CN101619429B - 铜靶材的加工方法 - Google Patents
铜靶材的加工方法 Download PDFInfo
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- CN101619429B CN101619429B CN 200910165364 CN200910165364A CN101619429B CN 101619429 B CN101619429 B CN 101619429B CN 200910165364 CN200910165364 CN 200910165364 CN 200910165364 A CN200910165364 A CN 200910165364A CN 101619429 B CN101619429 B CN 101619429B
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- copper
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- coppersmith spare
- coppersmith
- mechanical workout
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 73
- 239000010949 copper Substances 0.000 title claims abstract description 73
- 229910052802 copper Inorganic materials 0.000 title claims abstract description 73
- 239000013077 target material Substances 0.000 title abstract description 7
- 238000003672 processing method Methods 0.000 title abstract 3
- 238000000034 method Methods 0.000 claims abstract description 34
- 238000012545 processing Methods 0.000 claims abstract description 25
- 241000969106 Megalaima haemacephala Species 0.000 claims description 99
- 238000001816 cooling Methods 0.000 claims description 19
- 238000005520 cutting process Methods 0.000 claims description 17
- 239000007921 spray Substances 0.000 claims description 15
- 239000002173 cutting fluid Substances 0.000 claims description 14
- 238000003825 pressing Methods 0.000 claims description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 4
- 230000001186 cumulative effect Effects 0.000 claims description 2
- 230000003746 surface roughness Effects 0.000 abstract description 2
- 239000012530 fluid Substances 0.000 description 9
- 239000007788 liquid Substances 0.000 description 9
- 238000003754 machining Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 239000004411 aluminium Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000008595 infiltration Effects 0.000 description 3
- 238000001764 infiltration Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 238000005461 lubrication Methods 0.000 description 2
- 230000000803 paradoxical effect Effects 0.000 description 2
- 239000012466 permeate Substances 0.000 description 2
- 208000037656 Respiratory Sounds Diseases 0.000 description 1
- 206010044565 Tremor Diseases 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 230000007903 penetration ability Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
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- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
Description
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Priority Applications (1)
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CN 200910165364 CN101619429B (zh) | 2009-08-07 | 2009-08-07 | 铜靶材的加工方法 |
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CN 200910165364 CN101619429B (zh) | 2009-08-07 | 2009-08-07 | 铜靶材的加工方法 |
Publications (2)
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CN101619429A CN101619429A (zh) | 2010-01-06 |
CN101619429B true CN101619429B (zh) | 2011-06-22 |
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CN 200910165364 Active CN101619429B (zh) | 2009-08-07 | 2009-08-07 | 铜靶材的加工方法 |
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102586744B (zh) * | 2011-12-30 | 2014-05-07 | 余姚康富特电子材料有限公司 | 靶材及其形成方法 |
CN106541154A (zh) * | 2015-09-16 | 2017-03-29 | 宁波江丰电子材料股份有限公司 | 一种加工钨靶材的方法 |
CN107470650A (zh) * | 2016-06-07 | 2017-12-15 | 宁波江丰电子材料股份有限公司 | 银靶材的加工方法 |
CN110578126B (zh) * | 2019-10-18 | 2021-12-28 | 洛阳高新四丰电子材料有限公司 | 一种多规格高纯铜靶材的制备方法 |
CN112518238B (zh) * | 2020-11-06 | 2022-07-12 | 安徽江淮汽车集团股份有限公司 | 一种汽车变速箱阀板结合面的加工工艺及加工*** |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4551187A (en) * | 1984-06-08 | 1985-11-05 | Brush Wellman Inc. | Copper alloy |
CN101367132A (zh) * | 2007-10-19 | 2009-02-18 | 马进中 | 可加工回转体薄壁工件的机床夹具 |
-
2009
- 2009-08-07 CN CN 200910165364 patent/CN101619429B/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4551187A (en) * | 1984-06-08 | 1985-11-05 | Brush Wellman Inc. | Copper alloy |
CN101367132A (zh) * | 2007-10-19 | 2009-02-18 | 马进中 | 可加工回转体薄壁工件的机床夹具 |
Non-Patent Citations (3)
Title |
---|
刘志峰.喷雾冷却法及其应用.《机械工艺师》.1997,(第7期),9. * |
尚再艳等.集成电路制造用溅射靶材.《稀有金属》.2005,第29卷(第4期),476. * |
柳舟通等.模具加工工艺规程的编制.《模具制造工艺学》.科学技术出版社,2005,30-31. * |
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CN101619429A (zh) | 2010-01-06 |
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Address after: 315400 Zhejiang Province, Yuyao City Yangming science and Technology Industrial Park No. 1 Jiang Feng Lu Patentee after: NINGBO JIANGFENG ELECTRONIC MATERIAL CO., LTD. Address before: 315400 Zhejiang Province, Yuyao City Yangming science and Technology Industrial Park No. 1 Jiang Feng Lu Patentee before: Ningbo Jiangfeng Electronic Materials Co., Ltd. |
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