CN101673810B - 腔盖启闭机构 - Google Patents
腔盖启闭机构 Download PDFInfo
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- CN101673810B CN101673810B CN200910042397XA CN200910042397A CN101673810B CN 101673810 B CN101673810 B CN 101673810B CN 200910042397X A CN200910042397X A CN 200910042397XA CN 200910042397 A CN200910042397 A CN 200910042397A CN 101673810 B CN101673810 B CN 101673810B
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- 230000007246 mechanism Effects 0.000 title claims abstract description 121
- 230000005540 biological transmission Effects 0.000 claims abstract description 55
- 230000033001 locomotion Effects 0.000 claims abstract description 28
- 239000003638 chemical reducing agent Substances 0.000 claims abstract description 5
- 230000008878 coupling Effects 0.000 claims description 6
- 238000010168 coupling process Methods 0.000 claims description 6
- 238000005859 coupling reaction Methods 0.000 claims description 6
- 230000001360 synchronised effect Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 238000000034 method Methods 0.000 description 15
- 230000008569 process Effects 0.000 description 10
- 238000005516 engineering process Methods 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000013461 design Methods 0.000 description 4
- 230000000153 supplemental effect Effects 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 238000011161 development Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 235000013399 edible fruits Nutrition 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000013021 overheating Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 210000000056 organ Anatomy 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000003319 supportive effect Effects 0.000 description 1
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Abstract
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Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200910042397XA CN101673810B (zh) | 2009-09-03 | 2009-09-03 | 腔盖启闭机构 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN200910042397XA CN101673810B (zh) | 2009-09-03 | 2009-09-03 | 腔盖启闭机构 |
Publications (2)
Publication Number | Publication Date |
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CN101673810A CN101673810A (zh) | 2010-03-17 |
CN101673810B true CN101673810B (zh) | 2011-06-22 |
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CN200910042397XA Expired - Fee Related CN101673810B (zh) | 2009-09-03 | 2009-09-03 | 腔盖启闭机构 |
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CN (1) | CN101673810B (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104746010B (zh) * | 2013-12-31 | 2017-06-06 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Pvd设备 |
CN105369207B (zh) * | 2015-12-02 | 2018-03-30 | 武汉华星光电技术有限公司 | 快速更换真空腔体内消耗件的装置与方法 |
CN107067992B (zh) * | 2017-03-31 | 2022-02-18 | 深圳市洲明科技股份有限公司 | 带保护装置的led显示屏 |
KR101921644B1 (ko) * | 2017-04-04 | 2019-02-13 | 주식회사 파인솔루션 | 기어박스형 탑 리드 개폐 장치 |
CN114717509B (zh) * | 2022-06-09 | 2022-09-13 | 上海陛通半导体能源科技股份有限公司 | 一种腔体盖开合结构及气相沉积设备 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1924659A (zh) * | 2005-08-31 | 2007-03-07 | 东京毅力科创株式会社 | 基板处理装置以及基板处理*** |
CN1983515A (zh) * | 2005-12-14 | 2007-06-20 | 东京毅力科创株式会社 | 基板处理装置和该装置的盖吊支装置 |
CN201508831U (zh) * | 2009-09-03 | 2010-06-16 | 东莞宏威数码机械有限公司 | 开启机构 |
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2009
- 2009-09-03 CN CN200910042397XA patent/CN101673810B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1924659A (zh) * | 2005-08-31 | 2007-03-07 | 东京毅力科创株式会社 | 基板处理装置以及基板处理*** |
CN1983515A (zh) * | 2005-12-14 | 2007-06-20 | 东京毅力科创株式会社 | 基板处理装置和该装置的盖吊支装置 |
CN201508831U (zh) * | 2009-09-03 | 2010-06-16 | 东莞宏威数码机械有限公司 | 开启机构 |
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CN101673810A (zh) | 2010-03-17 |
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