CN101709763B - Horizontal two-degree-of-freedom vibration isolating mechanism - Google Patents
Horizontal two-degree-of-freedom vibration isolating mechanism Download PDFInfo
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- CN101709763B CN101709763B CN2009102731833A CN200910273183A CN101709763B CN 101709763 B CN101709763 B CN 101709763B CN 2009102731833 A CN2009102731833 A CN 2009102731833A CN 200910273183 A CN200910273183 A CN 200910273183A CN 101709763 B CN101709763 B CN 101709763B
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Abstract
The invention provides a horizontal two-degree-of-freedom vibration isolating mechanism. The horizontal two-degree of freedom vibration isolating mechanism comprises a connecting plate, wherein a piston rod is inserted in the center of the connecting plate; and four magnetic suspension units are evenly arranged along the circumference of a disc. By utilizing the characteristics of generating the positive rigidity due to like pole repulsion of magnets (comprising electromagnets and permanent magnets) and the negative rigidity due to unlike pole attraction of magnets, the magnetic suspension units are designed to be a horizontal two-degree-of-freedom vibration isolating system with the positive rigidity and the negative rigidity in parallel. Because the positive rigidity and the negative rigidity are in parallel, the positive rigidity and the negative rigidity offset each other, so the horizontal two-degree of freedom vibration isolating mechanism has the self-rigidity close to zero, and the ultra-low frequency horizontal vibration isolation is realized.
Description
Technical field
The present invention relates to semiconductor and make the active damping field, particularly relate to a kind of horizontal two-degree-of-freedom vibration isolating mechanism, can initiatively suppress to be processed vibration in the horizontal two-dimension direction.
Background technique
U.S. Pat 7290642 has adopted the floating principle design of magnetic a kind of positive and negative rigidity shunting means that is used for vertical vibration isolation.Negative stiffness is meant that when particle departs from the equilibrium position suffered power is identical with the direction of displacement that is taken place, and the trend that continues to depart from the equilibrium position is arranged.Positive rigidity is meant then that when particle departs from the equilibrium position suffered power is opposite with the direction of displacement that is taken place, and the trend of getting back to the equilibrium position is arranged, and this power is called restoring force.The positive rigidity mechanism of this device is served as by metal spring; Negative stiffness mechanism is made up of the two groups of permanent magnets and the suspension bar of parallel arranged, and wherein, permanent magnet heteropole is in twos arranged, with each group permanent magnet corresponding position the permanent magnetism fritter is housed in the suspension bar, and the principle of utilizing heteropole to inhale mutually realizes negative stiffness.Is connected support and leading role between the positive and negative rigidity mechanism with the sheet spring through connecting rod.Distance is adjustable between the permanent magnet, and also available electromagnet replacement permanent magnet is adjustable to realize magnetic intensity, thereby can make magnetic floating mechanism show linear negative stiffness.But this device can only be realized the low rigidity of one degree of freedom, only is applicable to vertical vibration isolation, if be used for horizontal vibration isolation, then can not satisfy horizontal two-degree-of-freedom and be X, Y to the requirement that has negative stiffness simultaneously.And whole mechanism is complicated, and the control difficulty is big.
U.S. Pat 5844664 has designed a kind of active damping device, its vertical and level to low rigidity respectively through pneumatic spring and the realization of beat mechanism.Beat mechanism is made up of three rods of circumferentially evenly arranging along land, because rods can produce bending deflection in all directions perpendicular to rod member, so this beat mechanism can realize the vibration isolation of level to two degrees of freedom.But this device is cost for the low rigidity of acquisition level to sacrifice pendulum length; And big pendulum length can cause the volume of this active damping device air spring piston bigger; Thereby under the situation of engagement positions given volume, make the restricted volume of auxiliary chamber, and then its vertical stiffness is had a negative impact.In addition, only use positive rigidity mechanism---beat,, also be difficult to obtain the ultralow rigidity of comparatively ideal level even increase pendulum length.
Summary of the invention
The object of the present invention is to provide a kind of horizontal two-degree-of-freedom vibration isolating mechanism, can realize the rigidity active adjustment in the horizontal two-degree-of-freedom direction, thereby be up to the standard superlow frequency vibration isolating.
A kind of horizontal two-degree-of-freedom vibration isolating mechanism comprises a plate, and the connecting plate center is inserted with piston rod, connecting plate along evenly laying the floating unit of four magnetic week, the bottom of piston rod is connected with the floating unitary elasticity of each magnetic respectively; It is characterized in that; The floating unit of magnetic comprises by positive rigidity mechanism and the parallel connection of negative stiffness mechanism and constitutes positive negative stiffness paralleling mechanism; Positive rigidity mechanism adopts the magnet homopolar-repulsion to realize, negative stiffness mechanism adopts the magnet heteropole to inhale realization mutually, and the magnet in positive rigidity mechanism and/or the negative stiffness mechanism is electromagnet.
Technique effect of the present invention is embodied in: the positive stiffness characteristics that the present invention utilizes the homopolar-repulsion of magnet (comprising electromagnet and permanent magnet) to produce; And the magnet heteropole inhales the negative stiffness characteristic of generation mutually, designs the horizontal two-degree-of-freedom vibration isolating system of positive negative stiffness parallel connection.Because positive negative stiffness parallel connection is cancelled out each other rigidity, therefore, this horizontal two-degree-of-freedom vibration isolating system has the self-stiffness near zero.The self-stiffness that this horizontal two-degree-of-freedom system very is low makes it have extremely low natural frequency, thereby can realize the ultra-low-frequency horizontal vibration isolation.
Description of drawings
Fig. 1 is the structural representation of first embodiment of the invention.
Fig. 2 is the plan view of first embodiment of the invention.
Fig. 3 is the partial structurtes schematic representation of second embodiment of the invention.
Fig. 4 is the partial structurtes schematic representation of third embodiment of the invention.
Fig. 5 is the structural representation of fourth embodiment of the invention.
Fig. 6 is the stressed schematic representation of fourth embodiment of the invention.
Fig. 7 is the plan view of fifth embodiment of the invention.
Embodiment
First embodiment's for the zero stiffness mechanism that is used for horizontal two-degree-of-freedom vibration isolating of the present invention shown in Figure 1 structural representation.As shown in fig. 1,1 is that permanent magnet is right, by the permanent magnet 1a of a pair of identical model, 1b around suspension bar 3 symmetric arrangement.Permanent magnet 1a is installed on the vertical support chamber outer wall 10, and permanent magnet 1b is installed on the vertical support cavity inner wall 11, and the S utmost point of permanent magnet 1a is extremely relative with the N of permanent magnet 1b.2 is that another permanent magnet is right, and same permanent magnet 2a by a pair of and permanent magnet 1a, 1b same model, 2b are around suspension bar 3 symmetric arrangement.Permanent magnet 2a is adjacent with permanent magnet 1a, is installed on the vertical support chamber outer wall 10, and permanent magnet 2b is adjacent with permanent magnet 1b, is installed on the vertical support cavity inner wall 11, and the N utmost point of permanent magnet 2a is extremely relative with the S of permanent magnet 2b.Suspension bar 3 is processed by ferromagnetic substance, in electromagnet 3a, 3b are housed, the S utmost point of electromagnet 3a is extremely relative with the S of permanent magnet 1a, the N of its N utmost point and permanent magnet 1b is extremely relative; The N utmost point of electromagnet 3b is extremely relative with the N of permanent magnet 2a, and the S of its S utmost point and permanent magnet 2b is extremely relative.Suspension bar 3 is installed on the discoid connecting plate 4 through lock screw 5.Permanent magnet 1,2 and level of suspension bar 3 common compositions are to the floating unit 13 of magnetic.6 is piston plate among the figure, is used for bearing load.Piston rod 7 upper ends and piston plate 6 are affixed, and lower end and piston chassis 8 are affixed.Piston chassis 8 is supported by vertical support device 14.Leave gap 12 between piston rod 7 and the vertical support cavity inner wall 11.Be connected through elastic membrane 9 between piston chassis 8 and the vertical support cavity inner wall 11.
Fig. 2 is the plan view of the first embodiment of the present invention.As shown in Figure 2,4 tapped holes of connecting plate design are evenly arranged (each two on X axle, Y axle) along 90 degree of circumferentially being separated by, and are used to install 4 suspension bars 3.With each suspension bar 3 corresponding position the floating unit 13 of 4 magnetic is installed.
Because suspension bar 3 is ferromagnetic substance (iron, cobalt, nickel and alloy thereof etc. can directly produce the material that magnetic maybe can be magnetized, its magnetic susceptibility be on the occasion of), permanent magnet 1,2 and suspension bar 3 attract each other, and show as negative stiffness.When suspension bar 3 is in the equilibrium position, permanent magnet 1a, 2a to its attraction force and permanent magnet 1b, 2b to the mutual balance of its attraction force.The purpose of two pairs of permanent magnets of design is the piston torque that balance is tilted to cause by load in the floating unit of each magnetic.And why up and down the magnetic pole of two unit is arranged not exclusively equally, is because this kind magnetic pole arrangement makes that between the adjacent magnets of the same side (outer wall or inwall) be that heteropole is inhaled mutually, can reduce leakage field, thereby weaken the non-linear of magnetic field to a certain extent.The purpose of the floating unit 13 of 4 magnetic of layout as shown in Figure 2 is the negative stiffness of the horizontal both direction of realization simultaneously.
Through electromagnet 3a, 3b (polarity of electromagnet is identical with the polarity of homonymy permanent magnet) are installed in suspension bar 3, utilize electromagnet and the mutually exclusive principle of permanent magnet homopolarity, can realize positive rigidity mechanism.The negative stiffness mechanism acting in conjunction that the ferromagnetic substance of this positive rigidity mechanism and permanent magnet and suspension bar is formed, the level that can realize is to positive and negative rigidity parallel connection.And the application of electromagnet makes that this horizontal vibration isolating mechanism can be through closed loop control, and therefore realization level two direction rigidity real-time regulated, can obtain comparatively ideal ultralow stiffness characteristics.
Fig. 3 is the second embodiment of the present invention.As shown in Figure 3,15 is the suspension bar of being processed by nonmagnetic substance, and 4 electromagnet 15a, 15b, 15c, 15d that model is identical are installed in the suspension bar 15.Wherein, the polarity arrangement direction of electromagnet 15b is identical with electromagnet 3a among first embodiment; The polarity arrangement direction of electromagnet 15a and the polarity arrangement of electromagnet 15b are in the opposite direction, and promptly the S of the N utmost point of electromagnet 15a and permanent magnet 1a is extremely relative, and the N of its S utmost point and permanent magnet 1b is extremely relative.Equally; Electromagnet 3b is identical among the polarity arrangement direction of electromagnet 15c and first embodiment; The polarity arrangement direction of electromagnet 15d and the polarity arrangement of electromagnet 15c are in the opposite direction, and promptly the N of the S utmost point of electromagnet 15d and permanent magnet 2a is extremely relative, and the S of its N utmost point and permanent magnet 2b is extremely relative.Electromagnet 15b, 15c respectively and between permanent magnet 1a, 1b and 2a, the 2b homopolarity repel each other, realized positive rigidity; And electromagnet 15a, 15d respectively and between permanent magnet 1a, 1b and 2a, the 2b heteropole attract each other, realized negative stiffness.Therefore, this embodiment has realized the parallel connection of positive and negative rigidity equally.
Compare with first embodiment, its advantage is:
1. can carry out positive and negative rigidity and regulate simultaneously, thereby can in the shorter time, obtain comparatively ideal ultralow stiffness characteristics, and can significantly improve degree of regulation;
2. the suspension bar adopts nonmagnetic substance, can weaken crosstalking between the adjacent electromagnet, and the nonlinear characteristics of the floating unit of magnetic is improved.
Fig. 4 is the third embodiment of the present invention.As shown in Figure 4, permanent magnet 16a, 16b, 16c, 16d are installed in the suspension bar 16. Permanent magnet 16a, 16b are arranged in the magnetic field of electromagnet 17a, 17b formation, and permanent magnet 16c, 16d are arranged in the magnetic field of electromagnet 18a, 18b formation, have realized positive and negative rigidity parallel connection.Compare with the second embodiment of the present invention, its advantage is that electromagnet is installed on the vertical support chamber wall, can avoid the harmful effect of the connection cable of electromagnet to the horizontal vibration damping effect, and further optimum level is to damping property.
Fig. 5 is the fourth embodiment of the present invention.This embodiment is the optimization that combines first embodiment and the 3rd embodiment to make.As shown in Figure 5, suspension bar 19,20 adopts nonmagnetic substance to process, and the two is the central shaft symmetric arrangement with the piston rod.19a, 19b are the permanent magnet that is installed in the suspension bar 19, and 20a, 20b are the permanent magnet that is installed in the suspension bar 20.The magnetic pole arranged direction of all permanent magnets is all identical among the figure.Permanent magnet 19a and electromagnet show as positive rigidity to 17 (being made up of electromagnet 17a and 17b) homopolarity mutual exclusion; Permanent magnet 19b and electromagnet are inhaled 18 heteropoles mutually, show as negative stiffness.Thereby in the floating unit 13 of magnetic, realized positive and negative rigidity parallel connection.Permanent magnet 20a in the suspension bar 20,20b form negative stiffness and positive rigidity unit with electromagnet to 21,22 respectively.
Adopting layout as shown in Figure 5 is for the suffered torque of equalizing piston.Fig. 6 is the stressed schematic representation (producing along the skew of X axle forward with piston is example) of piston.The suffered repulsion F1 of permanent magnet 19a is along X axle negative sense, and as far as suspension bar 19, there is counterclockwise torque along X axle forward in the suffered attraction force F2 of permanent magnet 19b; In like manner, as far as suspension bar 20, there is the clockwise torque that causes by F3, F4.Because suspension bar 19 and 20 is rigidly connected through connecting plate 4, counterclockwise torque on the suspension bar 19 and the clockwise torque on the suspension bar 20 are cancelled out each other, and therefore, piston is zero along the directions X resultant torque.Along the magnet arrangements of Y direction and stressed identical with X-axis direction.
This design makes that the installation of permanent magnet is more convenient in the suspension bar, and can reduce the quantity of required magnet, practices thrift cost.Fig. 7 is the fifth embodiment of the present invention.As shown in Figure 7, the connecting plate that is about among first embodiment changes square plate 23 into.
Claims (5)
1. a horizontal two-degree-of-freedom vibration isolating mechanism comprises a plate, and the connecting plate center is inserted with piston rod, connecting plate along evenly laying the floating unit of four magnetic week, the bottom of piston rod is connected with the floating unitary elasticity of each magnetic respectively; It is characterized in that; The floating unit of magnetic comprises the suspension bar; In the suspension bar, internal magnet is set, suspension bar both sides are that the center is symmetrical set external magnet with the internal magnet, form the positive rigidity mechanism of adjacent pole homopolar-repulsion and the negative stiffness mechanism that the adjacent pole heteropole is inhaled mutually between external magnet and internal magnet; Positive rigidity mechanism and the parallel connection of negative stiffness mechanism constitute positive negative stiffness paralleling mechanism, and internal magnet and/or external magnet are electromagnet.
2. horizontal two-degree-of-freedom vibration isolating mechanism according to claim 1 is characterized in that, the floating unit of said magnetic comprises upper and lower two positive negative stiffness paralleling mechanisms, and the positive rigidity mechanism polarity arrangement in two positive negative stiffness paralleling mechanisms is in the opposite direction.
3. horizontal two-degree-of-freedom vibration isolating mechanism according to claim 1 is characterized in that, is provided with two blocks of internal magnets in the said suspension bar, and the polarity arrangement of two blocks of internal magnets is in the opposite direction; The both sides of suspension bar are that the center is arranged with a pair of external magnet with two internal magnets; External magnet pair and the positive rigidity of the identical formation of internal magnet sides adjacent polarity mechanism wherein, external magnet pair and the different formation negative stiffness of another piece internal magnet sides adjacent polarity mechanism.
4. horizontal two-degree-of-freedom vibration isolating mechanism according to claim 1; It is characterized in that; Be provided with two blocks of internal magnets in the said suspension bar, suspension bar both sides are that the center is provided with a pair of external magnet with internal magnet wherein, this external magnet pair and the positive rigidity of the identical formation of internal magnet sides adjacent polarity mechanism; Suspension bar both sides are that the center is provided with another to external magnet with another piece internal magnet, this external magnet pair and the different formation negative stiffness of internal magnet sides adjacent polarity mechanism.
5. a horizontal two-degree-of-freedom vibration isolating mechanism comprises a plate, and the connecting plate center is inserted with piston rod, connecting plate along evenly laying the floating unit of four magnetic week, the bottom of piston rod is connected with the floating unitary elasticity of each magnetic respectively; It is characterized in that the floating unit of magnetic comprises the suspension bar, said suspension bar is made up of ferromagnetic substance, is provided with an internal magnet in the suspension bar; The both sides of suspension bar are that the center is arranged with a pair of external magnet with the internal magnet, external magnet pair and the positive rigidity of the identical formation of internal magnet sides adjacent polarity mechanism, and external magnet pair constitutes negative stiffness mechanism with the suspension bar.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN2009102731833A CN101709763B (en) | 2009-12-10 | 2009-12-10 | Horizontal two-degree-of-freedom vibration isolating mechanism |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2009102731833A CN101709763B (en) | 2009-12-10 | 2009-12-10 | Horizontal two-degree-of-freedom vibration isolating mechanism |
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| CN101709763A CN101709763A (en) | 2010-05-19 |
| CN101709763B true CN101709763B (en) | 2012-07-04 |
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| CN2009102731833A Expired - Fee Related CN101709763B (en) | 2009-12-10 | 2009-12-10 | Horizontal two-degree-of-freedom vibration isolating mechanism |
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| CN101871505B (en) * | 2010-06-12 | 2012-07-04 | 江苏大学 | Positive and negative stiffness parallel three-translation vibration and impact isolation platform |
| CN102734377A (en) * | 2011-03-31 | 2012-10-17 | 上海微电子装备有限公司 | Negative stiffness apparatus and vibration damping system applying same |
| CN102410337A (en) * | 2011-10-25 | 2012-04-11 | 清华大学 | Permanent magnet low-frequency multidegree of freedom vibration isolation mechanism based on negative stiffness principle |
| CN102606673B (en) * | 2012-03-26 | 2013-10-09 | 湖南大学 | Load-bearing adjustable zero-stiffness electromagnetic vibration isolator and control method thereof |
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| US20180068773A1 (en) * | 2016-09-07 | 2018-03-08 | The Hong Kong Polytechnic University | Apparatus for Negative Stiffness |
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| CN111677798A (en) * | 2020-06-29 | 2020-09-18 | 哈尔滨工业大学 | Horizontal two-degree-of-freedom electromagnetic vibration isolation device based on magnetic attraction positive and negative stiffness parallel connection |
| CN111810585B (en) * | 2020-07-24 | 2021-05-14 | 上海大学 | Combined vibration isolation system |
| CN111779790B (en) * | 2020-07-24 | 2021-09-28 | 上海大学 | Vibration damper |
| CN112696455B (en) * | 2020-12-28 | 2021-09-21 | 哈尔滨工程大学 | Quasi-zero stiffness electromagnetic vibration isolator suitable for ultralow frequency vibration reduction and isolation |
| CN114033833B (en) * | 2021-11-29 | 2023-01-17 | 中国人民解放军海军工程大学 | Parameter-adjustable high-static-low dynamic stiffness electromagnetic vibration isolator |
| CN116221335B (en) * | 2023-03-24 | 2023-07-28 | 大连地拓电子工程技术有限公司 | Ultra-low frequency quasi-zero stiffness adjustable vibration isolator |
| CN116292740B (en) * | 2023-03-24 | 2023-09-05 | 大连地拓电子工程技术有限公司 | Quasi-zero rigidity three-degree-of-freedom active anti-micro-vibration platform |
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