CN101775643A - 一种整体“u”形硅芯的生产工艺 - Google Patents
一种整体“u”形硅芯的生产工艺 Download PDFInfo
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- CN101775643A CN101775643A CN200910227779A CN200910227779A CN101775643A CN 101775643 A CN101775643 A CN 101775643A CN 200910227779 A CN200910227779 A CN 200910227779A CN 200910227779 A CN200910227779 A CN 200910227779A CN 101775643 A CN101775643 A CN 101775643A
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 109
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 18
- 238000005516 engineering process Methods 0.000 title abstract description 10
- 239000013078 crystal Substances 0.000 claims abstract description 68
- 238000010438 heat treatment Methods 0.000 claims abstract description 29
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 19
- 239000010703 silicon Substances 0.000 claims abstract description 19
- 238000002844 melting Methods 0.000 claims abstract description 13
- 230000008018 melting Effects 0.000 claims abstract description 13
- 239000000463 material Substances 0.000 claims abstract description 6
- 239000000446 fuel Substances 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 19
- 238000002425 crystallisation Methods 0.000 claims description 12
- 230000008025 crystallization Effects 0.000 claims description 12
- 238000007664 blowing Methods 0.000 claims description 4
- 230000004927 fusion Effects 0.000 claims description 4
- 239000000155 melt Substances 0.000 claims description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract description 7
- 239000002994 raw material Substances 0.000 abstract 5
- 238000005265 energy consumption Methods 0.000 abstract 1
- 238000005452 bending Methods 0.000 description 12
- 238000006722 reduction reaction Methods 0.000 description 12
- 229920005591 polysilicon Polymers 0.000 description 6
- 239000007789 gas Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 150000002431 hydrogen Chemical group 0.000 description 1
- 238000011946 reduction process Methods 0.000 description 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
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CN 200910227779 CN101775643B (zh) | 2009-12-23 | 2009-12-23 | 一种整体“u”形硅芯的生产工艺 |
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CN 200910227779 CN101775643B (zh) | 2009-12-23 | 2009-12-23 | 一种整体“u”形硅芯的生产工艺 |
Publications (2)
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CN101775643A true CN101775643A (zh) | 2010-07-14 |
CN101775643B CN101775643B (zh) | 2012-06-13 |
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CN 200910227779 Active CN101775643B (zh) | 2009-12-23 | 2009-12-23 | 一种整体“u”形硅芯的生产工艺 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102351187A (zh) * | 2011-07-01 | 2012-02-15 | 乐山乐电天威硅业科技有限责任公司 | 硅芯拉制工艺及硅芯拉制过程中的原料棒预热方法 |
CN102912428A (zh) * | 2012-10-13 | 2013-02-06 | 洛阳金诺机械工程有限公司 | 一种宝石晶体的拉制装置及其方法 |
CN103160914A (zh) * | 2011-12-09 | 2013-06-19 | 洛阳金诺机械工程有限公司 | 一种c形硅芯的拉制方法 |
CN108458916A (zh) * | 2017-02-20 | 2018-08-28 | 江苏协鑫软控设备科技发展有限公司 | 多晶硅检测采样设备 |
CN111005070A (zh) * | 2019-12-31 | 2020-04-14 | 亚洲硅业(青海)股份有限公司 | П形硅芯拉制装置、п形硅芯拉制方法以及п形硅芯 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2887896Y (zh) * | 2006-04-14 | 2007-04-11 | 刘朝轩 | 一次可生产多根硅芯带“u”形口的高频线圈 |
KR101811872B1 (ko) * | 2007-09-20 | 2017-12-22 | 미츠비시 마테리알 가부시키가이샤 | 다결정 실리콘 반응로 및 다결정 실리콘의 제조 방법 |
JP5309963B2 (ja) * | 2007-12-28 | 2013-10-09 | 三菱マテリアル株式会社 | 多結晶シリコンのシリコン芯棒組立体及びその製造方法、多結晶シリコン製造装置、多結晶シリコン製造方法 |
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2009
- 2009-12-23 CN CN 200910227779 patent/CN101775643B/zh active Active
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102351187A (zh) * | 2011-07-01 | 2012-02-15 | 乐山乐电天威硅业科技有限责任公司 | 硅芯拉制工艺及硅芯拉制过程中的原料棒预热方法 |
CN103160914A (zh) * | 2011-12-09 | 2013-06-19 | 洛阳金诺机械工程有限公司 | 一种c形硅芯的拉制方法 |
CN102912428A (zh) * | 2012-10-13 | 2013-02-06 | 洛阳金诺机械工程有限公司 | 一种宝石晶体的拉制装置及其方法 |
CN102912428B (zh) * | 2012-10-13 | 2015-09-16 | 洛阳金诺机械工程有限公司 | 一种宝石晶体的拉制装置及其方法 |
CN108458916A (zh) * | 2017-02-20 | 2018-08-28 | 江苏协鑫软控设备科技发展有限公司 | 多晶硅检测采样设备 |
CN108458916B (zh) * | 2017-02-20 | 2024-04-02 | 江苏协鑫软控设备科技发展有限公司 | 多晶硅检测采样设备 |
CN111005070A (zh) * | 2019-12-31 | 2020-04-14 | 亚洲硅业(青海)股份有限公司 | П形硅芯拉制装置、п形硅芯拉制方法以及п形硅芯 |
CN111005070B (zh) * | 2019-12-31 | 2020-12-15 | 亚洲硅业(青海)股份有限公司 | П形硅芯拉制装置、п形硅芯拉制方法以及п形硅芯 |
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CN101775643B (zh) | 2012-06-13 |
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Owner name: LUOYANG JINNUO MACHINERY ENGINEERING CO., LTD. Free format text: FORMER OWNER: LIU ZHAOXUAN Effective date: 20111115 |
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Effective date of registration: 20111115 Address after: 471009 Jin Xin of Henan Province, Luoyang national hi tech Industrial Development Zone, Road No. 2 Luoyang Jinnuo Machinery Engineering Co Ltd Applicant after: Luoyang Jinnuo Mechanical Engineering Co., Ltd. Address before: 471009 Henan province Luoyang Xigong Road No. 1, No. 24 Jiashuyuan monocrystalline silicon factory building 1 unit 101 room Applicant before: Liu Chaoxuan |
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