CN101793598A - Target generator for ultraviolet transfer function measuring instruments - Google Patents
Target generator for ultraviolet transfer function measuring instruments Download PDFInfo
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- CN101793598A CN101793598A CN201010121812A CN201010121812A CN101793598A CN 101793598 A CN101793598 A CN 101793598A CN 201010121812 A CN201010121812 A CN 201010121812A CN 201010121812 A CN201010121812 A CN 201010121812A CN 101793598 A CN101793598 A CN 101793598A
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- target
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- transfer function
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Abstract
The invention discloses a target generator for ultraviolet transfer function measuring instruments, which comprises an optical collimator, an ultraviolet light source, a focusing optical system, optical filters, a chopper and a plurality of groups of slits mounted on a rotary wheel, each group of slits include two slits with the same width, moreover, the length direction of one of two slit targets is consistent with the radial direction of the rotary wheel, the other slit target is perpendicular to the radial direction of the rotary wheel, and by rotating the rotary wheel, the selected silt targets can be positioned in the light path of the target generator. The light beam emitted by the ultraviolet light source is focused by the focusing optical system and gated by the optical filter, and is then imaged on one of the slit targets, and the imaged light beam of the slit target is modulated by the chopper and then collimated by the optical collimator into a parallel light beam. The invention solves the problem on how to provide ultraviolet targets for ultraviolet transfer function measuring instruments, and meanwhile, the invention is also characterized by spectral coverage selectivity, simple operation, reliable performance and the like, and can meet the demand on different testing precisions.
Description
Technical field
The present invention relates to optical metrology and Photoelectric Detection field, relate in particular to the target generator that a kind of digital Fourier transform method is measured the ultraviolet optics ssystem transfer function.
Background technology
The optical transfer function that target generator is mainly used in optical system produces the infinite distance measured target with certain feature when measuring, and as spectral signature and size characteristic, its purposes is very extensive.Disclose a kind of IR target generator as Chinese patent ZL01100958.6, can realize producing the function of infrared elongated target, and be used to measure the optical parametric of infrared convergence optical system, especially measured the optical transfer function of infrared optical system.This IR target generator mainly is made of self luminous tinsel, chopper, scanning mechanism and orientation adjustment mechanism, can produce the target of 0.8 μ m～12 μ m infrared spectrums, target is a nickel-chrome filament target, the filament width direction is of a size of 127 μ m, under the drive of motor, can also realize that the orientation of meridian and sagitta of arc direction is selected.But its weak point is: (1) light source is that tinsel is luminous, and the overall optical spectral limit is only in 0.8 μ m～12 mu m wavebands and can not select; (2) target azimuth selection mechanism more complicated; (3) the target filament diameter is a fixed value, and usable range is subjected to certain limitation, and measuring accuracy is not high enough.
Ultraviolet optics is used widely in space exploration and military field, has opened up the new direction of photoelectron development.The ultraviolet optics transport function is to estimate the call parameter of ultraviolet optics system imaging quality, is the overall target of ultraviolet optics system space resolution characteristic and energy-handling capability, important consideration when being optical design.Because ultraviolet light is shorter than visible wavelength, to the ultraviolet optics systematic survey time, need to produce the small-sized elongated target of ultraviolet, tinsel is luminous can't to produce the ultraviolet spectrum target but select for use.Owing to the refractive index of optical material and the function that abbe number is wavelength, wavelength difference, refractive index are also just different in addition.So when analyzing optical system imaging quality, also need to select different spectrum segment to analyze.Also can't make the ultraviolet target generator that satisfies above demand at present with existing means.
Summary of the invention
The technical problem to be solved in the present invention is that a kind of target generator that is applicable to ultraviolet transfer function measuring instruments is provided.
For solving the problems of the technologies described above, target generator provided by the invention comprises optics collimator and is installed in ultraviolet source, convergence optical system, a plurality of optical filter, target slit assembly and chopper in the housing; Described ultraviolet source is selected deuterium lamp for use; Described target slit assembly contains runner, 1～2 circular hole target and organizes slit more, every group of slit contains two slit targets that width is identical, described circular hole target and slit target are installed on same the circumference of described runner card, wherein, the length direction of a slit target and runner is radially consistent in every group of slit, the length direction of another slit target is radially vertical with runner, can make selected slit target be arranged in the light path of described target generator by rotating wheel; Described chopper is close to the slit target; The light beam that described ultraviolet source sends is imaged on the center of one of them slit target behind convergence optical system convergence and optical filter gating, the imaging beam of slit target is collimated into parallel beam through described optics collimator again after the chopper modulation.
According to the present invention, described target slit assembly [2] contains the dimension width of three groups of slits and each slit target in 10 μ m～200 mu m ranges.
Beneficial effect of the present invention is embodied in the following aspects.
(1) in ultraviolet target generator of the present invention, adopt deuterium lamp to do radiation source, its spectral range can cover ultraviolet band, thereby provides technical support for the optical transfer function of measuring the ultraviolet optics system.
(2) in the present invention, the slit target contains the different slit of many group width dimensions, thereby can satisfy the demand of different measuring accuracies; In addition, many group slit targets are installed on the same circumference of a runner, when adopting ultraviolet transfer function measuring instruments that the ultraviolet optics system is carried out meridian and sagitta of arc orientation measurement, can finish the selection of slit target according to testing requirement by stirring runner, therefore, simple to operate and dependable performance.
(3) in the present invention, be provided with a plurality of optical filters,, can carry out gating the ultraviolet radiation of different spectral coverage by selecting corresponding optical filter, thereby, can make ultraviolet transfer function measuring instruments realize the picture element of ultraviolet optics system different spectral coverage is measured and estimated.
Description of drawings
Fig. 1 is the composition synoptic diagram of target generator for ultraviolet transfer function measuring instruments of the present invention.
Fig. 2 is the light path synoptic diagram of target generator.
Embodiment
The present invention is described in further detail below in conjunction with accompanying drawing and preferred embodiment.
Referring to Fig. 1, the target generator of the preferred embodiment of the present invention is made up of chopper 1, target slit assembly 2, optical filter 3, convergence optical system 4, ultraviolet source 5, cooling fan 6, supporting component, housing 7 and optics collimator 8.Ultraviolet source 5 is for radiation source and select deuterium lamp for use, is 260nm～400nm in its spectral range of ultraviolet band.It is the monolithic biconvex positive lens of Φ 30mm that convergence optical system 4 is selected bore for use.Ultraviolet source 5 and convergence optical system are installed in the housing 7 by supporting component.Optical filter 3 is installed in the jack on the housing 7 for the plug part, and optical filter 3 can have multiple choices, can insert one, also can insert a plurality of, so that test spectral is selected.In the present embodiment, optical filter 3 is selected two, first is a narrow band pass filter, spectral centroid wavelength 300nm, half-band width 20nm, according to the calculating of optical design software, the optical transfer function value in the general ultraviolet camera lens half-band width 20nm is constant substantially, so this narrow band pass filter is used at 300nm ultraviolet transfer function measuring instruments being proofreaied and correct; Second is bandpass filter, and bandwidth is 140nm, is the spectral measurement ranges according to 260nm～400nm, again according to the radiation source curve of spectrum, and the spectrum correction optical filter that the spectral response curve of the used ultraviolet detector of ultraviolet transfer function measuring instruments comprehensively comes out.The bore of optical filter 3 is identical with the bore of convergence optical system 4, to guarantee passing through the light beam of convergence optical system 4 also all by optical filter 3.Target slit assembly 2 contains runner, two circular hole targets and three slot set, and the runner center has the through hole that is evenly equipped with eight Φ 25mm on the card of rotating shaft and runner on same circumference.The diameter of two circular hole targets is respectively Φ 5mm and Φ 10mm and is installed in two through holes on the runner; Two circular hole targets are used for the collimation adjustment of light path.Every group of slit comprises two slit targets that size is the same, and the dimension width of slit target is in 10 μ m～200 mu m ranges, and in the present embodiment, the dimension width of three groups of slit targets is respectively: 20 μ m, 50 μ m and 100 μ m.Two slit targets of every group of slit are installed in two adjacent through holes on the runner, and wherein, the length direction of a slit target is radially consistent with runner, and the length direction of another slit target is radially vertical with runner.The rotating shaft of runner is connected on supporting component and the housing 7 by bearing, and one section arc limit on the runner by rotating wheel, can select to test needed slit target by exposing in the slotted hole on the housing 7.Six slit targets and two circular hole targets all adopt laser boring technology to make on metal substrate, and metal substrate is fixed on round metal by the metal trim ring and puts, the round metal cover again by screw retention on runner.Chopper 1 is installed on the housing 7 and is close to the slit target, and chopper 1 is by motor-driven, and its chopping frequency is 200hz.Chopper 1 is positioned at light by outgoing one side behind the slit, so that the light that passes through is carried out spatial modulation, plays the effect that suppresses noise.Optics collimator 8 adopts the off-axis parabolic mirror of being made by K4 glass, and in the best was used bore Φ 150mm, surface figure accuracy PV value was less than λ/15, and the RMS value is less than λ/70, and is coated with the ultraviolet highly reflecting films, its reflectivity 〉=92%.High reflectance and high surface figure accuracy can either reduce the loss of luminous energy, avoid introducing in optical system for testing measuring error again.
According to shown in Figure 2, the light beam that ultraviolet source 5 sends is behind convergence optical system 4 convergences and optical filter 3 gatings, be imaged on the center of one of them slit target of target slit assembly 2, the imaging beam of slit target again through optics collimator 8 reflections, finally forms parallel beam and shines in the tested ultraviolet optics system after chopper 1 modulation.After the outgoing beam of tested ultraviolet optics system was received by the UV image analyzer, control and the disposal system delivered in the ultraviolet transfer function measuring instruments were handled, thereby obtained the optical transfer function value of tested ultraviolet optics system.
Claims (2)
1. target generator for ultraviolet transfer function measuring instruments is characterized in that: it comprises optics collimator [8] and is installed in ultraviolet source [5], convergence optical system [4], a plurality of optical filter [3], target slit assembly [2] and chopper [1] in the housing [7]; Described ultraviolet source [5] is selected deuterium lamp for use; Described target slit assembly [2] contains runner, 1～2 circular hole target and organizes slit more, every group of slit contains two slit targets that width is identical, described circular hole target and slit target are installed on same the circumference of described runner card, wherein, the length direction of a slit target and runner is radially consistent in every group of slit, the length direction of another slit target is radially vertical with runner, can make selected slit target be arranged in the light path of described target generator by rotating wheel; Described chopper [1] is close to the slit target; The light beam that described ultraviolet source [5] sends is behind convergence optical system [4] convergence and optical filter [3] gating, be imaged on the center of one of them slit target, the imaging beam of slit target is collimated into parallel beam through described optics collimator [8] again after described chopper [1] modulation.
2. target generator for ultraviolet transfer function measuring instruments according to claim 1 is characterized in that: described target slit assembly [2] contains the dimension width of three groups of slits and each slit target in 10 μ m～200 mu m ranges.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010121812A CN101793598A (en) | 2010-03-10 | 2010-03-10 | Target generator for ultraviolet transfer function measuring instruments |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010121812A CN101793598A (en) | 2010-03-10 | 2010-03-10 | Target generator for ultraviolet transfer function measuring instruments |
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| CN101793598A true CN101793598A (en) | 2010-08-04 |
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| CN201010121812A Pending CN101793598A (en) | 2010-03-10 | 2010-03-10 | Target generator for ultraviolet transfer function measuring instruments |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102288391A (en) * | 2011-07-22 | 2011-12-21 | 苏州大学 | Spectral target generator for measuring optical transfer function |
| CN114486197A (en) * | 2022-01-27 | 2022-05-13 | 中国科学院长春光学精密机械与物理研究所 | Target generator suitable for optical lens transfer function detection |
-
2010
- 2010-03-10 CN CN201010121812A patent/CN101793598A/en active Pending
Non-Patent Citations (3)
| Title |
|---|
| 《OptiSpheric AutoFocus通用途光学测量***__自动聚焦型操作手册》 20050228 北京全欧光学检测仪器有限公司 OptiSpheric AutoFocus通用途光学测量***__自动聚焦型操作手册 第13-15页 1-2 , 1 * |
| 《仪器仪表学报》 19900228 林逸群 等 一种新型的OTF测试仪 第3节、图2 1-2 第11卷, 第1期 2 * |
| 《仪器仪表学报》 19930531 向才新 等 "传递函数在线快速测定新方法" 第134页第3段、图1 1－2 第14卷, 第2期 2 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102288391A (en) * | 2011-07-22 | 2011-12-21 | 苏州大学 | Spectral target generator for measuring optical transfer function |
| CN102288391B (en) * | 2011-07-22 | 2013-03-27 | 苏州大学 | Spectral target generator for measuring optical transfer function |
| CN114486197A (en) * | 2022-01-27 | 2022-05-13 | 中国科学院长春光学精密机械与物理研究所 | Target generator suitable for optical lens transfer function detection |
| CN114486197B (en) * | 2022-01-27 | 2024-03-12 | 中国科学院长春光学精密机械与物理研究所 | Target generator suitable for optical lens transfer function detection |
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Application publication date: 20100804 |