated with the state of machined object.
Label declaration
1: topping machanism; 2: holding unit; 20: suction unit; 21: clamping section; 3: housing unit carrying mechanism; 30: the first housing units; 31: the second housing units; 32: framework; 320: the first conveyance mouths; 321: the second conveyance mouths; 33: machined object mounting frame; 330: rotating part; 330a: handle part; 330b: slit; 331: sliding part; 332: access unit; 333: rotating mechanism; 333a: rotating shaft; 334: engaging portion; 334a: rising portions; 334b: stopper section; 334c: mountain portion; 4: cleaning unit; 40: holding table; 5: the first conveyance unit; 50: guide rail; 51: arm; 52: clamping part; 6: the second conveyance unit; 60: guide rail; 61: arm; 62: lifting unit; 63: adsorption section; 7: the three conveyance unit; 70: guide rail; 71: arm; 72: lifting unit; 73: adsorption section; 8: display unit; 9: housing unit; 90: framework; 900: the first conveyance mouths; 901: the second conveyance mouths; 91: machined object mounting frame; 910: opening/closing portion; 910a: handle part; 911: sliding part; 912: incorporating section; 912a: slit; 913: access unit; 914: engaging portion; 10: the first cutting units; 100: the first cutting tools; 11: the second cutting units; 12: the first feed units; 120: ball-screw; 121: guide rail; 122: movable part; 123: elevating mechanism; 13: the second feed units; 130: ball-screw; 131: pulse motor; 132: movable part; 133: elevating mechanism; W: wafer; W1: check workpiece; T: splicing tape; F: framework.
Embodiment
Topping machanism 1 shown in Fig. 1 is the one in processing unit (plant), and this topping machanism 1 has the holding unit 2 that keeps machined object, (X-direction in Fig. 1) movement in the horizontal direction and can rotate.Holding unit 2 has the suction unit 20 of the machined objects such as attraction semiconductor wafer and the clamping section 21 that the surrounding of the machined objects such as semiconductor wafer is fixed.
There is housing unit carrying mechanism 3 in the front of the movable area of holding unit 2, this housing unit carrying mechanism 3 loads to the first housing unit 30 received of machined object as cutting object with to checking one or both in the second housing unit 31 that the machined object of use receives, and this housing unit carrying mechanism 3 can lifting.In illustrated example, be placed with the second housing unit 31 at housing unit carrying mechanism 3, and be further placed with the first housing unit 30 on this second housing unit 31.In the example of Fig. 1, in the first housing unit 30, stick on as the wafer W of machined object on the splicing tape of framework F that is pasted on ring-type, wafer W is in being supported on the state of framework F through splicing tape T.
Be equipped with the cleaning unit 4 that the machined object after cutting is cleaned in the rear portion side of the movable area of holding member 2.Cleaning unit 4 has: holding table 40, and it keeps machined object, can be rotated and can lifting; And not shown nozzle class, its ejection rinse water and pressure-air.
Above the movable area of holding unit 2, be equipped with the first conveyance unit 5, the second conveyance unit 6 and the 3rd conveyance unit 7.The first conveyance unit 5 have holding unit 2 and the first housing unit 30 or and the second housing unit 31 between the function of conveyance machined object, this first conveyance unit 5 comprises: guide rail 50, it extends in conveyance direction (Y direction); Arm 51, it moves along guide rail 50; And clamping part 52, it is arranged at the lower end of arm 51, for clamping machined object at above-below direction.In addition, Y direction is direction orthogonal with respect to the X-direction of the moving direction as holding unit 2 on horizontal plane.
The second conveyance unit 6 has the function to cleaning unit 4 by the machined object conveyance after cutting, and this second conveyance unit 6 comprises: guide rail 60, and it extends in conveyance direction (Y direction); Arm 61, it moves along guide rail 60; Lifting unit 62, it is with respect to arm 61 liftings; And adsorption section 63, it is arranged at the lower end of lifting unit 62, for adsorbing machined object.
The 3rd conveyance unit 7 has machined object that conveyance carried out cleaning in cleaning unit 4 being received into the function in the first housing unit 30 or the second housing unit 31, the 3rd conveyance unit 70 comprises: guide rail 70, and it extends in conveyance direction (Y direction); Arm 71, it moves along guide rail 70; Lifting unit 72, it is with respect to arm 71 liftings; And adsorption section 73, it is arranged at the lower end of lifting unit 72, for adsorbing machined object.
Have display unit 8 in the toe lateral of topping machanism 1, this display unit 8 shows guide picture and the image of machined object etc. while carrying out various operation by operator.
In the inside of topping machanism 1, be equipped with as illustrated in fig. 2 the first cutting unit 10 and the second cutting unit 11 as machining cell.Thereby the first cutting unit 10 is driven and can move in Y direction by the first feed unit 12, thereby the second cutting unit 11 is driven and can move in Y direction by the second feed unit 13.
The first cutting unit 10 has first cutting tool 100, the second cutting units 11 that can rotate and has second cutting tool that can rotate not shown in Fig. 2.
The first feed unit 12 has: ball-screw 120, and it has the axle center of Y direction; Guide rail 121, itself and ball-screw 120 arrange abreast; Not shown pulse motor, it rotates ball-screw 120; Movable part 122, the nut that it is inner and ball-screw 120 screw togather, and the sidepiece of this movable part 122 and guide rail 121 sliding contacts; And elevating mechanism 123, it makes the first cutting unit 10 liftings.In addition, the second feed unit 13 has: ball-screw 130, and it has the axle center of Y direction; Guide rail 121, itself and ball-screw 130 arrange abreast; Pulse motor 131, it rotates ball-screw 130; Movable part 132, the nut that it is inner and ball-screw 130 screw togather, and the sidepiece of this movable part 132 and guide rail 121 sliding contacts; And elevating mechanism 133, it makes the second cutting unit 11 liftings.
When holding unit 2 moves along X-direction, the effect of the first cutting unit 10 that the machined object that is held in holding unit 2 has been declined and the second cutting unit 11 of having declined and being cut, wherein, the first cutting unit 10 declines by the driving of the first feed unit 12, and the second cutting unit 11 declines by the driving of the second feed unit 13.
As shown in Figure 3, the second housing unit 31 has: framework 32; And the machined object that can insert and extract with respect to framework 32 mounting frame 33.Framework 32 connects at fore-and-aft direction, as shown in Figure 4, be formed with to the first conveyance mouth 320 of the first conveyance unit 5 side openings shown in Fig. 1 in the rear portion side of framework 32, be formed with the second conveyance mouth 321 to operator's side opening with the opposed toe lateral of the first conveyance mouth 320 of rear portion side.
Load one or more machined objects at machined object mounting frame 33.As shown in Figure 4 and Figure 5, machined object mounting frame 33 can pull out through the second conveyance mouth 321 from framework 32, this machined object mounting frame 33 comprises rotating part 330 and sliding part 331, rotating part 330 has the slit 330b of multiple groove shapes of the end for machined object being loaded to handle part 330a that frame 33 goes out to operator's layback and supporting machined object, sliding part 331 is supported to rotating part 330 can rotate, and this sliding part 331 can slide with respect to framework 32.Rear portion side at rotating part 330 is provided with access unit 332 with open state, moves into or when machined object is taken out of from the second housing unit 31, this access unit 332 becomes taking out of of machined object and moves into mouth to the second housing unit 31 at machined object.
Rotating part 330 can rotate with respect to sliding part 331 by rotating mechanism 333.Rotating mechanism 333 has in horizontal plane the rotating shaft 333a of the direction orthogonal with the Y direction of moving into direction as taking out of of machined object, and rotating mechanism 333 is configured to the structure that rotating part 330 is rotated centered by this rotating shaft 333a.As shown in Figure 5, the state that rotating part 330 erects is access unit 332 state upward, and is the state that operator easily picks and places machined object.Herein, so-called top, and the top of not only making a comment or criticism, also comprise the state that the either side of access unit 332 in framework 32 sides and operator's side tilts.
Like this, under access unit 332 state upward, for example, the inspection workpiece W1 that is supported on framework F through splicing tape T is received into rotating part 330, or identical inspection workpiece W1 is taken out from rotating part 330.Therefore, operator easily sees access unit 332 clearly, easily machined object is received in each slit, and easily takes out desirable machined object.When the height of rotating part 330 is when than position on the lower of operator's sight line, more easily carry out storage and the taking-up of machined object.
In addition, at rotating part 330, except checking workpiece W1, also can receive the finishing board, the common workpiece etc. that cut the preseptum of (test cut), dressing (order だ) for the first cutting tool 100 shown in Fig. 2 and the second cutting tool, cavetto (true Yen だ), equating (な ら) etc. for trial cut.
Machined object is being received into after rotating part 330, as shown in Figure 6, rotating part 330 was being fallen and become the state of droping to the ground, thereby returning to original state.Then, as shown in Figure 7, machined object is loaded to frame 33 and be pushed in framework 32.In the time like this machined object being received into machined object mounting frame 33 and being received in framework 32, become the state that can machined object be taken out of by the first conveyance unit 5.
The clamping part 52 of the first conveyance unit 5 shown in Fig. 1 enters inside the holding frame F of machined object mounting frame 33 from the rear portion side of machined object mounting frame 33, as shown in Figure 8, by clamping part 52 being moved to the outside of machined object mounting frame 33 in the situation that maintaining clamp position, the inspection workpiece W1 that is supported on framework F is taken out of from the second housing unit 31.Then, inspection workpiece W1 conveyance to the holding unit 2 shown in Fig. 1 of being taken out of is kept, and process.
As shown in Figure 9, be formed with engaging portion 334 at machined object mounting frame 33, this engaging portion 334 prevents that received inspection workpiece W1 is from the fly out outside of machined object mounting frame 33 of access unit 332.Engaging portion 334 shown in Fig. 9 forms in the mode that runs through multilayer slit 330b, but also can engaging portion be set respectively individually at each layer of slit.
The engaging portion 334 of examples shown is leaf spring, and as represented enlargedly in Fig. 9, this engaging portion 334 has: rising portions 334a, and its sidewall 330c from slit 330b erects towards front surface side (operator's side); Stopper section 334b, its end contacts with sidewall 330c in the mode that can slide; And the 334c of mountain portion, it couples together rising portions 334a and stopper section 334b.
In the time picking and placeing framework F from access unit 332, the 334c of mountain portion peripheral side along framework F in haunting is slided.As shown in figure 10, the periphery of framework F is formed as having the shape of a pair of opposed line part F2, and this pair of opposed line part F2 is by forming linearly a part for the periphery of circular curve part F1 excision.In utilizing the first conveyance unit 5 holding frame F shown in Fig. 7, Fig. 8 inspection workpiece W1 to be moved into machined object mounting frame 33 time, as shown in solid line in Figure 11, the line part F2 of framework F slides in pressing the 334a of mountain portion of engaging portion 334.Then, as shown in double dot dash line in Figure 11, in the time that line part F2 has passed through the 334c of mountain portion and has entered into the toe lateral than mountain portion 334a, the 334c of mountain portion slowly protrudes along curve part F1, as shown in figure 12, engaging portion 334 returns to the state before being pressed by framework F, and stopper section 334b contacts with the curve part F1 of framework F with the 334c of mountain portion, thereby framework F can not be to access unit 332 side shiftings.On the other hand, in the case of checking that workpiece W1 is through access unit 332 is taken out of machined object mounting frame 33 outside, line part F2 presses stopper section 334b and the 334c of mountain portion so that they submerge by the slip of framework F, line part F2 with the state of the 334c of mountain portion sliding contact under gone out to access unit 332 laybacks.Then,, in the time that line part F2 has passed through the 334c of mountain portion completely, engaging portion 334 returns to the state before being pressed by framework F.
The state being drawn out through the second conveyance mouth 321 from the machined object mounting frame 33 that is accommodated with as shown in Figure 9 machined object, as shown in Figure 7 machined object is loaded frame 33 be pushed into framework 32 time, inertia force acts on the machined object being accommodated in machined object mounting frame 33 to the first conveyance mouth 320 sides, but engaging portion 334 can prevent that machined object from flying out from the first conveyance mouth 320 due to this inertia force with the power of being scheduled to.Said predetermined power herein, refers to larger and than the little power of power that in the first conveyance unit 5, machined object is acted in the time that the first conveyance mouth 320 is moved into or taken out of to engaging portion 334 than the power that acts on engaging portion 334 at machined object due to this inertia force in the time that the first conveyance mouth 320 moves.Therefore, prevented that machined object from flying out from the first conveyance mouth 320, and, in the first conveyance unit 5 in the time that the first conveyance mouth 320 is moved into machined object and take out of, engaging portion 334 is disengaged the engaging of machined object, therefore can not hinder taking out of of the first conveyance unit 5 and move into function.
In addition, in the time using leaf spring as engaging portion 334, by changing the thickness of slab of rising portions 334a, stopper section 334b, the 334c of mountain portion, or change the shape of leaf spring so that the contact-making surface angulation of plate face and framework F changes, the performance that can have more the shape of framework F and the arm 51 of size and the first conveyance unit 5 etc. easily regulates described predetermined power.
Also can replace the second housing unit 31 shown in Fig. 3～Fig. 9 with the housing unit 9 shown in Figure 13, Figure 14.This housing unit 9 has: framework 90; And the machined object that can insert and extract with respect to framework 90 mounting frame 91.Framework 90 connects at fore-and-aft direction, be formed with to the first conveyance mouth 900 of the first conveyance unit 5 side openings shown in Fig. 1 in the rear portion side of framework 90, be formed with the second conveyance mouth 901 to operator's side opening with the opposed toe lateral of the first conveyance mouth 900 of rear portion side.
The machined object mounting frame 91 that loads one or more machined objects can pull out through the second conveyance mouth 901 from framework 90, this machined object mounting frame 91 comprises: opening/closing portion 910, and it can become the state of erecting and state that forwards (operator's side) falls down; Sliding part 911, it can slide with respect to framework 90; And incorporating section 912, it is disposed in the inner side of opening/closing portion 910, for receiving multiple machined objects.Incorporating section 912 has the slit 912a of multiple groove shapes of the end for supporting machined object.In addition,, in the rear portion side of incorporating section 912, be provided with the access unit 913 of moving into mouth as taking out of of machined object using open state.
As shown in figure 14, be formed with handle part 910a at opening/closing portion 910, this handle part 910a is the part of being controlled by operator in the time opening and closing.As shown in figure 13, while becoming open mode when opening/closing portion 910 was fallen, can pick and place machined object with respect to incorporating section 912.On the other hand, in the time not carrying out the picking and placeing of machined object, as shown in figure 14, opening/closing portion 910 is erected and become closed condition.In Figure 13, show the inspection workpiece W1 being supported by framework F through splicing tape T and be supported on the state being contained under the state of slit 912a, but except checking workpiece W1, finishing board, the common workpiece etc. of the preseptum that also storage is cut for trial cut sometimes, the dressing for the first cutting tool 100 shown in Fig. 2 and the second cutting tool, cavetto, equating etc.
Be formed with engaging portion 914 in incorporating section 912, this engaging portion 914 prevents that received inspection workpiece W1 is from the fly out outside of machined object mounting frame 91 of access unit 913.Engaging portion 914 shown in Figure 13, Figure 14 forms in the mode that runs through multilayer slit 912a, but also can engaging portion be set separately respectively at each layer of slit.The structure of engaging portion 914 and effect are identical with the engaging portion 334 shown in Fig. 9, Figure 11, Figure 12.
Claims (2)
1. a processing unit (plant), it has:
Holding unit, it keeps machined object;
Machining cell, it is processed the machined object that is held in described holding unit;
Housing unit, it receives described machined object; And
Conveyance unit, it is taken out of described machined object from described housing unit, and extremely described holding unit of conveyance,
Described processing unit (plant) is characterised in that,
Described housing unit has:
Framework, it has to the first conveyance mouth of described conveyance cell side opening and opposed and to the second conveyance mouth of operator's side opening with this first conveyance mouth;
Machined object mounting frame, it can pull out from described framework through described the second conveyance mouth;
Engaging portion, it is formed at described machined object mounting frame, prevent that with the power of being scheduled to the described machined object loading in described machined object mounting frame from flying out from described the first conveyance mouth due to inertia force, described inertia force is from the inertia force in the time that the state of described the second conveyance mouth pull-out is pushed into described framework by described machined object mounting frame
Described predetermined force rate acts on the power of described engaging portion and wants large in the time that described the first conveyance mouth direction moves due to described inertia force at described machined object, and than to utilize described conveyance unit to act on the power of described engaging portion in the time that described the first conveyance mouth takes out of described machined object and move into little
In described conveyance unit by described machined object in the time that described the first conveyance mouth is taken out of and is moved into, the engaging realizing by described engaging portion is disengaged.
2. processing unit (plant) according to claim 1, is characterized in that,
Described engaging portion is made up of leaf spring.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009-095799 | 2009-04-10 | ||
| JP2009095799A JP5286142B2 (en) | 2009-04-10 | 2009-04-10 | Processing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101859722A CN101859722A (en) | 2010-10-13 |
| CN101859722B true CN101859722B (en) | 2014-06-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010164020.4A Active CN101859722B (en) | 2009-04-10 | 2010-04-09 | Processing device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP5286142B2 (en) |
| CN (1) | CN101859722B (en) |
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| US7802356B1 (en) | 2008-02-21 | 2010-09-28 | Hrl Laboratories, Llc | Method of fabricating an ultra thin quartz resonator component |
| JP5308218B2 (en) * | 2009-04-10 | 2013-10-09 | 株式会社ディスコ | Processing equipment |
| US8176607B1 (en) | 2009-10-08 | 2012-05-15 | Hrl Laboratories, Llc | Method of fabricating quartz resonators |
| US8912711B1 (en) | 2010-06-22 | 2014-12-16 | Hrl Laboratories, Llc | Thermal stress resistant resonator, and a method for fabricating same |
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| US10308505B1 (en) | 2014-08-11 | 2019-06-04 | Hrl Laboratories, Llc | Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite |
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| JP3898162B2 (en) * | 2003-06-26 | 2007-03-28 | クリーン・テクノロジー株式会社 | A storage device in which a plurality of drawers can be pulled out horizontally. |
| JP2006074004A (en) * | 2004-08-02 | 2006-03-16 | Disco Abrasive Syst Ltd | Work conveying housing equipment, and grinding equipment provided with the same |
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2010
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| CN1412831A (en) * | 2001-10-18 | 2003-04-23 | 富士通株式会社 | Board supporting parts and using method |
| CN1787198A (en) * | 2004-12-07 | 2006-06-14 | 宝晶科技股份有限公司 | Chip flame storage box |
| CN201112363Y (en) * | 2007-09-17 | 2008-09-10 | 中芯国际集成电路制造(上海)有限公司 | Wafer conveying case |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2010251348A (en) | 2010-11-04 |
| JP5286142B2 (en) | 2013-09-11 |
| CN101859722A (en) | 2010-10-13 |
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