CN101745993A - Method for forming windmill-shaped scribing sheet groove structures - Google Patents
Method for forming windmill-shaped scribing sheet groove structures Download PDFInfo
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- CN101745993A CN101745993A CN200810044083A CN200810044083A CN101745993A CN 101745993 A CN101745993 A CN 101745993A CN 200810044083 A CN200810044083 A CN 200810044083A CN 200810044083 A CN200810044083 A CN 200810044083A CN 101745993 A CN101745993 A CN 101745993A
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Abstract
The invention discloses a method for forming windmill-shaped scribing sheet groove structures, which comprises the following steps: the first step, generating scribing sheet groove data in a rectangular array according to the dimension of chips and the arrangement number of the chips; the second step, determining the data of placeholder pattern units and generating a plurality of placeholder pattern units; the third step, placing each placeholder pattern unit into scribing sheet grooves on the periphery of the rectangular array and ranging each placeholder pattern unit into a windmill shape in the scribing sheet grooves on the periphery of the rectangular array; and the fourth step, removing the layers of the scribing sheet grooves in the positions of the placeholder pattern units by utilizing Boolean operation for causing the scribing sheet grooves on the periphery of the rectangular array to form the windmill shape. The invention realizes the originally complicated data design of the windmill-shaped scribing sheet grooves, so the process use pattern units are arranged on the periphery of the scribing sheet grooves according to the regularity of the windmill shape.
Description
Technical field
The present invention relates to a kind of semiconductor fabrication, be specifically related to a kind of method that forms windmill-shaped scribing sheet groove structures.
Background technology
In semi-conductive manufacture process, need carry out the location of chip by the photoetching alignment, concrete grammar is that scribe line is set around chip, places on the various technologies simultaneously in scribe line or the mark that will use on the product, as photoetching alignment mark.
Existing scribing sheet groove structures forms rectangular array as shown in Figure 1.Can arrange 5 * 4 chips in this rectangular array.
But progress along with semiconductor technology, the size of chip is constantly dwindled, in order to keep and improve the utilization rate of silicon area, the width of scribe line also needs corresponding dwindling, and can not all dwindle for the various marks that must be placed in the scribe line in manufacturing, for example be placed on the photoetching alignment mark in the ragged edge scribe line, therefore the scribe line of this rectangular array has limited the utilization rate of silicon area.
Summary of the invention
Technical problem to be solved by this invention provides a kind of method that forms windmill-shaped scribing sheet groove structures, can form windmill-shaped scribing sheet groove with this method, thereby improves the utilization rate of silicon area.
For solving the problems of the technologies described above, the technical solution that the present invention forms the method for windmill-shaped scribing sheet groove structures is may further comprise the steps:
The first step according to the size of chip and the number of permutations of chip, generates the scribe line data of rectangular array;
Second goes on foot, and determines the data of occupy-place graphic element, generates a plurality of occupy-place graphic elements;
The 3rd step was positioned over each occupy-place graphic element in the described rectangular array scribe line all around, and each occupy-place graphic element is arranged in windmill shape in the scribe line around the described rectangular array;
The 4th step, utilize Boolean calculation that the scribe line level on the occupy-place graphic element position is removed, make rectangular array scribe line all around form the windmill shape.
The width of described occupy-place graphic element is less than the scribe line width around being positioned in the described rectangular array.
The total length of the occupy-place graphic element on each limit of described rectangular array is no more than half of each limit length of side of rectangular array.
The technique effect that the present invention can reach is:
The present invention utilizes the occupy-place graphic element to stop other technology to be placed on the zone at its place with graphic element by the occupy-place graphic element is set on scribe line.Regularity by the occupy-place graphic element is arranged, and forms the windmill-shaped scribing sheet groove structures that needs.
The present invention has realized the windmill-shaped scribing sheet groove design data of original more complicated, makes technology with graphic element regularly arranged around scribe line by windmill shape.
Description of drawings
The present invention is further detailed explanation below in conjunction with the drawings and specific embodiments:
Fig. 1 is the schematic diagram of the scribing sheet groove structures of prior art rectangular array;
Fig. 2 is the schematic diagram of windmill-shaped scribing sheet groove structures;
Fig. 3 is the method schematic diagram that the present invention forms windmill-shaped scribing sheet groove structures.
Among the figure, inner scribe line width in the A scribing sheet groove structures, the scribe line width around in the B scribing sheet groove structures, B1, B2, B3, R1, R2 occupy-place graphic element, the initial point of O occupy-place graphic element.
The specific embodiment
In order to dwindle the area of scribe line in ground to the greatest extent, improve the utilization rate of silicon area, the windmill shape that scribing sheet groove structures is formed is as shown in Figure 2 arranged.
The formation method of the scribing sheet groove structures that this windmill shape is arranged may further comprise the steps:
1, utilizes prior art,, generate the scribe line data of rectangular array according to the size of chip and the number of permutations of chip;
2, determine the data of occupy-place graphic element, generate the occupy-place graphic element;
A, determine the size of each occupy-place graphic element;
The width of occupy-place graphic element is less than the scribe line width around being positioned in the scribing sheet groove structures;
The length of each occupy-place graphic element is no more than the chip size corresponding with it;
The total length of the occupy-place graphic element on each limit of rectangular array of scribing sheet groove structures is less than half of each limit length of side of rectangular array;
B, according to the number of permutations of chip, the number of needed occupy-place graphic element on every limit around determining.
3, the occupy-place graphic element is positioned in the rectangular array scribe line all around,, arranges counterclockwise successively, make each occupy-place graphic element in the scribe line around the described rectangular array, be arranged in windmill shape to be starting point near each limit mid point of rectangular array or the mid point; In last occupy-place graphic element of every limit of rectangular array the technology special construction is set.
4, utilize Boolean calculation that the scribe line level on the occupy-place graphic element position is removed, make rectangular array scribe line all around form the windmill shape.
The occupy-place graphic element can stop other technology to be placed on the zone at its place with graphic element.Because the total length of the occupy-place graphic element on each limit of rectangular array approximately is this length of side of rectangular array half, so the occupy-place graphic element on each limit only occupies scribe line around the rectangular array half.
Be provided with the technology special construction in every last occupy-place graphic element of limit, this structure is as the special construction on the scribe line.
By the following method, can form the chip used 400 * 450um that is of a size of, the arrangements of chips number is that 5 * 4 width is the scribing sheet groove structures that the windmill shape of 50um is arranged:
1, utilize prior art, read in chip size (CX=400um, CY=450um) and number of permutations (AX=5 AY=4), generates the scribe line data of rectangular array, as shown in Figure 1; In this rectangular array, being positioned at inner scribe line width A is 50um, and the scribe line width B around being positioned at is 48um;
2, generate the occupy-place graphic element, as shown in Figure 3;
A, determine around the number of needed occupy-place graphic element on every limit;
The number that goes up following occupy-place graphic element is: (AX+1)/and 2=3
The number of limit, left and right sides occupy-place graphic element is: (AY+1)/and 2=2
B, determine the size of each occupy-place graphic element;
The width of occupy-place graphic element should be less than 48um, and the width that makes the occupy-place graphic element is 42um, can make this position keep the scribe line width of 6um like this;
The length that goes up following occupy-place graphic element is no more than CX;
The length of limit, left and right sides occupy-place graphic element is no more than CY;
Then the coordinate of each occupy-place graphic element is:
With the center on every limit of rectangular array initial point O as each occupy-place graphic element, the directions X scope of last following first occupy-place graphic element B1 is that 2um is to CX/2, the directions X scope CX/2 of second occupy-place graphic element B2 is to 3*CX/2, and the scope 3*CX/2 of the 3rd occupy-place graphic element B3 is to 5*CX/2; The Y direction scope of limit, the left and right sides first occupy-place graphic element R1 be 2um to CY, the Y direction scope CY of second occupy-place graphic element R2 is to 2*CY.
C, in last occupy-place graphic element of every limit, produce the technology special construction;
3, the center with every limit around the rectangular array is a starting point, the occupy-place graphic element that is generated is placed on successively in the scribe line on each limit around the rectangular array, and the occupy-place graphic element after the stack covers fully and begins the zone of 2um to each summit, limit from each center, limit;
4, in scribe line, place other inside and outside technology graphic elements, since the existence of occupy-place graphic element, the zone at each occupy-place graphic element place, limit around the technology graphic element can not be placed in.
5, utilize Boolean calculation that the cutting of the scribe line level on the occupy-place graphic element position is removed, just can form the scribe line data of windmill shape, as shown in Figure 3.
The present invention has realized the windmill-shaped scribing sheet groove design data of original more complicated, makes technology with graphic element regularly arranged around scribe line by windmill shape.
Claims (4)
1. a method that forms windmill-shaped scribing sheet groove structures is characterized in that, may further comprise the steps:
The first step according to the size of chip and the number of permutations of chip, generates the scribe line data of rectangular array;
Second goes on foot, and determines the data of occupy-place graphic element, generates a plurality of occupy-place graphic elements;
The 3rd step was positioned over each occupy-place graphic element in the described rectangular array scribe line all around, and each occupy-place graphic element is arranged in windmill shape in the scribe line around the described rectangular array;
The 4th step, utilize Boolean calculation that the scribe line level on the occupy-place graphic element position is removed, make rectangular array scribe line all around form the windmill shape.
2. the method for formation windmill-shaped scribing sheet groove structures according to claim 1 is characterized in that: the width of described occupy-place graphic element is less than the scribe line width around being positioned in the described rectangular array.
3. the method for formation windmill-shaped scribing sheet groove structures according to claim 1 and 2 is characterized in that: the total length of the occupy-place graphic element on each limit of described rectangular array is less than half of each limit length of side of rectangular array.
4. the method for formation windmill-shaped scribing sheet groove structures according to claim 3 is characterized in that: the length of described each occupy-place graphic element is no more than the size of chip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100440839A CN101745993B (en) | 2008-12-10 | 2008-12-10 | Method for forming windmill-shaped scribing sheet groove structures |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100440839A CN101745993B (en) | 2008-12-10 | 2008-12-10 | Method for forming windmill-shaped scribing sheet groove structures |
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| CN101745993A true CN101745993A (en) | 2010-06-23 |
| CN101745993B CN101745993B (en) | 2012-04-18 |
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| CN2008100440839A Active CN101745993B (en) | 2008-12-10 | 2008-12-10 | Method for forming windmill-shaped scribing sheet groove structures |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103050490A (en) * | 2011-10-13 | 2013-04-17 | 上海华虹Nec电子有限公司 | Automatic design method of scribing slot frame |
| CN103337454A (en) * | 2013-05-30 | 2013-10-02 | 深圳市锐骏半导体有限公司 | Design method of grooved MOS scribing groove |
| CN114113091A (en) * | 2021-11-24 | 2022-03-01 | 上海华力集成电路制造有限公司 | Mask design method for increasing frame uniformity measurement |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3042639B2 (en) * | 1991-07-12 | 2000-05-15 | 日本電気株式会社 | Photo reticles for semiconductor device manufacturing |
| JP3387072B2 (en) * | 1993-10-21 | 2003-03-17 | 株式会社ニコン | Exposure method and apparatus, and element manufacturing method |
| SG67365A1 (en) * | 1995-11-21 | 1999-09-21 | Texas Instruments Inc | Trench scribe line for decreased chip spacing |
| CN100445869C (en) * | 2004-04-23 | 2008-12-24 | 上海华虹Nec电子有限公司 | Scribing groove structure for registration photo etching |
| CN1963679A (en) * | 2006-11-24 | 2007-05-16 | 上海微电子装备有限公司 | Alignment mark structure for aligning wafer |
-
2008
- 2008-12-10 CN CN2008100440839A patent/CN101745993B/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103050490A (en) * | 2011-10-13 | 2013-04-17 | 上海华虹Nec电子有限公司 | Automatic design method of scribing slot frame |
| CN103050490B (en) * | 2011-10-13 | 2015-06-03 | 上海华虹宏力半导体制造有限公司 | Automatic design method of scribing slot frame |
| CN103337454A (en) * | 2013-05-30 | 2013-10-02 | 深圳市锐骏半导体有限公司 | Design method of grooved MOS scribing groove |
| CN114113091A (en) * | 2021-11-24 | 2022-03-01 | 上海华力集成电路制造有限公司 | Mask design method for increasing frame uniformity measurement |
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| Publication number | Publication date |
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| CN101745993B (en) | 2012-04-18 |
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Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI Effective date: 20140110 |
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Free format text: CORRECT: ADDRESS; FROM: 201206 PUDONG NEW AREA, SHANGHAI TO: 201203 PUDONG NEW AREA, SHANGHAI |
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Effective date of registration: 20140110 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Patentee after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201206, Shanghai, Pudong New Area, Sichuan Road, No. 1188 Bridge Patentee before: Shanghai Huahong NEC Electronics Co., Ltd. |