CN101793395A - Coaxial high-temperature cofiring ceramic microburner and processing mode thereof - Google Patents

Coaxial high-temperature cofiring ceramic microburner and processing mode thereof Download PDF

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Publication number
CN101793395A
CN101793395A CN 201010122126 CN201010122126A CN101793395A CN 101793395 A CN101793395 A CN 101793395A CN 201010122126 CN201010122126 CN 201010122126 CN 201010122126 A CN201010122126 A CN 201010122126A CN 101793395 A CN101793395 A CN 101793395A
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head
microburner
micro
htcc
burner
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CN101793395B (en
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蔡国飙
孙威
理查德·叶特
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Beihang University
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Beihang University
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Abstract

The invention relates to a coaxial high-temperature cofiring ceramic microburner and a processing method thereof. Unique processing materials and processing technology realize the processing of a middle micro size coaxial microburner with a complex inner cavity structure and the function of mechanical and electrical integration according to specific processes. Combined with the special design and the structural concept via many times of test verification, the microburner can realize reliable ignition and continuous stable burning of 'hydrogen/oxygen' under small flow condition, can also be used as a micro energy generating device to be applied in the micro actuation field or the aerospace boost field, and has the potential of industrialized large-scale production due to the characteristics of the processing method.

Description

A kind of HTCC microburner and processing mode thereof of coaxial-type
[technical field]
The present invention relates to a kind of microburner device and processing method thereof, can be used as small energy generating apparatus and be applied to little actuating field or the little propelling of space flight field, and possess the potentiality that large-scale industrialization is produced based on the HTCC process technology.
[background technology]
In recent years, along with the lifting of the research temperature of small-sized power generator, also more and more about the research of burning, reaction and application thereof under the middle minute yardstick condition.Yet, when characteristic size narrows down to a certain degree (millimeter magnitude), adopts traditional processing mode carry out small burner or reactor to add trade union relatively more difficult.Though the electric spark special process can reach than high manufacturing accuracy, but its rapidoprint only is confined to metal or semiconductor, and can't process comparatively complicated internal cavity structure, also can't embed the conduction subsystem therein, be unfavorable for the enforcement of electromechanical integration.Integrated circuit process technology based on technique for processing silicon chip is having tradition processing incomparable advantage aspect electromechanical integration and the large-scale processing, but the tolerant temperature of the material that it adopted institute very low (<500K), can't adapt to the requirement of continuous firing under the micro-burner hot conditions.On the other hand, because the space is narrow and small, the reliable ignition of the burner under the middle minute yardstick condition itself also is a difficult problem.
[summary of the invention]
For the microburner of minute yardstick in overcoming in microfabrication, electromechanical integration, igniting and keep many-sided restriction such as burning.The invention provides a kind of micro-burner device based on the HTCC process technology, this device can be realized the reliable ignition and the continual and steady burning of " hydrogen/oxygen " under the small flow rate, can satisfy microfabrication again, electromechanical integration, and the requirement of industrial large-scale processing convenience aspect.
The technical solution adopted for the present invention to solve the technical problems is: a kind of HTCC microburner of coaxial-type, comprise head, body portion, orifice plate portion, and three parts are arranged in order by from top to bottom order.Wherein head comprises embedded igniter and ejector filler two critical components again, embedded igniter is made of two platinum silks that embed the default cavity of head, wire one end center bottom position from the head stretches out distance about 1.5mm to body portion direction, two wire mutual spacings are about 2mm, the other end respectively from the head sidewall stretch out, reserve the above length of 5mm.The head ejector filler is a kind of structure of two-phase cut, comprise as the medium pore of a combustion chamber part and two and be symmetrically distributed in medium pore both sides and Way out and the cavity tangent respectively with the medium pore inwall, these two cavities link to each other with " fuel-oxidant " feeding pipe by the head built-in channel.Body portion combustion chamber and orifice plate portion steam vent are the endoporus of cylindrical shape, and the combustion chamber diameter is identical with the ejector filler medium pore, is of a size of a millimeter magnitude, and the steam vent diameter is less than the combustion chamber diameter.The ejector filler medium pore, the combustion chamber, the steam vent three is coaxial.Burner body portion's diameter and orifice plate portion steam vent diameter can be regulated in process according to specific requirement.
HTCC sheet process technology is adopted in the processing of this burner, and its raw material is the HTCC sheet of 100 μ m thickness, can process variform interior cavity thereon by laser or numerical control press.According to the overall construction design scheme, these refractory ceramics sheets that possess identical or different interior cavity characteristic are arranged in turn, " honey-water " solution by mass fraction 75% bonds together each layer potsherd again, can obtain needed internal cavity.Bonding order is by from bottom to up, and promptly the order of " orifice plate portion-body portion-head " is carried out, and embeds the platinum silk in the process of bonding head on request.Need to guarantee the relative position of each interlayer in the bonding process, behind bonding the finishing the burner part is downcut from the substrate of integral body by location-plate.The burner semi-finished product are put into high temperature furnace fire according to the roasting process of HTCC, each layer potsherd will be combined as a whole and finally obtain needed coaxial-type HTCC micro-burner.
The invention has the beneficial effects as follows, utilize unique rapidoprint, processing technology and organization plan, realize possessing the processing of coaxial-type micro-burner of the middle minute yardstick of complicated inner cavity body structure and electromechanical integration function, and in this burner, realized the reliable ignition and the smooth combustion of " hydrogen-oxygen ".The present invention can provide direct technical support for the development of microactuator or space flight microthrust device, and owing to the characteristics of its processing method possess the potentiality that large-scale industrialization is produced.
[description of drawings]
Below in conjunction with accompanying drawing the present invention is further specified.
Fig. 1 comprise 3 width of cloth figure be micro-burner among the present invention perspective structure each to schematic diagram.
Shown in Fig. 1 .1, this burner comprises: head (1), body portion (2), orifice plate portion (3), three parts.Head comprises again: embedded metal silk igniter (1-1), the two-phase cut ejector filler (1-2) that is symmetrical distribution, capillary metal tube (1-3), wait key component.
Fig. 2 comprises the detailed work flow schematic diagram that 15 width of cloth subgraphs are these micro-burners.
[specific embodiment]
Further specify below in conjunction with the occupation mode and the concrete manufacturing procedure of accompanying drawing micro-burner among the present invention.
In Fig. 1 .1, two capillary metal tubes (1-3) link to each other with the oxygen feeding pipe with the hydrogen feeding pipe respectively.The revealed section that embedded metal silk igniter (1-1) is reserved in the burner both sides is connected with positive and negative two electrodes of priming supply respectively.The air-supplying valve of opening oxygen road and gas circuit during work feeds hydrogen and oxygen, and total gas flow rate is selected by burner body portion volume size, and " hydrogen-oxygen " equivalent mixing ratio can be regulated arbitrarily at 0.1~1.Hydrogen and oxygen will flow into and blending by tangential from the combustion chamber side wall outlet by inner cavity and two-phase cut ejector filler (1-2) respectively.Treat an ignition pulse voltage to be provided for the wire igniter by priming supply behind the stability of flow, the two poles of the earth that igniter stretches into the combustion chamber part will produce electric spark owing to discharge process, thereby the carrying out that provides hydrogen and oxygen can keep combustion reaction in the combustion chamber is provided the mixture of ignite hydrogen and oxygen.High-temperature combustion product can be used as the power source of small actuator or microthrust device by the ejection of bottom orifice plate.
The concrete work flow of this micro-burner can be referring to shown in Figure 2, and processing sequence is followed successively by:
2.1, the processing of micro-burner different piece HTCC sheet inner chamber body;
2.2, utilize the location and installation of finishing the HTCC sheet with the metal location-plate of four reference columns;
2.3, smear " honey-water " mixed solution of 75% to the common burning porcelain sheet that fixes;
2.4 the stack and the bonding process of repetition HTCC sheet are finished the adhesion of orifice plate part by design thickness;
2.5, on the orifice plate part, continue stack, finish the adhesion of body portion and ejector filler successively by design thickness;
2.6, on the ejector filler layer, continue stack, finish the adhesion of igniter cavity part and ejector filler;
2.7, in the igniter cavity, embed preprepared wire by designing requirement;
2.8 adhesion top layer common burning porcelain sheet on the igniter layer covers cavity and wire in the igniter;
2.9, on the good common burning porcelain plate of adhesion, add a cover metal cover board;
2.10, give bonding common burning porcelain plate pressurization, make each potsherd bonding tightr;
2.11, from the common burning porcelain plate, micro-burner is partly cut out;
2.12, the micro-burner semi-finished product are put into the high temperature kiln roasting, make each layer potsherd at high temperature merge;
2.13, take out the micro-burner that roasting finishes, reserve the place, aperture at the top capillary metal tube is installed;
2.14, use high-temp glue to finish the sealing in capillary connecting portion and igniting wire exit, side;
2.15, wait for the high-temp glue drying, obtain the micro-burner finished product.

Claims (4)

1. the HTCC microburner of a coaxial-type comprises head, body portion, orifice plate portion, and three parts are arranged in order by from top to bottom order.It is characterized in that: head comprises embedded igniter and ejector filler two critical components, and apical head embeds two minute metallic pipes, links to each other respectively with ejector filler two cavities by the head built-in channel.Body portion combustion chamber and orifice plate portion steam vent are the endoporus of cylindrical shape, and the combustion chamber diameter is identical with the ejector filler medium pore, is of a size of a millimeter magnitude, and the steam vent diameter is less than the combustion chamber diameter.The ejector filler medium pore, the combustion chamber, the steam vent three is coaxial.
2. the HTCC microburner of a kind of coaxial-type according to claim 1, it is characterized in that: the embedded igniter of head is made of two platinum silks that embed the prefabricated cavity of head, wire one end center bottom position from the head stretches out distance about 1.5mm to the combustion chamber direction, two wire mutual spacings are about 2mm, the other end respectively from the head sidewall stretch out, reserve the above length of 5mm.
3. the HTCC microburner of a kind of coaxial-type according to claim 1, it is characterized in that: the head ejector filler is a kind of structure of two-phase cut, comprise as the medium pore of a combustion chamber part and two and be symmetrically distributed in medium pore both sides and Way out and the cavity tangent respectively with the medium pore inwall, these two cavities link to each other with " fuel-oxidant " feeding pipe by the head built-in channel.
4. the detailed processing method of the HTCC microburner of coaxial-type according to claim 1, the operating procedure of this method is as follows:
The 1st step, the processing of micro-burner different piece HTCC sheet inner chamber body;
In the 2nd step, utilize the location and installation of finishing the HTCC sheet with the metal location-plate of four reference columns;
In the 3rd step, smear " honey-water " mixed solution of 75% to the common burning porcelain sheet that fixes;
In the 4th step, the stack and the bonding process of repetition HTCC sheet are finished the adhesion of orifice plate part by design thickness;
The 5th step, on the orifice plate part, continue stack, finish the adhesion of body portion and ejector filler successively by design thickness;
The 6th step, on the ejector filler layer, continue stack, finish the adhesion of igniter cavity part and ejector filler;
In the 7th step, in the igniter cavity, embed preprepared wire by designing requirement;
In the 8th step, adhesion top layer common burning porcelain sheet on the igniter layer covers cavity and wire in the igniter;
In the 9th step, on the good common burning porcelain plate of adhesion, add a cover metal cover board;
The 10th step, give bonding common burning porcelain plate pressurization, make each potsherd bonding tightr;
In the 11st step, from the common burning porcelain plate, micro-burner is partly cut out;
The 12nd step, the micro-burner semi-finished product are put into the high temperature kiln roasting, make each layer potsherd merge and form integral body;
The 13rd step, take out the micro-burner that roasting finishes, reserve the place, aperture at the top capillary metal tube is installed;
In the 14th step, use high-temp glue to finish the sealing in capillary connecting portion and igniting wire exit, side;
The 15th step, wait for the high-temp glue drying, obtain the micro-burner finished product.
CN2010101221268A 2010-03-10 2010-03-10 Coaxial high-temperature cofiring ceramic microburner and processing mode thereof Expired - Fee Related CN101793395B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106196171A (en) * 2016-08-26 2016-12-07 北京航天动力研究所 A kind of gasifier section

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE9111888U1 (en) * 1991-09-24 1991-12-12 Rothenberger Werkzeuge-Maschinen GmbH, 6233 Kelkheim Micro burner with a plug connection between a burner tube and a handle
US20070007257A1 (en) * 2005-07-05 2007-01-11 Uhm Han S Microwave plasma burner
KR100709386B1 (en) * 2006-09-28 2007-04-20 한국기계연구원 A micro cyclone combustor with the swirl air-issuing tubes

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE9111888U1 (en) * 1991-09-24 1991-12-12 Rothenberger Werkzeuge-Maschinen GmbH, 6233 Kelkheim Micro burner with a plug connection between a burner tube and a handle
US20070007257A1 (en) * 2005-07-05 2007-01-11 Uhm Han S Microwave plasma burner
KR100709386B1 (en) * 2006-09-28 2007-04-20 한국기계연구원 A micro cyclone combustor with the swirl air-issuing tubes

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
《Energy Conversion and Management》 20070531 H.L Cao and J.L. Xu Thermal performance of a micro-combustor for micro-gas turbine system 第1569-1578页 1-4 第48卷, 第5期 2 *
《微细加工技术》 20080229 闫云飞等 基于MEMS技术的微型燃烧器的特性分析与设计 第49-53页 1-4 , 第1期 2 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106196171A (en) * 2016-08-26 2016-12-07 北京航天动力研究所 A kind of gasifier section
CN106196171B (en) * 2016-08-26 2019-04-09 北京航天动力研究所 A kind of gasifier section

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