CN101750032A - Detection method and device of spherical curvature radius based on equivalent plane mirror - Google Patents
Detection method and device of spherical curvature radius based on equivalent plane mirror Download PDFInfo
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- CN101750032A CN101750032A CN200910244961A CN200910244961A CN101750032A CN 101750032 A CN101750032 A CN 101750032A CN 200910244961 A CN200910244961 A CN 200910244961A CN 200910244961 A CN200910244961 A CN 200910244961A CN 101750032 A CN101750032 A CN 101750032A
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Abstract
The invention relates to a detection method and a device of spherical curvature radius based on an equivalent plane mirror. The method comprises: converging the collimated light emitted by an autocollimator at a focal point by an auxiliary lens, projecting converged light beams on a spherical surface to be detected, forming the equivalent plane mirror by adjusting the distance between the auxiliary lens and the spherical surface to be detected, and reflecting back the collimated light beams emitted by the autocollimator to the autocollimator in the form of the collimated light and imaging the light beams on a photoelectric receiver. When the peak of the spherical surface to be detected is at the focal point of the auxiliary lens or the center of the sphere of the spherical surface is at the focal point of the auxiliary lens, the auxiliary lens and the spherical surface to be detected form the equivalent plane mirror for two times, and the difference value of the distances between the auxiliary lens and the spherical surface to be detected in the two processes is the curvature radius of the spherical surface to be detected. The invention has the advantages of quick detection speed and strong capacity of resisting disturbance and can be used for measuring the curvature radius in the assembly of spherical lenses and optical systems.
Description
[technical field]:
The invention belongs to photoelectric detection technology field, relate to a kind of sphere curvature radius detection method and device based on equivalent plane mirror.
[background technology]:
At optical field, the radius of curvature measurement of lens is significant, is an important parameter in optical lens processing, detection and the assembling process, and its measurement is a difficult point of optical field always.The measurement of contact is easy to realize, but measuring speed is slow and can cause the damage of lens surface; Non-contacting optical measurement mode has been avoided the damage to lens, and typical measuring method is interferometry, but such measuring method is to the having relatively high expectations of system light path adjustment, and is subject to the influence of environmental interference.Above measuring method all is to adopt to derive and draw for the radius-of-curvature of lens.
In recent years, photoelectric auto-collimator maturation is applied to fields measurements such as optics, machinery, adopts the aiming mode of electronic eyepiece, and its aiming and reading are more objective; The application of high-precision sensor has also further improved its aiming and measuring accuracy.
[summary of the invention]: the present invention seeks to overcome the prior art above shortcomings, a kind of sphere curvature radius detection method and device based on equivalent plane mirror is provided.
The present invention utilizes the subsidiary lens, constitute equivalent plane mirror with sphere to be measured (convex surface or concave surface), the collimated light that photoelectric auto-collimator is launched, focus on attachment lens, and project lens surface to be measured, make attachment lens and surface to be measured constitute the equivalent plane catoptron,, image in once more on the photelectric receiver of photoelectric auto-collimator collimated light reflected back photoelectricity autocollimator.When changing attachment lens with surface distance to be measured, attachment lens with constitute equivalent plane mirror the surperficial second time to be measured, the difference of attachment lens and surface distance to be measured is surface curvature radius to be measured in twice process.
Sphere curvature radius detection method based on equivalent plane mirror provided by the invention may further comprise the steps:
The first, measurement is preceding with attachment lens, and cooperates installation with photoelectric auto-collimator, and the collimated light that photoelectric auto-collimator is sent focuses on the focal point F of attachment lens;
The second, use centralizer to be installed on sphere to be measured to measure on the optical axis near the attachment lens focus;
Three, adjust the surface distance of attachment lens and sphere to be measured, when the surface vertices of sphere to be measured is positioned at the attachment lens focus, the surface of attachment lens and sphere to be measured constitutes equivalent plane mirror, then reflected back is gone forward side by side and still is collimated light into the light beam of photoelectricity autocollimator, and this moment, photoelectric auto-collimator entered accurate aiming state;
Four, along measuring light axial adjustment attachment lens and spherical distance to be measured, when the centre of sphere of sphere to be measured is positioned at the attachment lens focus, constitute equivalent plane mirror once more, photoelectric auto-collimator enters accurate aiming state once more;
When photoelectric auto-collimator entered accurate aiming state for twice, the spacing difference of attachment lens and spherical face to be measured was the radius-of-curvature of sphere to be measured.
Described sphere to be measured comprises protruding sphere and concave spherical surface.
The present invention provides a kind of device that is used to realize the above detection method simultaneously, this device comprises the photoelectric auto-collimator that is used to launch and receive collimated light, the emission light path of photoelectric auto-collimator is promptly measured to cooperate on the optical axis attachment lens is installed, and sphere to be measured uses centralizer to be fixed on the attachment lens back.
Described photoelectric auto-collimator and attachment lens are installed on the translation control device by stationary installation, and photoelectric auto-collimator and attachment lens can move the distance adjustment that is used between measuring process attachment lens and sphere to be measured on the translation control device.Mobile distance measuring device is installed on the translation control device simultaneously, and when being used for photoelectric auto-collimator and entering accurate aiming state for twice, the spacing difference of attachment lens and spherical face to be measured is measured.
Advantage of the present invention and good effect:
1, the present invention is a plane mirror with attachment lens and surperficial lens equivalent to be measured, is convenient to aim at collimator;
2, adopt collimator to aim at, remove traditional aiming eyepiece, more objective;
3, attachment lens and to be measured surperficial when reaching the equivalent plane mirror effect twice, the spacing difference on attachment lens and surface to be measured is surface curvature radius to be measured, measures fast, accurately.
[description of drawings]:
Fig. 1 is a nonreentrant surface instrumentation plan of the present invention.Equivalent plane catoptron effect when wherein presentation surface summit in dotted line surface is positioned at the attachment lens focus, solid line surface are surperficial centre of sphere equivalent plane mirror effects when being positioned at the attachment lens focus.
Fig. 2 is the index path of attachment lens of the present invention and twice equivalent plane mirror of nonreentrant surface, when the surperficial centre of sphere to be measured or surface vertices to be measured are positioned at the attachment lens focus, constitutes equivalent plane mirror twice.
Fig. 3 is the recessed surface curvature radius measurement of a present invention synoptic diagram.Equivalent plane mirror effect when wherein dotted line surface is positioned at the attachment lens focus for the recessed surperficial centre of sphere, solid line are recessed surface vertices equivalent plane mirror effect when being positioned at the attachment lens focus.
Fig. 4 is the index path that attachment lens of the present invention and recessed surface constitute equivalent plane mirror; When recessed surface vertices to be measured or the centre of sphere are positioned at the attachment lens focus, constitute equivalent plane mirror twice.
Fig. 5 increases the translating device synoptic diagram for the present invention.
Fig. 6 increases translating device and linear displacement measurement mechanism synoptic diagram for the present invention.
Wherein 1 is photoelectric auto-collimator, and 2 is the subsidiary lens, and 3 is nonreentrant surface to be measured, and 4 is recessed surface to be measured, and 5 is stationary installation, and 6 is translating device, and 7 is linear measuring assembly.
[embodiment]:
Embodiment 1:
Convex lens surface radius of curvature measurement as shown in Figure 1.
Measuring method mainly measures its formation equivalent plane mirror by adjusting attachment lens and surface spacing to be measured, and concrete measuring process is as follows:
1, before the measurement,, cooperates installation with photoelectric auto-collimator, use centralizer to be installed on the measurement optical axis on convex lens to be measured again, adjust attachment lens and lenticular spacing to be measured focal length near attachment lens earlier with attachment lens.Open photoelectric auto-collimator afterwards, adjust attachment lens and surface spacing to be measured,, aim at by autocollimator observation reflected signal along optical axis direction; When lens surface to be measured summit was positioned at the attachment lens focus, attachment lens and surface to be measured constituted equivalent plane mirror, and photoelectric auto-collimator will be in accurate aiming state.
2, after this reduce the distance of attachment lens and lens to be measured along optical axis direction, when the lens surface centre of sphere to be measured is positioned at the attachment lens focus, attachment lens and surface to be measured constitute equivalent plane mirror once more, and reflected back collimated light, photoelectric auto-collimator enter accurate aiming state once more.
3, constitute equivalent plane for twice, promptly during the accurate aiming state of twice of photoelectric auto-collimator, attachment lens and surface spacing difference to be measured (distance that photoelectric auto-collimator and attachment lens move) are the radius-of-curvature of lens surface to be measured.
This example is a concavees lens surface curvature radius testing process, as shown in Figure 3.
Measuring principle is with embodiment 1.
1, measures the preceding attachment lens of selecting and cooperate installation with photoelectric auto-collimator, and concavees lens to be measured are fixed on the measurement optical axis.
2, adjust attachment lens and concavees lens spacing to be measured, utilize photoelectric auto-collimator to aim at, when surface vertices to be measured was positioned at the attachment lens focus, attachment lens and surface to be measured constituted equivalent plane mirror, and photoelectric auto-collimator reaches accurate aiming state.
3, increase attachment lens and concavees lens spacing to be measured, when the surperficial centre of sphere to be measured was positioned at the attachment lens focus, attachment lens and surface to be measured constituted equivalent plane mirror once more, and photoelectric auto-collimator enters accurate aiming state once more.
4, accurately aim in the state procedure for twice, attachment lens and surface spacing difference to be measured are concavees lens surface curvature radius to be measured.
This example is a measurement mechanism, as shown in Figure 5 and Figure 6, this device comprises the photoelectric auto-collimator (1) that is used to launch and receive collimated light, the emission light path of photoelectric auto-collimator (1) is promptly measured to cooperate on the optical axis attachment lens (2) is installed, and sphere to be measured (3) uses centralizer to be fixed on attachment lens (2) back.
Described photoelectric auto-collimator and attachment lens are installed on the translation control device (6) by stationary installation (5), and photoelectric auto-collimator and attachment lens can be gone up at translation control device (6) and move the distance adjustment that is used between measuring process attachment lens and sphere to be measured.Mobile distance measuring device (7) is installed on translation control device (6) simultaneously, and when being used for photoelectric auto-collimator and entering accurate aiming state for twice, the spacing difference of attachment lens and spherical face to be measured is measured.
Claims (5)
1. sphere curvature radius detection method based on equivalent plane mirror is characterized in that this detection method may further comprise the steps:
The first, measurement is preceding cooperates installation with attachment lens (2) with photoelectric auto-collimator (1), and the collimated light that photoelectric auto-collimator is sent focuses on the focal point F of attachment lens;
The second, sphere to be measured (3) is used centralizer be installed in to measure on the optical axis near the attachment lens focus;
Three, adjust the distance of attachment lens and sphere to be measured, when the summit of sphere to be measured is positioned at the attachment lens focus, the surface of attachment lens and sphere to be measured constitutes equivalent plane mirror, then reflected back is gone forward side by side and still is collimated light into the light beam of photoelectricity autocollimator (1), and this moment, photoelectric auto-collimator entered accurate aiming state;
Four, along measuring light axial adjustment attachment lens and spherical distance to be measured, when the centre of sphere of sphere to be measured is positioned at the attachment lens focus, constitute equivalent plane mirror once more, photoelectric auto-collimator enters accurate aiming state once more;
When photoelectric auto-collimator entered accurate aiming state for twice, the spacing difference of attachment lens and spherical face to be measured was the radius-of-curvature of sphere to be measured.
2. detection method according to claim 1 is characterized in that described sphere to be measured comprises protruding sphere and concave spherical surface.
3. device of realizing the described detection method of claim 1, it is characterized in that this device comprises the photoelectric auto-collimator (1) that is used to launch and receive collimated light, the lens barrel front end cooperation of photoelectric auto-collimator (1) is equipped with attachment lens (2), and sphere to be measured (3) is fixed on attachment lens (2) back with centralizer.
4. device according to claim 3, it is characterized in that photoelectric auto-collimator and attachment lens are installed on the translation control device (6) by stationary installation (5), and photoelectric auto-collimator and attachment lens can be gone up and move the distance adjustment that is used between measuring process attachment lens and sphere to be measured at translation control device (6).
5. device according to claim 4, it is characterized in that being equipped with simultaneously on the translation control device (6) mobile distance measuring device (7), when being used for photoelectric auto-collimator and entering accurate aiming state for twice, the spacing difference of attachment lens and spherical face to be measured is measured.
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| CN200910244961A CN101750032A (en) | 2009-12-21 | 2009-12-21 | Detection method and device of spherical curvature radius based on equivalent plane mirror |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102735188A (en) * | 2012-06-21 | 2012-10-17 | 南京邮电大学 | Method for measuring radius of curvature of spherical surface |
| CN103673928A (en) * | 2013-12-21 | 2014-03-26 | 大连宏海新能源发展有限公司 | High-precision measuring device for micro-curvature of optical reflecting mirror |
| CN105157617A (en) * | 2015-08-27 | 2015-12-16 | 浙江大学 | Spherical surface automatic centering method applied to spherical surface optical element surface defect detection |
| CN106679595A (en) * | 2016-12-29 | 2017-05-17 | 福州华友光学仪器有限公司 | Center offset and wedge angle detecting instrument for wedge angle spherical lens and measurement method |
| CN106908016A (en) * | 2017-03-06 | 2017-06-30 | 中国科学院光电技术研究所 | A kind of concave surface hysteroscope curvature radius measurement method based on light-field camera |
| CN111288933A (en) * | 2020-02-28 | 2020-06-16 | 浙江大学 | Automatic centering method for spherical or rotationally symmetric aspheric optical element |
| CN114485499A (en) * | 2021-12-28 | 2022-05-13 | 浙江大学嘉兴研究院 | Automatic measurement device and method for curvature radius and spherical center position of spherical lens |
| CN114993206A (en) * | 2022-06-10 | 2022-09-02 | 北京创思工贸有限公司 | Large-caliber convex surface shape detection system |
-
2009
- 2009-12-21 CN CN200910244961A patent/CN101750032A/en active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102735188A (en) * | 2012-06-21 | 2012-10-17 | 南京邮电大学 | Method for measuring radius of curvature of spherical surface |
| CN102735188B (en) * | 2012-06-21 | 2014-09-10 | 南京邮电大学 | Method for measuring radius of curvature of spherical surface |
| CN103673928A (en) * | 2013-12-21 | 2014-03-26 | 大连宏海新能源发展有限公司 | High-precision measuring device for micro-curvature of optical reflecting mirror |
| CN105157617A (en) * | 2015-08-27 | 2015-12-16 | 浙江大学 | Spherical surface automatic centering method applied to spherical surface optical element surface defect detection |
| CN105157617B (en) * | 2015-08-27 | 2018-01-30 | 浙江大学 | Method during sphere applied to spherical optics element surface defects detection is determined automatically |
| CN106679595A (en) * | 2016-12-29 | 2017-05-17 | 福州华友光学仪器有限公司 | Center offset and wedge angle detecting instrument for wedge angle spherical lens and measurement method |
| CN106908016A (en) * | 2017-03-06 | 2017-06-30 | 中国科学院光电技术研究所 | A kind of concave surface hysteroscope curvature radius measurement method based on light-field camera |
| CN111288933A (en) * | 2020-02-28 | 2020-06-16 | 浙江大学 | Automatic centering method for spherical or rotationally symmetric aspheric optical element |
| CN114485499A (en) * | 2021-12-28 | 2022-05-13 | 浙江大学嘉兴研究院 | Automatic measurement device and method for curvature radius and spherical center position of spherical lens |
| CN114993206A (en) * | 2022-06-10 | 2022-09-02 | 北京创思工贸有限公司 | Large-caliber convex surface shape detection system |
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Open date: 20100623 |