CN101776620A - Bent crystal light splitting device of wavelength dispersion X-fluorescence spectrograph and operating method thereof - Google Patents

Bent crystal light splitting device of wavelength dispersion X-fluorescence spectrograph and operating method thereof Download PDF

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CN101776620A
CN101776620A CN200910068795A CN200910068795A CN101776620A CN 101776620 A CN101776620 A CN 101776620A CN 200910068795 A CN200910068795 A CN 200910068795A CN 200910068795 A CN200910068795 A CN 200910068795A CN 101776620 A CN101776620 A CN 101776620A
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crystal
beam split
box body
light
carriage
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CN101776620B (en
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宋欣
宋晓琨
张晓颖
李海建
杨伟清
张磊
张朝捷
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China Building Material Test & Certification Center
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China Building Material Test & Certification Center
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Abstract

The invention relates to a bent crystal light splitting device of a wavelength dispersion X-fluorescence spectrograph, comprising a front-slit conduit, a light splitting box body, a crystal bracket, a rear-slit conduit and a detector. The operating method comprises the following steps of: affixing a crystal film on the crystal bracket which is in accordance with the overall-focusing and logarithmic spiral special curve via calculation, fixing the crystal film in the light splitting box body, and regulating the angle of the crystal bracket to be consistent with a theoretical curve, wherein the front-slit conduit, an inner cavity of the light splitting box body, the crystal, the crystal bracket and the rear-slit conduit form a light splitting path; and connecting the detector with the rear-slit conduit, and performing quantified detection on the characteristic X ray of a certain element selected by the light splitter. The invention has the advantages that the structural design of a wedge-shaped inner cavity and a rear opening reduces the amount of the scattered surface of the X ray, is beneficial to lowering the intensity of background signals of instrument detection data, reducing the inside and outside dimension of the light splitter and arranging vacuum seal and the light splitter; besides, the seal between the light splitter and a vacuum chamber is double radial shaft seal, thereby the positioning precision of the light splitter and the vacuum chamber is improved.

Description

The bent face crystal light splitting and the method for work thereof of wavelength dispersion X-fluorescence instrument
(1) technical field:
The present invention relates to a kind of X ray crystal light splitting and method of work thereof, especially a kind of bent face crystal light splitting and method of work thereof of wavelength dispersion X-fluorescence instrument, it is the vitals of X-ray analysis with the wavelength dispersion X-fluorescence instrument, and light-dividing device structure and performance directly determine the quality of spectrometer performance.
(2) background technology:
The wavelength dispersion X-fluorescence instrument is a detection by quantitative materials chemistry composition exact instrument, is widely used in fields such as building materials, metallurgy, environmental protection and scientific research.The X ray crystal light splitting is the most crucial parts of nuclear instrument.Its principle of work (as Fig. 1), sample is collected in the optical splitter by the prime slit by the secondary x rays that has each component elemental characteristic spectral line that X-ray tube inspires, place the crystal of a specific lattice spacing in optical splitter, (d is an interplanar distance in 2dsin θ=λ formula when the angle of the optical path length of incident X-rays and incident crystal satisfies Bragg equation; Angle between θ incident ray and the diffraction surfaces; λ is the wavelength of characteristic X-ray) time, just can obtain the monochromatic characteristic X-ray of certain element with the specific angle and distance place of plane of crystal, on this position, X-ray detector is set, the X ray light energy signal is transferred to electric signal and carries out accurate quantitative test, detect the content of certain element in sample.
(3) summary of the invention:
The objective of the invention is to design a kind of bent face crystal light splitting and method of work thereof of wavelength dispersion X-fluorescence instrument, its adopts wedge structure and double curvature method or equiangular spiral method bent face crystal to carry out wavelength dispersion, is a kind of spectroscopical effeciency height, noise background is low, structure is simple and direct and the optical splitter formation of the reliable novel high-performance of vacuum seal.
Technical scheme of the present invention: a kind of bent face crystal light splitting of wavelength dispersion X-fluorescence instrument is characterized in that it comprises preceding slit conduit, beam split box body, crystal carriage, back slit conduit and detector; The incident end of beam split box body is a slit conduit before the entrance port of light path is equipped with, and the exit end of beam split box body is that the exit portal of light path is sealed and installed with back slit conduit; The light path axle center of said crystal carriage is fixed in the beam split box body according to bearing pin, on the crystal carriage crystal film is arranged, and the light path axle center of crystal carriage is axis of rotation with the bearing pin; Said back slit conduit and detector are sealing and install.
The optical splitter inner chamber that above-mentioned said preceding slit conduit, beam split box body and back slit conduit constitute is processed into wedge shape according to the light path shape that the method in the patent work principle of the present invention calculates.
Dual radially O-ring seals and beam split vacuum chamber mounting hole sealing installation before the locating surface that above-mentioned said beam split box body is installed according to optical splitter location and vacuum chamber, and be according to the screw of mounting hole periphery and be fixed connection.
The locating surface that above-mentioned said optical splitter location and vacuum chamber are installed and the light path axle center of crystal carriage are easy to the distance of measurement and positioning face and axle center hole in one side, the processing of this position and installation accuracy are the keys of optical splitter effect.
Above-mentioned said crystal carriage curved surface is the coordinate data that calculates according to the method in the patent work principle of the present invention, is processed by numerically-controlled machine; Axle center hole is left in light path center in crystal carriage two sides, and bearing pin is penetrated by the light-splitting box both sides, and the crystal carriage is fixed on the beam split box body, and the crystal carriage can rotate along bearing pin; Bearing pin is according to screw thread and dual O-ring seals and beam split box body sealing installation.
The opening that crystal is installed is left in the bottom of above-mentioned said beam split box body, and opening part is sealed and installed with bonnet according to O-ring seals I; Crystal carriage angular setting push rod and back-moving spring are installed on the said bonnet, and crystal carriage angular setting push rod is sealing according to O-ring seals II and bonnet and installs; Crystal carriage angular setting push rod and back-moving spring are connected to the two ends of crystal carriage.Be connected according to screw between beam split box body and the bonnet.
The slit width of above-mentioned said preceding slit conduit and back slit conduit can be changed according to the needs of different sample elements.
Above-mentioned said preceding slit conduit and beam split box body are in together in the vacuum, need not sealing, only need screw to connect; Back slit catheter proximal end is installed according to O-ring seals III and the sealing of light-splitting box body and function screw, and rear end and detector are installed with the screw sealing according to O-ring seals IV.
A kind of method of work of bent face crystal light splitting of wavelength dispersion X-fluorescence instrument is characterized in that it may further comprise the steps:
(1) according to double curvature method or equiangular spiral method design beam split light path, calculate the coordinate of the segment of curve that is used for beam split in the light path, and press curvillnear coordinate worked crystal carriage, and the crystal film that processes is sticked on the crystal carriage, plane of crystal and the light path curve that calculates are matched;
(2) in being fixed on the crystal carriage in the beam split box body with bearing pin, cover bonnet then, withstand the crystal carriage back side with back-moving spring and crystal carriage angle adjustment lever that bonnet is provided with, by their acting in conjunction, turn crystal carriage is adjusted push rod, simultaneously the effect by back-moving spring, adjust the angle of crystal carriage within the specific limits, when electric signal is the highest, think that the crystal angle conforms to calculated value, lives adjustment hole with wax seal;
(3) the light-splitting box intracoelomic cavity is processed into wedge shape according to the shape of light path, to satisfy passing through of the required X fluorescence of beam split, at utmost reduce simultaneously the scattering and the reflection of X ray, shelter from other the harmful scatterings and the X ray of reflection simultaneously, accomplish the interior physical dimension minimum of optical splitter simultaneously, improve the vacuum seal performance;
(4) slit conduit before the incident end of beam split box body is loaded onto is loaded onto back slit conduit at the exit end of beam split box body, and like this, preceding slit conduit, beam split box body, crystal carriage, crystal, back slit conduit constitute the beam split light path;
(5) detector is connected with back slit conduit, characteristic X-ray through crystal beam split and focusing shines on the detector, transfer light signal to electric signal, thereby the characteristic X ray strength of certain element that optical splitter is sub-elected carries out quantitative measurment, can detect the content of certain element in the sample like this;
(6) to keep vacuum state in the optical splitter, requiring has good sealing between per two parts that are connected, O-ring seals I, O-ring seals II are well contacted with sealing surface respectively with dual radially O-ring seals, and, guarantee the vacuum seal of light-dividing device according to screw in compression;
(7) optical splitter requires between per two parts that are connected the good location precision is arranged, and conforms to abstract optical dimensions to guarantee physics light path size that optical splitter constitutes; This reaches designing requirement with regard to the dimensional accuracy that needs each parts, and when mounted simultaneously, each locating surface will be in conjunction with closely, and according to screw in compression; The place locating surface is a rigidity, does not move with the O-ring seals distortion of sealing usefulness; Wherein the location dimension of most critical be crystal axis center and optical splitter and vacuum chamber the installing and locating face apart from size, this size should be easy to processing and measure;
(8) the incident end of the beam split box body of light-dividing device inserted vacuum chamber together with preceding slit conduit, with dual radially O-ring seals the junction is sealed, and the locating surface of light-dividing device and vacuum chamber compressed, crystal and crystal carriage are fixed on the crystal axis place of beam split box body with bearing pin, first-class bonnet, will back slit and detector and after light-splitting box reliably is connected, light-dividing device has just possessed the condition that secondary x rays that sample excitation is gone out carries out beam split.
Principle of work of the present invention: the present invention adopts double curvature method or equiangular spiral method to carry out wavelength dispersion with the bent face crystal;
Double curvature method claims the total focus method again: as Fig. 2, earlier single crystal ingot is ground to the thin slice that radius-of-curvature is R, makes the atomic plane in this thin slice all parallel with the tangent plane of crystal mid point; And then this wafer is curved with O ' is that the center of circle, R/2 are the cylinder of radius; So reflecting wherein that atom all curved with O is that the center of circle, R are the cylinder of radius; As seen from Figure 1, the tangent plane uu of A, B and C three point atom faces is vertical with OC with OA, OB respectively; AP=L=n λ R/2d=Rsin θ meets Bragg condition among Fig. 1; In like manner each bar incident ray all meets the cloth brace members, and strictness focuses on the P point; In the making practice of crystal, generally be the crystal mould of fixing several R values, then adjust the distance L value of slit for different diffraction angle to the germ nucleus, make light path satisfy Bragg condition;
Fig. 3 is to be the index path of example with Elements C a, make R/2=100mm, L=OA, circular arc line will pass through O and A point simultaneously, and P is the symmetric points of O with respect to A, slit point before making O be, A is the germ nucleus point, and P is a back slit point, and single crystal ingot is ground to the thin slice that radius-of-curvature is R, being bonded at intrados is the metal holder of R/2, and makes the crystal carriage; Optical splitter and crystal carriage have just constituted a complete beam split light path like this, and therefore the optical splitter with this structure just can utilize the special construction of twice crooked intracell of crystal to carry out the X ray beam split;
The equiangular spiral method claims the logarithmic spiral method again: the polar coordinates mathematic(al) representation of equiangular spiral is: ρ=Ae ψ ctg θ, and curve such as Fig. 2: its mathematical definition is: the angle of the tangent line of the line of any point P and P point place curve all is θ on limit pts and the curve; We utilize this character of equiangular spiral, will be taken as Bragg angle θ among the formula θ; Limit is an entrance slit; Crystal only need simply grind into plane lamina, is posted on the crystal carriage that is processed into the equiangular spiral shape; The light that shines on the crystal of each bar all becomes Bragg angle with crystal like this; X ray through diffraction is intersected in a very little zone, rather than intact double curvature, but focusing range is very little, and is high a lot of more than the intensity of flat crystal;
Before slit to the analyzing crystal center apart from p, crystal effective diameter D, sample is interrelated to four parameters of effective length S of entrance slit distance 1 and crystal, light path is short more good more, be that l+p is short more good more, but l is more little, can make crystal length long more, and the light-splitting box cavity diameter strengthens, the making of crystal is difficulty all the more, and cost is also high more; Because vacuum chamber can not be too little, so the p value also will be subjected to the restriction of structure; Therefore, in design process, comprehensive above various factors, computation optimization is finally determined crystal effective diameter D, ray taking-up angle repeatedly
Figure G2009100687959D00041
Sample to entrance slit apart from l, preceding slit to the analyzing crystal center apart from p 0Etc. parameter as the basic experience parameter;
The surface curve of crystal carriage is consistent with that section that light path drops on the equiangular spiral; Enough coordinate figure on this section of geometrical calculation curve is exported to numerically controlled wire cutting machine the crystal bracket surface is processed, and the logarithm crystal is made the very thin crystal of one deck and is bonded on the crystal carriage;
The crystal axle center of light-dividing device (Fig. 5) is the PO point of bearing pin place for Fig. 4, preceding slit conduit 13 centers are pts point among Fig. 4, back slit conduit 16 centers are the F point of Fig. 4, optical splitter and crystal carriage have just constituted a complete beam split light path like this, and therefore the optical splitter with this structure just can utilize the special mathematical characteristic of equiangular spiral to carry out the X ray beam split;
Optical splitter adopts wedge structure, and as Fig. 5: X ray light path 12 is wedge shapes, and therefore, the optical splitter inner chamber is tightly around X ray light path design wedgewise.
Superiority of the present invention is: a, bent face crystal have focussing force to X ray, enter high 2 orders of magnitude of X ray strength ratio flat crystal beam split of detector after the focusing; B, the beam split of bent face crystal need not the necessary front and back of flat crystal beam split collimating apparatus, and the front and back collimating apparatus has into the decay of 2 orders of magnitude to X ray; The physical dimension of the preceding slit of c, the beam split of bent face crystal is little, can draw closer together to sample, and farthest reduce X ray decay in the air; The used crystalline size of d, the beam split of bent face crystal is less, helps the growth and the processing of crystal; E, optical splitter inner chamber except that for light path by and the space do not have unnecessary space, reduce the burden of vacuum system to the full extent; F, wedge shape inner chamber have reduced the quantity of the face of X ray scattering to the full extent, help the intensity that lowering apparatus detects the background signal of data; The structural design of g, wedge shape inner-cavity structure and after-opening reduces the aperture area of optical splitter to the full extent, helps vacuum seal; The size of the relative optical splitter datum clamp face in crystal installation shaft center of h, wedge shape inner-cavity structure is easy to measure in machining, can improve the precision of machining greatly, also is convenient to the check of optical splitter section; I, optical splitter profile are parallel fully with inner chamber, and the physical dimension minimum can increase the more session that divides under the situation of vacuum chamber constancy of volume for fixing road X fluorescence spectrophotometer; The Installation and Debugging of j, optical splitter are all finished on bonnet, and for fixing road X fluorescence spectrophotometer, it is very convenient to carry out Installation and Debugging from this angle; Sealing between k, optical splitter and vacuum chamber changes the double radial shaft sealing into by traditional butt-end packing, improve the bearing accuracy of optical splitter and vacuum chamber greatly, stopped traditional butt-end packing optical splitter is out of shape the data drift that causes during use owing to seal phenomenon simultaneously; The slit width of preceding slit conduit in l, this device and back slit conduit can be changed according to the needs of different sample elements.
(4) description of drawings:
Fig. 1 is flat crystal diffraction principle figure.
Fig. 2 is a total focus crystal diffraction schematic diagram.
Fig. 3 is a total focus beam split index path.
Fig. 4 is a logarithm spiral shell beam split index path.
Fig. 5 is the structural representation of the bent face crystal light splitting of the related a kind of wavelength dispersion X-fluorescence instrument of the present invention.
Wherein, 1 is O-ring seals I, and 2 is O-ring seals II, 3 is bonnet, and 4 is crystal carriage angular setting push rod, and 5 is back-moving spring, 6 are the beam split box body, and 7 is the crystal carriage, and 8 is bearing pin, 9 is crystal film, and 10 are the locating surface of optical splitter location with the vacuum chamber installation, and 11 is dual radially O-ring seals, 12 is light path, and 13 is preceding slit conduit, and 14 is O-ring seals III, 15 is O-ring seals IV, and 16 is back slit conduit, and 17 is detector.
(5) embodiment:
Embodiment: a kind of bent face crystal light splitting (see figure 5) of wavelength dispersion X-fluorescence instrument is characterized in that it comprises preceding slit conduit 13, beam split box body 6, crystal carriage 7, crystal carriage angular setting push rod 4, back-moving spring 5, bonnet 3, back slit conduit 16 and detector 17; Wherein, the inner chamber of beam split box body 6 is processed into wedge shape according to the shape of light path 12, the incident end end of beam split box body 6 is a slit conduit 13 before the entrance port of light path 12 is equipped with, the exit end of beam split box body 6 is that the exit portal of light path 12 is sealed and installed with back slit conduit 16 according to O-ring seals III14, the opening that crystal is installed is left at the middle part of beam split box body 6, and opening part is sealed and installed with bonnet 3 according to O-ring seals I1; Crystal carriage angular setting push rod 4 and back-moving spring 5 are installed on the said bonnet 3, and crystal carriage angular setting push rod 4 is sealing according to O-ring seals II 2 with bonnet 3 and installs; The light path axle center of said crystal carriage 7 is fixed in the beam split box body 6 according to bearing pin 8, crystal film 9 is arranged on the crystal carriage 7, the two ends of crystal carriage 7 connect crystal carriage angular setting push rod 4 and back-moving spring 5 respectively, and the light path axle center of crystal carriage 7 is an axis of rotation with bearing pin 8; Said back slit conduit 16 is sealing according to O-ring seals IV15 and detector 17 and installs.
The slit width of above-mentioned said preceding slit conduit 13 and back slit conduit 16 can be changed according to the needs of different sample elements.(see figure 5)
Above-mentioned said preceding slit conduit 13 is connected according to screw with beam split box body 6 and is installed in the beam split vacuum chamber; Said beam split box body 6 is installed with the sealing of beam split vacuum chamber mounting hole according to the dual radially O-ring seals 11 at locating surface 10 places that optical splitter location and vacuum chamber are installed, and is according to the screw of mounting hole periphery and is fixed connection.(see figure 5)
Be connected according to screw between above-mentioned said beam split box body 6 and the bonnet 3.(see figure 5)
Above-mentioned said back slit conduit 16 is connected according to screw with beam split box body 6 and detector 17 respectively.(see figure 5)
Above-mentioned said detector 17 is the flow gas proportional counter.(see figure 5)
A kind of method of work of bent face crystal light splitting of wavelength dispersion X-fluorescence instrument is characterized in that it may further comprise the steps:
(1) according to double curvature method or equiangular spiral method design beam split light path, calculate the coordinate of the segment of curve that is used for beam split in the light path, and press curvillnear coordinate worked crystal carriage 7, and the crystal film that processes is sticked on the crystal carriage 7, plane of crystal and the light path curve that calculates are matched;
(2) in being fixed on crystal carriage 7 in the beam split box body 6 with bearing pin 8, cover bonnet 3 then, withstand crystal carriage 7 back sides with back-moving spring 5 and crystal carriage angle adjustment lever 4 that bonnet is provided with, by their acting in conjunction, turn crystal carriage is adjusted push rod 4, passes through the effect of back-moving spring 5 simultaneously, adjust the angle of crystal carriage within the specific limits, when electric signal is the highest, think that the crystal angle conforms to calculated value, lives adjustment hole with wax seal;
(3) beam split box body 6 inner chambers and crystal carriage 7 constitute the beam split light path;
(4) slit conduit 13 before the incident end of beam split box body 6 is loaded onto is loaded onto back slit conduit 16 at the exit end of beam split box body 6;
(5) detector 17 is connected with back slit conduit 16;
(6) O-ring seals I 1, O-ring seals II 2 are well contacted with dual radially O-ring seals 11 respectively with sealing surface, tighten housing screw, guarantee the vacuum seal of light-dividing device;
(7) with the incident end of the beam split box body 6 of light-dividing device insert vacuum chambers together with preceding slit conduit 13, with dual radially O-ring seals 11 junction is sealed, and the locating surface 10 of light-dividing device and vacuum chamber is compressed, light-dividing device begins sample is carried out beam split.

Claims (9)

1. the bent face crystal light splitting of a wavelength dispersion X-fluorescence instrument is characterized in that it comprises preceding slit conduit, beam split box body, crystal carriage, back slit conduit and detector; The incident end of beam split box body is a slit conduit before the entrance port of light path is equipped with, and the exit end of beam split box body is that the exit portal of light path is sealed and installed with back slit conduit; The light path axle center of said crystal carriage is fixed in the beam split box body according to bearing pin, on the crystal carriage crystal film is arranged, and the light path axle center of crystal carriage is axis of rotation with the bearing pin; Said back slit conduit and detector are sealing and install.
2. according to the bent face crystal light splitting of the said a kind of wavelength dispersion X-fluorescence instrument of claim 1, it is characterized in that the optical splitter inner chamber that said preceding slit conduit, beam split box body and back slit conduit constitute is processed into wedge shape according to the light path shape that the method in the patent work principle of the present invention calculates.
3. according to the bent face crystal light splitting of the said a kind of wavelength dispersion X-fluorescence instrument of claim 1, it is characterized in that dual radially O-ring seals and beam split vacuum chamber mounting hole sealing installation before the locating surface that said beam split box body installs according to optical splitter location and vacuum chamber, and be according to the screw of mounting hole periphery and be fixed connection.
4. according to the bent face crystal light splitting of the said a kind of wavelength dispersion X-fluorescence instrument of claim 1, the light path axle center that it is characterized in that locating surface that said optical splitter location and vacuum chamber install and crystal carriage same simultaneously in.
5. according to the bent face crystal light splitting of the said a kind of wavelength dispersion X-fluorescence instrument of claim 1, it is characterized in that said crystal carriage curved surface is the coordinate data that calculates according to the method in the patent work principle of the present invention, process by numerically-controlled machine; Axle center hole is left in light path center in crystal carriage two sides, and bearing pin is penetrated by the light-splitting box both sides, and the crystal carriage is fixed on the beam split box body, and the crystal carriage can rotate along bearing pin; Bearing pin is according to screw thread and dual O-ring seals and beam split box body sealing installation.
6. according to the bent face crystal light splitting of the said a kind of wavelength dispersion X-fluorescence instrument of claim 1, it is characterized in that the opening that crystal is installed is left in the bottom of said beam split box body, opening part is sealed and installed with bonnet according to O-ring seals I; Crystal carriage angular setting push rod and back-moving spring are installed on the said bonnet, and crystal carriage angular setting push rod is sealing according to O-ring seals II and bonnet and installs; Crystal carriage angular setting push rod and back-moving spring are connected to the two ends of crystal carriage.Be connected according to screw between beam split box body and the bonnet.
7. according to the bent face crystal light splitting of the said a kind of wavelength dispersion X-fluorescence instrument of claim 1, it is characterized in that the slit width of said preceding slit conduit and back slit conduit can be changed according to the needs of different sample elements.
8. according to the bent face crystal light splitting of the said a kind of wavelength dispersion X-fluorescence instrument of claim 1, it is characterized in that said preceding slit conduit and beam split box body are in together in the vacuum, need not sealing, only need screw to connect; Back slit catheter proximal end is installed according to O-ring seals III and the sealing of light-splitting box body and function screw, and rear end and detector are installed with the screw sealing according to O-ring seals IV.
9. the method for work of the bent face crystal light splitting of a wavelength dispersion X-fluorescence instrument is characterized in that it may further comprise the steps:
(1) according to double curvature method or equiangular spiral method design beam split light path, calculate the coordinate of the segment of curve that is used for beam split in the light path, and press curvillnear coordinate worked crystal carriage, and the crystal film that processes is sticked on the crystal carriage, plane of crystal and the light path curve that calculates are matched;
(2) in being fixed on the crystal carriage in the beam split box body with bearing pin, cover bonnet then, withstand the crystal carriage back side with back-moving spring and crystal carriage angle adjustment lever that bonnet is provided with, by their acting in conjunction, turn crystal carriage is adjusted push rod, simultaneously the effect by back-moving spring, adjust the angle of crystal carriage within the specific limits, when electric signal is the highest, think that the crystal angle conforms to calculated value, lives adjustment hole with wax seal;
(3) the light-splitting box intracoelomic cavity is processed into wedge shape according to the shape of light path, to satisfy passing through of the required X fluorescence of beam split, at utmost reduces the scattering and the reflection of X ray simultaneously, accomplishes the interior physical dimension minimum of optical splitter simultaneously, improves the vacuum seal performance;
(4) slit conduit before the incident end of beam split box body is loaded onto is loaded onto back slit conduit at the exit end of beam split box body, and like this, preceding slit conduit, beam split box body, crystal carriage, crystal, back slit conduit constitute the beam split light path;
(5) detector is connected with back slit conduit, characteristic X-ray through crystal beam split and focusing shines on the detector, transfer light signal to electric signal, thereby the characteristic X ray strength of certain element that optical splitter is sub-elected carries out quantitative measurment, can detect the content of certain element in the sample like this;
(6) to keep vacuum state in the optical splitter, requiring has good sealing between per two parts that are connected, O-ring seals I, O-ring seals II are well contacted with sealing surface respectively with dual radially O-ring seals, and, guarantee the vacuum seal of light-dividing device according to screw in compression;
(7) optical splitter requires between per two parts that are connected the good location precision is arranged, and conforms to abstract optical dimensions to guarantee physics light path size that optical splitter constitutes; This reaches designing requirement with regard to the dimensional accuracy that needs each parts, and when mounted simultaneously, each locating surface will be in conjunction with closely, and according to screw in compression; The place locating surface is a rigidity, does not move with the O-ring seals distortion of sealing usefulness; Wherein the location dimension of most critical be crystal axis center and optical splitter and vacuum chamber the installing and locating face apart from size, this size should be easy to processing and measure;
(8) the incident end of the beam split box body of light-dividing device inserted vacuum chamber together with preceding slit conduit, with dual radially O-ring seals the junction is sealed, and the locating surface of light-dividing device and vacuum chamber compressed, crystal and crystal carriage are fixed on the crystal axis place of beam split box body with bearing pin, first-class bonnet, will back slit and detector and after light-splitting box reliably is connected, light-dividing device has just possessed the condition that secondary x rays that sample excitation is gone out carries out beam split.
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