CN101858764A - Coriolis mass flowmeter - Google Patents
Coriolis mass flowmeter Download PDFInfo
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- CN101858764A CN101858764A CN200910131173A CN200910131173A CN101858764A CN 101858764 A CN101858764 A CN 101858764A CN 200910131173 A CN200910131173 A CN 200910131173A CN 200910131173 A CN200910131173 A CN 200910131173A CN 101858764 A CN101858764 A CN 101858764A
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Abstract
The invention provides a Coriolis mass flowmeter, comprising a measuring tube capable of rotating around a rotation axis and a pair of vibrating sensors; wherein the measuring tube is made by metal glass, the measuring tube is provided with an inlet straight tube section which is coaxial with the rotation axis and guides the fluid to be measure to flow in, an outlet straight tube section which is coaxial with the rotation axis and guides the fluid to be measured to flow out as well as a curved tube section which is arranged between the inlet straight tube and the outlet straight tube and is communicated with the two; and the vibrating sensor is arranged at the two ends of the curved tube of the measuring tube. The mass flowmeter of the invention has high sensibility and can be applied to mass flow measuring in small flow or in large flow regulating range.
Description
Technical field
The present invention relates to a kind of flowmeter, be used to measure the mass rate of fluid, specifically, relate to a kind of very highly sensitive coriolis flowmeter that has, it can measure the minimum mass rate of flow, or measures flow under the very big situation of flow adjustment range.
Background technology
In industrial circles such as pharmacy, food, determine that ducted flow is very important to monitoring, control and the production of technological process.Ducted mass rate is measured with flowmeter usually, and the flowmeter that is usually used at present in the closed pipe system can be divided into electromagnetic flowmeter, ultrasonic flow meter, matrix flowmeter and coriolis flowmeter.
Compare with other flowmeters, coriolis flowmeter has many good qualities.At first, it can be with the direct method mass rate that measures with considerable accuracy, and the flowmeter of other types can only the measurement volumes flow, need carry out extra calculating and transfer mass rate to.In addition, coriolis flowmeter can be used for the almost measurement of various fluids, as the fluid of liquid, gas, slurries and mixing phase.At last, the measuring principle of coriolis flowmeter and the physical property of fluid are irrelevant, and it can not be subjected to pressure, density and the influence of temperature variation of fluid.Therefore, coriolis flowmeter has purposes widely in every field.
Common coriolis flowmeter comprises the measuring tube and the driving head that is used for the vibration survey pipe that are used to measure fluid, and its vibration frequency is the resonance frequency of measuring tube.When measuring tube vibrated, the quality of fluid impacted the tube wall of measuring tube, produced Coriolis force, caused measuring tube generation elastic deformation.The motion of a plurality of measuring tubes can be amplified distortion, so that calculate Coriolis force, thereby determines the mass rate of fluid.
A problem of this coriolis flowmeter is that the sensitivity of measuring can't obviously improve, and most of measuring tubes are by stainless steel or Hastelloy manufacturing, and these metallic spring are limited, so the sensitivity of measuring is difficult to further improve.In addition, the shape of measuring tube is generally U-shaped or S shape, though such shape can strengthen the elastic deformation that Coriolis force produces on measuring tube, also is easy to flow at fluid the bend pipe or the shunting place generation pressure loss of welding, causes measuring accuracy to reduce.In this flowmeter, sensitivity and the precision of taking all factors into consideration measurement during the measuring tube shaped design are very difficult.
Another problem of coriolis flowmeter is the design to the measuring tube vibration at present.Measuring tube can produce bending as a kind of bearing part of fluid when being vibrated, this means, measuring tube will have enough thickness and intensity, to bear the fatigue of hydrodynamic pressure and measuring tube material.And on the other hand, measuring tube is measured by elastic deformation, so the tube wall of measuring tube is thin as far as possible, could produce significantly distortion like this under the effect of Coriolis force.Obviously, these two conflicting requirements have also limited the raising of measuring sensitivity.
Owing to there are the problems referred to above, present coriolis flowmeter is not suitable for following occasion:
Measurement range of adjustment in petrochemical industry very big (be maximum flow and ratio＞2000 of minimum flow: gas flow 1), ducted gas flow can change between 4 gram/minute to 8 kg/min;
Measure the mass rate of the liquids and gases of flow very low (flow＜50 gram/minute), as: the chemical vapor deposition (CVD) of semi-conductor industry and physical vapor deposition (PVD), research and development of products in the pharmaceuticals industry and testing laboratory analyze.
As the core component of coriolis flowmeter, measuring tube is to the performance decisive role of flowmeter.In recent years, people make great efforts to attempt to design difform measuring tube always, to improve the performance of flowmeter.
Disclose a kind of coriolis flowmeter among the US 6684716B2, Figure 1 shows that a kind of typical structure of this type of flowmeter.This flowmeter comprises a straight measuring tube 71 and parallel status two straight-bar 72a and the 72b in the straight tube both sides, detected fluid flows through measuring tube 71, measuring tube 71 and straight-bar 72a drive vibration by vibration generator 73a, another vibration generator 73b drives measuring tube 71 and straight-bar 72b vibration at opposite side, and measuring tube 71 is identical with the vibration frequency of straight-bar 72a and 72b.The end 72a of the end of measuring tube 71 and two straight-bars and 72b are fixed on common the back-up block 74a and 74b.Be provided with vibration transducer 75a and 75b in both sides, in order to detect the deflection of measuring tube 71 along the straight tube direction.
Although this simple in structure, compact and firm, the measurement sensitivity of the coriolis flowmeter of this straight tube is not high.Under the state of resonance, measuring tube can only produce very little bending, when fluid is flowed through straight tube, the Coriolis force that produces on perpendicular to the straight tube direction is very little, the distortion of measuring tube is also just very little, therefore needs to optimize the structure of measuring tube, with the amplitude of the distortion that strengthens measuring tube.
US 2007/0034019A1 discloses the coriolis flowmeter of another kind of type, and as shown in Figure 2, it has the measuring tube 81 of a bending, and electric magnetization coil 83 is fixed on the below at U-shaped measuring tube 81 front end centers 82, does small vibration in order to drive measuring tube.As shown in Figure 2, fluid flows into from the left side, flows out from the right side, produces opposite Coriolis force in both sides, twisting U-shaped measuring tube.In the corner, assembled the power of fluid, so the vibration of measuring tube amplified, about be provided with two measure coils 84 and measure consequent distortion.
The vibration that above-mentioned existing coriolis flowmeter all is based on measuring tube designs, and in order to satisfy the requirement of bearing hydrodynamic pressure, measuring tube needs enough intensity, therefore should not make too thinly, but this has influenced the raising of measuring sensitivity again.For solving the design problem of measuring tube vibration, US 5728951A has proposed a kind of rotary-type coriolis flowmeter, as shown in Figure 3, has a phase measurement rotor-support-foundation system on it, this system has an outer rotor 91, a coaxially inside rotor 92 (also claiming the Ke Shi rotor) and an elastic torsion bar 93, and elastic torsion bar 93 links to each other with internal rotor 92 with outer rotor 91.Measure the rotation displacement of 92 of outer rotor 91 and Ke Shi rotors, can determine to flow through the mass flowrate of flow.But, the complex structure of this flow measurement buret, the design of fluid diverter also can cause the pressure loss of fluid, and then causes measuring error.
Summary of the invention
Therefore, the present invention aims to provide and a kind ofly can overcome above-mentioned shortcoming coriolis mass flowmeters, just provides a kind of highly sensitive coriolis flowmeter specifically.
Another object of the present invention provides a kind of can reduce extraneous measuring accuracy is exerted an influence and long-lived coriolis flowmeter.
For achieving the above object, the invention provides a kind of coriolis mass flowmeters, comprise one can be around the measuring tube and a pair of vibration transducer of turning axle rotation, measuring tube is made by metallic glass, this measuring tube has: one section import straight tube that flows into for detected fluid with rotating shaft coaxle, one section outlet straight tube that flows out for detected fluid with rotating shaft coaxle, and one section be positioned between import straight tube and the outlet straight tube and the curve bend that communicates with both; Vibration transducer is arranged on the curve bend two ends of measuring tube.
According to another coriolis flowmeter of the present invention, wherein, also comprise a bow, the curve bend of this bow and measuring tube is axially symmetrical in same plane along turning axle, and the two ends of this bow are fixed on two back-up blocks with measuring tube respectively.
According to another kind of coriolis flowmeter of the present invention, wherein, a motor drives measuring tube and rotates around turning axle, and the rotor of motor is at the import straight tube or the outlet straight tube of the endpiece place clamping measuring tube of detected fluid inlet end or detected fluid, and the stator of motor is fixed on the housing of flowmeter.
According to another coriolis flowmeter of the present invention, wherein, the housing of this flowmeter supports measuring tube by bearing at the detected fluid inlet end of measuring tube and the endpiece place of detected fluid respectively.
According to another coriolis flowmeter of the present invention, wherein, the metallic glass of making measuring tube is zirconium (Zr) base metal glass.
By the metallic glass manufacturing,, have good mechanical property at the measuring tube of coriolis flowmeter of the present invention, therefore can produce than existing stainless steel or the better measuring tube of Hastelloy performance because metallic glass intensity height, elasticity are big.In addition, because measuring tube also has one section curve bend, when flowing through curve bend, fluid can produce bigger Coriolis force, two vibration transducers of radial symmetry setting can strengthen the variable magnitude of measuring on the measuring tube, so this flowmeter of the present invention has very high measurement sensitivity.
Because the measuring tube of metallic glass of the present invention need not welding, therefore also eliminate the measuring tube pressure loss that produces by welding in addition, guaranteed measuring accuracy.
In order further to improve measuring accuracy, also provide an energy that measuring tube is played the bow of equilibrium activity in one embodiment of the invention, can reduce the external vibration that is subjected to when measuring tube rotates like this.
In the present invention, the stator of rotation motor is fixed on the housing of flowmeter, and rotor is clamped the measuring tube straight-tube portion, can eliminate the crooked and distortion that measuring tube is subjected to, greatly reduce the possibility of metallic glass measuring tube fracture again, improved the reliability of the flowmeter use of using.
Description of drawings
The following drawings is only done the present invention and is schematically illustrated and explain, not delimit the scope of the invention.Wherein:
Fig. 1 is existing a kind of structural representation that has the coriolis flowmeter of straight tube;
Fig. 2 is existing a kind of schematic perspective view that has the coriolis flowmeter of U-shaped pipe;
Fig. 3 is the structural representation of existing a kind of rotary-type coriolis flowmeter;
Fig. 4 is the synoptic diagram of a kind of wheel measuring pipe in the coriolis flowmeter of the present invention;
Fig. 5 is the structural representation of a kind of coriolis flowmeter of the present invention;
Fig. 6 is the mechanical property distribution plan of steel, titanium alloy, timber, polymkeric substance and metallic glass;
Fig. 7 has represented the measuring tube length direction shown in Figure 4 along the present invention, the distribution curve of the distortion that produces because of Coriolis force;
Fig. 8 has shown the difference of sensitivity when metallic glass measuring tube and stainless steel measuring tube are measured flow.
Embodiment
Understand for technical characterictic of the present invention, purpose and effect being had more clearly, now contrast description of drawings the specific embodiment of the present invention, identical label is represented identical part in each figure.
Fig. 4 has shown that the present invention adopts the principle of work of the coriolis flowmeter of wheel measuring pipe.As shown in Figure 4, measuring tube 1 comprises one section import straight tube 11, one section outlet straight tube 12 and one section curve bend 13.One quality is that the fluid of m flows into, flows out from the endpiece that exports straight tube 12 from the inlet end of import straight tube 11 with speed V.Measuring tube 1 turns clockwise with constant angular velocity omega around turning axles of being determined by straight tube 11 and 12 (turning axle shown in the dotted line in also can be referring to Fig. 5).When this fluid streams is in the import straight tube 11 of measuring tube 1 or exports straight tube 12, because the direction of motion of fluid and turning axle are in the same way, so can not produce Coriolis force.And when flowed at (for example 15 places, position) in the curve bend 13 of this fluid streams at measuring tube 1, the speed V of fluid can be decomposed into a speed component V who is parallel to turning axle
xWith a vertical rotating shaft direction and outside speed component V
yAt this moment, fluid has one makes its acceleration that departs from turning axle, under the effect of this acceleration, just has been subjected to a Coriolis force F on the wall of curve bend 13
cEffect, this power can be drawn by equation (1):
F
c＝mA
c (1)
Wherein:
F
cExpression acts on the Coriolis force on the measuring tube,
M represents the quality of this fluid streams,
A
cThe expression Coriolis acceleration.
According to physical law, Coriolis acceleration A
cCan be expressed as:
A
c＝2(ω×V
y) (2)
Wherein:
ω represents the angular velocity of rotation of measuring tube,
V
yExpression fluid velocity V is perpendicular to the speed component on the turning axle direction.
The pitch angle of supposing 15 place's measuring tubes in the position is θ, then:
V
y＝V?×cosθ (3)
Behind equation (2) and equation (3) substitution equation (1), the Coriolis force that can draw 15 places in the position is:
F
c＝2×m×(ω×V×cosθ) (4)
Can calculate Coriolis force F shown in Figure 4 from equation (4)
c, this power is directly proportional with the quality m of fluid, and the speed V by measuring tube 1 is directly proportional with the fluid of these quality, is directly proportional with the angular velocity of rotation ω of measuring tube 1.According to this principle, at position 16 places symmetrical, Coriolis force F with position 15
cEqual and opposite in direction, direction is opposite.Under the acting in conjunction of these two power, measuring tube 1 produces distortion, in the position 15 and 16 of positions be provided with that two vibration transducers can be measured Coriolis force thus and the amplitude of the distortion that produces, and then the mass rate of definite fluid.
Figure 5 shows that the concrete Application Example of a kind of coriolis flowmeter of the present invention that adopts above-mentioned principle.As shown in the figure, the measuring tube 1 of the flowmeter of present embodiment comprises one section import straight tube 11, one section outlet straight tube 12 and one section curve bend 13 that is positioned between these two straight-tube portions, detected fluid flows into from the inlet end of import straight tube 11, through curve bend 13, the endpiece from outlet straight tube 12 flows out at last.A rotation motor 3 is housed on the fluid inlet end of measuring tube 1 or the fluid outlet, and in the example depicted in fig. 5, rotation motor is installed in fluid egress point one end.Rotation motor 3 comprises a rotor 31 and a stator 32, and stator 32 is fixed on the housing 5 of flowmeter, and rotor 31 is clamped the tube wall of measuring tube 1 straight tube, thereby drives measuring tube 1 necessarily to rotate with angular velocity.The housing 5 of flowmeter can be respectively by bearing supporting measuring tube 1, and as shown in the figure, this bearing can be arranged on the inlet end of measuring tube 1 detected fluid and the endpiece place of detected fluid.
Also have a bow 7 in flowmeter shown in Figure 5, bow 7 is axial symmetry with the arch section 13 of sounding rod 1 along rotation axis in same plane, the power that is subjected to when rotating with balancing side buret 1 curve bend 13.The two ends of bow 2 and sounding rod 1 are supported by back-up block 41,42 respectively, and be more steady to guarantee rotation.
When fluid flow through the measuring tube 1 of rotation, the fluid in the curve bend 13 of measuring tube 1 produced Coriolis force, and measuring tube is deformed.The two ends of measuring tube 1 arch section 13 are equipped with vibration transducer 14a and 14b respectively, and these two sensors are arranged along the measuring tube radial symmetry, measure the amplitude of tube wall deformation.
Under the situation that produces same Coriolis force, the amplitude of measuring tube elastic deformation is big more, the measurement sensitivity of flowmeter is high more, can obviously find out from the mechanism performance distribution plan of various different materials shown in Figure 6, metallic glass just has the mechanical property of such excellence, and its intensity height, elasticity are big.In the present invention, measuring tube 1 is by the metallic glass manufacturing, and this coriolis tube of being made by metallic glass can be measured the mass rate of fluid in very big flow adjustment range and under the situation of extremely low flow.
According to one embodiment of the invention, the measuring tube that has curve bend is by the manufacturing of Zr base metal glass.Compare with the measuring tube that uses stainless steel to make, metallic glass has higher intensity and bigger elasticity.For example: the tensile yield strength of Zr base metal glass pipe is 1.6 times of stainless-steel tube, and the Young modulus of Zr base metal glass pipe is stainless 2/5ths, and the thickness of Zr base metal glass pipe can only have 1/4th of stainless-steel tube thickness.And Zr base metal glass pipe is also very strong to the chemical resistance of chlorine and liquid chloride etc.
In invention, the stator 32 of rotation motor is fixed on the housing 5 of flowmeter, and rotor 31 has been clamped the straight-tube portion of measuring tube 1, has eliminated the crooked and distortion that measuring tube 1 is subjected to, and greatly reduces the possibility of metallic glass measuring tube fracture.
Fig. 7 has represented that under the effect of Coriolis force measuring tube 1 is along the deformation distribution figure of x direction of principal axis (being the x direction of principal axis among Fig. 4).As can be seen from the figure, the distortion that produces because of Coriolis force on the diverse location of measuring tube 1 is different, but on curve bend 13, the deflection of measuring tube 1 has had tangible increase.In order to improve the sensitivity of measurement, vibration transducer will be arranged on the position that can produce maximum deformation quantity, i.e. two ends of close curve bend.Vibration transducer can adopt piezoelectric element.
Fig. 8 measures sensitivity when making measuring tube with glass metal and stainless steel and compares, and wherein solid line is partly represented metallic glass measuring tube of the present invention, and dotted portion is represented the stainless steel measuring tube.Coriolis mass flowmeters mainly is a mass rate of determining fluid by the elastic deformation amount's of measuring tube amplitude δ, and amplitude of deformation δ is big more, and then meter is sensitive more.Amplitude of deformation can be calculated by equation (5):
δ＝4F
cL
3/3πE(d
2 4-d
1 4) (5)
Wherein:
F
cThe expression Coriolis force,
E represents Young modulus,
d
1The internal diameter of expression measuring tube,
d
2The external diameter of expression measuring tube,
L represents the length of measuring tube.
In actual use, because the length of measuring tube is subjected to the restriction of meter volume, Oscillation Amplitude δ mainly is subjected to the wall thickness of measuring tube and the influence of Young modulus.That is to say that the used material of measuring tube is thin more in the flowmeter, Young modulus is more little, then the measurement sensitivity of flowmeter is high more.The Young modulus of metal current glass measuring tube approximately is 2/5ths of a stainless steel measuring tube, the thickness of measuring tube of the present invention is 1/4th of stainless-steel tube thickness, according to the calculating of equation (5), the measurement sensitivity of metallic glass measuring tube can reach more than 30 times of stainless-steel tube.
Above listed a series of detailed description only is specifying at feasibility embodiment of the present invention; they are not in order to restriction protection scope of the present invention, allly do not break away from equivalent embodiment or the change that skill spirit of the present invention done and all should be included within protection scope of the present invention.
Claims (5)
1. coriolis mass flowmeters, comprise one can be around the measuring tube and a pair of vibration transducer of turning axle rotation, it is characterized in that: described measuring tube is made by metallic glass, this measuring tube has: one section for detected fluid flow into, with the import straight tube of described rotating shaft coaxle, one section for detected fluid flow out, with the outlet straight tube of described rotating shaft coaxle, and one section be positioned between described import straight tube and the described outlet straight tube and the curve bend that communicates with both; Described a pair of vibration transducer is arranged along the measuring tube radial symmetry, and is arranged on the described curve bend two ends of described measuring tube.
2. coriolis flowmeter as claimed in claim 1, wherein, also comprise a bow, the curve bend of this bow and described measuring tube is axially symmetrical in same plane along described turning axle, and the two ends of this bow are fixed on two back-up blocks with described measuring tube respectively.
3. coriolis flowmeter as claimed in claim 2, wherein, a motor drives described measuring tube and rotates around described turning axle, the import straight tube of the described measuring tube of rotor clamping of described motor or outlet straight tube, and the stator of described motor is fixed on the housing of this flowmeter.
4. coriolis flowmeter as claimed in claim 3, wherein, the housing of this flowmeter supports described measuring tube by bearing at the inlet end of described measuring tube detected fluid and the endpiece place of detected fluid respectively.
5. coriolis flowmeter as claimed in claim 1, wherein, the metallic glass of making described measuring tube is a zirconium-based metallic glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101311736A CN101858764B (en) | 2009-04-07 | 2009-04-07 | Coriolis mass flowmeter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101311736A CN101858764B (en) | 2009-04-07 | 2009-04-07 | Coriolis mass flowmeter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101858764A true CN101858764A (en) | 2010-10-13 |
| CN101858764B CN101858764B (en) | 2012-07-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009101311736A Expired - Fee Related CN101858764B (en) | 2009-04-07 | 2009-04-07 | Coriolis mass flowmeter |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105403267A (en) * | 2014-09-10 | 2016-03-16 | 西门子公司 | Valve operation and diagnosis |
| CN107110752A (en) * | 2014-12-30 | 2017-08-29 | 恩德斯+豪斯流量技术股份有限公司 | The method for measuring fluid density |
| CN110455362A (en) * | 2019-09-11 | 2019-11-15 | 中国测试技术研究院流量研究所 | Flowmeter sensor, flowmeter and the method for improving fluid impact vibrating tube |
| CN113108855A (en) * | 2021-04-13 | 2021-07-13 | 合肥精大仪表股份有限公司 | Mass flow meter based on Coriolis principle |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3503841A1 (en) * | 1985-02-05 | 1986-08-07 | Karl Dipl.-Ing. 8060 Dachau Küppers | Mass flow meter |
| JP3656947B2 (en) * | 1999-10-05 | 2005-06-08 | 株式会社オーバル | Coriolis mass flow meter |
| DE10351311B3 (en) * | 2003-10-31 | 2005-06-30 | Abb Patent Gmbh | Coriolis mass flowmeter |
-
2009
- 2009-04-07 CN CN2009101311736A patent/CN101858764B/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105403267A (en) * | 2014-09-10 | 2016-03-16 | 西门子公司 | Valve operation and diagnosis |
| US10048160B2 (en) | 2014-09-10 | 2018-08-14 | Siemens Aktiengesellschaft | Valve operation and diagnosis |
| CN107110752A (en) * | 2014-12-30 | 2017-08-29 | 恩德斯+豪斯流量技术股份有限公司 | The method for measuring fluid density |
| US10466151B2 (en) | 2014-12-30 | 2019-11-05 | Endress + Hauser Flowtec Ag | Method for measuring density of a fluid |
| CN107110752B (en) * | 2014-12-30 | 2020-04-28 | 恩德斯+豪斯流量技术股份有限公司 | Method for measuring fluid density |
| CN110455362A (en) * | 2019-09-11 | 2019-11-15 | 中国测试技术研究院流量研究所 | Flowmeter sensor, flowmeter and the method for improving fluid impact vibrating tube |
| CN113108855A (en) * | 2021-04-13 | 2021-07-13 | 合肥精大仪表股份有限公司 | Mass flow meter based on Coriolis principle |
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| CN101858764B (en) | 2012-07-18 |
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