CN101789360A - Controllable bidirectional cross circulation ventilation device and operation method - Google Patents
Controllable bidirectional cross circulation ventilation device and operation method Download PDFInfo
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- CN101789360A CN101789360A CN200910266731A CN200910266731A CN101789360A CN 101789360 A CN101789360 A CN 101789360A CN 200910266731 A CN200910266731 A CN 200910266731A CN 200910266731 A CN200910266731 A CN 200910266731A CN 101789360 A CN101789360 A CN 101789360A
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Abstract
The invention discloses a controllable bidirectional cross circulation ventilation device. The ventilation device comprises a left ventilation pipe, a right ventilation pipe, a chamber, a fan, an air intake passage and an air exhaust passage, wherein the air intake passage and the air exhaust passage are arranged in parallel; the left ventilation pipe and the right ventilation pipe are extended into the chamber and are positioned on two sides in the chamber respectively; ventilating holes are formed on the corresponding side walls of the left ventilation pipe and the right ventilation pipe; an air inlet of the fan is communicated with the air intake passage and positioned between a left air intake passage and a right air intake passage; an air outlet of the fan is communicated with the air exhaust passage and positioned between a left air exhaust passage and a right air exhaust passage; and an air intake valve component is arranged between the air inlet and the air intake passage and an air exhaust valve component is arranged between the air outlet and the air exhaust passage. Different circulation loops are switched by controlling the air intake valve component and the air exhaust valve component so that the controllable bidirectional cross circulation of air flow is realized and the aim of uniform temperature treatment is fulfilled. The invention also discloses an operation method for the controllable bidirectional cross circulation ventilation device.
Description
Technical field
The present invention relates to a kind of ventilation unit, relate more specifically to a kind of controllable bidirectional cross circulation ventilation device and method of operation.
Background technology
Along with rapid development of science and technology, thin film semiconductor market is flourish in recent years, make thin film semiconductor's application gradually deeply, its trend is expanded towards large tracts of land, as adopt the thin-film solar cells device of glass substrate to be of a size of general size to develop into 1100mm * 1400mm, there is organic light emitting display (OLED) panel also to shield large-area TV again by conventional mobile phone, the application extension of portable computer display screen, its size has also reached more than 370mm * 470mm, suchlike thin film semiconductor product all needs through many different film-plating process or its integrated, in many operations, often relate to the link of utilizing ventilation unit that film substrates such as glass are heated, existing ventilation unit utilizes hot air circulation that thin plates such as glass are heated, but this heating technique can only be confined to the heating of unidirectional circulation, heating process causes being heated object easily and temperature occurs along hot blast flow direction generation graded, can not realize the evenly purpose of heating.
Therefore, be necessary to provide a kind of and can realize bidirectional crossed circulation, uniform controllable bidirectional cross circulation ventilation device of Temperature Treatment and method of operation.
Summary of the invention
One of purpose of the present invention provides and a kind ofly can realize bidirectional crossed circulation, the uniform controllable bidirectional cross circulation ventilation device of Temperature Treatment.
Another object of the present invention provides and a kind ofly can realize bidirectional crossed circulation, the method for operation of the uniform controllable bidirectional cross circulation ventilation device of Temperature Treatment.
For achieving the above object, technical scheme of the present invention is: a kind of controllable bidirectional cross circulation ventilation device is provided, comprise left ventilation duct, right ventilation duct, the chamber that hollow is airtight and be arranged on the outer wind inlet channel of described chamber, the air-out air channel, blower fan, described left ventilation duct, right ventilation duct stretches in the described chamber respectively and is positioned at the both sides of described chamber, offer ventilation hole respectively on described left ventilation duct and the corresponding sidewall of right ventilation duct, described wind inlet channel and described air-out air channel are arranged in parallel, described wind inlet channel comprises left wind inlet channel and the right wind inlet channel that is interconnected, described air-out air channel comprises left air-out air channel and the right air-out air channel that is interconnected, described left wind inlet channel is communicated with described left ventilation duct by the air channel interface with described left air-out air channel simultaneously, described right wind inlet channel is communicated with described right ventilation duct by the air channel interface with described left air-out air channel simultaneously, described blower fan has air outlet and air inlet, the air inlet of described blower fan is communicated with described wind inlet channel and between described left wind inlet channel and described right wind inlet channel, the air outlet of described blower fan is communicated with described air-out air channel and between described left air-out air channel and described right air-out air channel, be provided with the air intake valve member between the air inlet of described blower fan and the described wind inlet channel, be provided with the air-out valve member between the air outlet of described blower fan and the described air-out air channel, described chamber, left side ventilation duct, left side wind inlet channel, blower fan, right air-out air channel, right ventilation duct is interconnected and forms clockwise circulation circuit, described chamber, right ventilation duct, right wind inlet channel, blower fan, air-out air channel, a left side, left side ventilation duct is interconnected and forms counterclockwise circulation circuit.
Preferably, the air inlet of described blower fan is installed in described wind inlet channel centre down, the air-out oral-lateral of described blower fan is contained in the centre in air-out air channel, described left wind inlet channel and right wind inlet channel, left air-out air channel and right air-out air channel symmetry division are formed, make the well-balanced airflow of path more even.
As one embodiment of the invention, described air intake valve member is two open and close type valves, and described open and close type valve is separately positioned between the air inlet of described left wind inlet channel and blower fan, between the air inlet of right wind inlet channel and blower fan; Described air-out valve member is a guiding valve, and described guiding valve is arranged on the air outlet place of described blower fan, by changing the state of described open and close type valve and described guiding valve, selects to be communicated with different air channels, realizes the bidirectional crossed circulation of ventilating.
As another embodiment of the present invention, described air intake valve member is two open and close type valves, and described open and close type valve is separately positioned between the air inlet of described left wind inlet channel and blower fan, between the air inlet of right wind inlet channel and blower fan; Described air-out valve member is two open and close type valves, described open and close type valve is separately positioned between the air outlet of described left air-out air channel and blower fan, between the air outlet of right air-out air channel and blower fan, by changing the assembled state of described open and close type valve, select to be communicated with different air channels, realize the bidirectional crossed circulation of ventilating.
Preferably, described controllable bidirectional cross circulation ventilation device also comprises circuit control unit, described air intake air-valve assembly, air-out air-valve assembly and blower fan are electrically connected with described circuit control unit respectively, by specific circuit control, but the bidirectional crossed circulation of timing controlled ventilation unit.
Preferably, the aperture of described ventilation hole increases gradually along the direction that stretches into of ventilation duct, and realization is even along ventilation duct air-out flow, pressure, further improves the uniformity of the air-flow that is used for Temperature Treatment, improves product processing quality.
Preferably, described left ventilation duct and right ventilation duct are positioned at same plane, make on left ventilation duct and the right ventilation duct described ventilation hole in opposite directions and over against, form treatment region between left ventilation duct and the right ventilation duct.
Preferably, the air outlet of described blower fan is provided with heater strip or is filled with the coil pipe that freezes water, air-flow forms corresponding thermal current or cold airflow through the heating of the heater strip of the air outlet of blower fan or the cooling of freezing water coil, thereby realizes the chamber domestic demand is handled the heat treatment or the cold treatment of object.
Correspondingly, the present invention also provides the method for operation of aforesaid controllable bidirectional cross circulation ventilation device, may further comprise the steps: control air intake valve member makes left wind inlet channel be communicated with the air inlet of blower fan, and control air-out valve member makes right air-out air channel be communicated with the air outlet of blower fan, makes described chamber, left ventilation duct, left wind inlet channel, blower fan, right air-out air channel, the right ventilation duct clockwise circulation circuit of formation that is interconnected; Control air intake valve member makes right wind inlet channel be communicated with the air inlet of blower fan, and control air-out valve member makes left air-out air channel be communicated with the air outlet of blower fan, makes described chamber, left ventilation duct, left wind inlet channel, blower fan, right air-out air channel, the right ventilation duct counterclockwise circulation circuit of formation that is interconnected.
Compared with prior art, because controllable bidirectional cross circulation ventilation device of the present invention adopts blower fan as turnover wind power source, the air-out air channel is arranged in parallel with wind inlet channel and two ends are communicated with by the air channel interface, be provided with the air intake valve member between the air inlet of described blower fan and the described wind inlet channel, be provided with the air-out valve member between the air outlet of described blower fan and the described air-out air channel, by controlling described air intake valve member, the air-out valve member, make described chamber, left side ventilation duct, left side wind inlet channel, blower fan, right air-out air channel, right ventilation duct is interconnected and forms clockwise circulation circuit, control described air intake valve member, the air-out valve member makes it be in another state, make described chamber, right ventilation duct, right wind inlet channel, blower fan, air-out air channel, a left side, left side ventilation duct is interconnected and forms counterclockwise circulation circuit, by selecting the air intake valve member and the state of air-out valve member to realize that controllable bidirectional intersects circulation, thereby reach the purpose of carrying out the uniform temperature processing.Correspondingly, the method for operation of controllable bidirectional cross circulation ventilation device of the present invention can realize the bidirectional crossed circulation of air-flow, carries out even temperature and handles.
Description of drawings
Fig. 1 is the structural representation of controllable bidirectional cross circulation ventilation device one embodiment of the present invention.
Fig. 2 is the principle schematic of controllable bidirectional cross circulation ventilation device shown in Figure 1.
Fig. 3 is the structural representation of another state of controllable bidirectional cross circulation ventilation device shown in Figure 1.
Fig. 4 is the principle schematic of controllable bidirectional cross circulation ventilation device shown in Figure 3.
Fig. 5 is the functional-block diagram of controllable bidirectional cross circulation ventilation device shown in Figure 1.
Fig. 6 is the flow chart of the method for operation of controllable bidirectional cross circulation ventilation device of the present invention.
Fig. 7 is the structural representation of another embodiment of controllable bidirectional cross circulation ventilation device of the present invention.
Fig. 8 is the functional-block diagram of controllable bidirectional cross circulation ventilation device shown in Figure 7.
Embodiment
In order to describe technology contents of the present invention, structural feature in detail, be described further below in conjunction with execution mode and conjunction with figs., label identical among the wherein different figure is represented identical parts.As mentioned above, the invention discloses a kind of controllable bidirectional cross circulation ventilation device, be applicable to that air-flow is used, sheets of glass or other pending objects to the vertical storing in the chamber carry out Temperature Treatment, adopt blower fan as turnover wind power source, air-out air channel and wind inlet channel are arranged in parallel, and realize that by selecting the air intake valve member and the different conditions of air-out valve member controllable bidirectional intersects circulation, thereby reach the purpose of carrying out the uniform temperature processing.
Referring to figs. 1 to Fig. 4, the controllable bidirectional cross circulation ventilation device of one embodiment of the invention comprises the chamber 100 that left ventilation duct 200a, right ventilation duct 200b, hollow are airtight and is arranged on chamber 100 outer wind inlet channel 300, air-out air channel 400, blower fan 600.Left side ventilation duct 200a, right ventilation duct 200b stretches in the chamber 100 respectively and is positioned at the both sides of chamber 100 and is positioned at same plane, form treatment region 210 between left side ventilation duct 200a and the right ventilation duct 200b, sheets of glass or other are handled object 110 and vertically are seated in the treatment region 210, offer ventilation hole 220 respectively on left side ventilation duct 200a and the corresponding sidewall of right ventilation duct 200b, ventilation hole 220 on a left side ventilation duct 200a and the right ventilation duct 200b in opposite directions and over against, the aperture of this ventilation hole 220 increases gradually along the direction that stretches into of ventilation duct, realization is along the ventilation duct air-out flow, pressure is even, further improve the uniformity of the air-flow that is used for Temperature Treatment, improve product processing quality.Wind inlet channel 300 is long straight tube-like with air-out air channel 400 and is arranged in parallel, blower fan 600 has air inlet 610 and air outlet 620, the air inlet 610 of blower fan 600 is installed in the top of wind inlet channel 300 central parts down, the air outlet 620 of blower fan 600 is installed in the centre on 400 sidewalls of air-out air channel, left wind inlet channel 300a and right wind inlet channel 300b that air inlet 610 becomes to be interconnected with wind inlet channel 300 symmetry division, air outlet 620 is divided into air-out air channel 400 left air-out air channel 400a and the right air-out air channel 400b that is interconnected, left side wind inlet channel 300a is communicated with left ventilation duct 200a by left air channel interface 500a with left air-out air channel 400a simultaneously, right wind inlet channel 300b is communicated with right ventilation duct 200b by right air channel interface 500b with left air-out air channel 400b simultaneously, the air inlet 610 of blower fan 600 is communicated with wind inlet channel 300 and between left wind inlet channel 300a and right wind inlet channel 300b, and the air outlet 620 of blower fan 600 is communicated with air-out air channel 400 and between left air-out air channel 400a and right air-out air channel 400b.Be provided with the air intake valve member between the air inlet 610 of blower fan 600 and the described wind inlet channel 300, be provided with the air-out valve member between the air outlet 620 of blower fan 600 and the air-out air channel 400, in the present embodiment, described air intake valve member comprises the first open and close type valve 700a, the second open and close type valve 700b, and the air-out valve member comprises a guiding valve 810.The first open and close type valve 700a, the second open and close type valve 700b are symmetrical arranged respectively, the first open and close type valve 700a is arranged between the air inlet 610 of left wind inlet channel 300a and blower fan 600, and the second open and close type valve 700b is arranged between the air inlet 610 of right wind inlet channel 300b and blower fan 600; Guiding valve 810 is arranged on air outlet 600 places of blower fan 600, this guiding valve 810 is curved and can 90 ° of rotations, realize that by rotary steering valve 810 left air-out air channel 400a is communicated with the air channel 400b of right air-out simultaneously and is not communicated with air outlet 620 closures of blower fan 600 with the air outlet 620 of blower fan 600, or right air-out air channel 400b is communicated with left air-out simultaneously, and air channel 400a is not communicated with air outlet 620 closures of blower fan 600 with the air outlet 620 of blower fan 600, by changing the described first open and close type valve 700a, the state of the second open and close type valve 700b and described guiding valve 810, select to be communicated with different air channels, realize the conversion of the direction of ventilation, make described chamber 100, left side ventilation duct 200a, left side wind inlet channel 300a, blower fan 600, right air-out air channel 400b, right ventilation duct 200b is interconnected and forms clockwise circulation circuit, described chamber 100, right ventilation duct 200b, right wind inlet channel 300b, blower fan 600, left side air-out air channel 400a, left side ventilation duct 200a is interconnected and forms counterclockwise circulation circuit.
With reference to figure 5, described controllable bidirectional cross circulation ventilation device also comprises circuit control unit 900, the first open and close type air-valve 700a, the second open and close type valve 700b, guiding air-valve 810 and blower fan 600 are electrically connected with circuit control unit 900 respectively, by specific circuit control, but the bidirectional crossed circulation of timing controlled ventilation unit realizes automation control.
In an embodiment of the present invention, can heater strip (figure does not show) be set at the air outlet 620 of blower fan 600 or left air channel interface 500a, interface 500b place, right air channel, when the air outlet 620 of air-flow process blower fan 600 or air channel interface 500a, 500b, heat through heater strip, form thermal current, thereby realize heat treatment pending object 110 in the chamber 100.Similarly, also can be provided with and be filled with the coil pipe that freezes water at the air outlet 620 of blower fan 600 or air channel interface 500a, 500b place, when the air outlet 620 of air-flow process blower fan 600 or air channel interface 500a, 500b, through freezing the cooling of water coil, form cold airflow, thereby realize the chamber domestic demand is handled the cold treatment of object.
With reference to figure 6, the method for operation of controllable bidirectional intersection circulating ventilation system of the present invention may further comprise the steps:
Step S1: control air intake valve member makes left wind inlet channel be communicated with the air inlet of blower fan, and control air-out valve member makes right air-out air channel be communicated with the air outlet of blower fan, makes described chamber, left ventilation duct, left wind inlet channel, blower fan, right air-out air channel, the right ventilation duct clockwise circulation circuit of formation that is interconnected;
Step S2: control air intake valve member makes right wind inlet channel be communicated with the air inlet of blower fan, and control air-out valve member makes left air-out air channel be communicated with the air outlet of blower fan, makes described chamber, left ventilation duct, left wind inlet channel, blower fan, right air-out air channel, the right ventilation duct counterclockwise circulation circuit of formation that is interconnected.
At length, the operation principle of the controllable bidirectional cross circulation ventilation device of first embodiment is as described below: with reference to figure 1, open the second open and close type valve 700b by control circuit unit 900, close the first open and close type valve 700a, the valve 810 of control guiding simultaneously rotates on the position that is communicated with left air-out air channel 400a, at this moment, as Fig. 1, among Fig. 2 shown in the direction of arrow, the ventilation hole 220 that air communication in the chamber 100 is crossed on the right ventilation duct 200b enters right ventilation duct 200b, this air communication is crossed right air channel interface 500b and is flowed into right wind inlet channel 300b, enter the air inlet 610 of blower fan 600 by the second open and close type valve 700b, the guiding valve 810 at air outlet 620 places by blower fan 600 enters left air-out air channel 400a, enter left breather pipe 200a through left air channel interface 500a again, air vent hole 220 on left breather pipe 200a blows to air-flow the pending object 110 in the chamber 100, last air flow stream is crossed pending object 110 backs and is entered right breather pipe 200b by the air vent hole 220 on the right breather pipe 200b, forms the closed-loop path of counterclockwise circulation.Behind the certain hour, with reference to figure 3, close the second open and close type valve 700b by control circuit unit 900, open the first open and close type valve 700a, the valve 810 of control guiding simultaneously rotates on the position that is communicated with right air-out air channel 400b, at this moment, the ventilation hole 220 that air communication in the chamber 100 is crossed on the left ventilation duct 200a enters left ventilation duct 200a, this air communication is crossed left air channel interface 500a and is flowed into left wind inlet channel 300a, enter the air inlet 610 of blower fan 600 by the first open and close type valve 700a, the guiding valve 810 at air outlet 620 places by blower fan 600 enters right air-out air channel 400b, enter right breather pipe 200b through right air channel interface 500b again, air vent hole 220 on right breather pipe 200b blows to air-flow the pending object 110 in the chamber 100, last air flow stream is crossed pending object 110 backs and is entered left breather pipe 200a by the air vent hole 220 on the left breather pipe 200a, forms the closed-loop path of clockwise circulation.The intersection time of two circulation circuits is provided with regularly conversion according to concrete needs, require to carry out different actions by circuit control unit 900 according to different process as shown in Figure 5 and cooperate control, automatically control realizes bidirectional crossed circulation, makes heating or cooling uniformity, improves product processing quality.
Fig. 7 is an another embodiment of the present invention, different with first embodiment is, described in the present embodiment air intake valve member comprises the first open and close type valve 700a, the second open and close type valve 700b, the air-out valve member comprises the 3rd open and close type valve 820a, the 4th open and close type valve 820b, the first open and close type valve 700a, the second open and close type valve 700b are symmetrical arranged respectively, and the first open and close type valve 700a is arranged between the air inlet 610 of left wind inlet channel 300a and blower fan 600; The second open and close type valve 700b is arranged between the air inlet 610 of right wind inlet channel 300b and blower fan 600; The 3rd open and close type valve 820a is arranged between the air outlet 620 of left air-out air channel 400a and blower fan 600; The 4th open and close type valve 820b is arranged between the air outlet 620 of right air-out air channel 400b and blower fan 600, by selecting to change the assembled state of open and close type valve 700a, 700b, 820a, 820b, select to be communicated with different air channels, realize the bidirectional crossed circulation of ventilating.Cooperation is with reference to figure 8, the operation principle of the controllable bidirectional cross circulation ventilation device of this embodiment is as described below: open the second open and close type valve 700b, close the first open and close type valve 700a by control circuit unit 900, open the 3rd open and close type valve 820a simultaneously, close the 4th open and close type valve 820b, described chamber 100, left ventilation duct 200a, left wind inlet channel 300a, blower fan 600, right air-out air channel 400b, right ventilation duct 200b are interconnected form clockwise circulation circuit.Behind the certain hour, close the second open and close type valve 700b, open the first open and close type valve 700a by control circuit unit, close the 3rd open and close type valve 820a simultaneously, open the 4th open and close type valve 820b, described chamber 100, right ventilation duct 200b, right wind inlet channel 300b, blower fan 600, left air-out air channel 400a, left ventilation duct 200a are interconnected form counterclockwise circulation circuit.Two-way circulate principle and first embodiment of the air-flow of two circulation circuits are similar, do not describe in detail in addition at this.Be appreciated that ground, described air intake valve member also can adopt single guiding valve, cooperation is realized by the air-out valve member that two open and close type valves are formed, require to carry out different actions by circuit control unit 900 according to different process and cooperate control, regularly change direction of ventilation, automatically control realizes bidirectional crossed circulation, makes heating or lowering temperature uniform unanimity, improves product processing quality.
Compared with prior art, because controllable bidirectional cross circulation ventilation device of the present invention adopts blower fan 600 as turnover wind power source, air-out air channel 400 is arranged in parallel with wind inlet channel 300 and two ends are communicated with by the air channel interface, be provided with the air intake valve member between the air inlet 610 of described blower fan 600 and the described wind inlet channel 300, be provided with the air-out valve member between the air outlet 620 of described blower fan 600 and the described air-out air channel 400, by controlling described air intake valve member, the air-out valve member, make described chamber 100, left side ventilation duct 200a, left side wind inlet channel 300a, blower fan 600, right air-out air channel 400b, right ventilation duct 200b is interconnected and forms clockwise circulation circuit, control described air intake valve member, the air-out valve member makes it be in another state, make described chamber 100, right ventilation duct 200b, right wind inlet channel 300b, blower fan 600, left side air-out air channel 400a, left side ventilation duct 200a is interconnected and forms counterclockwise circulation circuit, by selecting the air intake valve member and the state of air-out valve member to realize that controllable bidirectional intersects circulation, thereby reach the purpose of carrying out the uniform temperature processing.
Above disclosed only is preferred embodiments of the present invention, can not limit the present invention's interest field certainly with this, and therefore the equivalent variations of doing according to claim of the present invention still belongs to the scope that the present invention is contained.
Claims (10)
1. controllable bidirectional cross circulation ventilation device, it is characterized in that, comprise left ventilation duct, right ventilation duct, the chamber that hollow is airtight and be arranged on the outer wind inlet channel of described chamber, the air-out air channel, blower fan, described left ventilation duct, right ventilation duct stretches in the described chamber respectively and is positioned at the both sides of described chamber, offer ventilation hole respectively on described left ventilation duct and the corresponding sidewall of right ventilation duct, described wind inlet channel and described air-out air channel are arranged in parallel, described wind inlet channel comprises left wind inlet channel and the right wind inlet channel that is interconnected, described air-out air channel comprises left air-out air channel and the right air-out air channel that is interconnected, described left wind inlet channel is communicated with described left ventilation duct by the air channel interface with described left air-out air channel simultaneously, described right wind inlet channel is communicated with described right ventilation duct by the air channel interface with described left air-out air channel simultaneously, described blower fan has air outlet and air inlet, the air inlet of described blower fan is communicated with described wind inlet channel and between described left wind inlet channel and described right wind inlet channel, the air outlet of described blower fan is communicated with described air-out air channel and between described left air-out air channel and described right air-out air channel, be provided with the air intake valve member between the air inlet of described blower fan and the described wind inlet channel, be provided with the air-out valve member between the air outlet of described blower fan and the described air-out air channel, described chamber, left side ventilation duct, left side wind inlet channel, blower fan, right air-out air channel, right ventilation duct is interconnected and forms clockwise circulation circuit, described chamber, right ventilation duct, right wind inlet channel, blower fan, air-out air channel, a left side, left side ventilation duct is interconnected and forms counterclockwise circulation circuit.
2. controllable bidirectional cross circulation ventilation device as claimed in claim 1 is characterized in that, the air inlet of described blower fan is installed in described wind inlet channel centre down, and the air-out oral-lateral of described blower fan is contained in the centre in air-out air channel.
3. controllable bidirectional cross circulation ventilation device as claimed in claim 1, it is characterized in that, described air intake valve member is two open and close type valves, and described open and close type valve is separately positioned between the air inlet of described left wind inlet channel and blower fan, between the air inlet of right wind inlet channel and blower fan.
4. controllable bidirectional cross circulation ventilation device as claimed in claim 3 is characterized in that, described air-out valve member is a guiding valve, and described guiding valve is arranged on the air outlet place of described blower fan.
5. controllable bidirectional cross circulation ventilation device as claimed in claim 3, it is characterized in that, described air-out valve member is two open and close type valves, and described open and close type valve is separately positioned between the air outlet of described left air-out air channel and blower fan, between the air outlet of right air-out air channel and blower fan.
6. controllable bidirectional cross circulation ventilation device as claimed in claim 1, it is characterized in that, described controllable bidirectional cross circulation ventilation device also comprises circuit control unit, and described air intake air-valve assembly, air-out air-valve assembly and blower fan are electrically connected with described circuit control unit respectively.
7. controllable bidirectional cross circulation ventilation device as claimed in claim 1 is characterized in that, the aperture of described ventilation hole increases gradually along the direction that stretches into of ventilation duct.
8. controllable bidirectional cross circulation ventilation device as claimed in claim 1 is characterized in that, described left ventilation duct and right ventilation duct are positioned at same plane.
9. controllable bidirectional cross circulation ventilation device as claimed in claim 1 is characterized in that, the air outlet of described blower fan is provided with heater strip or is filled with the coil pipe that freezes water.
10. as the method for operation of each described controllable bidirectional cross circulation ventilation device among the claim 1-9, it is characterized in that, may further comprise the steps:
Control air intake valve member makes left wind inlet channel be communicated with the air inlet of blower fan, and control air-out valve member makes right air-out air channel be communicated with the air outlet of blower fan, makes described chamber, left ventilation duct, left wind inlet channel, blower fan, right air-out air channel, the right ventilation duct clockwise circulation circuit of formation that is interconnected;
Control air intake valve member makes right wind inlet channel be communicated with the air inlet of blower fan, and control air-out valve member makes left air-out air channel be communicated with the air outlet of blower fan, makes described chamber, left ventilation duct, left wind inlet channel, blower fan, right air-out air channel, the right ventilation duct counterclockwise circulation circuit of formation that is interconnected.
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| Application Number | Priority Date | Filing Date | Title |
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| CN200910266731XA CN101789360B (en) | 2009-12-30 | 2009-12-30 | Controllable bidirectional cross circulation ventilation device and operation method |
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| CN200910266731XA CN101789360B (en) | 2009-12-30 | 2009-12-30 | Controllable bidirectional cross circulation ventilation device and operation method |
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| CN101789360A true CN101789360A (en) | 2010-07-28 |
| CN101789360B CN101789360B (en) | 2011-05-11 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102024682A (en) * | 2010-09-17 | 2011-04-20 | 沈阳芯源微电子设备有限公司 | Multi-layer cavity device with liftable shielding plates |
| CN103698355A (en) * | 2013-12-28 | 2014-04-02 | 苏州市东华试验仪器有限公司 | Integral thaw testing machine |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3321540B2 (en) * | 1997-02-14 | 2002-09-03 | 東京エレクトロン株式会社 | Deaeration mechanism, processing apparatus using the same, and deaeration method |
| JP2000147793A (en) * | 1998-11-12 | 2000-05-26 | Mitsubishi Electric Corp | Method for removing photoresist film and apparatus therefor |
| CN2662164Y (en) * | 2003-09-12 | 2004-12-08 | 郑州大学 | Tunnel type hot-blast circulation electric heating drying furnace |
| CN201608166U (en) * | 2009-12-30 | 2010-10-13 | 东莞宏威数码机械有限公司 | Controllable bidirectional cross-circulation ventilating device |
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2009
- 2009-12-30 CN CN200910266731XA patent/CN101789360B/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102024682A (en) * | 2010-09-17 | 2011-04-20 | 沈阳芯源微电子设备有限公司 | Multi-layer cavity device with liftable shielding plates |
| CN103698355A (en) * | 2013-12-28 | 2014-04-02 | 苏州市东华试验仪器有限公司 | Integral thaw testing machine |
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| CN101789360B (en) | 2011-05-11 |
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