CN101682075A - Solid-state battery and method for manufacturing of such a solid-state battery - Google Patents
Solid-state battery and method for manufacturing of such a solid-state battery Download PDFInfo
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- CN101682075A CN101682075A CN200880018931A CN200880018931A CN101682075A CN 101682075 A CN101682075 A CN 101682075A CN 200880018931 A CN200880018931 A CN 200880018931A CN 200880018931 A CN200880018931 A CN 200880018931A CN 101682075 A CN101682075 A CN 101682075A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/05—Accumulators with non-aqueous electrolyte
- H01M10/056—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes
- H01M10/0561—Accumulators with non-aqueous electrolyte characterised by the materials used as electrolytes, e.g. mixed inorganic/organic electrolytes the electrolyte being constituted of inorganic materials only
- H01M10/0562—Solid materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/04—Construction or manufacture in general
- H01M10/0436—Small-sized flat cells or batteries for portable equipment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
- H01M4/133—Electrodes based on carbonaceous material, e.g. graphite-intercalation compounds or CFx
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
- H01M4/134—Electrodes based on metals, Si or alloys
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/64—Carriers or collectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M6/00—Primary cells; Manufacture thereof
- H01M6/14—Cells with non-aqueous electrolyte
- H01M6/18—Cells with non-aqueous electrolyte with solid electrolyte
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M6/00—Primary cells; Manufacture thereof
- H01M6/14—Cells with non-aqueous electrolyte
- H01M6/18—Cells with non-aqueous electrolyte with solid electrolyte
- H01M6/188—Processes of manufacture
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M6/00—Primary cells; Manufacture thereof
- H01M6/40—Printed batteries, e.g. thin film batteries
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/04—Processes of manufacture in general
- H01M4/0402—Methods of deposition of the material
- H01M4/0404—Methods of deposition of the material by coating on electrode collectors
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
Batteries based on solid-state electrolytes are known in the art. These (planar) energy sources, or solid-state batteries, efficiently convert chemical energy into electrical energy and can be used asthe power sources for portable electronics. The invention relates to a method for manufacturing of a solid-state battery. The invention also relates to a battery obtained by performing such a method.The invention further relates to an electronic device provided with such a battery.
Description
Technical field
The present invention relates to be used to make the method for solid state battery group (battery).The present invention also relates to by carrying out the battery pack that this method obtains.The invention still further relates to the electronic equipment that is provided with this battery pack.
Background technology
Battery pack based on solid electrolyte is well known in the art.These (plane) energy sources or " solid state battery group " convert chemical energy to electric energy effectively and can be used as the power supply of mobile electronic device.Under small-scale, such battery pack can be used for providing electric energy to for example microelectronic modules, and more particularly, (IC) provides electric energy to integrated circuit.Disclose an example about this point in the International Patent Application WO 2005/027245, wherein solid-state thin-film battery group, particularly lithium ion battery group comprise the structured silicon substrate of the lamination that has deposited silicon anode, solid electrolyte and negative electrode on it in succession.An example of suitable solid electrolyte is LiPON (lithium-phosphor-oxygen nitride compound).Nowadays, LiPON is used for the most promising of all solid state lithium ion battery pack and uses one of maximum electrolyte.This material is good insulator (25 ℃ of following σ of electronics
El=10
-14S/cm) and relative good conductor (25 ℃ of following σ of (comparing) lithium ion with other solid electrolytes
Ion=210
-6S/cm).And LiPON is an electrochemical stability.Yet the lithium ion conducting rate of most of liquid electrolytes is than high about two orders of magnitude of conductance of LiPON.But the performance of solid electrolyte still can be near the performance of (perhaps may even surpassing) liquid electrolyte, because solid electrolyte can be produced very thin, and the resistance of solid electrolyte will reduce when electrolyte thickness reduces.For this reason, as long as be no more than electrolytical breakdown field, it is important making thin as far as possible solid electrolyte so.Yet, have been found that it is unusual difficulty that deposit thickness is lower than 1 micron free of pinholes LiPON layer, should be noted in the discussion above that wherein existing single pin hole in the solid electrolyte may cause the electrode of short circuit and thereby cause the battery pack of short circuit.Therefore, in order to prevent in dielectric substrate, to form pin hole, and thereby in order to prevent the battery pack of short circuit, existing all-solid-state battery group has the dielectric substrate with about 3 microns or thicker safe thickness usually.
Purpose is, is provided for making the improved method of the all-solid-state battery group that comprises relatively thin free of pinholes dielectric substrate.
Summary of the invention
This purpose can realize by the method according to the preface part is provided, the method comprising the steps of: A) with first electro-deposition to substrate, B) solid electrolyte is deposited on described first electrode, and C) with second electro-deposition to described solid electrolyte, step B wherein) comprise step D) and step e), step D) solid electrolyte that comprises the final layer thickness that initiation layer thickness surpass is wished is deposited on described first electrode, and step e) comprise step D) during the initiation layer thickness of dielectric substrate of deposition be decreased to described final layer thickness.By at first deposition is enough thick so that guarantee to eliminate the thicker relatively dielectric substrate of pin hole and reduce (by removing excess electrolytic material) to the final thickness of wishing by the thickness that will be somebody's turn to do thicker relatively free of pinholes dielectric substrate subsequently, can produce relatively thin free of pinholes dielectric substrate.By carry out apply in the battery pack obtain according to method of the present invention relatively thin solid-state electrolyte layer will reduce electrolytical resistance and thereby reduce the resistance of battery pack equally, this will help the performance of battery pack.In order to prevent in dielectric substrate, to form pin hole, the enough thick dielectric substrate of deposition when initial of general homology.In this way, the pin hole that originally forms in dielectric substrate is filled and sealing by electrolyte the most at last, consequently can realize the free of pinholes dielectric substrate.What it is contemplated that is to apply the dielectric substrate that initiation layer thickness is or several microns.Yet it is normally undesirable to apply the dielectric substrate with excessive initiation layer thickness, because this will cause the relatively large superfluous of electrolyte and thereby cause the considerable damage (during step e) of material.Therefore, advantageously deposition has the dielectric substrate of the initiation layer thickness that just prevents enough that pin hole from forming usually, because the final loss of electrolyte can be kept minimum in this way.For this reason, advantageously at step D) during initiation layer thickness is deposited on first electrode for the solid electrolyte of 500nm at least.In step e) during, preferably the initiation layer thickness with solid-state electrolyte layer is decreased to final layer thickness, and this final layer thickness is less than 500nm, preferably less than 100nm, more preferably less than 60nm.In this way, can cause the appreciable reduction of dielectric substrate impedance, thereby cause improved considerablely battery performance.
In preferred embodiment, by in step e according to method of the present invention) during dielectric substrate is etched back to hope final layer thickness reduce the thickness of solid-state electrolyte layer.Usually, the known etching technique such as dry etching and wet etching to each layer patternization, wherein these etching techniques combine with the masking of routine usually.In the embodiment of a replaceability, described excess electrolytic material removes by polishing technology, particularly remove by chemico-mechanical polishing (" CMP ") technology, wherein on the bath surface that will polish, insertion therebetween comprises the fine dimension abrasive grain slurries of (with other compositions) to the pad of Yi Donging by bias.The result that CMP handles is also the layer thickness of dielectric substrate to be decreased to the final thickness of hope.
Solid electrolyte is preferably made by at least a material that is selected from the group that comprises following material: Li
5La
3Ta
2O
12(carbuncle type classification), LiPON, LiNbO
3, LiTaO
3, Li
9SiAlO
8And Li
0.5La
0.5TiO
3(Ca-Ti ore type).Other solid electrolyte materials that can apply neatly are tungstate lithium (lithium orthotungstate) (Li
2WO
4), lithium germanium oxynitride thing (LiGeON), Li
14ZnGe
4O
16(lisicon), Li
3N, beta-alumina or Li
1.3Ti
1.7Al
0.3(PO
4)
3(nasicon type).Protonically conducting electrolyte can be for example by TiO (OH) or ZrO
2H
xForm.
First electrode generally includes negative electrode and second electrode generally includes anode (perhaps vice versa).In a preferred embodiment, negative electrode is made by at least a material that is selected from the group that comprises following material: LiCoO
2, LiMn
2O
4, LiFePO
4, V
2O
5, MoO
3, WO
3And LiNiO
2Have been found that these materials are fit to be applied in the lithium ion energy source very much at least.Under the situation based on the energy source of proton, the example of negative electrode is Ni (OH)
2And NiM (OH)
2, wherein M is formed by one or more elements of the group that is selected from for example Cd, Co or Bi.The cathode material that should be understood that other also can be used in by in the battery pack that obtains according to method of the present invention.Anode is preferably made by at least a material that is selected from the group that comprises following material: Li metal, Si base alloy, Sn base alloy, Al, Si, SnO
x, Li
4Ti
5O
12, SiO
x, LiSiON, LiSnON and LiSiSnON, particularly Li
xSiSn
0.87O
1.20N
1.72
Preferably, be suitable for storing at least a spike (active species) in the following element according at least one electrode of energy source of the present invention: hydrogen (H), lithium (Li), beryllium (Be), magnesium (Mg), aluminium (Al), copper (Cu), silver (Ag), sodium (Na) and potassium (K) perhaps are assigned to any other suitable elements of 1 family or 2 families of periodic table.Therefore, can and thereby be fit to form different types of (dispenser-type) battery cell (cell), lithium ion battery Battery pack for example, NiMH battery cell or the like based on various intercalation mechanism by the battery pack that obtains according to method of the present invention.In a preferred embodiment, at least one electrode, battery anode more particularly comprises at least a in the following material: C, Sn, Ge, Pb, Zn, Bi, Sb, Li and the Si that preferably mixes.The combination of these materials also can be used for forming (one or more) electrode.Preferably, the Si that n type or p type are mixed is as electrode, perhaps with the Si related compound (such as SiGe or SiGeC) that mixes as electrode.Other suitable materials also can be used as anode, and any other the suitable element that preferably is assigned to one of the 12-16 family of periodic table can be used as anode, as long as the material of battery set electrode is suitable for above-mentioned reaction kind is carried out intercalation and storage.Previous materials is particularly suitable for being applied in the battery cell based on lithium ion.Under the situation of application based on the battery cell of hydrogen, anode preferably includes hydride and forms material, for example AB
5Section bar material, particularly LaNi
5, and for example magnesium base alloy, particularly Mg
xTi
1-x
Described method preferably also comprises step F) and step G), step F) be included in according to steps A) deposition deposits to first current-collector on the substrate before first electrode, and step G) be included in according to step C) second current-collector is deposited on described second electrode after described second electrode of deposition.By means of current-collector, can easily battery pack be connected to electronic equipment.Preferably, current-collector is by at least a the making in the following material: Al, Ni, Pt, Au, Ag, Cu, Ta, Ti, TaN and TiN.Also can use the current-collector of other kinds, for example the semi-conducting material (for example Si, GaAs, InP) that preferably mixes.
In a preferred embodiment, described method also comprises step H), this step is included in according to steps A) deposition deposits to electron-conductive barrier layer on the substrate before first electrode, and the spike that described barrier layer is suitable for stoping first electrode to comprise at least basically is diffused in the described substrate.In this way, from chemically having separated substrate and electrochemical cell, consequently, can keep the performance of electrochemical cell relatively for a long time enduringly.Under situation about having used based on the battery of lithium ion, the barrier layer is preferably by at least a the making in the following material: Ta, TaN, Ti and TiN.Should be understood that other suitable materials also can be used to serve as the barrier layer.Usually, useful is that the barrier layer is placed between anode and the adjacent substrate.
In a preferred embodiment, used substrate, it is ideally suited the experience surface treatment so that this substrate of patterning, and this can help the patterning of (one or more) electrode.This substrate is more preferably by at least a the making in the following material: C, Si, Sn, Ti, Ge, Al, Cu, Ta and Pb.The combination of these materials also can be used for forming (one or more) substrate.Preferably, Si that n type or p type are mixed or Ge be as substrate, perhaps with the Si that mixes relevant and/or Ge related compound (such as SiGe or SiGeC) as substrate.Except the relative stiffness material, the material of substantial flexibility (for example as
The paper tinsel that paper tinsel is such) also can be used to make substrate.Should be understood that other suitable materials also can be used as backing material.
In a particularly preferred embodiment, at least in part patterning towards the surface of electrolytical at least one electrode.In this way, described (one or more) electrode increases for the relative level and smooth contact surface of routine of described (one or more) electrode fully with effective contact surface area between the electrolyte, thereby causes the rate capabilities (rate capability) by the battery pack that obtains according to method of the present invention to increase pro rata.Patterning can realize that towards the surface of electrolytical one or more electrodes described method is selectivity wet chemical etch, physical etch (reactive ion etching), mechanical stamping and chemico-mechanical polishing (CMP) particularly by means of various method.The pattern that increases (one or more) electrode of the contact surface area between (one or more) electrode and the electrolyte can be shaped in various mode.Preferably, the patterned surface of at least one electrode is provided with a plurality of cavitys, particularly column, groove, slit or hole, and described specific cavity can apply with relative accurate way.In this way, also can pre-determine the augmented performance of battery pack with relative accurate way.
The present invention also relates to the battery pack that obtains according to method of the present invention by carrying out, it comprises first electrode, dielectric substrate and second electrode that deposits to successively on the substrate.Dielectric substrate is preferably thinner relatively, and wherein the thickness of dielectric substrate is less than 500nm, preferably less than 100nm, more preferably less than 60nm and particularly preferably be essentially 50nm.And dielectric substrate is uniformly (free of pinholes) basically, so that prevent the short circuit of first electrode and second electrode.According to battery pack of the present invention other (preferably) embodiment and advantage disclose in the above.
The invention still further relates to and be provided with according at least one battery pack of the present invention and the electronic equipment that is connected at least one electronic unit of described battery pack.Described at least one electronic unit preferably is embedded in the substrate of battery pack at least in part.In this way, can realize system in package (System in Package, Sip).In SiP, one or more electronic units and/or device (for example integrated circuit (IC), actuator, transducer, receiver, reflector or the like) are embedded in the substrate according to battery pack of the present invention at least in part.Be ideally suited to less relatively high power electronic application (for example (biology) implantable, hearing aids, the autonomous network equipment and N﹠M stimulation apparatus) power supply according to battery pack of the present invention, and power to flexible electronic devices (for example fabric electronic device, electronic device capable of washing, the application that needs the preform battery pack, electronic paper and a large amount of portable electronic are used).
Description of drawings
The present invention describes by following limiting examples, wherein:
Fig. 1 shows the cross section of the known solid state battery pack that comprises relatively thin dielectric substrate, and
Fig. 2 a-2d shows the manufacturing according to battery pack of the present invention.
Embodiment
Fig. 1 shows the schematic cross-sectional according to the known battery pack 1 of prior art.The example of battery pack 1 shown in Figure 1 also is disclosed in the International Patent Application WO 2005/027245.This known battery pack 1 comprises the lithium ion battery lamination 2 of anode 3, solid electrolyte 4 and negative electrode 5, and described battery stack 2 deposits on the substrate 6 that has wherein embedded one or more electronic units 7.In this example, substrate 6 is made by intrinsic silicon, and anode 3 is made by amorphous silicon (a-Si).Negative electrode 5 is by V
2O
5Make, and solid electrolyte is made by LiPON.Between battery stack 2 and substrate 6, lithium barrier layer 8 deposits on the substrate 6.In this example, lithium diffusion impervious layer 8 is made by tantalum.The tantalum layer 8 of conduction serves as chemical barrier, because the lithium ion that originally this layer obstruction comprised by lamination 2 (or other spikes) is diffused in the substrate 6.If lithium ion leaves lamination 2 and enters substrate 6, then the performance of lamination 2 will be affected.And this diffusion will have a strong impact on (one or more) electronic unit 7 that is embedded in the substrate 6.In this example, lithium diffusion impervious layer 8 also serves as the current-collector of the anode 3 in the known battery pack 1.Battery pack 1 also comprises additional current collector made of aluminum 9, and it deposits on the battery stack 2, deposits to particularly on the negative electrode 5.The deposition of each layer 3,4,5,8,9 can for example deposit by means of CVD, sputter, electron beam deposition or sol-gel and realize.In this example, the relatively thin dielectric substrate 4 that thickness is about 100nm deposits on the anode 3.The advantage that applies relatively thin dielectric substrate 4 is that the resistance of this layer 4 is less relatively, and this helps the performance of battery pack 1.Yet sedimentary facies is to form pin hole 10 in dielectric substrate 4 to sizable risk of thin dielectric substrate, thereby causes the short circuit of anode 3 and negative electrode 5.Therefore, conventional film all-solid-state battery group is that cost is equipped with shown dielectric substrate 4 and compares (big approximate number micron) thicker dielectric substrate with the performance of battery pack usually, forms pin hole so that prevent in dielectric substrate 4.
Fig. 2 a-2d shows the manufacturing according to battery pack 11 of the present invention.In Fig. 2 a, show barrier layer 12, anode 13 and solid electrolyte 14 are deposited on the substrate 15 that is provided with one or more electronic units 16 successively.As shown in the drawing, will compare relative thicker dielectric substrate 14 with the final layer thickness (being shown dotted line) of hope when initial and deposit on the anode 13 to obtain free of pinholes dielectric substrate 14.In this example, the original depth of dielectric substrate 14 is about 500nm.The upper surface of dielectric substrate 14 may be provided with irregularity 17.In order to remove these irregularities 17, by means of conventional etching and/or polishing technology to dielectric substrate 14 planarizations (referring to Fig. 2 b).After the planarization of dielectric substrate 14, the thickness (further) of described layer 14 is decreased to the layer thickness (referring to Fig. 2 c) of for example hope of 50nm.This relatively thin dielectric substrate 14 will not have pin hole, and will thereby can physically separate anode 13 and the negative electrode 18 (referring to Fig. 2 d) that will deposit on the electrolyte 14.On negative electrode 18, deposited current-collector 19.Described relatively thin dielectric substrate 14 will have less relatively resistance, and this will help the performance according to battery pack 1 of the present invention.Therefore, by carrying out, can make relatively thin high performance battery 11 in mode relatively simply and efficiently according to method of the present invention.
Should be noted in the discussion above that the foregoing description has illustrated rather than limited the present invention, and those skilled in the art are at the embodiment that can design many replaceabilities without departing from the scope of the appended claims.In claims, place any Reference numeral of bracket should not be regarded as restriction to claim.Verb " comprises " and element or element the step or the step that existence is listed do not got rid of in the use of variant in claim.Article " " (" a " or " an ") before the element is not got rid of and is had a plurality of such elements.In different mutually dependent claims, state this fact of some measure and do not mean that the combination of these measures can not advantageously be utilized.
Claims (18)
1. be used to make the method for solid state battery group, comprise step:
A) with first electro-deposition to substrate,
B) solid electrolyte is deposited on described first electrode, and
C) with second electro-deposition to described solid electrolyte,
Step B wherein) comprise step D) and step e), step D) solid electrolyte that comprises the final layer thickness that initiation layer thickness surpass is wished is deposited on described first electrode, and step e) comprise step D) during the initiation layer thickness of dielectric substrate of deposition be decreased to described final layer thickness.
2. according to the method for claim 1, it is characterized in that, at step D) during, be that the solid electrolyte of 500nm is deposited on described first electrode at least with initiation layer thickness.
3. according to the method for claim 1 or 2, it is characterized in that, in step e) during, the initiation layer thickness of described solid-state electrolyte layer is decreased to final layer thickness, this final layer thickness is less than 500nm, preferably less than 100nm, more preferably less than 60nm.
4. according to the method for one of claim of front, it is characterized in that, in step e) during, the thickness of described solid-state electrolyte layer reduced by the final layer thickness that described dielectric substrate is etched back to hope.
5. according to the method for one of claim of front, it is characterized in that, in step e) during, the thickness of described solid-state electrolyte layer reduced by the final layer thickness that described dielectric substrate is polished to hope.
6. according to the method for one of claim of front, it is characterized in that described first electrode is formed by anode and described second electrode is formed by negative electrode.
7. according to the method for one of claim of front, it is characterized in that, described method also comprises step F) and step G), step F) be included in according to steps A) deposition deposits to first current-collector on the described substrate before described first electrode, and step G) be included in according to step C) second current-collector is deposited on described second electrode after described second electrode of deposition.
8. according to the method for one of claim of front, it is characterized in that, described method also comprises step H), this step is included in according to steps A) deposition deposits to electron-conductive barrier layer on the described substrate before described first electrode, and the spike that described barrier layer is suitable for stoping described first electrode to comprise at least basically is diffused in the described substrate.
9. the battery pack that obtains by the method for carrying out according to one of claim 1-8 comprises first electrode, dielectric substrate and second electrode that deposit to successively on the substrate.
10. according to the battery pack of claim 9, it is characterized in that described dielectric substrate is uniform basically.
11. the battery pack according to claim 9 or 10 is characterized in that, the thickness of described dielectric substrate is less than 500nm, preferably less than 100nm, more preferably less than 60nm.
12. the battery pack according to one of claim 9-11 is characterized in that, described solid electrolyte is made by at least a material that is selected from the group that comprises following material: Li
5La
3Ta
2O
12, LiPON, LiNbO
3, Li
3N, beta-alumina, Li
1.3Ti
1.7Al
0.3(PO
4)
3, LiTaO
3, LiGeON, Li
2WO
4, Li
14ZnGe
4O
16, Li
9SiAlO
8, Li
0.5La
0.5TiO
3, TiO (OH) and ZrO
2H
x
13. the battery pack according to one of claim 9-12 is characterized in that, at least one in described first electrode and described second electrode is suitable for storing at least a ion in the following element: H, Li, Be, Mg, Cu, Ag, Al, Na and K.
14. the battery pack according to one of claim 9-13 is characterized in that, at least one in described first electrode and described second electrode be by at least a the making in the following material: C, Sn, Ge, Pb, Zn, Bi, Sb and the Si that preferably mixes.
15. the battery pack according to one of claim 14 is characterized in that, described substrate comprises Si.
16. electronic equipment is provided with at least one battery pack according to one of claim 9-15.
17. the electronic equipment according to claim 16 is characterized in that, described at least one electronic unit, particularly integrated circuit (IC) are embedded in the substrate of described battery pack at least in part.
18. the electronic equipment according to claim 16 or 17 is characterized in that, described electronic equipment and battery pack form system in package (SiP).
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP07109493 | 2007-06-04 | ||
| EP07109493.2 | 2007-06-04 | ||
| PCT/IB2008/052132 WO2008149272A1 (en) | 2007-06-04 | 2008-06-02 | Solid-state battery and method for manufacturing of such a solid-state battery |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101682075A true CN101682075A (en) | 2010-03-24 |
Family
ID=39632235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200880018931A Pending CN101682075A (en) | 2007-06-04 | 2008-06-02 | Solid-state battery and method for manufacturing of such a solid-state battery |
Country Status (4)
| Country | Link |
|---|---|
| KR (1) | KR20100036280A (en) |
| CN (1) | CN101682075A (en) |
| TW (1) | TW200919802A (en) |
| WO (1) | WO2008149272A1 (en) |
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|---|---|---|---|---|
| CN102986077A (en) * | 2010-06-21 | 2013-03-20 | 原子能和代替能源委员会 | Microbattery and method for manufacturing a microbattery |
| CN104272519A (en) * | 2012-04-18 | 2015-01-07 | 应用材料公司 | Pinhole-free solid state electrolyte with high ionic conductivity |
| CN109301311A (en) * | 2018-10-09 | 2019-02-01 | 大连理工大学 | A method of improving full solid thin film secondary lithium battery anode and electrolyte layers film interface |
| CN109428116A (en) * | 2017-09-05 | 2019-03-05 | 丰田自动车株式会社 | The manufacturing method of slurry, the manufacturing method of solid electrolyte layer and all-solid-state battery |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102456919B (en) * | 2011-07-20 | 2015-05-27 | 宁波大学 | Zn<2+> and B<3+> ion doped NASICON solid lithium ion electrolyte |
| TWI485905B (en) | 2014-07-18 | 2015-05-21 | Iner Aec Executive Yuan | Thin film battery structure and manufacturing method thereof |
| TWI600780B (en) * | 2014-12-18 | 2017-10-01 | 沙克堤公司 | Manufacture of high capacity solid state batteries |
| EP3293802B1 (en) * | 2015-09-14 | 2020-10-21 | Toyota Jidosha Kabushiki Kaisha | Method of manufacturing an all-solid-state battery system |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004093223A2 (en) * | 2003-04-14 | 2004-10-28 | Massachusetts Institute Of Technology | Integrated thin film batteries on silicon integrated circuits |
| DE602004006883T2 (en) * | 2003-09-15 | 2008-02-14 | Koninklijke Philips Electronics N.V. | ELECTROCHEMICAL ENERGY SOURCE, ELECTRONIC EQUIPMENT AND METHOD FOR PRODUCING THE ENERGY SOURCE |
| FR2862437B1 (en) * | 2003-11-14 | 2006-02-10 | Commissariat Energie Atomique | PROCESS FOR MANUFACTURING A LITHIUM MICRO-BATTERY |
| FR2880197B1 (en) * | 2004-12-23 | 2007-02-02 | Commissariat Energie Atomique | ELECTROLYTE STRUCTURE FOR MICROBATTERY |
| JP5153065B2 (en) * | 2005-08-31 | 2013-02-27 | 株式会社オハラ | Lithium ion secondary battery and solid electrolyte |
-
2008
- 2008-06-02 CN CN200880018931A patent/CN101682075A/en active Pending
- 2008-06-02 KR KR1020097027596A patent/KR20100036280A/en not_active Application Discontinuation
- 2008-06-02 WO PCT/IB2008/052132 patent/WO2008149272A1/en active Application Filing
- 2008-06-03 TW TW097120607A patent/TW200919802A/en unknown
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102986077A (en) * | 2010-06-21 | 2013-03-20 | 原子能和代替能源委员会 | Microbattery and method for manufacturing a microbattery |
| CN102986077B (en) * | 2010-06-21 | 2015-12-02 | 原子能和代替能源委员会 | The method of minicell and manufacture minicell |
| CN104272519A (en) * | 2012-04-18 | 2015-01-07 | 应用材料公司 | Pinhole-free solid state electrolyte with high ionic conductivity |
| CN109428116A (en) * | 2017-09-05 | 2019-03-05 | 丰田自动车株式会社 | The manufacturing method of slurry, the manufacturing method of solid electrolyte layer and all-solid-state battery |
| CN109301311A (en) * | 2018-10-09 | 2019-02-01 | 大连理工大学 | A method of improving full solid thin film secondary lithium battery anode and electrolyte layers film interface |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2008149272A1 (en) | 2008-12-11 |
| KR20100036280A (en) | 2010-04-07 |
| TW200919802A (en) | 2009-05-01 |
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