CN101817631A - Glass granules is synthetic with burner and use the manufacture method of its porous glass base material - Google Patents

Glass granules is synthetic with burner and use the manufacture method of its porous glass base material Download PDF

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Publication number
CN101817631A
CN101817631A CN201010135182A CN201010135182A CN101817631A CN 101817631 A CN101817631 A CN 101817631A CN 201010135182 A CN201010135182 A CN 201010135182A CN 201010135182 A CN201010135182 A CN 201010135182A CN 101817631 A CN101817631 A CN 101817631A
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gas
small
ejiction opening
supporting property
bore
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CN201010135182A
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CN101817631B (en
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吉田真
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Shin Etsu Chemical Co Ltd
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Shin Etsu Chemical Co Ltd
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C03B37/0142—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/06—Concentric circular ports
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/12—Nozzle or orifice plates
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/36—Fuel or oxidant details, e.g. flow rate, flow rate ratio, fuel additives
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Abstract

A kind of glass granules is synthetic uses burner, and it possesses: the glass raw material gas ejiction opening; The inflammable gas ejiction opening, it is the outside of center configuration at the glass raw material gas ejiction opening with the glass raw material gas ejiction opening; And small-bore combustion-supporting property gas vent, it is concentric circles with the glass raw material gas ejiction opening and forms 1 circle or multi-turn in the inflammable gas ejiction opening, is configured to a plurality of ring-types; And the small-bore combustion-supporting property gas vent that is configured in same circle has mutually identical focal length, and each small-bore combustion-supporting property gas vent has respectively: the gas introduction part of coming out from common person in charge branch and be configured in the end opposite with the gas introduction part with the fixed part between the gas introduction part; And, be made as D at internal diameter with the locational small-bore combustion-supporting property gas vent of fixed part 1, the internal diameter of the locational small-bore combustion-supporting property gas vent of gas introduction part is made as D 2, the internal diameter of the small-bore combustion-supporting property gas vent beyond the position of fixed part and gas introduction part is made as D 3The time, D 1Greater than D 3, and D 2Greater than D 3

Description

Glass granules is synthetic with burner and use the manufacture method of its porous glass base material
Technical field
It is synthetic with burner (below, only be called burner) and use the manufacture method of its porous glass base material to the present invention relates in a kind of manufacturing of glass base material for optical fiber employed glass granules.
Background technology
Before, in order to make fibre parent material, the whole bag of tricks had been proposed.Among these methods, because burner or initial member are relatively moved back and forth, and the glass granules that generates in the burner flame is adhered to be piled up on the initial member that rugosity is about the rotation about 50mm φ, synthesize rugosity and be about cigarette ash (soot) about 250～350mm φ, with its in electric furnace, dewater, agglomerating OVD (outside vapor deposition, the OVD method) can obtain the comparison optional refractive index distribution, and can produce bigbore fibre parent material in batches, so be used widely.
Before, the glass granules accumulation body had been to use with the core multiple-tubed burner when synthetic, but the burner of this structure can not carry out the mixing of glass raw material gas, inflammable gas and combustion-supporting property gas fully, therefore can not carry out the generation of glass granules fully.Its result does not improve productive rate and is difficult to synthetic at a high speed.
For head it off, the mode with the unstripped gas ejiction opening that surrounds the center of having proposed patent documentation 1 in inflammable gas ejiction opening (port) disposes multi-nozzle (multi-nozzle) the type burner of small-bore combustion-supporting property gas vent (below, abbreviate small-bore gas ejiction opening as).
Usually, small-bore gas ejiction opening is branched off into several～tens small-bore pipes from the person in charge of the gas introduction port that is connected burner, has suitable weight.Therefore, burner at high temperature can produce bending owing to the weight of pipe itself, produces core shift at the burner front end.As the method that prevents this problem, patent documentation 2 has proposed method that small-bore gas ejiction opening and adjacent interior pipe or outer tube are fixedly prevented bending or vibration.
[prior art document]
Patent documentation 1: the special fair 3-9047 communique of Japanese Patent
Patent documentation 2: Japanese patent laid-open 10-95623 communique
[inventing problem to be solved]
Yet, because the multi-nozzle type burner of record comprises a plurality of small-bore pipes in the patent documentation 2, so it is extremely complicated to fix the structure of fixed part of these small-bore pipes.
Like this, because multi-nozzle type burner has complicated structure, so each root is made by handwork.Therefore the individual difference between burner is bigger, can produce following problem: because the burner difference, so exist small-bore gas ejiction opening front end to be easy to the burner of glassivation particulate, perhaps deposition efficiency produces difference.
The object of the present invention is to provide that a kind of individual difference between burner is less in baroque multi-nozzle type burner, and the good glass granules of the combined coefficient of glass granules is synthetic with burner and use the manufacture method of its porous glass base material.
Summary of the invention
As first kenel of the present invention, provide a kind of glass granules to synthesize and use burner, it possesses: the glass raw material gas ejiction opening; The inflammable gas ejiction opening, it is the center with the glass raw material gas ejiction opening, is configured in the outside of glass raw material gas ejiction opening; And small-bore combustion-supporting property gas vent, it is concentric circles with the glass raw material gas ejiction opening and forms 1 circle or multi-turn in the inflammable gas ejiction opening, is configured to a plurality of ring-types; And be configured in small-bore combustion-supporting property gas vent on the same circle and have identical focal length mutually, each small-bore combustion-supporting property gas vent has respectively: the gas introduction part of coming out from common person in charge branch and be configured in the end opposite with the gas introduction part with the fixed part between the gas introduction part; And, be made as D at internal diameter with the locational small-bore combustion-supporting property gas vent of fixed part 1, the internal diameter of the locational small-bore combustion-supporting property gas vent of gas introduction part is made as D 2, the internal diameter of the small-bore combustion-supporting property gas vent beyond the position of fixed part and gas introduction part is made as D 3The time, D 1Greater than D 3, and D 2Greater than D 3
And, as second kenel of the present invention, providing a kind of manufacture method of porous glass base material, it uses, and described glass granules is synthetic makes porous glass base material with burner.
The summary of described invention is not enumerated all essential feature of the present invention.And time combination (subcombination) of these syndromes also can become invention.
Description of drawings
Fig. 1 is the sketch chart of an example of the manufacturing installation of expression porous glass base material.
Fig. 2 is that setting of expression burner of the present invention is the diagrammatic, cross-sectional figure that the 1 small-bore gas ejiction opening that encloses concentric circles is fixed as the burner leading section of cyclic state.
Fig. 3 is that setting of expression burner of the present invention is the diagrammatic, cross-sectional figure that the 2 small-bore gas ejiction openings that enclose concentric circles are fixed as the burner leading section of cyclic state.
Fig. 4 is the summary longitudinal section of burner shown in Figure 2.
Fig. 5 A is the sketch chart that the stationary state to small-bore gas ejiction opening describes.
Fig. 5 B is the sketch chart that the stationary state to small-bore gas ejiction opening describes.
Fig. 5 C is the sketch chart that the stationary state to small-bore gas ejiction opening describes.
Fig. 6 is the chart of the relation of expression flow velocity of small-bore gas ejiction opening front end and fixed part internal diameter.
[explanation of symbol]
1 fine nuclear rod
2 illusory rods
3 burners
4 wharve mechanisms
5 extraction hoods
6 glass raw material gas ejiction openings
7 small-bore gas ejiction openings
8 inflammable gas ejiction openings
9 sealed gas ejiction openings
10 fixed parts
11 branching portions
12 are responsible for
Embodiment
Below, by the working of an invention form the present invention is described, but following example does not limit the invention in claims.And all illustrated combination of features are not that the solution institute of invention is essential in the example.
The inventor makes great efforts research to the burner with a plurality of small-bore gas ejiction openings, and the result is as can be known because the gas flow inequality of each small-bore gas ejiction opening, and makes multi-nozzle type burner produce individual difference.
For example, if the gas flow of certain small-bore gas ejiction opening is few terrifically, the gas flow rate of this ejiction opening can diminish so, and the ejiction opening front end can be easy to the glassivation particulate.In addition, if between ejiction opening, there is the gas flow inequality, it is uneven to produce reaction at the less ejection oral-lateral of gas flow and the ejection oral-lateral beyond it so, therefore with compare with the gas flow of equalization, the burner that balance is reacted well, deposition efficiency descends.
Studies show that, the inequality of the gas flow of each this small-bore gas ejiction opening has due to the straight-tube portion of small-bore pipe of precision no thanks to, but because when the person in charge's shown in Figure 4 branching portion and fixed part added hot-work, shown in Fig. 5 A, can form diameter shrinkage part, the degree of its undergauge causes the generation of gas flow inequality.Therefore in order to solve described problem, when inventor's discovery added hot-work to a plurality of small-bore gas ejiction openings, in order not produce diameter shrinkage part, fixing small-bore gas ejiction opening got final product, thereby reaches the present invention.
Particularly, between the small-bore gas ejiction opening front end, the ejiction opening of same circle is fixed into ring-type at branching portion.For example, at the place of branching portion till the small-bore gas ejiction opening front end, will be fixing respectively between adjacent small-bore gas ejiction opening, the ejiction opening of same circle is fixed as ring-type.In addition, be made as D at internal diameter with the small-bore gas ejiction opening in the fixed part 1, the internal diameter of the small-bore gas ejiction opening in the branching portion is made as D 2, the internal diameter of the small-bore gas ejiction opening beyond fixed part and the branching portion is made as D 3The time, be processed into D 3＜D 1And D 3＜D 2In other words, in the mode of the internal diameter that is not less than straight-tube portion the fixed part of small-bore gas ejiction opening and the internal diameter of branching portion are processed with precision.
It is desirable to shown in Fig. 5 B D 3=D 1, D 3=D 2, but consider because be to utilize the flame heating of the burner that handwork makes to carry out glass processing, so this is impossible.Therefore, shown in Fig. 5 C, branching portion and fixed part are carried out hole enlargement, make D 3＜D 1And D 3＜D 2But, if therefore too hole enlargement and thickness of pipe attenuation can make undercapacity so wishes that hole enlargement is than at 1.0≤D 1/ D 3And 1.0≤D 2/ D 3Scope in as much as possible little.Like this,,, can pressure boost not lose, the pressure-losses of each mouthful can be suppressed be same degree thus, can dwindle gas flow distribution owing to undergauge than the straight-tube portion beyond it at branching portion and fixed part.
Fig. 1 is the sketch chart of an example of expression porous glass base material manufacturing installation, initial member is illusory rod (dummy rod) 2 in the both ends difference welding of fibre nuclear rod (corerod) 1, utilizes wharve (ingot chuck) mechanism 4 to pivot and supporting freely.Spray SiCl from burner 3 4Deng fiber with raw material and combustion gases (hydrogen and oxygen), utilize burner guide mechanism (omitting diagram) that burner 3 is moved back and forth along initial member, the glass granules (cigarette ash) of hydrolysis generation in the oxyhydrogen flame is deposited on the initial member, obtains porous glass base material for optical fiber thus.The glass granules that does not adhere to is discharged to outside the system from extraction hood (exhaust hood) 5.
The porous glass base material that is obtained forms base material for optical fiber by the process furnace vitrifying of dewatering.
Fig. 2 is the diagrammatic, cross-sectional figure of burner of the present invention, the outside at glass raw material gas ejiction opening 6, with across sealed gas ejiction opening 9, with respect to glass raw material gas ejiction opening 6 be 1 the circle concentric circles mode, 8 small-bore gas ejiction openings 7 are provided in the inflammable gas ejiction opening 8.Fix with identical material respectively between the only adjacent ejiction opening of small-bore gas ejiction opening 7, the ejiction opening of concentric same circle is fixed as ring-type.
The preferred silica glass of the identical material of gas vent therewith when in addition, fixing adjacent ejiction opening.
Among Fig. 3, similarly in inflammable gas ejiction opening 8, it is 2 circle concentric circles that small-bore gas ejiction opening sets, and ejiction opening of each circle is fixed as ring-type respectively at the place of branching portion till the ejiction opening front end.
Fig. 4 is the summary longitudinal section of the central axis alongst of burner shown in Figure 2, and small-bore gas ejiction opening 7 is 1 circle in inflammable gas ejiction opening 8, to be with respect to glass raw material gas ejiction opening 6 that concentric circles sets.Small-bore gas ejiction opening 7 branches into a plurality of small-bore pipes to branching portion 11 being responsible for 12, and at the place of branching portion 11 till the ejiction opening front end, fixing with fixed part 10 respectively between the adjacent ejiction opening of same circle, the ejiction opening 7 of same circle is fixed as ring-type.
Shown in Fig. 5 C, this small-bore gas ejiction opening 7 carries out branch, fixing, the inside diameter D of the fixed part 10 of ejiction opening 7 under the state that branching portion 11 and fixed part 10 are expanded a little 1And the inside diameter D of branching portion 2Greater than the inside diameter D of locating beyond it 3, to satisfy D 3＜D 1And D 3＜D 2Mode process.Below, enumerate embodiment and comparative example describes.
[embodiment 1]
Use device as shown in Figure 1, utilize outside vapor deposition to make porous glass base material.Employed burner has structure as shown in Figure 2, the outside at the glass raw material gas ejiction opening 6 at center, to be the mode of 1 circle concentric circles across sealed gas ejiction opening 9, with respect to glass raw material gas ejiction opening 6, the small-bore gas ejiction opening 7 of 8 combustion-supporting property gases of ejection is provided in the inflammable gas ejiction opening 8, and these small-bore ejiction openings 7 all have the focal length of 150mm.The internal diameter of small-bore gas ejiction opening 7 is 1.5mm, 200mm is arranged till from branching portion to front end, and at distance front end 75mm place, 8 small-bore ejiction openings 7 are fixed as 1 loop.The internal diameter hole enlargement of branching portion and fixed part is 1.6mm.
, import combustion-supporting property gas herein, (gas flow rate of small-bore gas ejiction opening front end of A～H), the result is as shown in table 1 be the gas flow rate of equalization to utilize hot-wire anemometer to measure 8.
[table 1]
Small-bore ejiction opening ??A ??B ??C ??D ??E ??F ??G ??H
Branching portion internal diameter [mm] ??1.6 ??1.6 ??1.6 ??1.6 ??1.6 ??1.6 ??1.6 ??1.6
Fixed part internal diameter [mm] ??1.6 ??1.6 ??1.6 ??1.6 ??1.6 ??1.6 ??1.6 ??1.6
Front end flow velocity [m/s] ??30 ??30 ??30 ??30 ??30 ??30 ??30 ??30
Secondly, supply with SiCl to first pipe of this burner respectively 4And O 2, supply with sealed gas to second pipe, supply with H to the 3rd pipe 2, the small-bore gas ejiction opening in being arranged at the 3rd pipe is supplied with O 2, be that the both ends welding of the fibre nuclear rod of 50mm on the initial member of illusory rod that external diameter is 50mm at external diameter, pile up the 100kg glass granules.Its result, small-bore gas ejiction opening front end is the glassivation particulate not, and deposition efficiency is 64.2%.
[comparative example 1]
The burner that intention shown in the making table 2 changes the diameter of the fixed part of small-bore gas ejiction opening utilizes the condition identical with embodiment 1, utilizes hot-wire anemometer to measure the flow velocity of the combustion-supporting property gas of small-bore gas ejiction opening front end.Its result is as shown in table 2, in addition its pictorialization is shown among Fig. 6.Can confirm that by table 2 and Fig. 6 the flow velocity of the more little then front end of the internal diameter of fixed part becomes more little.
[table 2]
Small-bore ejiction opening ??A ??B ??C ??D ??E ??F ??G ??H
Branching portion internal diameter [mm] ??1.6 ??1.6 ??1.6 ??1.6 ??1.6 ??1.6 ??1.6 ??1.6
Fixed part internal diameter [mm] ??1.2 ??1.3 ??1.4 ??1.4 ??1.5 ??1.6 ??1.7 ??1.7
Front end flow velocity [m/s] ??22 ??25 ??29 ??30 ??34 ??34 ??34 ??34
In addition, except changing burner, utilizing the condition identical with embodiment 1, is that accumulation 100kg glass granules on the initial member of illusory rod that external diameter is 50mm in the both ends welding of the fibre nuclear rod of 50mm at external diameter.Its result finds the glassivation particulate at the front end of the ejiction opening A of the internal diameter that dwindles fixed part.And deposition efficiency is 63.0%, is lower than 64.2% of embodiment 1.
[comparative example 2]
Make the burner that diameter that intention makes the branching portion of small-bore gas ejiction opening changes, utilize the condition identical, measure the flow velocity of the combustion-supporting property gas of small-bore gas ejiction opening front end with embodiment 1.Its result is as shown in table 3, and is same with comparative example 1, and the flow velocity of the more little then front end of the internal diameter of branching portion becomes more little.
[table 3]
Small-bore ejiction opening ??A ??B ??C ??D ??E ??F ??G ??H
Branching portion internal diameter [mm] ??1.2 ??1.3 ??1.4 ??1.4 ??1.5 ??1.6 ??1.7 ??1.7
Fixed part internal diameter [mm] ??1.6 ??1.6 ??1.6 ??1.6 ??1.6 ??1.6 ??1.6 ??1.6
Front end flow velocity [m/s] ??22 ??25 ??29 ??30 ??34 ??34 ??34 ??34
In addition, except changing burner, utilizing the condition identical with embodiment 1, is that accumulation 100kg glass granules on the initial member of illusory rod that external diameter is 50mm in the both ends welding of the fibre nuclear rod of 50mm at external diameter.Its result finds the glassivation particulate at the front end of the small-bore gas ejiction opening A of the internal diameter that dwindles branching portion.And deposition efficiency is 62.7%, is lower than 64.2% of embodiment 1.
As mentioned above, the individual performance difference of burner is less, and fully carries out the mixing of glass raw material gas, inflammable gas and combustion-supporting property gas, can come the synthetic glass particulate with higher productive rate.Therefore, the deposition efficiency of glass granules improves, and helps to improve the productivity of porous glass base material.
In addition, use example to describe the present invention, but in the scope that technical scope of the present invention is not limited to put down in writing in the described example.It will be apparent to those skilled in the art that and to apply various changes or improvement to described example.By the record of claims as can be known, the form that applies this kind change or improvement also can be included in the technical scope of the present invention.
Please note, claims, specification sheets and graphic shown in device, system, program and method in action, in proper order, the implementation order of each processing such as step and stage, short of especially clearly expression " in the past ", " before " etc., and be not after processing in the situation of output of processing before using, can utilizing arbitrarily so, order realizes.About claims, specification sheets and graphic in motion flow, even use " at first, " for convenience, " secondly, " etc. describe, do not represent yet and must implement in proper order with this.

Claims (4)

1. a glass granules is synthetic uses burner, it is characterized in that: possess
The glass raw material gas ejiction opening;
The inflammable gas ejiction opening, it is the center with described glass raw material gas ejiction opening, is configured in the outside of described glass raw material gas ejiction opening; And
Small-bore combustion-supporting property gas vent, it is concentric circles with described glass raw material gas ejiction opening and forms 1 circle or multi-turn in described inflammable gas ejiction opening, is configured to a plurality of ring-types; And
The described small-bore combustion-supporting property gas vent that is configured in same circle has identical focal length mutually,
Each described small-bore combustion-supporting property gas vent has respectively
The gas introduction part of coming out from common person in charge branch and be configured in the end opposite with the fixed part between the described gas introduction part with described gas introduction part;
And,
Be made as D at internal diameter with the locational described small-bore combustion-supporting property gas vent of described fixed part 1, the internal diameter of the locational described small-bore combustion-supporting property gas vent of described gas introduction part is made as D 2, the internal diameter of the small-bore combustion-supporting property gas vent beyond the position of described fixed part and described gas introduction part is made as D 3The time, D 1Greater than D 3, and D 2Greater than D 3
2. glass granules according to claim 1 is synthetic uses burner, it is characterized in that: be configured in each described small-bore combustion-supporting property gas vent of described same circle,
Place between described end and described gas introduction part is fixed on other adjacent described small-bore combustion-supporting property gas vents.
3. glass granules according to claim 2 is synthetic uses burner, it is characterized in that: described fixed part is to utilize with described small-bore combustion-supporting property gas vent identical materials to form.
4. the manufacture method of a porous glass base material is characterized in that: use that each described glass granules is synthetic to the claim 3 makes porous glass base material with burner according to claim 1.
CN2010101351825A 2009-02-27 2010-02-25 Burner for producing glass fine particles and method for manufacturing porous glass base material using the same Active CN101817631B (en)

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