CN101845610A - 一种连续垂直热蒸发的金属镀膜方法 - Google Patents
一种连续垂直热蒸发的金属镀膜方法 Download PDFInfo
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- CN101845610A CN101845610A CN201010193192A CN201010193192A CN101845610A CN 101845610 A CN101845610 A CN 101845610A CN 201010193192 A CN201010193192 A CN 201010193192A CN 201010193192 A CN201010193192 A CN 201010193192A CN 101845610 A CN101845610 A CN 101845610A
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- 239000002184 metal Substances 0.000 title claims abstract description 60
- 238000001704 evaporation Methods 0.000 title claims abstract description 53
- 230000008020 evaporation Effects 0.000 title claims abstract description 53
- 238000000034 method Methods 0.000 title claims abstract description 32
- 239000007888 film coating Substances 0.000 title claims abstract description 26
- 238000009501 film coating Methods 0.000 title claims abstract description 26
- 239000000758 substrate Substances 0.000 claims abstract description 36
- 239000000463 material Substances 0.000 claims abstract description 21
- 238000002207 thermal evaporation Methods 0.000 claims description 23
- 239000011248 coating agent Substances 0.000 claims description 12
- 238000000576 coating method Methods 0.000 claims description 12
- 230000000295 complement effect Effects 0.000 claims description 4
- 238000004804 winding Methods 0.000 claims description 2
- 230000008021 deposition Effects 0.000 abstract description 9
- 230000010287 polarization Effects 0.000 abstract description 8
- 238000005516 engineering process Methods 0.000 abstract description 7
- 230000015572 biosynthetic process Effects 0.000 abstract description 4
- 230000002349 favourable effect Effects 0.000 abstract 1
- 238000007740 vapor deposition Methods 0.000 abstract 1
- 238000000151 deposition Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- 238000010276 construction Methods 0.000 description 5
- 206010037660 Pyrexia Diseases 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 238000001883 metal evaporation Methods 0.000 description 2
- 206010010774 Constipation Diseases 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
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CN2010101931924A CN101845610B (zh) | 2010-06-07 | 2010-06-07 | 一种连续垂直热蒸发的金属镀膜方法 |
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CN2010101931924A CN101845610B (zh) | 2010-06-07 | 2010-06-07 | 一种连续垂直热蒸发的金属镀膜方法 |
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CN101845610A true CN101845610A (zh) | 2010-09-29 |
CN101845610B CN101845610B (zh) | 2011-12-07 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104131253A (zh) * | 2013-05-02 | 2014-11-05 | 三星显示有限公司 | 沉积源以及具有其的沉积设备 |
CN105132868A (zh) * | 2015-09-25 | 2015-12-09 | 京东方科技集团股份有限公司 | 蒸发源及其制作方法、蒸镀方法 |
CN106435483A (zh) * | 2016-12-12 | 2017-02-22 | 福州大学 | 一种高精度oled器件的制备装置及制备方法 |
CN107012434A (zh) * | 2017-05-27 | 2017-08-04 | 武汉天马微电子有限公司 | 一种蒸发源及真空蒸镀装置 |
JP2017173742A (ja) * | 2016-03-25 | 2017-09-28 | 大日本印刷株式会社 | 偏光子の製造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1038129A (zh) * | 1988-05-31 | 1989-12-20 | 基也辅综合技术研究所 | 薄膜真空喷镀装置 |
CN1104262A (zh) * | 1993-09-17 | 1995-06-28 | 凡利安同仁股份有限公司 | 控制准直溅射源的方法 |
US20090308732A1 (en) * | 2008-06-17 | 2009-12-17 | Applied Materials, Inc. | Apparatus and method for uniform deposition |
-
2010
- 2010-06-07 CN CN2010101931924A patent/CN101845610B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1038129A (zh) * | 1988-05-31 | 1989-12-20 | 基也辅综合技术研究所 | 薄膜真空喷镀装置 |
CN1104262A (zh) * | 1993-09-17 | 1995-06-28 | 凡利安同仁股份有限公司 | 控制准直溅射源的方法 |
US20090308732A1 (en) * | 2008-06-17 | 2009-12-17 | Applied Materials, Inc. | Apparatus and method for uniform deposition |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104131253A (zh) * | 2013-05-02 | 2014-11-05 | 三星显示有限公司 | 沉积源以及具有其的沉积设备 |
CN104131253B (zh) * | 2013-05-02 | 2018-05-22 | 三星显示有限公司 | 沉积源以及具有其的沉积设备 |
CN105132868A (zh) * | 2015-09-25 | 2015-12-09 | 京东方科技集团股份有限公司 | 蒸发源及其制作方法、蒸镀方法 |
US9831430B2 (en) | 2015-09-25 | 2017-11-28 | Boe Technology Group Co., Ltd. | Evaporation system and fabricating method and evaporation method thereof |
CN105132868B (zh) * | 2015-09-25 | 2019-09-27 | 京东方科技集团股份有限公司 | 蒸发源及其制作方法、蒸镀方法 |
JP2017173742A (ja) * | 2016-03-25 | 2017-09-28 | 大日本印刷株式会社 | 偏光子の製造方法 |
CN106435483A (zh) * | 2016-12-12 | 2017-02-22 | 福州大学 | 一种高精度oled器件的制备装置及制备方法 |
CN107012434A (zh) * | 2017-05-27 | 2017-08-04 | 武汉天马微电子有限公司 | 一种蒸发源及真空蒸镀装置 |
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CN101845610B (zh) | 2011-12-07 |
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