CN101823147A - Method for producing aluminum-titanium alloy target by means of high-intensity current - Google Patents
Method for producing aluminum-titanium alloy target by means of high-intensity current Download PDFInfo
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- CN101823147A CN101823147A CN200910044672A CN200910044672A CN101823147A CN 101823147 A CN101823147 A CN 101823147A CN 200910044672 A CN200910044672 A CN 200910044672A CN 200910044672 A CN200910044672 A CN 200910044672A CN 101823147 A CN101823147 A CN 101823147A
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Abstract
The invention relates to a method for producing aluminum-titanium alloy target by means of high-intensity current. The method adopts the following steps to produce the product: (1) titanium powder and aluminum powder are adopted, the weight ratio of the titanium powder is 5 percent to 75 percent, and the rest is the aluminum powder; (2) the titanium powder and the aluminum powder are uniformly mixed for 4 to 16 hours, and are then poured into a mould; (3) the mould is arranged between an anode plate and a cathode plate of a heater, 5000A to 25000A of current and 5V of voltage are applied; when being raised to 400 DEG C to 520 DEG C, the temperature is kept for 5 to 20 minutes; when the temperature is raised to 800 DEG C to 1200 DEG C, sintering is carried out for 10 to 30 minutes; (4) semi-finished aluminum-titanium alloy target is put into a resistance furnace with the temperature of 600 DEG C to 1200 DEG C and heated for 4 to 6 hours, and after cooling and demoulding, the finished product is obtained. The invention adopts the device which can obtain high current, utilizes high current to heat the aluminum powder and the titanium powder, and applies pressure, so that the aluminum and the titanium react to product the aluminum-titanium alloy target. The density of the product is larger than 99 percent, the grain size is less than or equal to 100Mum, the cost is low, and the invention can meet the requirement of mass industrialized production.
Description
Technical field
The present invention relates to the metal surface Coating Materials of powder metallurgy manufacture field, relate in particular to a kind of production method of aluminum-titanium alloy target.
Background technology
Aluminum titanium alloy is a kind of novel vacuum coating alloy sputtering target, in this alloy, can obtain the aluminum-titanium alloy target of different qualities by the content of allotment aluminium and titanium, as cooperate the nitrogen discharge starting the arc to implement sputter, can obtain high rigidity low coefficient of friction surfaces film, the superficial layer that is particularly suitable for various cutters, mould and other consumable accessory is coated with, and is therefore of many uses.But its preparation is very difficult, and this is because under different composition proportion conditions, can form multiple intermetallic compound between aluminium and the titanium, as Ti
3Al, TiAl, TiAl
2, TiAl
3Deng, the existence of these intermetallic compounds has caused the work brittleness of aluminum titanium alloy, and particularly the content of Aluminum in Alloy surpasses at 50% o'clock, and the oxidisability of alloy improves suddenly, will soon oxidation even burning under the conventional conditions.And alloying process is the process that a heat release is expanded, and often causes the porosity height, and the consequence that oxidation is serious can't satisfy the target requirement.Therefore, also caused the complicated of technological process simultaneously.Domestic patent 200710303869.3 provides a kind of technology that adopts high temperature insostatic pressing (HIP) to prepare powder metallurgy titanium aluminium target, these process using high temperature insostatic pressing (HIP) means, and long flow path requires height, however the material property of making is unstable, and cost is too high.And the technology of some other bibliographical information has to produce bubble, loose and segregation in casting process; Have the uniformity of composition and tissue to be difficult to guarantee, cause the quality instability, and aluminium content surpasses 50% and just can't prepare, the commercial Application scale is restricted greatly.
Summary of the invention
The technical problem to be solved in the present invention is, overcomes the defective of above-mentioned technology, and a kind of method of producing aluminum-titanium alloy target by means of high-intensity current is provided.This method can be prepared high-quality aluminum-titanium alloy target at characteristics and application demand that aluminum-titanium alloy target especially aluminium content surpasses 50% aluminum-titanium alloy target.
Technical solution of the present invention is that described a kind of method system by means of high-intensity current production aluminum-titanium alloy target adopts following raw material and processing step to make aluminum-titanium alloy target:
1, adopt aluminium powder and titanium valve batching to obtain blank, wherein the percentage by weight of titanium valve is 5～75%, and all the other are aluminium powder.The particle size range of the titanium valve that is adopted is 10～100 μ m, purity 〉=99.5%, oxygen content≤500ppm; The particle size range of aluminium powder is 10～50 μ m, purity 〉=99.5%, oxygen content≤500ppm;
2, with after evenly mixing 4～16 hours in the step 1 gained blank input batch mixer, pour into and vibrate in the mould evenly;
3, the mould that step 2 gained is equipped with the blank that mixes places between the positive electrode substrate and negative electrode substrate of heater circuit, and positive electrode substrate by this appliances power source and the powder blank of negative electrode substrate in mould apply the voltage about 5000～25000A electric current and 5V.Exert pressure with titanium valve mixing blank so that the blank powder densification receives that inhibition aluminium and titanium produce the effect that excessive bulk expands when combination reaction by the aluminium powder in the electrode pair mould.Pressure limit is 5～50Mpa.The means of high-intensity current that is applied makes the aluminium powder in the mould mix blank heating with titanium valve and heats up when reaching 400～520 ℃, be incubated 5～20 minutes, gas and slough forming agent between the discharge powder.Then, strengthen current strength, temperature is climbed to 800～1200 ℃ and implements 10～30 minutes sintering, makes the titanium valve in the mould be the aluminum-titanium alloy target semi-finished product with aluminium powder mixing blank sinter molding.
4, together with mould step 3 gained aluminum-titanium alloy target semi-finished product are inserted and heated in predefined 600～1200 ℃ resistance furnace 4～6 hours, close stove, naturally cool to room temperature with stove, the demoulding promptly gets the aluminum-titanium alloy target finished product of sinter molding.
The invention has the beneficial effects as follows, as mentioned above, adopted a kind of device that can pass through to obtain big electric current.This device is input in the blank that aluminium powder and titanium valve are housed by big electric current, utilize the energy of big electric current to make aluminium powder and titanium valve heating, simultaneously, apply 5～50MPa pressure, the a large amount of heat energy that self produce during by aluminium powder and titanium valve generation combination reaction self react aluminium and titanium and produce aluminum-titanium alloy target.
The specific embodiment:
Embodiment 1:
1, get 95 kilograms of 5 kilograms of titanium valves, aluminium powder prepare burden blank, the granularity of titanium valve and aluminium powder is 10 μ m, purity all 〉=99.5%, oxygen content all≤500ppm;
2, step 1 gained blank is dropped into evenly mix in the batch mixer and pour in the mould vibration after 4 hours into evenly;
3, the mould that step 2 gained is equipped with the blank that mixes places Chinese Changsha to rise forever between the positive electrode substrate and negative electrode substrate of the single-phase heater circuit of TL-2000 that metal material Co., Ltd produces, and positive electrode substrate and the powder blank of negative electrode substrate in mould by this appliances power source apply 5000A electric current and 5V voltage.Insulation is 5 minutes when applying 5MPa pressure and blank heating is heated up reach 400 ℃ by the blank in the electrode pair mould.Strengthen current strength then, temperature is climbed to 800 ℃ and implements 10 minutes sintering, makes the blank sinter molding.
4, together with mould step 3 gained aluminum-titanium alloy target semi-finished product are inserted in 600 ℃ of resistance furnaces heating 4 hours, close stove, naturally cool to room temperature with stove, the demoulding, the aluminum-titanium alloy target finished product.
Embodiment 2:
1, get 25 kilograms of 75 kilograms of titanium valves, aluminium powder prepare burden blank, wherein the granularity of titanium valve is 100 μ m, the granularity of aluminium powder is 50 μ m.The purity of titanium valve and aluminium powder all 〉=99.5%, oxygen content all≤500ppm;
2, step 1 gained blank is dropped into evenly mix in the batch mixer and pour in the mould vibration after 16 hours into evenly;
3, the mould that step 2 gained is equipped with the blank that mixes places Chinese Changsha to rise forever between the positive electrode substrate and negative electrode substrate of the single-phase heater circuit of TL-2000 that metal material Co., Ltd produces, and positive electrode substrate and the powder blank of negative electrode substrate in mould by this appliances power source apply 25000A electric current and 5V voltage.Insulation is 20 minutes when applying 50MPa pressure and blank heating is heated up reach 520 ℃ by the blank in the electrode pair mould.Strengthen current strength then, temperature is climbed to 1200 ℃ and implements 30 minutes sintering, makes the blank sinter molding.
4, together with mould step 3 gained aluminum-titanium alloy target semi-finished product are inserted in 1200 ℃ of resistance furnaces heating 6 hours, close stove, naturally cool to room temperature with stove, the demoulding, the aluminum-titanium alloy target finished product.
The above aluminum-titanium alloy target finished product that obtains, density＞99%, crystallite dimension≤100 μ m, composition are even, and cost is low, can satisfy the requirement of large-scale industrialized production fully.
Claims (1)
1. method of producing aluminum-titanium alloy target by means of high-intensity current, this method system adopts following raw material and processing step to make aluminum-titanium alloy target:
1, adopt titanium valve and aluminium powder batching to obtain blank, wherein the percentage by weight of titanium valve is 5～75%, and all the other are aluminium powder, and the particle size range of the titanium valve that is adopted is 10～100 μ m, purity 〉=99.5%, oxygen content≤500ppm; The particle size range of aluminium powder is 10～50 μ m, purity 〉=99.5%, oxygen content≤500ppm;
2, with after evenly mixing 4～16 hours in the step 1 gained blank input batch mixer, pour into and vibrate in the mould evenly;
3, the mould that step 2 gained is equipped with the blank that mixes places between the positive electrode substrate and negative electrode substrate of heater circuit, positive electrode substrate by this appliances power source and the aluminium powder of negative electrode substrate in mould and titanium valve mixing blank apply the voltage of 5000～25000A electric current and 5V, exert pressure so that the blank powder densification by the blank in the electrode pair mould, pressure limit is 5～50Mpa, the means of high-intensity current that is applied makes the aluminium powder in the mould mix blank heating with titanium valve and heats up when reaching 400～520 ℃, be incubated 5～20 minutes, discharge between powder gas and slough forming agent, then, strengthen current strength, temperature is climbed to 800～1200 ℃ and implements 10～30 minutes sintering, makes the titanium valve in the mould be the aluminum-titanium alloy target semi-finished product with aluminium powder mixing blank sinter molding;
4, together with mould step 3 gained aluminum-titanium alloy target semi-finished product are inserted and heated in predefined 600～1200 ℃ resistance furnace 4～6 hours, close stove, naturally cool to room temperature with stove, the demoulding promptly gets the aluminum-titanium alloy target finished product of sinter molding.
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|---|---|---|---|
| CN200910044672A CN101823147A (en) | 2009-10-30 | 2009-10-30 | Method for producing aluminum-titanium alloy target by means of high-intensity current |
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|---|---|---|---|
| CN200910044672A CN101823147A (en) | 2009-10-30 | 2009-10-30 | Method for producing aluminum-titanium alloy target by means of high-intensity current |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101979703A (en) * | 2010-11-10 | 2011-02-23 | 范文波 | Method for performing surface treatment on golf head by aluminium -titanium nitride composite coating |
| CN102000805A (en) * | 2010-12-27 | 2011-04-06 | 深圳大学 | Metal micro part forming mold and method |
| CN102672156A (en) * | 2011-03-11 | 2012-09-19 | 北京有色金属研究总院 | Production device of pre-alloy powder |
| CN113234960A (en) * | 2021-05-08 | 2021-08-10 | 陕西工业职业技术学院 | Preparation method of alloy |
| CN115091154A (en) * | 2022-06-30 | 2022-09-23 | 维克多精密工业技术(苏州)有限责任公司 | Preparation process of quick selection type mixed cutter |
-
2009
- 2009-10-30 CN CN200910044672A patent/CN101823147A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101979703A (en) * | 2010-11-10 | 2011-02-23 | 范文波 | Method for performing surface treatment on golf head by aluminium -titanium nitride composite coating |
| CN101979703B (en) * | 2010-11-10 | 2013-01-16 | 范文波 | Method for performing surface treatment on golf head by aluminium -titanium nitride composite coating |
| CN102000805A (en) * | 2010-12-27 | 2011-04-06 | 深圳大学 | Metal micro part forming mold and method |
| CN102000805B (en) * | 2010-12-27 | 2012-08-29 | 深圳大学 | Metal micro part forming mold and method |
| CN102672156A (en) * | 2011-03-11 | 2012-09-19 | 北京有色金属研究总院 | Production device of pre-alloy powder |
| CN113234960A (en) * | 2021-05-08 | 2021-08-10 | 陕西工业职业技术学院 | Preparation method of alloy |
| CN115091154A (en) * | 2022-06-30 | 2022-09-23 | 维克多精密工业技术(苏州)有限责任公司 | Preparation process of quick selection type mixed cutter |
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Open date: 20100908 |