CN101750027B - Three-dimensional feature detection device - Google Patents
Three-dimensional feature detection device Download PDFInfo
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- CN101750027B CN101750027B CN2008101801533A CN200810180153A CN101750027B CN 101750027 B CN101750027 B CN 101750027B CN 2008101801533 A CN2008101801533 A CN 2008101801533A CN 200810180153 A CN200810180153 A CN 200810180153A CN 101750027 B CN101750027 B CN 101750027B
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Abstract
The invention provides a three-dimensional feature detection device which contains at least two optical detection devices and an inclination angle adjusting mechanism. The at least two optical detection devices are arranged on the inclination angle adjusting mechanism to adjust the inclination angles of the optical detection devices. When the inclination angles of the at least two optical detection devices are changed, focal points of the at least two optical detection devices are kept on a same position; and a to-be-measured object is positioned within a field range of the at least two optical detection devices. The at least two optical detection devices are used for capturing image data for image reconstruction, namely the three-dimensional feature of the to-be-measured object can be obtained.
Description
Technical field
The present invention relates to a kind of optical detection apparatus, particularly relate to a kind of detector for three-dimensional appearance.
Background technology
It is a very important ring in the modern science and technology that accurate pattern detects, and when many first assemblies microminiaturization gradually, just more needs accurate and reliable detection technique to verify the precision of its microstructure size or pattern, with controlling performance and manufacturing process.Wherein utilize the measuring technique of optics non-contact detecting mode, can obtain the accurate topographic data in determinand surface by non-failure mode, be widely used in the various industries.
With reference to Fig. 1, when determinand 12 pattern surface slope were big, because of the optical microscope 11 normal object lens multiplying powers of using are below 20 times, this interval numerical aperture was too small, can cause determinand 12 surface reflections 13 can't enter optical microscope 11, and can't obtain determinand surface topography data.Therefore, often can only adopt numerical interpolation, supply the topographic data that is lacked, but can't measure actual appearance and size and coarseness data thereof.
TaiWan, China patent TW1229186 utilizes the linear sweep device at the double vision angle oblique light source of arranging in pairs or groups, can be in order to detect the general shape and the size of defective, and major advantage is for can faster detect large-area defective, and the judgement defective is raised or sunken.But can't accurately measure the micro-structural 3 D appearance and size, also not solve determinand pattern surface slope when big, the problem that surface signal can't be captured.
United States Patent (USP) 6,449,048 utilizes the interferometer angle that tilts, do not become vertical with the determinand sideslip direction, can directly use traditional vertical scanning interferometer (VSI) and phase shifting interferometer (PSI) hardware, continuous sweep determinand surface does not need to sew and mend technology with image, obtains the determinand surface topography.But still fail to solve the problem that the full azimuth pattern of determinand pattern surface slope when big obtained.
QED Technology company then develop with the inclination determinand and the rotation mode, obtain the bigger surface topography data of bigger surperficial determinand slope.But this kind mode is subject to less testing sample, if testing sample is bigger, in the time of can't cooperating to tilt, then can't use.
Summary of the invention
The present invention is directed to cutting, impression, grinding, the nanoprocessing industry of Advanced Manufacturing Technology, common advanced the detection and the checking core technology that the required micro-structure surface appearance and size of exploitation precision optical machinery, large-stroke nanometer are resolved and measured at a high speed.The present invention proposes a kind of detector for three-dimensional appearance, can effectively overcome determinand pattern surface slope when big, causes determinand surface reflection light signal can't enter microscope, and can't obtain the problem of determinand surface topography data.No matter be simple microstructure of systematicness or complicated microstructure, all utilized the present invention to carry out the detection of microstructure, can reach nano level application.
The detector for three-dimensional appearance of one enforcement example according to the present invention, it comprises at least two optical detection apparatuss and a bevel angle adjustment mechanism.This bevel angle adjustment mechanism sets up two optical detection apparatuss on it at least, to adjust the angle of inclination of this optical detection apparatus.When the angle of inclination of at least two optical detection apparatuss changed, the focus of at least two optical detection apparatuss maintained same position (or same focal plane), and makes determinand be positioned at the field range (Field of view) of this at least two optical detection apparatus.After these at least two optical detection apparatuss pick-up image data are carried out image reconstruction, can obtain the three-dimensional appearance of determinand.
The present invention utilizes tilted optical mode to detect framework, can obtain the bigger surface topography data of slope, and can be applicable to the situation that testing sample is inconvenient to tilt.In addition, the present invention utilizes the angle of inclination to adjust framework adjustable image pick-up unit to arbitrarily angled, to obtain the determinand image and to rebuild three-dimensional appearance; And can detect the appearance and size of microstructure appearance size and bigger surperficial determinand.
Description of drawings
Fig. 1 is the synoptic diagram that shows existing detector for three-dimensional appearance;
Fig. 2 to Fig. 4 shows that the present invention one implements the synoptic diagram of the detector for three-dimensional appearance of example;
Fig. 5 and Fig. 6 are the conceptual schematic view that shows detector for three-dimensional appearance of the present invention.
The main element symbol description:
11 optical microscopes, 12 determinands
13 reflected light
20 detector for three-dimensional appearance, 21 optical detection apparatuss
22 optical detection apparatuss, 23 arc orbits
25 hinges, 26 determinands
27 rotation platforms, 28 mobile platforms
30 motors, 31 lead screws
43 coupling shafts, 44 coupling shafts
50 detector for three-dimensional appearance, 51 optical detection apparatuss
52 optical detection apparatuss, 53 angle of inclination adjusting gears
55 determinands, 60 detector for three-dimensional appearance
61 deflection adjusting mechanisms
Embodiment
The implementation method of three-dimensional appearance detection system framework provided by the present invention will illustrate as follows with reference to the accompanying drawings, but described implementation is an illustration only, and be not to be its limitation.
As shown in Figure 2, detector for three-dimensional appearance 20 mainly comprises two optical detection apparatuss 21,22, the both sides of the arc orbit 23 that is placed in.Optical detection apparatus 21 utilizes hinge 25 to slide at arc orbit 23, optical detection apparatus 22 also utilizes hinge (it is provided with position class and is similar to the position of hinge 25 with respect to optical detection apparatus 21, but is not just seen among the figure by optical detection system 22 stops) to slide at arc orbit 23.Arc orbit 23 is formed in one, the tool favorable rigidity, and can promote the precision of optical detection apparatus 21,22 shift positions.
Can adjust the angle of inclination of optical detection apparatus 21 and 22 according to the path of this arc orbit 23, that is arc orbit 23 is a bevel angle adjustment mechanism.The center of arc of arc orbit 23 is the focusing imaging point of optical detection apparatus 21 and 22, and when the angle of inclination of optical detection apparatus 21 and 22 was changed, optical detection apparatus 21 and 22 focus maintained same position (same focal plane) at any time.In addition, drop on for the position that will make determinand 26 in the field range of optical detection apparatus 21 and 22, in the time of perhaps will obtaining the full azimuth image of determinand 26, can assist to finish capture work by determinand rotation platform 27 and mobile platform 28.
The practice of above-mentioned detector for three-dimensional appearance 20 can be as shown in Figures 3 and 4 framework, wherein Fig. 3 shows comprehensive architecture, Fig. 4 then is a side view.Rotate lead screw 31 via two groups of step motor 30, move the coupling shaft 43 and 44 that is connected in optical detection apparatus 21 and 22, make the hinge 25 (another hinge is not shown among the figure) of each optical detection apparatus 21 and 22 on arc orbit 23, to slide.The image obtained respectively of optical detection apparatus 21 and 22 can be sewed up via software and reconstruct the determinand pattern then.In addition, whether the decision of the appearance structure complexity of visual determinand needs the rotation and the mobile platform of determinand, to change different visual angles or detection position, obtains the three-dimensional appearance image of full azimuth.
In the practical application, be not to exceed with the foregoing description, arc orbit also can other bevel angle adjustment mechanism substitute, for example: attainable mechanisms such as linkage assembly, X-Y plane displacement platform, rotation platform.This optical detection apparatus 21,22 comprises optical microscope, interferometer etc.
Comprehensively above-mentioned, notion of the present invention as shown in Figure 5, a detector for three-dimensional appearance 50 comprises 51,52 and bevel angle adjustment mechanisms 53 of two optical detection apparatuss. Optical detection apparatus 51,52 utilizes bevel angle adjustment mechanism 53 to carry out the adjustment of position, angle of inclination, when the angle of inclination of optical detection apparatus 51 and 52 is changed, its focus still maintains same position (same focal plane) at any time, detects to carry out pattern at determinand 55.Detector for three-dimensional appearance 50 can be applicable to detect the simple microstructure of systematicness, as brightness enhancement film in the backlight module (BEF) etc.
If need to detect as during structure such as complicated curved surface or taper, complex micro structure is to depend merely on two groups of optical detection apparatuss and bevel angle adjustment mechanism still can't be finished detection, can finish testing and need can to adjust determinand deflection mechanism in the collocation.With reference to Fig. 6, a detector for three-dimensional appearance 60 is except that comprising 51,52 and bevel angle adjustment mechanisms 53 of two optical detection apparatuss, other comprises a determinand deflection adjusting mechanism 61, and it can comprise rotation platform for example shown in Figure 2 27 and mobile platform 28.
Generally speaking, the present invention utilizes tilted optical mode to detect framework, can obtain the bigger surface topography data of slope, and can be applicable to the situation that testing sample is inconvenient to tilt.In addition, the present invention utilizes the angle of inclination to adjust framework adjustable image pick-up unit to arbitrarily angled, to obtain the determinand image and to rebuild three-dimensional appearance; And can detect the appearance and size of microstructure appearance size and bigger surperficial determinand.
With application facet, for example be applied to the cylinder die processing machine of flat-panel screens industry backlight module, can after machining, directly on processing machine, detect machining precision, do not need workpiece is unloaded detection, if detect the machining precision deficiency, need to go up again again the trouble of machine location processing again, can save time, raise the efficiency.The microstructure that and for example can be applicable to semiconductor industry, flat-panel screens industry, optical element industry detects and the detection of optical element pattern.The present invention can be used for the microscope stand framework, in order to detect microstructure three micromorphologies of testing sample, particularly can overcome the bigger surface of slope and detect problem; Or be used to detect the appearance and size of the determinand (as aspheric mirror) on surface greatly, and can grasp product quality really, improve process efficiency.
Technology contents of the present invention and technical characterstic disclose as above, yet those skilled in the art still may do all replacement and modifications that does not deviate from spirit of the present invention based on teaching of the present invention.Therefore, it is disclosed that protection scope of the present invention should be not limited to implement example, and should comprise various do not deviate from replacement of the present invention and modifications, and contained by the scope of claims.
Claims (9)
1. a detector for three-dimensional appearance is characterized in that, comprises:
At least two optical detection apparatuss;
One bevel angle adjustment mechanism sets up this two optical detection apparatus on it at least, and adjusting the angle of inclination of this at least two optical detection apparatus, and this bevel angle adjustment mechanism is an arc orbit;
Wherein when the angle of inclination of this at least two optical detection apparatus changed, the focus of this at least two optical detection apparatus maintained same position, and makes determinand be positioned at the field range of this at least two optical detection apparatus.
2. detector for three-dimensional appearance according to claim 1, it is characterized in that: this at least two optical detection apparatus is provided with hinge, and utilize this hinge to make this at least two optical detection apparatus on arc orbit, move, to adjust the angle of inclination of this optical detection apparatus.
3. detector for three-dimensional appearance according to claim 1 is characterized in that: this arc orbit is formed in one.
4. detector for three-dimensional appearance according to claim 1 is characterized in that: this bevel angle adjustment mechanism is linkage assembly, X-Y plane displacement platform or rotation platform.
5. detector for three-dimensional appearance according to claim 1 is characterized in that: other comprises the deflection adjusting mechanism, to adjust the orientation angle of this determinand.
6. detector for three-dimensional appearance according to claim 5 is characterized in that: this deflection adjusting mechanism comprises a mobile platform and a rotation platform.
7. detector for three-dimensional appearance according to claim 1 is characterized in that: this at least two optical detection apparatus respectively arrange in pairs or groups one group of motor, lead screw and coupling shaft, and to drive moving of this at least two optical detection apparatus.
8. detector for three-dimensional appearance according to claim 1 is characterized in that: this optical detection apparatus comprises optical microscope, interferometer.
9. detector for three-dimensional appearance according to claim 1 is characterized in that: the focus of this optical detection apparatus maintains same focal plane.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2008101801533A CN101750027B (en) | 2008-12-01 | 2008-12-01 | Three-dimensional feature detection device |
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| CN2008101801533A CN101750027B (en) | 2008-12-01 | 2008-12-01 | Three-dimensional feature detection device |
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| CN101750027A CN101750027A (en) | 2010-06-23 |
| CN101750027B true CN101750027B (en) | 2011-08-10 |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105547647B (en) * | 2015-12-05 | 2019-01-29 | 中国航空工业集团公司洛阳电光设备研究所 | A kind of big visual field parallel light tube device |
| CN106813899A (en) * | 2016-12-19 | 2017-06-09 | 李业清 | Fixed screen optical detection apparatus |
| CN107345798A (en) * | 2017-07-25 | 2017-11-14 | 爱佩仪中测（成都）精密仪器有限公司 | Ensure the accurate implementation method of 3 D measuring instrument focus |
| CN107389010A (en) * | 2017-07-25 | 2017-11-24 | 爱佩仪中测（成都）精密仪器有限公司 | Improve the supporting mechanism of three-dimensional measurement instrument measurement accuracy |
| CN109387514A (en) * | 2018-10-30 | 2019-02-26 | 德星技术（苏州）有限公司 | A kind of filter screen three-dimensional detection system |
| CN110687018B (en) * | 2019-09-24 | 2021-07-02 | 武汉大学 | 3D contact angle measuring device and measuring method |
| CN112611337B (en) * | 2020-11-23 | 2022-07-08 | 江苏科技大学 | Three-dimensional measurement device and method based on binocular stereo vision |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1271085A (en) * | 1999-04-15 | 2000-10-25 | 奥托·博克矫形工业两合公司 | Method for measuring limb part |
| JP2002040352A (en) * | 2000-07-21 | 2002-02-06 | Minolta Co Ltd | Scanner and three-dimensional measuring device |
| CN1600278A (en) * | 2003-09-27 | 2005-03-30 | 宝元科技股份有限公司 | Device for scanning teeth mode |
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2008
- 2008-12-01 CN CN2008101801533A patent/CN101750027B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1271085A (en) * | 1999-04-15 | 2000-10-25 | 奥托·博克矫形工业两合公司 | Method for measuring limb part |
| JP2002040352A (en) * | 2000-07-21 | 2002-02-06 | Minolta Co Ltd | Scanner and three-dimensional measuring device |
| CN1600278A (en) * | 2003-09-27 | 2005-03-30 | 宝元科技股份有限公司 | Device for scanning teeth mode |
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| CN101750027A (en) | 2010-06-23 |
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