CN101804725A - Software and hardware combination multi-grade exception processing method of full-automatic precise screen printer - Google Patents

Software and hardware combination multi-grade exception processing method of full-automatic precise screen printer Download PDF

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CN101804725A
CN101804725A CN201010130661A CN201010130661A CN101804725A CN 101804725 A CN101804725 A CN 101804725A CN 201010130661 A CN201010130661 A CN 201010130661A CN 201010130661 A CN201010130661 A CN 201010130661A CN 101804725 A CN101804725 A CN 101804725A
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module
fault
failure
warning
user
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CN101804725B (en
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赵立华
宫晨
张文
何健全
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Beijing Semiconductor Equipment Institute
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Beijing Semiconductor Equipment Institute
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Abstract

The invention relates to a software and hardware combination multi-grade exception processing method of a full-automatic precise screen printer, and provides a multi-grade exception division processing mechanism, which adopts multithreading to design a monitoring and processing module, provides multi-grade exception processing means and puts part of exceptions into a hardware module according to exception grades to process exception conditions in real time. The method comprises the following steps: 1, establishing a background to operate the multithreading; 2, establishing a hardware independent exception I/O processing module by using PLC; 3, if interactive exceptions of failure occur, giving an alarm through equipment immediately; 4 processing the failure by users. The software and hardware combination multi-grade exception processing method has the advantages that: the exception processing of software and hardware combination is adopted to improve the exception processing speed of the equipment and reduce the resource occupancy rate of software controlled by programs; and the exception grades are divided, flexible processing modes are provided for the users, and the operation time of the equipment is improved by using a warning mechanism.

Description

Soft in the full-automatic precise screen printer, hardware combination multi-grade exception processing method
Technical field
The present invention relates to soft in a kind of full-automatic precise screen printer, hardware combination multi-grade exception processing method, be applicable to the abnormality processing of semiconductor applications fully-automatic equipment.
Background technology
In semiconductor production, described full-automatic precise screen printer comprises mechanisms such as automatic upper and lower material, transmission, images match location, printing, baking oven heating, cooling, be a kind of large-scale, complicated, high-accuracy equipment, contain 17 linear electric machines, each mechanism moves and equipment requirement unmanned simultaneously, UPH produces imitates height, easy care and operation, so it is unusual to have a complete cover abnormal monitoring, demonstration, warning, treatment mechanism to go in real time, accurately to catch all of entire equipment, guarantees equipment high efficiency, high stability operation.
The traditional exception handling of semiconductor equipment so not only increased the resources occupation rate of computer system, and it is not high to cause responding processing speed yet usually entirely by software control.Not to the fault processing of classifying, the back takes place and all shuts down operation even only eject the dialog box explanation, the operation underaction in fault in addition.
Chinese patent " a kind of monitoring of computer applied algorithm and abnormality eliminating method " (application number: 200610104447.9) disclose a kind of monitoring and abnormality eliminating method, its method is to have opened up program process and abnormal monitoring process, go each module of monitoring application program with the abnormal monitoring treatment progress, and use abnormality processing process transfer application process, when unusual the generation, can finish application process and restart application process.Though Synchronization Design is comparatively complicated between the multithreading, it is bigger that process and thread are compared expense, and simultaneously not as close relation between the multithreading, inconvenient communication and exchanges data mutually are not easy to management especially.Said method only limits to software view simultaneously, does not use hardware module to go to handle unusually, has influenced the real-time of abnormality processing greatly.
Summary of the invention
Technical problem to be solved by this invention provides and a kind ofly can improve abnormality processing speed, and soft, hardware combination multi-grade exception processing method in the full-automatic precise screen printer of user flexibility processing method is provided.
The technical solution adopted for the present invention to solve the technical problems:
Step of the present invention is as follows:
One, set up the running background multithreading:
Set up following worker thread in this program process inside of described Control System of Printing Machine software:
A, registration and catastrophe failure processing threads unusually are called for short the A module;
B, I/O state and fault-signal monitoring thread are called for short the B module;
C, fault show thread, are called for short the C module;
D, function logic module thread are called for short the D module;
Described D module is all mechanism's active threads of described printing machine, comprises the material loading module, these 5 threads of module behind two pawl modules, printing module, stokehold module and the stove;
The priority of described worker thread is identical and be lower than the UI thread of process, and promptly described worker thread is carried out on the backstage;
Two, use PLC to set up the independent unusual I/O processing module of hardware, be called for short the E module; Described E module uses PLC to handle all warning of I/O type and faults, and all warning points are together in parallel, and according to " start button " on the panel generic failure is pressed group and is together in parallel; The alarm address takes place then to jump to and triggers warning in arbitrary I/O warning fault; Arbitrary I/O generic failure takes place then to jump to the corresponding panel start button address and trigger command according to its place group, promptly by changing output I/O level its startup " is stopped ", and the operation of other mechanism is unaffected;
Three, mutual unusual generation of fault, equipment is reported to the police immediately:
At first fault is divided into 3 kinds of grades, promptly warns fault, generic failure and catastrophe failure;
Described warning fault refers to I/O warning fault; Described generic failure comprises I/O generic failure and logic generic failure;
(1) warning fault:
When the warning fault took place, the E module captured immediately, and the alarm user, the monitoring in real time of B module reads out current I/O and warns fault message, and the A module reads and register this warning fault message, and the user reads by the demonstration of C module, the D module is operation automatically still, does not shut down; After having served as certain hour, the I/O warning fault-signal in the B module has caused certain interior module service condition deficiency of D module and interrupt run; Process circuit: E-B-A-G and B-D;
(2) I/O generic failure:
When the I/O generic failure takes place when, the E module captures immediately, and be " stopping " by the starting switch that relevant part body station is handled in I/O output, B module monitoring in real time reads out current I/O generic failure information, the A module reads and registers this information, each inside modules in the D module becomes " stopping " because of each organization switch signal service condition in the B module from " startup " at this moment, thereby makes relevant each mechanism module all out of service, promptly is equivalent to hard interruption; The user shows this abnormal show in " fault " hurdle of fault dialog box by C module invokes A module information; Process route: E-B-A-C and B-D, each route is the thread executed in parallel because of module;
(3) logic generic failure in the D module:
The logic generic failure has taken place in a certain inside modules in the D module, and the then automatic soft interruption of this module by while circulation self-locking, report to the police and described source of trouble details, and in internal circular B module, the internal delivery fault message is given the A module registers then; The B module receives that triggering the E module after the information again revises and stop relevant panel " startups " the press button state of this module and be " stopping ", and other module is unaffected, and the user goes read failure information and processing by the C module; Process route: D-B-E-A-C;
(4) catastrophe failure:
During catastrophe failure, certain module generation catastrophe failure in the D module then sends information immediately, and the labor of registration catastrophe failure gives the A module, and D module photos and sending messages is given the B module then, and it is halted state that B module notice E module triggers " startup " button that stops on all panels; The A module receives that the catastrophe failure information of D module can carry out the catastrophe failure processing scheme immediately: promptly suddenly stop all motors operations, the passback thread withdraws from incident and gives the D module, and all internal thread of all modules of D inside modules withdraw from; Process route: D-A-C, D-B-E, circuit is the thread executed in parallel because of module;
Four, user's troubleshooting:
The user pushes for emergency earlier and resets, and the cancellation buzzer warning is opened C module dialog box again and checked fault message, handles accordingly according to the fault message situation;
(1) warning fault:
The user can temporarily need not handle, and this is just temporary transient reminds user, and equipment can be out of service because of current mechanism module " the hard interruption " in the near future, and at this moment the user is when operation or stop post processing;
(2) generic failure:
The generic failure that the user directly handles comprises I/O generic failure and logic generic failure, and presses relevant " startup " button on the device panel, recovers operation automatically; When not eliminating fault, then repeat the process of described step 3 and step 4;
(3) catastrophe failure:
The user must reinitialize described equipment, and initialization inside is opened up all logic function module threads of D inside modules again, success back and by described device panel start button recover complete machine automatically operation be that each module is moved automatically in the D module.
Beneficial effect of the present invention is as follows:
(1) adopts the abnormality processing soft, that hardware combines, improved the abnormality processing speed of equipment, and reduced the resources occupation rate of program controlled software;
(2) divide exception level, and the user flexibility processing mode is provided, used aposematic mechanism to improve operation hours.
Description of drawings
Fig. 1 is a system schematic of the present invention.
Fig. 2-4 is the partial design figure of E module of the present invention.
Fig. 5 is the schematic diagram of " the material loading tray is full " warning fault diagnosis example.
Fig. 6 is the abnormality processing flow chart of I/O generic failure.
One, in Fig. 1 and Fig. 5,1, the material loading module, 2, two pawl module, 3, printing module, 4, the stokehold module, 5, module behind the stove, 6, tablet, 7, feeding manipulator, 8, hard limited block, 9, tray, 10, the full sense switch of tray, 11, go up material level disc detection switch is arranged, A, A module, B, B module, C, C module, D, D module, E, E module.
Two, Fig. 6 is described as follows:
In Fig. 6, all abnormal informations that taken place of A module registers, all I/O signal conditions of B module monitors comprise I/O generic failure point failure situation, can make amendment to the output state of I/O in addition.The C module provides the abnormal show dialog box.The D module is all mechanism's active threads.The isolated module of dotted line among Fig. 6 all is to carry out simultaneously, and described dotted line is to call situation.
The specific embodiment
Specify abnormality eliminating method of the present invention below in conjunction with Fig. 1-6.
The concrete steps of abnormality eliminating method of the present invention are as follows:
One, set up the running background multithreading:
Set up following worker thread in this program process inside of described Control System of Printing Machine software:
A, registration and catastrophe failure processing threads unusually are called for short the A module;
B, I/O state and fault-signal monitoring thread are called for short the B module;
C, fault show thread, are called for short the C module;
D, function logic module thread are called for short the D module;
Described D module is all mechanism's active threads of described printing machine, comprises material loading module (1), these 5 threads of module (5) behind two pawl modules (2), printing module (3), stokehold module (4) and the stove;
The priority of described worker thread is identical and be lower than the UI thread of process, and promptly described worker thread is carried out on the backstage;
Two, use PLC to set up the independent unusual I/O processing module of hardware, be called for short the E module; Described E module uses PLC to handle all warning of I/O type and faults, and all warning points are together in parallel, and according to " start button " on the panel generic failure is pressed group and is together in parallel; The alarm address takes place then to jump to and triggers warning in arbitrary I/O warning fault; Arbitrary I/O generic failure takes place then to jump to the corresponding panel start button address and trigger command according to its place group, promptly by changing output I/O level its startup " is stopped ", and the operation of other mechanism is unaffected;
Three, mutual unusual generation of fault, equipment is reported to the police immediately:
At first fault is divided into 3 kinds of grades, promptly warns fault, generic failure and catastrophe failure: described warning fault refers to I/O warning fault; Described generic failure comprises I/O generic failure and logic generic failure;
(1) warning fault:
When the warning fault took place, the E module captured immediately, and the alarm user, the monitoring in real time of B module reads out current I/O and warns fault message, and the A module reads and register this warning fault message, and the user reads by the demonstration of C module, the D module is operation automatically still, does not shut down; After having served as certain hour, the I/O warning fault-signal in the B module has caused certain interior module service condition deficiency of D module and interrupt run; Process circuit: E-B-A-G and B-D;
For example: as " the material loading tray is full " takes place, this is after having been grabbed by manipulator because of a collection of tablet on the last tray, this tray is fed conveyer belt to the front transfer new tray of then coming in again, because of a last tray just takes getting last position of dish station, new tray then can not transmit when front transfer next time, but new tray last consignment of tablet (maximum 40) do not got yet, and then equipment still can run to this batch of material sheet and got.This is the arbitrary moment that can wait for that tablet is not taken away entirely in the new tray, or tablet is taken away entirely and can not be moved ahead and the material loading module stops to get again in the new tray, can move automatically after having got, and sees Fig. 5.
(2) I/O generic failure:
When the I/O generic failure takes place when, the E module captures immediately, and be " stopping " by the starting switch that relevant part body station is handled in I/O output, B module monitoring in real time reads out current I/O generic failure information, the A module reads and registers this information, each inside modules in the D module becomes " stopping " because of each organization switch signal service condition in the B module from " startup " at this moment, thereby makes relevant each mechanism module all out of service, promptly is equivalent to hard interruption; The user shows this abnormal show in " fault " hurdle of fault dialog box by C module invokes A module information; Process route: E-B-A-C and B-D, each route is the thread executed in parallel because of module;
For example: when " equipment material loading safety door is opened ", external bleed pressure were not enough etc., equipment alarm also switched to " stopping " pattern with all panel start buttons, and Fig. 6 is seen in the arrestment operation.
(3) logic generic failure in the D module:
The logic generic failure has taken place in a certain inside modules in the D module, and the then automatic soft interruption of this module by while circulation self-locking, report to the police and described source of trouble details, and in internal circular B module, the internal delivery fault message is given the A module registers then; The B module receives that triggering the E module after the information again revises and stop relevant panel " startups " the press button state of this module and be " stopping ", and other module is unaffected, and the user goes read failure information and processing by the C module; Process route: D-B-E-A-C;
For example: " the machinery in the casthouse hand is got the sheet failure ", illustrate that the specific station that the machinery in the casthouse hand is failed from the printing conveyer belt picks up tablet, the stokehold module mechanism quits work at this moment, and other module mechanism still can move.
(4) catastrophe failure:
During catastrophe failure, certain module generation catastrophe failure in the D module then sends information immediately, and the labor of registration catastrophe failure gives the A module, and D module photos and sending messages is given the B module then, and it is halted state that B module notice E module triggers " startup " button that stops on all panels; The A module receives that the catastrophe failure information of D module can carry out the catastrophe failure processing scheme immediately: promptly suddenly stop all motors operations, the passback thread withdraws from incident and gives the D module, and all internal thread of all modules of D inside modules withdraw from; Process route: D-A-C, D-B-E, circuit is the thread executed in parallel because of module;
For example: " printing table Y-axis motion failure: tracking error is overproof " then system motor all " suddenly stops ", and 5 big modules all withdraw from automatically in the D mechanism, and all panel start buttons all are in " stopping " state.
Four, user's troubleshooting:
The user pushes for emergency earlier and resets, and the cancellation buzzer warning is opened C module dialog box again and checked fault message, handles accordingly according to the fault message situation;
(1) warning fault:
The user can temporarily need not handle, and this is just temporary transient reminds user, and equipment can be out of service because of current mechanism module " the hard interruption " in the near future, and at this moment the user is when operation or stop post processing;
(2) generic failure:
The generic failure that the user directly handles comprises I/O generic failure and logic generic failure, and presses relevant " startup " button on the device panel, recovers operation automatically; When not eliminating fault, then repeat the process of described step 3 and described step 4;
(3) catastrophe failure:
The user must reinitialize described equipment, and initialization inside is opened up all logic function module threads of D inside modules again, success back and by described device panel start button recover complete machine automatically operation be that each module is moved automatically in the D module.

Claims (1)

1. soft, hardware combination multi-grade exception processing method in the full-automatic precise screen printer is characterized in that its step is as follows:
One, set up the running background multithreading:
Set up following worker thread in this program process inside of described Control System of Printing Machine software:
A, registration and catastrophe failure processing threads unusually are called for short the A module;
B, I/O state and fault-signal monitoring thread are called for short the B module;
C, fault show thread, are called for short the C module;
D, function logic module thread are called for short the D module;
Described D module is all mechanism's active threads of described printing machine, comprises material loading module (1), these 5 threads of module (5) behind two pawl modules (2), printing module (3), stokehold module (4) and the stove;
The priority of described worker thread is identical and be lower than the UI thread of process, and promptly described worker thread is carried out on the backstage;
Two, use PLC to set up the independent unusual I/O processing module of hardware, be called for short the E module; Described E module uses PLC to handle all warning of I/O type and faults, and all warning points are together in parallel, and according to " start button " on the panel generic failure is pressed group and is together in parallel; The alarm address takes place then to jump to and triggers warning in arbitrary I/O warning fault; Arbitrary I/O generic failure takes place then to jump to the corresponding panel start button address and trigger command according to its place group, promptly by changing output I/O level its startup " is stopped ", and the operation of other mechanism is unaffected;
Three, mutual unusual generation of fault, equipment is reported to the police immediately:
At first fault is divided into 3 kinds of grades, promptly warns fault, generic failure and catastrophe failure;
Described warning fault refers to I/O warning fault; Described generic failure comprises I/O generic failure and logic generic failure;
(1) warning fault:
When the warning fault took place, the E module captured immediately, and the alarm user, the monitoring in real time of B module reads out current I/O and warns fault message, and the A module reads and register this warning fault message, and the user reads by the demonstration of C module, the D module is operation automatically still, does not shut down; After having served as certain hour, the I/O warning fault-signal in the B module has caused certain interior module service condition deficiency of D module and interrupt run; Process circuit: E-B-A-G and B-D;
(2) I/O generic failure:
When the I/O generic failure takes place when, the E module captures immediately, and be " stopping " by the starting switch that relevant part body station is handled in I/O output, B module monitoring in real time reads out current I/O generic failure information, the A module reads and registers this information, each inside modules in the D module becomes " stopping " because of each organization switch signal service condition in the B module from " startup " at this moment, thereby makes relevant each mechanism module all out of service, promptly is equivalent to hard interruption; The user shows that by C module invokes A module information this is unusually in " fault " hurdle of fault dialog box; Process route: E-B-A-C and B-D, each route is the thread executed in parallel because of module;
(3) logic generic failure in the D module:
The logic generic failure has taken place in a certain inside modules in the D module, and the then automatic soft interruption of this module by while circulation self-locking, report to the police and described source of trouble details, and in internal circular B module, the internal delivery fault message is given the A module registers then; The B module receives that triggering the E module after the information again revises and stop relevant panel " startups " the press button state of this module and be " stopping ", and other module is unaffected, and the user goes read failure information and processing by the C module; Process route: D-B-E-A-C;
(4) catastrophe failure:
During catastrophe failure, certain module generation catastrophe failure in the D module then sends information immediately, and the labor of registration catastrophe failure gives the A module, and D module photos and sending messages is given the B module then, and it is halted state that B module notice E module triggers " startup " button that stops on all panels; The A module receives that the catastrophe failure information of D module can carry out the catastrophe failure processing scheme immediately: promptly suddenly stop all motors operations, the passback thread withdraws from incident and gives the D module, and all internal thread of all modules of D inside modules withdraw from; Process route: D-A-C, D-B-E, circuit is the thread executed in parallel because of module;
Four, user's troubleshooting:
The user pushes for emergency earlier and resets, and the cancellation buzzer warning is opened C module dialog box again and checked fault message, handles accordingly according to the fault message situation;
(1) warning fault:
The user can temporarily need not handle, and this is just temporary transient reminds user, and equipment can be out of service because of current mechanism module " the hard interruption " in the near future, and at this moment the user is when operation or stop post processing;
(2) generic failure:
The generic failure that the user directly handles comprises I/O generic failure and logic generic failure, and presses relevant " startup " button on the device panel, recovers operation automatically; When not eliminating fault, then repeat the process of described step 3 and step 4;
(3) catastrophe failure:
The user must reinitialize described equipment, and initialization inside is opened up all logic function module threads of D inside modules again, success back and by described device panel start button recover complete machine automatically operation be that each module is moved automatically in the D module.
CN201010130661.8A 2010-03-24 2010-03-24 Software and hardware combination multi-grade exception processing method of full-automatic precise screen printer Expired - Fee Related CN101804725B (en)

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CN102632705A (en) * 2011-02-09 2012-08-15 富士机械制造株式会社 Printing operation assisting device
CN103020772A (en) * 2012-12-12 2013-04-03 中国南方电网有限责任公司超高压输电公司广州局 Form management information system and form management method thereof
CN104752265A (en) * 2013-12-31 2015-07-01 北京北方微电子基地设备工艺研究中心有限责任公司 Helium leakage alarm processing method and system of semiconductor device
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CN114495316A (en) * 2022-02-15 2022-05-13 北京半导体专用设备研究所(中国电子科技集团公司第四十五研究所) Data monitoring method and device for precision motion platform

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CN102632705A (en) * 2011-02-09 2012-08-15 富士机械制造株式会社 Printing operation assisting device
CN103020772A (en) * 2012-12-12 2013-04-03 中国南方电网有限责任公司超高压输电公司广州局 Form management information system and form management method thereof
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CN114282177A (en) * 2022-03-07 2022-04-05 中体彩印务技术有限公司 Printing data security protection method and system
CN114282177B (en) * 2022-03-07 2022-05-20 中体彩印务技术有限公司 Printing data security protection method and system

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