CN101661226B - Carrying box of photomask boxes and fixing pieces thereof - Google Patents
Carrying box of photomask boxes and fixing pieces thereof Download PDFInfo
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- CN101661226B CN101661226B CN2008101464008A CN200810146400A CN101661226B CN 101661226 B CN101661226 B CN 101661226B CN 2008101464008 A CN2008101464008 A CN 2008101464008A CN 200810146400 A CN200810146400 A CN 200810146400A CN 101661226 B CN101661226 B CN 101661226B
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- alar part
- box
- photomask
- cover body
- pressure section
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Abstract
The invention relates to a carrying box of photomask boxes and fixing pieces thereof. The carrying box of the photomask boxes is provided with an accommodating space formed by an upper cover body and a lower cover body which correspond approximately; the lower cover body is provided with a plurality of pairs of guide rails arranged on side faces of two opposite inner surfaces of the lower cover body; separation plates are embedded into the lower cover body through the guide rails to divide the accommodating space into a plurality of accommodating spaces so as to store the photomask boxes; the fixing pieces are arranged on the top surface of the inner surface of the upper cover body and are provided with a clamping part and a pressing part; when the upper cover body covers the lower cover body, each fixing piece of the upper cover body can be stored in each photomask box in the carrying box correspondingly; and the clamping part of the fixing pieces can clamp the photomask boxes, the pressing part of the fixing pieces can butt against the photomask boxes so as to prevent photomasks stored in the photomask boxes from generating friction or damage caused by the influence of the vibration generated by the carrying box in the process of conveying the photomask boxes. Therefore, the carrying box has excellent effects on vibration prevention and protection.
Description
Technical field
The present invention relates to a kind of Carrier box of box for photomask, particularly about a kind of in the Carrier box of box for photomask a plurality of fixtures of configuration, in order to the box for photomask in the fixing Carrier box.
Background technology
Modern age, the semiconductor development in science and technology was rapid, and wherein photoetching technique (Optical Lithography) is played the part of important role, so long as about figure (pattern) definition, all need rely on photoetching technique.Photoetching technique is that the circuit that will design is made into the light shield (photo mask) with given shape light-permeable in semi-conductive application.Utilize the exposure principle, then light source is projected to silicon chip (silicon wafer) the demonstration specific pattern that can expose by light shield.Because any dust granules (as particulate, dust or organism) that is attached on the light shield all can cause the quality deterioration of projection imaging, the light shield that is used to produce figure must keep absolute cleaning, therefore in general silicon chip technology, the environment that dust free room (clean room) all is provided is to avoid airborne particle contamination.Yet present dust free room also can't reach absolute dustless state.Modern semiconductor technology all utilizes resistant to pollution box for photomask (reticle pod) to carry out the preservation and the transportation of light shield, so that light shield remaining clean.
And the present the most general light shield mode of transporting, normally earlier with single photomask storage in the middle of single box for photomask, again a plurality of box for photomask together are positioned over the transport case of a box for photomask, and in the box of the transportation of box for photomask filling flexible material (as foam, sponge etc.), reduce the box internal clearance of the transport case of box for photomask, and by strengthening and fixing each box for photomask, the transport case of avoiding box for photomask influences friction or the damage depositing in the light shield in the box for photomask and cause light shield in transporting the vibrations that box for photomask is produced on the way.Yet, with regard to the light shield supplier, during shipment except need with the box for photomask fixed in position is in the transport case of box for photomask, also must be, and guarantee not have in the box a plurality of gaps with manual type with the transport case of flexible material filling in box for photomask; With regard to light shield party in request, when desire is taken out box for photomask, also must with manual type the flexible material of filling in the transport case box of box for photomask be taken out earlier, just taken out box for photomask, and need be used in the flexible material place that filling uses, therefore at these.The packing that both sides of supply and demand are carried out flexible material except all expending time in human cost and the dismounting, if these used flexible materials are directly abandoned and do not reuse, these flexible materials that can't decompose voluntarily will pollute environment again.
Summary of the invention
In order to address the above problem, fundamental purpose of the present invention is to provide in a kind of Carrier box that a plurality of fixtures is disposed at box for photomask, in order to the box for photomask in the fixing Carrier box, so that the box for photomask in the Carrier box has preferable shockproof and protection effect.
Another fundamental purpose of the present invention is to provide a kind of Carrier box of box for photomask, and its fixture has preferable prevent light shield friction or damage, and reduces the generation of grit.
Another fundamental purpose of the present invention is to provide a kind of fixture, and it has preferable elastic construction, can effectively discharge stress.
The present invention also has a fundamental purpose to be to provide a kind of fixture, and it has the mode of comparatively simply installing, and can be easy to the replacement that changes of single fixture.
A fundamental purpose more of the present invention is to provide a kind of Carrier box of box for photomask, and other has an Airtight gasket can provide preferable airtight effect.
A further object of the present invention is to provide a kind of Carrier box of box for photomask, and other has the slip that a sliding-proof pad can be avoided box for photomask, and causes the vibrations of light shield.
According to above-mentioned purpose, the invention provides the fixture in a kind of Carrier box that is disposed at box for photomask.The Carrier box of this box for photomask comprises a upper cover body, one lower cover, multi-disc dividing plate and a plurality of fixture, upper cover body is roughly corresponding to form an accommodation space with lower cover, lower cover has severally to be located on the relative inside surface side of lower cover two guide rail, dividing plate is to be embedded in the lower cover by guide rail, accommodation space is divided into a plurality of accommodation spaces in order to deposit several box for photomask, fixture then is arranged at the end face of upper cover body inside surface, this fixture has a top, these both sides, top respectively dispose a pair of alar part that tilts to extend laterally, this is downwards crooked so that this free end to alar part forms clamping part in a suitable turning point to alar part, and in this turning point of alar part is tilted to extend to together to form a pressure section to this free end to alar part is inboard again, wherein keep one first spacing between pressure section and top.
Therefore; when the upper cover body of Carrier box is covered on lower cover; each fixture of upper cover body all can corresponding be deposited in each box for photomask in the Carrier box; but the clamping part clamping box for photomask of fixture; the pressure section of fixture can hold box for photomask, and the vibrations to avoid Carrier box to be produced in transporting the box for photomask way influence friction or the damage depositing in the light shield in the box for photomask and cause light shield; therefore have preferable shockproof and protection effect, and can reduce the generation of grit.
Description of drawings
Fig. 1 is a preferred embodiment synoptic diagram of fixture;
Fig. 2 is another preferred embodiment synoptic diagram of fixture;
Fig. 3 is the another preferred embodiment synoptic diagram of fixture;
Fig. 4 is the side view of the Carrier box of box for photomask;
Fig. 5 is the top view of the Carrier box of box for photomask;
Fig. 6 is the side view of Carrier box;
Fig. 7 is the skeleton view of the Carrier box of box for photomask.
[main element symbol description]
1 fixture
10 tops
102 cylinder acrosomes
104 locking holes
12 alar parts
122 turning points
124 first arc grooves
14 clamping parts
16 pressure sections
18 support portions
182 second arc grooves
2 Carrier boxs
20 upper cover body
22 lower covers
220 guide rails
24 dividing plates
The 26a buckling element
26b locking edge portion
The space of 28 ccontaining box for photomask
3 box for photomask
30 hinges
32 Airtight gaskets
34 sliding-proof pads
A1 first angle
A2 second angle
C1 first spacing
C2 second spacing
Distance between C3 clamping part and clamping part
C4 box body width
Embodiment
Because the present invention discloses a kind of Carrier box of box for photomask, particularly a kind of in the Carrier box of box for photomask a plurality of fixtures of configuration, and fix box for photomask in the Carrier box by these fixtures.Because some light shields that the present invention used or the detailed manufacturing or the processing procedure of box for photomask are to utilize prior art to reach, so in following explanation, do not do complete description.And graphic in the literary composition, also not according to the actual complete drafting of relative dimensions, its effect is only being expressed the synoptic diagram relevant with feature of the present invention.
Fig. 1 is a preferred embodiment synoptic diagram of the fixture according to the present invention, this fixture 1 has a top 10, and dispose a locking hole 104 on the end face at top 10, fix this fixture 1 for a locking part (not being shown among the figure), 10 both sides, top respectively dispose a pair of alar part 12 that tilts to extend laterally, this is downward so that this free end to alar part 12 respectively forms a clamping part 14 in suitable turning point 122 bendings to alar part 12, and again in this to the turning point 122 of alar part 12 again to this to the free end of alar part 12 in lateral branching and tilt to extend to together to form a pressure section 16, wherein 10 at pressure section 16 and top keep one first spacing C1, can be in the top 10 form a cushion space when being subjected to exerting pressure.
From the above, shape approximation one v-shaped structure of pressure section 16, and the thickness at two ends is thin than central part in one-piece construction, and top 10 is an obtuse angle with formed one first included angle A 1 of the oblique extension of alar part 12 inclinations, its angle is 100 degree-170 degree, and its preferable 120 degree-160 that are designed to are spent; In addition, alar part 12 is an acute angle with one second included angle A 2 of turning point 122 inclinations extension pressure section that forms 16, and its angle is 10 degree-75 degree, and its preferable 20 degree-60 that are designed to are spent; In addition, and between each turning point 122 and free end, form one first arc groove 124,, can effectively discharge stress so fixture 1 has preferable elastic construction.Clearly, the structure that the top 10 of fixture 1, alar part 12, turning point 122, clamping part 14 and pressure section 16 are one of the forming, it is made by elastic material, and made material can be by selecting in the following material: macromolecular material, plastic material, tygon (PE) material or polypropylene (PP) material, wherein tygon (PE) is a kind of wear-resisting material.
Fig. 2 is another preferred embodiment synoptic diagram of the fixture according to the present invention, this fixture 1 has a top 10, dispose a locking hole 104 on the end face at top 10, fix this fixture 1 for a locking part (not being shown among the figure), other disposes a cylinder acrosome 102 in the top 10, this cylinder acrosome 102 is a hollow acrosome, 10 both sides, top respectively dispose a pair of alar part 12 that tilts to extend laterally, this is downward so that this free end to alar part 12 respectively forms a clamping part 14 in suitable turning point 122 bendings to alar part 12, and again in this to the turning point 122 of alar part 12 again to this to the free end of alar part 12 in lateral branching and tilt to extend to together to form a pressure section 16, wherein 102 of pressure section 16 and cylinder acrosomes keep one second spacing C2, can be in the top 10 form a cushion space when being subjected to exerting pressure, and the length of cylinder acrosome 102 can be the 1/4-3/4 of top 10 and the distance of pressure section 16 lowest parts, or also can be half of distance of top 10 and pressure section 16 lowest parts.
From the above, shape approximation one v-shaped structure of pressure section 16, and the thickness at two ends is thin than central part in one-piece construction, and top 10 is an obtuse angle with formed one first included angle A 1 of the oblique extension of alar part 12 inclinations, its angle is 100 degree-170 degree, and its preferable 120 degree-160 that are designed to are spent; In addition, alar part 12 is an acute angle with one second included angle A 2 of turning point 122 inclinations extension pressure section that forms 16, and its angle is 10 degree-75 degree, and its preferable 20 degree-60 that are designed to are spent; In addition, and between each turning point 122 and free end, form one first arc groove 124,, can effectively discharge stress so fixture 1 has preferable elastic construction.The structure that top 10, alar part 12, turning point 122, clamping part 14 and pressure section 16 are one of the forming, it is made by elastic material, and made material can be by selecting in the following material: macromolecular material, plastic material, tygon (PE) material or polypropylene (PP) material, wherein tygon (PE) is a kind of wear-resisting material.Clearly, above-mentioned fixture 1 has comparatively simple structure, can use general injection molding mode integrally formed, so the cost of its manufacturing is very low.
Fig. 3 is the another preferred embodiment synoptic diagram of the fixture according to the present invention, this fixture 1 has a top 10, dispose a locking hole 104 on the end face at top 10, fix this fixture 1 for a locking part (not being shown among the figure), other disposes a cylinder acrosome 102 in the top 10, this cylinder acrosome 102 is a hollow acrosome, 10 both sides, top respectively dispose a pair of alar part 12 that tilts to extend laterally, this is downward so that this free end to alar part 12 respectively forms a clamping part 14 in suitable turning point 122 bendings to alar part 12, and again in this to the turning point 122 of alar part 12 again to this to the free end of alar part 12 in lateral branching and tilt to extend to together to form a pressure section 16, and be provided with at least one support portion 18 between clamping part 14 and the pressure section 16 in addition, wherein, support portion 18 is thin with the thickness of pressure section 16 junctions than support portion 18 other parts, and support portion 18 and pressure section 16 junction tools one second arc groove 182, wherein 102 of pressure section 16 and cylinder acrosomes keep one second spacing C2, can be in the top 10 form a cushion space when being subjected to exerting pressure, and the length of cylinder acrosome 102 can be the 1/4-3/4 of the distance of top 10 and pressure section 16 lowest parts, or also can be half of distance of top 10 and pressure section 16 lowest parts, so fixture 1 has comparatively firm and preferable elastic construction is arranged.
From the above, shape approximation one v-shaped structure of pressure section 16, and the thickness at two ends is thin than central part in one-piece construction, and top 10 is an obtuse angle with formed one first included angle A 1 of the oblique extension of alar part 12 inclinations, its angle is 100 degree-170 degree, and its preferable 120 degree-160 that are designed to are spent; In addition, alar part 12 is an acute angle with one second included angle A 2 of turning point 122 inclinations extension pressure section that forms 16, and its angle is 10 degree-75 degree, and its preferable 20 degree-60 that are designed to are spent; In addition, and between each turning point 122 and free end, form one first arc groove 124,, can effectively discharge stress so fixture 1 has preferable elastic construction.The structure that top 10, alar part 12, turning point 122, clamping part 14, pressure section 16 and support portion 18 are one of the forming, it is made by elastic material, and made material can be by selecting in the following material: macromolecular material, plastic material, tygon (PE) material or polypropylene (PP) material, wherein tygon (PE) is a kind of wear-resisting material.
Fig. 4 and Fig. 5 are preferred embodiment synoptic diagram of the Carrier box according to the present invention, this Carrier box 2 comprises that a upper cover body 20 and with accommodation space has the lower cover 22 of accommodation space, so can upper cover body 20 and lower cover 22 is roughly corresponding to form an accommodation space that can hold object (for example box for photomask); In addition, in the accommodation space of lower cover 22, dispose at least one dividing plate 24, and at least one pair of guide rail 220 is disposed on the two relative inside surface sides in the accommodation space of lower cover 22, to provide dividing plate 24 to embed, be divided into the space 28 of a plurality of ccontaining box for photomask in order to accommodation space with Carrier box 2.
In addition, Carrier box 2 has several buckling elements 26a and the 26b of several locking edge portions in addition, buckling element 26a is located on the side in the outside of lower cover 22, the 26b of locking edge portion is located on the side in the outside of upper cover body 20, and buckling element 26a is to be arranged on the mutual corresponding different lids with the 26b of locking edge portion; In addition, upper cover body 20 is to be bonded with each other in hinge 30 modes with a side of lower cover 22, and has a lid opening part that an Airtight gasket 32 is located at lower cover, can provide Carrier box 2 to reach preferable airtight effect, be layed in the interior bottom surface of lower cover and have a sliding-proof pad 34 in addition, the box for photomask that can avoid being positioned in the Carrier box 2 slides, and causes the vibrations of light shield.
Fig. 6 is a preferred embodiment synoptic diagram of the Carrier box according to the present invention, this Carrier box 2 comprises that a upper cover body 20 and with accommodation space has the lower cover 22 of accommodation space, so can upper cover body 20 and lower cover 22 is roughly corresponding to form an accommodation space that can hold box for photomask; In addition, in the accommodation space of lower cover 22, dispose at least one dividing plate 24, and further at least one fixture 1 of configuration on the inboard end face of the accommodation space of upper cover body 20; In addition, in the accommodation space of lower cover 22, and at least one pair of guide rail 220 is disposed on the two relative inside surface sides in the accommodation space of lower cover 22, embeds so that dividing plate 24 to be provided, in order to accommodation space is divided into a plurality of accommodation spaces 28.
As mentioned above, fixture 1 of the present invention is to be arranged on the inboard end face of accommodation space of upper cover body 20.Fixture 1 has a top 10,10 both sides, top respectively dispose a pair of alar part 12 that tilts to extend laterally, this is downward so that this free end to alar part 12 respectively forms a clamping part 14 in suitable turning point 122 bendings to alar part 12, and again in this to the turning point 122 of alar part 12 again to this to the free end of alar part 12 in lateral branching and tilt to extend to together to form a pressure section 16, wherein 10 at pressure section 16 and top keep one first spacing C1, can be in the top 10 form a cushion space when being subjected to exerting pressure.
In addition, the present invention provides the mode on several end faces that fixture 1 are fixed in upper cover body 20 inside surfaces in addition, can utilize locking part (not being shown among the figure) to be fixed on Carrier box 2 as fixture 1, therefore fixture 1 disposes a locking hole 104 on the end face at top 10, and locking part can be a screw element; Or fixture 1 can utilize the viscose glue juncture to be fixed on the Carrier box 2; Or fixture 1 is one-body molded made with Carrier box 2, so fixture 1 has the mode of comparatively simply installing, can be easy to the replacement that changes of single fixture.
Fig. 7 is the preferred embodiment synoptic diagram that Carrier box according to the present invention is used to carry box for photomask, the Carrier box 2 of this box for photomask 3 comprises that a upper cover body 20 and with accommodation space has the lower cover 22 of accommodation space, so can upper cover body 20 and lower cover 22 is roughly corresponding to form an accommodation space that can hold box for photomask; In addition, in the accommodation space of lower cover 22, dispose at least one dividing plate 24, and further at least one fixture 1 of configuration on the inboard end face of the accommodation space of upper cover body 20; In addition, in the accommodation space of lower cover 22, and at least one pair of guide rail 220 is disposed on the two relative inside surface sides in the accommodation space of lower cover 22, embeds so that dividing plate 24 to be provided, in order to accommodation space is divided into a plurality of accommodation spaces 28.
Be positioned over the accommodation space 28 of Carrier box 2 in regular turn when a plurality of box for photomask 3 after; when upper cover body 20 is covered on lower cover 22; each fixture 1 of upper cover body 20 all can corresponding be deposited in each box for photomask 3 in the Carrier box 2; therefore; but the clamping part 14 clamping box for photomask 3 of fixture 1; and can be again pressure section 16 by fixture 1 hold box for photomask 3; with the vibrations of avoiding Carrier box 2 in transporting box for photomask 3 ways, to be produced; the light shield in the box for photomask 3 is deposited in influence; and cause the friction or the damage of light shield; therefore have preferable shockproof and protection effect, and can reduce the generation of grit.
The above is preferred embodiment of the present invention only, is not in order to limit interest field of the present invention; Simultaneously above description should be understood and be implemented for the special personage who knows the present technique field, so other does not break away from the equivalence of being finished under the disclosed spirit and change or modification, all should be included in the following claim.
Claims (9)
1. fixture, it is characterized in that comprising a top, these both sides, top respectively dispose a pair of alar part that tilts to extend laterally, it is an obtuse angle that this top and this alar part inclination are tiltedly extended formed angle, this is downwards crooked so that this free end to alar part forms clamping part in a suitable turning point to alar part, and in this to the turning point of alar part again to this to the free end of alar part in lateral branching and tilt to extend to together to form a pressure section, wherein keep one first spacing between this pressure section and this top, and this fixture is made by elastic material.
2. Carrier box, comprise that a upper cover body and with first accommodation space has the lower cover of second accommodation space, this upper cover body and this lower cover cover the back and form one the 3rd accommodation space, at least one pair of guide rail of configuration on two interior surface opposing of the accommodation space of this lower cover, provide at least one dividing plate to embed, in order to accommodation space is divided into a plurality of accommodation spaces, and further at least one fixture of configuration on the inboard end face of the accommodation space of upper cover body, it is characterized in that, this fixture has a top, these both sides, top respectively dispose a pair of alar part that tilts to extend laterally, it is an obtuse angle that this top and this alar part inclination are tiltedly extended formed angle, this is downwards crooked so that this free end to alar part forms clamping part in a suitable turning point to alar part, and in this free end to alar part is inboard tilts to extend to together to form a pressure section to this again to turning point of alar part, wherein keep one first spacing between this pressure section and this top, and this fixture is made by elastic material.
3. Carrier box as claimed in claim 2 is characterized in that, also disposes a cylinder acrosome in this top.
4. Carrier box as claimed in claim 3 is characterized in that, this cylinder acrosome is a hollow acrosome.
5. Carrier box as claimed in claim 3 is characterized in that, keeps one second spacing between this pressure section and this cylinder acrosome.
6. Carrier box as claimed in claim 3 is characterized in that, this cylinder acrosome length is the 1/2-3/4 of the distance of this top and this pressure section lowest part.
7. Carrier box as claimed in claim 2 is characterized in that, the angle that this turning point of this alar part and hand tilts to extend this pressure section that forms is an acute angle.
8. Carrier box as claimed in claim 2 is characterized in that, this pressure section forms an approximate v-shaped structure.
9. Carrier box as claimed in claim 2 is characterized in that, is provided with at least one support portion between this clamping part and this pressure section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101464008A CN101661226B (en) | 2008-08-27 | 2008-08-27 | Carrying box of photomask boxes and fixing pieces thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101464008A CN101661226B (en) | 2008-08-27 | 2008-08-27 | Carrying box of photomask boxes and fixing pieces thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101661226A CN101661226A (en) | 2010-03-03 |
| CN101661226B true CN101661226B (en) | 2011-07-06 |
Family
ID=41789319
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101464008A Active CN101661226B (en) | 2008-08-27 | 2008-08-27 | Carrying box of photomask boxes and fixing pieces thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101661226B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11787621B2 (en) | 2020-03-23 | 2023-10-17 | Gudeng Precision Industrial Co., Ltd. | Reticle pod and wear parts thereof |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102903656B (en) * | 2011-07-25 | 2015-01-21 | 北大方正集团有限公司 | Photomask basket |
| TWI680348B (en) * | 2018-12-06 | 2019-12-21 | 家登精密工業股份有限公司 | Reticle pod and connecting frame |
| CN117935436A (en) * | 2022-10-14 | 2024-04-26 | 无锡芯享信息科技有限公司 | Intelligent container of photomask box for semiconductor industry and management system thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4003468A (en) * | 1973-07-25 | 1977-01-18 | Berkman Joseph L | Case and insert for differently sized magnetic tape enclosures |
| US4436215A (en) * | 1982-01-21 | 1984-03-13 | Kleinert Karl W | Storage drawer with retained partitions |
| US4946037A (en) * | 1988-06-29 | 1990-08-07 | Minnesota Mining And Manufacturing Company | Package having supported gabletop containers for two part composition |
| CN200953716Y (en) * | 2006-09-08 | 2007-09-26 | 英业达股份有限公司 | Fixing element |
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2008
- 2008-08-27 CN CN2008101464008A patent/CN101661226B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4003468A (en) * | 1973-07-25 | 1977-01-18 | Berkman Joseph L | Case and insert for differently sized magnetic tape enclosures |
| US4436215A (en) * | 1982-01-21 | 1984-03-13 | Kleinert Karl W | Storage drawer with retained partitions |
| US4946037A (en) * | 1988-06-29 | 1990-08-07 | Minnesota Mining And Manufacturing Company | Package having supported gabletop containers for two part composition |
| CN200953716Y (en) * | 2006-09-08 | 2007-09-26 | 英业达股份有限公司 | Fixing element |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11787621B2 (en) | 2020-03-23 | 2023-10-17 | Gudeng Precision Industrial Co., Ltd. | Reticle pod and wear parts thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101661226A (en) | 2010-03-03 |
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