CN101794626B - Real-time monitoring method of service status of inner wall material in nuclear fusion device - Google Patents
Real-time monitoring method of service status of inner wall material in nuclear fusion device Download PDFInfo
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- CN101794626B CN101794626B CN2010101099641A CN201010109964A CN101794626B CN 101794626 B CN101794626 B CN 101794626B CN 2010101099641 A CN2010101099641 A CN 2010101099641A CN 201010109964 A CN201010109964 A CN 201010109964A CN 101794626 B CN101794626 B CN 101794626B
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Abstract
The invention relates to a real-time monitoring method of service status of an inner wall material in a nuclear fusion device, comprising the following steps: (1) make a real-time monitoring probe which is a resonance composite element which is composed of a chip piezoelectric crystal, an inner wall material thin layer and an electrode; (2) set up a resonance frequency calibration system; (3) calibrate the corresponding relationship of the resonance frequency of the resonance composite element and the performance state change of an inner wall material sample; (4) arrange the resonance composite element on a location in the fusion device inner wall, which is needed to measure and connect the resonance composite element to a resonance frequency measuring meter by a wire to set up a real-time measuring system; (5) measure the real-time changing status of the resonance frequency along the acting process of a plasma and convert the real-time changing status of the resonance frequency to the real-time changing status of the inner wall material life equivalent according to the corresponding relationship which is calibrated by the step 3, thereby realizing the real-time monitoring of service status of the inner wall material in the nuclear fusion device.
Description
Technical field
The present invention relates to a kind of method that the performance state of material is monitored in real time, can be applicable to the service state of the inner-wall material of monitoring surface article on plasma body in the nuclear fusion device, belong to the nuclear energy field.
Background technology
Along with the consumption gradually of fossil energy, the mankind must search out new energy form.The resource of fusion fuel deuterium is very abundant, and reserves can be used several hundred million years for the mankind.Fusion energy resource will be one of human following topmost energy.
In the nuclear fusion device operational process, in the face of the inner-wall material of plasma will stand the various particle effects of fusionplasma, the performance state of understanding wall material at any time for guarantee fusion reaction normally carry out very important.Yet,, utilize the monitoring purpose of very difficult realizations such as sensing principle such as optics, magnetics to wall material because the structure of fusion facility inside is complicated, and exists strong magnetic field circumstance.Also there is not at present a kind of more feasible method that inner-wall material in the nuclear fusion device is monitored in real time to be seen in report.
Goal of the invention
Technology of the present invention is dealt with problems: overcome the deficiencies in the prior art, a kind of method of real-time of plasma inner-wall material faulted condition is provided, the real-time monitoring that the faulted condition of realization article on plasma body inner-wall material carries out.
Technical solution of the present invention is: the method for real-time of service status of inner wall material in a kind of nuclear fusion device, and performing step is as follows:
The first step, form real-time monitoring probe, it is the resonance composite component, described resonance composite component is to produce the element that resonance frequency changes along with the variation of wall material performance state, form by chip type piezoelectric crystal wafer, inner-wall material thin layer and electrode, the inner-wall material thin layer that compound last layer closely contacts with it on a surface of chip type piezoelectric crystal wafer, compound last two electrodes are gone up on another surface, form a resonance composite component;
Second step, form the resonance frequency calibration system, at first resonance composite component and inner-wall material sample are installed in the fusionplasma simulated environment simultaneously, allow resonance recombiner unit and inner-wall material sample stand same action of plasma simultaneously, two electrodes of resonance recombiner unit are connected to the resonance frequency measuring instrument via two leads respectively, so that measure the frequency change situation of resonance recombiner unit;
The 3rd step, the corresponding relation that the resonance frequency of calibration resonance composite component and the performance state of inner-wall material sample change, along with increase action time of plasma, the resonance frequency of resonance recombiner unit will change; Simultaneously, the variation of performance state also can take place in the inner-wall material sample under the effect of plasma, various performance index result of variations according to the inner-wall material sample, assess out the serviceable life of inner-wall material sample under this state, as the overall target of weighing the wall material service state, be defined as the life-span equivalent, then a numerical value corresponding relation set up in resonance frequency variation and life-span equivalent, change the foundation that is converted into inner-wall material life-span equivalent according to resonance frequency during as real-time monitoring;
The 4th step was installed in described resonance recombiner unit on the position that the needs of fusion facility inwall measure, and with lead the resonance recombiner unit was connected on the resonance frequency measuring instrument, formed real-time measurement system;
The 5th step, measure the real-time change situation of resonance frequency along with the action of plasma process, and be converted into the real-time change situation of inner-wall material life-span equivalent according to the corresponding relation of the 3rd step calibration, so just realized real-time monitoring to service status of inner wall material in the nuclear fusion device.
The principle of the invention is: piezoelectric crystal has intrinsic resonance frequency, and its natural resonance frequency changes along with the variation of adhering to situation on the elastic modulus of crystal and surface.Various damages that the elastic modulus of crystal itself can produce its along with plasma and changing, simultaneously, the inner-wall material thin layer of its surface attachment also can produce the variation of multiple factors such as structure, tissue and performance under action of plasma, and these change the resonance frequency that all can influence piezoelectric crystal.By the relation of the calibration in advance resonance frequency and the inner-wall material extent of damage, just can obtain the service state situation of change of inner-wall material in real time.
The present invention's advantage compared with prior art is: the related factor of the service state of fusion facility inner-wall material has a lot, as micromechanism, tissue, stress, hydrogen content, hydrogen bubble quantity and distribution, top layer peel off, dust and dirt ... Deng.But the life-span of inner-wall material depend on the synthesis result of these factors of influential its service state, the present invention utilizes this synthesis result, it is the comprehensive parameters that the life-span equivalent is used as weighing service status of inner wall material, change the combination property state of the inner-wall material exactly that is reflected by the resonance frequency of resonance composite component, by the resonance frequency variation of calibration resonance composite component and the corresponding relation of the combination property state of wall material, just can utilize the measurement resonance frequency to converse the life-span equivalent, realization is quantitatively measured in real time to service state, and its quantitative accuracy depends on the measuring accuracy of resonance frequency and the calibration accuracy of corresponding relation.
Description of drawings
Fig. 1 is the method for real-time principle schematic of nuclear fusion device mesospore material military service state of the present invention;
Fig. 2 is a real-time monitoring system mounting structure synoptic diagram.
Embodiment
As shown in Figure 1, specific implementation process of the present invention is as follows:
The first step, form the resonance composite component with chip type piezoelectric crystal wafer 1 and inner-wall material thin layer 2 and electrode 3, chip type piezoelectric crystal wafer 1 is in the face of compound one deck inner-wall material thin layer 2 on the surface of plasma direction, the thickness of described chip type piezoelectric crystal wafer 1 is 0.05 millimeter to 2 millimeters, and the thickness of inwall thin layer 2 is 50 nanometers to 100 micron; Inner-wall material thin layer 2 closely contacts with the surface of chip type piezoelectric crystal wafer 1, tighten to connect airtight on another surface of chip type piezoelectric crystal wafer 1 and touched two electrodes 3, two electrodes 3 are connected with two line conductors 4 respectively, and the other end of two line conductors 4 is connected to resonance frequency measuring instrument 5.
Second step, resonance composite component and inner-wall material sample are put into the action of plasma device simultaneously, allow plasma act on simultaneously on resonance composite component and the inner-wall material sample.Measure the frequency change value of resonance composite component in real time by the resonance frequency measuring instrument, at regular intervals the inner-wall material sample is taken out simultaneously and carry out various Performance Detection, go out life-span equivalent under this state of inner-wall material sample according to inner-wall material sample detection outcome evaluation, set up the numerical value corresponding tables of frequency change and life-span equivalent.
The foundation of " the numerical value corresponding tables " of described frequency change and life-span equivalent, at first from the resonance frequency measuring instrument, read certain resonance frequency numerical value constantly, and then go out the life-span equivalent according to the various Performance Detection data assessments of the inner-wall material sample in this moment by the inner-wall material professional.Like this, measure, obtain a series of frequency change numerical value and life-span equivalent numerical value respectively by a series of actual alignment, the numerical value of these two series is corresponding one by one, both formed the numerical value corresponding tables, promptly each frequency values correspondence a unique life-span equivalent value.
The 3rd step, as shown in Figure 2, on the inwall 6 that is installed in behind the resonance composite component 9 equipped water-cooled shielding cases 8 in the fusionplasma device,, pass fusion facility outer wall 7 by two line conductors 4, lead to resonance frequency measuring instrument 5.Measure the variation numerical value that resonance frequency produces along with action of plasma then.
In fusionplasma device operational process, plasma will act on resonance recombiner unit 9 and the inwall 6 simultaneously, the inner-wall material life-span will decay because of plasma damage, and the inner-wall material thin layer 2 of forming resonance recombiner unit 9 simultaneously also can produce damage and cause that resonance frequency changes.The resonance frequency of measuring changes numerical value, can directly read reading from the resonance frequency measuring instrument in the measuring system of the 3rd step composition.
The 4th step, with survey numerical value according to the aforementioned numerical value of setting up for showing to be converted into the life-span equivalent, service status of inner wall material that this life-span equivalent promptly real-time monitors quantification metric.
Measured resonance frequency numerical value to be converted into the life-span equivalent, at first go on foot the numerical value corresponding tables of being set up and find same resonance frequency numerical value, the numerical result that the life-span equivalent value of this numerical value correspondence promptly will convert in the table from second.
Further describe detailed process of the present invention below by an embodiment:
Then resonance composite component and another piece tungsten inner-wall material sample are together put into the straight line plasma producing apparatus, allow both surface side by side towards the direction of plasma source, connect two argent electrodes respectively with two line conductors, lead to the resonance frequency measuring instrument.
Start straight line plasma source and resonance frequency measuring instrument, the record resonance frequency is to the change curve numerical value of time.Shut down every 2 hours, tungsten inner-wall material sample is taken out, organize, structure and correlated performance measurements; Measurement result is gone out serviceable life under this state according to the use criterion evaluation of tungsten inner-wall material, note as the life-span equivalent value; Calibration test continues record always, till the inner-wall material sample fails; At last that each is corresponding constantly life-span equivalent value is mapped with the frequency numerical value with the moment, forms the numerical value corresponding tables of resonance frequency and life-span equivalent.
Below be a hop count value corresponding tables by 50 data points of calibration process foundation:
| Resonance frequency (MHz) | Life-span equivalent (hour) | Resonance frequency (MHz) | Life-span equivalent (hour) | Resonance frequency (MHz) | Life-span equivalent (hour) | Resonance frequency (MHz) | Life-span equivalent (hour) | Resonance frequency (MHz) | Life-span equivalent (hour) |
| 2.1025 | 3536.41 | 2.1015 | 3533.04 | 2.1005 | 3529.68 | 2.0995 | 3526.32 | 2.0985 | 3522.96 |
| 2.1024 | 3536.07 | 2.1014 | 3532.71 | 2.1004 | 3529.34 | 2.0994 | 3525.98 | 2.0984 | 3522.63 |
| 2.1023 | 3535.73 | 2.1013 | 3532.37 | 2.1003 | 3529.01 | 2.0993 | 3525.65 | 2.0983 | 3522.29 |
| 2.1022 | 3535.40 | 2.1012 | 3532.03 | 2.1002 | 3528.67 | 2.0992 | 3525.31 | 2.0982 | 3521.95 |
| 2.1021 | 3535.06 | 2.1011 | 3531.70 | 2.1001 | 3528.34 | 2.0991 | 3524.98 | 2.0981 | 3521.62 |
| 2.1020 | 3534.72 | 2.1010 | 3531.36 | 2.1000 | 3528.00 | 2.0990 | 3524.64 | 2.0980 | 3521.28 |
| 2.1019 | 3534.39 | 2.1009 | 3531.02 | 2.0999 | 3527.66 | 2.0989 | 3524.30 | 2.0979 | 3520.95 |
| 2.1018 | 3534.05 | 2.1008 | 3530.69 | 2.0998 | 3527.33 | 2.0988 | 3523.97 | 2.0978 | 3520.61 |
| 2.1017 | 3533.71 | 2.1007 | 3530.35 | 2.0997 | 3526.99 | 2.0987 | 3523.63 | 2.0977 | 3520.28 |
| 2.1016 | 3533.38 | 2.1006 | 3530.02 | 2.0996 | 3526.66 | 2.0986 | 3523.30 | 2.0976 | 3519.94 |
The resonance composite component is installed in adopts tungsten to do on the fusionplasma device inwall of inner-wall material, draw with lead and be connected on the resonance frequency measuring unit.
In the fusion facility operational process, start the resonance frequency measuring instrument.Earlier read original resonance frequency from resonance measurement, suppose that original frequency is 2.1025 megahertzes (MHz), then from the numerical value corresponding tables that described calibration in advance is set up, we can find corresponding initial lifetime equivalent is 3536.41 hours (hour).In fusion facility continuation operational process subsequently, if want to know at any time certain life-span equivalent value constantly, then can be from the resonance frequency measuring instrument read frequency reading in real time, its frequency readings is converted into the life-span equivalent value according to the numerical value corresponding tables of being calibrated, thereby obtains the measurement numerical value of the service state quantification of inner-wall material in real time.Suppose that the reading that a certain moment reads from the resonance frequency measuring instrument is 2.0977MHz, then can to find from the numerical value corresponding tables be 3520.28 hours to the life-span equivalent value in this moment.
The content that is not described in detail in the instructions of the present invention belongs to this area professional and technical personnel's known prior art.
Claims (3)
1. the method for real-time of service status of inner wall material in the nuclear fusion device is characterized in that step is as follows:
The first step, form real-time monitoring probe, it is the resonance composite component, described resonance composite component is to produce the element that resonance frequency changes along with the variation of wall material performance state, form by chip type piezoelectric crystal wafer, inner-wall material thin layer and electrode, the inner-wall material thin layer that compound last layer closely contacts with it on a surface of chip type piezoelectric crystal wafer, compound last two electrodes are gone up on another surface, form a resonance composite component;
Second step, form the resonance frequency calibration system, at first resonance composite component and inner-wall material sample are installed in the fusionplasma simulated environment simultaneously, allow resonance composite component and inner-wall material sample stand same action of plasma simultaneously, two electrodes of resonance composite component are connected to the resonance frequency measuring instrument via two line conductors respectively, so that measure the frequency change situation of resonance composite component;
The 3rd step, the corresponding relation that the resonance frequency of calibration resonance composite component and the performance state of inner-wall material sample change, along with increase action time of plasma, the resonance frequency of resonance composite component will change; Simultaneously, the variation of performance state also can take place in the inner-wall material sample under the effect of plasma, various performance index result of variations according to the inner-wall material sample, assess out the serviceable life of inner-wall material sample under this state, as the overall target of weighing service status of inner wall material, be defined as the life-span equivalent, then a numerical value corresponding relation set up in resonance frequency variation and life-span equivalent, change the foundation that is converted into inner-wall material life-span equivalent according to resonance frequency during as real-time monitoring;
The 4th step was installed in described resonance composite component on the position that the fusion facility inwall need measure, and with lead the resonance composite component was connected on the resonance frequency measuring instrument, formed real-time measurement system;
The 5th step, measure the real-time change situation of resonance frequency along with the action of plasma process, and be converted into the real-time change situation of inner-wall material life-span equivalent according to the corresponding relation of the 3rd step calibration, so just realized real-time monitoring to service status of inner wall material in the nuclear fusion device.
2. the method for real-time of service status of inner wall material in the nuclear fusion device according to claim 1 is characterized in that: the thickness of described inwall thin layer is 50 nanometers to 100 micron.
3. the method for real-time of service status of inner wall material in the nuclear fusion device according to claim 1 is characterized in that: the thickness of described chip type piezoelectric crystal wafer is 0.05 millimeter to 2 millimeters.
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| KR20180033995A (en) * | 2016-09-27 | 2018-04-04 | 삼성전자주식회사 | Monitoring unit, plasma etching apparatus including the same, and method forfabricating semiconductor device using the same |
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Inventor after: Duan Yafei Inventor after: Wang Bo Inventor after: Zhang Ying Inventor after: Lv Guanghong Inventor before: Wang Bo Inventor before: Duan Yafei Inventor before: Zhang Ying Inventor before: Lv Guanghong |
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Free format text: CORRECT: INVENTOR; FROM: WANG BO DUAN YAFEI ZHANG YING LV GUANGHONG TO: DUAN YAFEI WANG BO ZHANG YING LV GUANGHONG |
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