CN101704211A - Substrate cleaning device - Google Patents

Substrate cleaning device Download PDF

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Publication number
CN101704211A
CN101704211A CN200910208684A CN200910208684A CN101704211A CN 101704211 A CN101704211 A CN 101704211A CN 200910208684 A CN200910208684 A CN 200910208684A CN 200910208684 A CN200910208684 A CN 200910208684A CN 101704211 A CN101704211 A CN 101704211A
Authority
CN
China
Prior art keywords
cleaning
cleaning device
substrate
pedestal
pressure head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN200910208684A
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Chinese (zh)
Inventor
周盼华
孙玮
夏仁贤
张良
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AU Optronics Suzhou Corp Ltd
AU Optronics Corp
Original Assignee
AU Optronics Suzhou Corp Ltd
AU Optronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AU Optronics Suzhou Corp Ltd, AU Optronics Corp filed Critical AU Optronics Suzhou Corp Ltd
Priority to CN200910208684A priority Critical patent/CN101704211A/en
Publication of CN101704211A publication Critical patent/CN101704211A/en
Pending legal-status Critical Current

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  • Liquid Crystal (AREA)

Abstract

The invention provides a substrate cleaning device for cleaning foreign matters on the surface of a substrate. The cleaning device comprises a cleaning pressure head, a base, a grinding belt and a pressure buffering unit. The cleaning pressure head provides pressure for the substrate. The base is arranged relative to the cleaning pressure head and is provided with a first surface and a second surface which are opposite to each other, and the first surface is far away from the cleaning pressure head. The grinding belt is arranged on the first surface of the base, fixed on the base and used for grinding the surface of the base. The pressure buffering unit is arranged between the cleaning pressure head and the base and connected with the cleaning pressure head and the base. The cleaning device utilizes the grinding belt to clean the surface of the substrate instead of a scraper, thereby effectively improving the cleaning capability of equipment, lowering the replacing frequency of the grinding belt and reducing the damage probability of the substrate.

Description

Apparatus for cleaning substrate
Technical field
The present invention relates in particular to a kind of cleaning device of removing the glass baseplate surface foreign matter about a kind of cleaning device.
Background technology
The manufacturing of LCD mainly can be divided into: array processing procedure, panel processing procedure and module group procedure.Wherein the array processing procedure mainly is glass substrate to be seen through similar semiconductor fabrication (technology such as plated film, exposure, development, etching) form numerous electric crystal on glass substrate.The panel processing procedure mainly is that the glass substrate that the manufacturing of array processing procedure is finished is combined with the glass substrate of colored filter, and is pouring into liquid crystal through between two sheet glass substrates of involution.Then being that the panel module is made at last, mainly is that panel and outside spare part groups such as drive IC, circuit board, Polarizer and backlight assembly that cutting is finished are erected.
Because in the panel processing procedure; two sheet glass substrates are carried out involution when pouring into liquid crystal; usually can be on panel surface residual have a sealing; or the processing procedure before the stickup Polarizer all can allow the surface of glass substrate produce foreign matter; when carrying out the Polarizer attaching, it is unreal that residual sealing or foreign matter can cause panel and Polarizer to attach for fear of follow-up, therefore before carrying out the Polarizer attaching; can carry out the panel cleaning earlier, it mainly acts on is the residue of removing panel surface.
Known way is to use the scraper that applies certain pressure to strike off the residue of panel surface, yet, scraper to strike off effect limited, and the mode of striking off of the prior art, the pressure that is put on the scraper adopts fixed form, does not have buffering effect, easily the scratch panel surface.In addition, traditional rotary washer structure, cleansing power is not good, cleans the scraper quick abrasion, changes frequently, and causes successional glass surface scratch easily, causes the product heavy industry or scraps.
Summary of the invention
In view of this, the object of the present invention is to provide a kind of cleaning device, utilize and grind band replacement scraper cleaning display panel surface, effectively promote the board cleaning capacity, reduce cleaning section and change frequency, and reduce the damage probability of panel.
For reaching above-mentioned purpose, the invention provides a kind of apparatus for cleaning substrate, in order to remove the residue of substrate surface, this cleaning device comprises cleaning pressure head, pedestal, grinding band and pressure buffer unit.The cleaning pressure head provides pressure in this substrate.Pedestal relatively should cleaning pressure head setting, and this pedestal has first surface and the second surface that is oppositely arranged, and this first surface cleans pressure head away from this.Grind band and be arranged at this first surface of this pedestal, and be fixed on this pedestal, in order to grind this surface of this substrate.The pressure buffer unit is arranged between this cleaning pressure head and this pedestal, and connects this cleaning pressure head and this pedestal.
As optional technical scheme, this cleaning device also comprises padded coaming, and this padded coaming is arranged between this pedestal and this grinding band.
As optional technical scheme, this pressure buffer unit is made up of a plurality of springs.
As optional technical scheme, this pressure buffer unit is air pressure or hydraulic cushion unit.
As optional technical scheme, this grinding band comprises base band and grinding agent, and this grinding agent is coated on this base band.
As optional technical scheme, base band adopts resin material to make.
As optional technical scheme, this grinding agent is the alundum (Al particle.
As optional technical scheme, this cleaning device also comprises fixture, is fixed on this pedestal in order to should grind band.
As optional technical scheme, this substrate is a glass.
As optional technical scheme, this substrate is a display floater.
Can be about the advantages and spirit of the present invention by following detailed Description Of The Invention and appended graphic being further understood.
Description of drawings
Figure 1 shows that the schematic diagram of display panels;
Figure 2 shows that schematic perspective view according to cleaning device of the present invention;
Figure 3 shows that the front view of the cleaning device among Fig. 2;
Figure 4 shows that local enlarged diagram according to grinding band of the present invention.
The specific embodiment
See also Fig. 1, Fig. 2 and Fig. 3, Figure 1 shows that the schematic diagram of display panels, Figure 2 shows that schematic perspective view, Figure 3 shows that the front view of the cleaning device among Fig. 2 according to cleaning device of the present invention.Apparatus for cleaning substrate 1 provided by the invention, in order to remove the foreign matter on substrate 2 surfaces 21, wherein, substrate 2 for example is glass or display floater.In the present embodiment, be that display panels is an example with substrate 2, display panels 2 includes colored filter substrate 22 and thin-film transistor array base-plate 23, and to be positioned at colored filter substrate 22 sides be example with surface 21.In field of liquid crystal, in display panels 2 processing procedures, before carrying out the Polarizer attaching, can carry out the panel cleaning earlier, it mainly acts on is foreign matter removing display panels 2 surfaces, when avoiding Polarizer to attach, residual sealing or foreign matter can cause display panels and Polarizer to attach unreal.Because two sheet glass substrates are carried out usually can residual on the display panels surface sealing be arranged, or the processing procedure of pasting before the Polarizer can allowing all the surface of glass substrate produce foreign matter after involution pours into liquid crystal.
Cleaning device 1 comprises cleaning pressure head 3, pedestal 4, grind and be with 5 and pressure buffer unit 6.Cleaning pressure head 3 provides pressure in substrate 2.Pedestal 4 cleaning pressure heads 3 relatively is provided with, and pedestal 4 has first surface 41 and the second surface 42 that is oppositely arranged, and wherein first surface 41 is provided with away from cleaning pressure head 3.Grinding is arranged at the first surface 41 of pedestal 4 with 5, and is fixed on the pedestal 4, in order to grind the surface 21 of substrate 2.
See also Fig. 4, Figure 4 shows that the enlarged diagram according to grinding band of the present invention, wherein, grind and be with 5 to comprise base band 51 and grinding agent 52, grinding agent 52 is coated on the base band 51.Base band 51 for example adopts resin material to make, and the resin material of polyurethane series preferably is as polyurethanes.And grinding agent 52 for example is the alundum (Al particle.On base band 51, apply grinding agent 52, can increase grind with 5 with substrate 2 surperficial 21 frictions, can remove the foreign matter or the residue on substrate 2 surfaces better.
Pressure buffer unit 6 is arranged between cleaning pressure head 3 and the pedestal 4, and connects cleaning pressure head 3 and pedestal 4.Wherein, pressure buffer unit 6 for example is made up of a plurality of springs.Certainly not as limit, pressure buffer unit 6 also can be air pressure or hydraulic cushion unit.When applying active force on substrate 2 time by cleaning pressure head 3, pressure buffer unit 6 can play certain cushioning effect, prevents the excessive wounded substrate 2 of pressure.
In addition, cleaning device 1 also comprises padded coaming 7, and padded coaming 7 is arranged at pedestal 4 and grinding is with between 5.Be with 5 suffered resistances excessive in case grind, buffering effect can be arranged, avoid unexpected damage to produce.
And, cleaning device 1 also comprises fixture 9, be with 5 to be fixed on the pedestal 4 in order to grinding, for example in the present embodiment, be provided with fixture 9 in the both sides of pedestal 4, after grinding is layed in the first surface 41 of pedestal 4 with 5, utilizing fixture 9 will grind with 5 two ends again is fixed on the both sides of pedestal 4. so, when changing the grinding band, only fixture 9 need be unclamped, take off used grinding band, newer strip be ground band and be layed in first surface 41, and utilize fixture 9 its two ends to be individually fixed in the both sides of pedestal 4. wherein, but fixture 9 as be pressing device or other fixed structures.
In the present embodiment, be to be with 5 to be that band shape describes with grinding.But in fact grinding is with 5 also can be roll, when grinding is with 5 to be fixed in pedestal 4 first surfaces 41 parts and need to change, only need unclamp fixture 9, mobile grinding is with 5, make the part of not using of grinding be layed in the first surface 41 of pedestal 4 with 5, fixing again the grinding is with 5 to get final product on pedestal 4, changes operation and is easy to carry out.
In the practical application, the present invention has also carried out test experiments.Experiment 1: the colored filter substrate 22 with cleaning solution LCD panel 2 is an example, and the mark that forms on colored filter substrate 22 surfaces with the oil pen replaces foreign matter.Found that: clean the oil pen vestige of back more than 70% and all be eliminated, more old-fashioned scraper cleaning device cleaning 20%, cleaning capacity has very much progress.Experiment 2: the mark that forms on thin-film transistor array base-plate 23 surfaces with the oil pen replaces foreign matter.Found that: clean the oil pen vestige of back more than 95% and all be eliminated, more old-fashioned scraper cleaning device cleaning 30%, cleaning capacity has very much progress.
In sum, cleaning device provided by the invention uses to grind is with alternative scraper to carry out the substrate surface cleaning, and provide pressure required when grinding belt grinding and cleaning by the mode that spring force and soft fender elastic force combine, can effectively promote the board cleaning capacity, remove the residue of panel surface, attach really to guarantee follow-up panel and polaroid; Also can reduce the replacing frequency that consumptive material portion product promptly grind band in addition, and avoid scratch display floater or glass substrate.
By the detailed description of the above specific embodiment, be to wish to know more to describe feature of the present invention and spirit, and be not to come claim scope of the present invention is limited with the above-mentioned disclosed specific embodiment.On the contrary, its objective is that hope can contain in being arranged in of various changes and the tool equality claim scope of the present invention.Therefore, claim scope of the present invention should be done the broadest explanation according to above-mentioned explanation, contains the arrangement of all possible change and tool equality to cause it.

Claims (10)

1. apparatus for cleaning substrate in order to remove the foreign matter of substrate surface, is characterized in that this cleaning device comprises:
The cleaning pressure head provides pressure in this substrate;
Pedestal, this cleaning pressure head setting, and this pedestal relatively has first surface and the second surface that is oppositely arranged, and this first surface cleans pressure head away from this;
Grind band, be arranged at this first surface of this pedestal, and be fixed on this pedestal, in order to grind this surface of this substrate; And
The pressure buffer unit is arranged between this cleaning pressure head and this pedestal, and connects this cleaning pressure head and this pedestal.
2. cleaning device as claimed in claim 1 is characterized in that this cleaning device also comprises padded coaming, and this padded coaming is arranged between this pedestal and this grinding band.
3. cleaning device as claimed in claim 1 is characterized in that this pressure buffer unit is made up of a plurality of springs.
4. cleaning device as claimed in claim 1 is characterized in that this pressure buffer unit is air pressure or hydraulic cushion unit.
5. cleaning device as claimed in claim 1 is characterized in that this grinding band comprises
Base band; And
Grinding agent, this grinding agent is coated on this base band.
6. cleaning device as claimed in claim 5 is characterized in that this base band adopts resin material to make.
7. cleaning device as claimed in claim 5 is characterized in that this grinding agent is the alundum (Al particle.
8. cleaning device as claimed in claim 1 is characterized in that this cleaning device also comprises fixture, is fixed on this pedestal in order to should grind band.
9. cleaning device as claimed in claim 1 is characterized in that this substrate is a glass.
10. cleaning device as claimed in claim 1 is characterized in that this substrate is a display floater.
CN200910208684A 2009-10-24 2009-10-24 Substrate cleaning device Pending CN101704211A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN200910208684A CN101704211A (en) 2009-10-24 2009-10-24 Substrate cleaning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN200910208684A CN101704211A (en) 2009-10-24 2009-10-24 Substrate cleaning device

Publications (1)

Publication Number Publication Date
CN101704211A true CN101704211A (en) 2010-05-12

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN200910208684A Pending CN101704211A (en) 2009-10-24 2009-10-24 Substrate cleaning device

Country Status (1)

Country Link
CN (1) CN101704211A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103921295A (en) * 2014-04-28 2014-07-16 山东奥纳尔制冷科技有限公司 Cleaning device for storage plates
CN103920686A (en) * 2014-04-06 2014-07-16 深圳市诚亿自动化科技有限公司 Self-adaption constant-pressure cleaning chuck mechanism
CN104492780A (en) * 2014-12-16 2015-04-08 苏州光宝康电子有限公司 Adjusting mechanism of scraper for LCD (liquid crystal display) production
CN105212825A (en) * 2015-10-19 2016-01-06 平湖市当湖街道超越时空模具图文设计服务部 A kind of cacheable automatic glass cleaning device
CN107028215A (en) * 2017-05-26 2017-08-11 红塔烟草(集团)有限责任公司 A kind of cutting tobacco leaves cutting knife cleaning device
CN107303649A (en) * 2016-04-19 2017-10-31 太原风华信息装备股份有限公司 The grinding head mechanism of Full-automatic grinder
CN110773537A (en) * 2019-11-14 2020-02-11 徐州市威固特种玻璃有限公司 Belt cleaning device for glass processing

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103920686A (en) * 2014-04-06 2014-07-16 深圳市诚亿自动化科技有限公司 Self-adaption constant-pressure cleaning chuck mechanism
CN103920686B (en) * 2014-04-06 2016-03-16 深圳市诚亿自动化科技有限公司 Self adaptation constant voltage cleaning chuck mechanism
CN103921295A (en) * 2014-04-28 2014-07-16 山东奥纳尔制冷科技有限公司 Cleaning device for storage plates
CN103921295B (en) * 2014-04-28 2016-08-31 山东奥纳尔制冷科技有限公司 Storehouse plate cleaner
CN104492780A (en) * 2014-12-16 2015-04-08 苏州光宝康电子有限公司 Adjusting mechanism of scraper for LCD (liquid crystal display) production
CN105212825A (en) * 2015-10-19 2016-01-06 平湖市当湖街道超越时空模具图文设计服务部 A kind of cacheable automatic glass cleaning device
CN107303649A (en) * 2016-04-19 2017-10-31 太原风华信息装备股份有限公司 The grinding head mechanism of Full-automatic grinder
CN107028215A (en) * 2017-05-26 2017-08-11 红塔烟草(集团)有限责任公司 A kind of cutting tobacco leaves cutting knife cleaning device
CN110773537A (en) * 2019-11-14 2020-02-11 徐州市威固特种玻璃有限公司 Belt cleaning device for glass processing

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Open date: 20100512