CN101615443B - Optical device for converging parallel X-ray - Google Patents
Optical device for converging parallel X-ray Download PDFInfo
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- CN101615443B CN101615443B CN2009100893513A CN200910089351A CN101615443B CN 101615443 B CN101615443 B CN 101615443B CN 2009100893513 A CN2009100893513 A CN 2009100893513A CN 200910089351 A CN200910089351 A CN 200910089351A CN 101615443 B CN101615443 B CN 101615443B
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Abstract
The invention discloses an optical device for converging and diverging parallel X-ray, which is used for realizing the low-energy X-ray filtering and the parallel high-energy X-ray converging. The optical device comprises a solid component made of glass material, the solid component adopts an axially symmetric structure, one group of opposite sides of a longitudinal cross-section are parallel lines, and the other group of opposite sides are para curves, the opening of which are opposite to each other; a metal film is plated on the side wall of the solid component; one end of the solid component is used for receiving X-ray, and the other end is used for outputting X-ray; a reflecting plane is formed on the critical plane between the glass material and the metal film, and the reflecting plane is used for the X-ray to be totally reflected when the X-ray is transmitted to the reflecting plane in the solid component and to be converged outside the other end.
Description
Technical field
The present invention relates to material and optical field, particularly relate to the optical device that is used for converging parallel X-ray.
Background technology
The X ray microbeam is generally used for the glancing incidence catoptron based on total reflection in X ray astronomical telescope and the synchrotron radiation light beam line, and its main restriction is minimum corner connection batter footpath, volume is big and involve great expense; Based on the zone plate of Fresnel diffraction with based on the crystal or the multilayer film optical element of Bragg diffraction, though there is not the restriction in corner connection batter footpath, only useful to a narrow band; And when being used to produce the X ray microbeam, just in time can remedy above deficiency based on the kapillary optical element of total reflection, and realize wide-angle, wideband transmit, and cheap, thereby cause people's very big interest.X ray kapillary optics is one of X ray optical technology with fastest developing speed.The X ray kapillary combines with traditional X-ray tube can build up desktop type (table-top) microbeam spectrometer or diffractometer, is specially adapted to the space station and uses.The X ray kapillary combines with synchrotron radiation light source and can produce stronger X ray microbeam.
For glass capillary, formula can be arranged
Wherein k is a scale-up factor, under the certain situation of reflecting material density p, the ENERGY E of X ray is high more, critical glancing angle θ is more little in total reflection, the transfer efficiency of glass capillary is low more, focusing effect is poor more, so present glass capillary can only be that 0.2～40keV X ray is effectively assembled to energy range.
Along with the continuous expansion of micro-beam X-ray range of application, how to obtain the little focal spot of high-energy high brightness X ray and then be subjected to showing great attention to of people.Light sources such as present synchrotron radiation can provide the depth of parallelism very high quasi parallel beams X ray, and how these parallel sigmatrons being focused on is the focus of being concerned about in the industry.
Summary of the invention
The embodiment of the invention provides a kind of optical device that is used for converging parallel X-ray, is used to realize the filtering low energy X ray, and the converging parallel sigmatron.
A kind of optical device of converging X-ray comprises:
By the solid component that glass material is made, this solid component is an axially symmetric structure, and one group of opposite side is parallel lines in two groups of opposite side of longitudinal cross-section, and another group opposite side is the relative para-curve of opening;
The sidewall metal-plated membrane of described solid component;
End in the described solid component two ends is used to receive X ray, and the other end is used to export X ray;
The critical surface of described glass material and metal film constitutes reflecting surface, and this reflecting surface is used for X ray total reflection takes place when described solid component is transferred to reflecting surface, and assembles outside the described other end.
Glass material comprises one or more elements among Li, Be and the B.
Glass material comprises:
Metal comprises one or more elements in tungsten, gold and the platinum.
The glass surface of described solid component is through smooth treatment.
The embodiment of the invention is made solid optical device by glass and two kinds of materials of metal, but the sigmatron of this optical device converging parallel.And the glass material in the optical device also can filter low energy X ray, obtains the X ray that energy is concentrated thereby assemble.The embodiment of the invention further improves the ability of assembling sigmatron by adopting foam glass material and/or heavy metal material.
The reflecting surface of the optical device in the embodiment of the invention is comparatively smooth, helps the transmission of X ray.And can before metal-coated membrane, carry out smooth treatment in the solid component surface to glass material, further reduce the roughness of reflecting surface, thereby improve the transfer efficiency of X ray, reduce light intensity loss.
Description of drawings
Fig. 1 is the synoptic diagram of optical device in the embodiment of the invention;
Fig. 2 is the synoptic diagram that optical device is assembled parallel beam in the embodiment of the invention;
Fig. 3 is a parabolical synoptic diagram in the embodiment of the invention.
Embodiment
In the embodiment of the invention, the ENERGY E of critical glancing angle θ of total reflection and X ray is inversely proportional to, and is directly proportional with the square root of reflecting material density p.Simultaneously, according to Waller-Debye's equation
As can be known, along with the roughness σ of reflecting surface becomes greatly gradually, the reflectivity R of X ray can obviously diminish.Wherein, the energy of wavelength X and X ray is inversely proportional to.That is to say that roughness σ is big more, the effect of effectively assembling sigmatron is poor more.The embodiment of the invention provides a kind of optical device that is used for converging parallel X-ray, when having improved the reflecting material density p, reduces the roughness σ of reflecting surface, thereby realizes the sigmatron of converging parallel, and the low energy X ray of filtering simultaneously.
Referring to Fig. 1, optical device comprises in the present embodiment:
By the solid component 101 that glass material is made, this solid component is that the xsect of axially symmetric structure, especially its any point is circle.One group of opposite side is parallel lines in two groups of opposite side of longitudinal cross-section, and another group opposite side is the relative para-curve of opening, and two para-curves in this group opposite side satisfy same parabolic equation.
The sidewall metal-plated membrane 102 of solid component.
End in described solid component 101 two ends is used to receive X ray, and the other end is used to export X ray; The critical surface of described glass material and metal film constitutes reflecting surface, and this reflecting surface is used for X ray total reflection takes place when described solid component 101 is transferred to reflecting surface, and assembles outside the described other end.
Present embodiment utilizes the critical surface of glass and metal to constitute reflecting surface.By changing material that constitutes reflecting surface and the roughness that reduces reflecting surface, realize the sigmatron of converging parallel, and light intensity loss is less.The inventor finds that the optical device in the employing present embodiment is the sigmatron of converging parallel effectively, and energy range is between 40～120keV.And the optical device of present embodiment can not only be assembled the X ray of high energy, and the solid component 101 of glass material can be used for the X ray below the 40keV is filtered, thereby obtains the more concentrated X ray of energy range.
With density is 2.2g/cm
3Glass be example, when utilizing the glass capillary converging X-ray that this glass material makes, when the energy of X ray is 40keV, the critical glancing angle of total reflection (unit: be 0.04315 degree).If adopt the optical device in the present embodiment, make solid component by this glass, the gold-plated film of sidewall, when the energy of X ray is 100keV, the critical glancing angle of total reflection is 0.04862, and when the energy of X ray was 120keV, the critical glancing angle of total reflection was 0.03969.This shows, under the identical situation of the critical glancing angle of total reflection, the energy of the X ray that the energy of the X ray that the optical device in the present embodiment is effectively assembled optical device in the prior art is effectively assembled.And, during optical device in adopting present embodiment, be the X ray of 40keV if assemble energy, then the critical glancing angle maximum of total reflection can reach 0.11854, obviously greater than of the prior art 0.04315.
In order further to improve the refringence of glass and metal, increase the critical glancing angle of total reflection, promptly improve the ability of assembling sigmatron, present embodiment adopts the lower foam glass of density, and this foam glass comprises elements such as containing lithium Li, beryllium Be, boron at least.For example, the composition of glass comprises:
In order further to improve the refringence of glass and metal, promptly further improve the ability of assembling sigmatron, present embodiment adopts the higher heavy metal of density, and this heavy metal comprises high density materials such as tungsten Wu, golden Au, platinum Pb at least.Consider that from manufacture craft and cost aspect preferable scheme is to adopt tungsten.
Optical device in the present embodiment is better to the convergent effect of parallel X-ray.Only through a total reflection, referring to shown in Figure 2, light intensity loss is less in this optical device for X ray.In the present embodiment, than major diameter d
1One end at place is used to receive the parallel X-ray (comprising the quasi-parallel X ray) from light source, less diameter d
2One end at place is used to export X ray.Parallel X-ray through after the total reflection, is assembled at the focal distance f place in optical device.Optical device in the present embodiment also can comprise a light barrier A, and this light barrier A is positioned at an end that is used to receive X ray, and relative with an end position of output X ray, and promptly along the incident direction of X ray, this light barrier A is overlapping with an end position of output X ray.Light barrier A is used to absorb direct light, is implemented in the focus place and obtains the focal spot that light intensity is concentrated.Light barrier A can be density bigger metal film or sheet metal, as lead etc.When density one timing of light barrier A, the energy of X ray is high more, and the thickness of required light barrier A is big more; When energy one timing of X ray, the density of light barrier A is big more, and the thickness of required light barrier A is more little.
Referring to shown in Figure 3, be with parabolic equation
Be example, if the glass density of the optical device in the present embodiment is 2.2g/cm
3, metal is a gold, then the critical glancing angle of total reflection is 1.04 milliradians.When the convergence energy was the X ray of 80keV, 2.3mm and above scope thereof all can be used as the optical device the present embodiment on X-axis, are used to assemble the X ray that energy is 80keV.If the density of existing glass capillary is 2.2g/cm
3, then the critical glancing angle of total reflection is 0.376 milliradian.When assembling energy and be the X ray of 80keV, 17.7mm and above scope thereof all can be used as glass capillary on the X-axis, are used to assemble the X ray that energy is 80keV.As seen, between 2.3mm～17.7mm, the optical device in the present embodiment can be assembled the X ray that energy is 80keV, and existing glass capillary then cannot.Therefore the optical device in the present embodiment has the ability of stronger converging X-ray with respect to existing glass capillary.
Because the roughness ratio of optical device reflecting surface is less in the present embodiment, the influence to transfer efficiency in the total reflection process is less, helps the sigmatron of converging parallel.
In the present embodiment by to glass heats, softening, being shaped obtains the solid component of required form, the smooth surface of this solid component after handling.Film plating process by the low speed of growth again as methods such as electron beam evaporation, magnetron sputterings, plates metal film at the sidewall of solid component.Because the smooth surface of solid component makes reflecting surface comparatively smooth, helps improving the transfer efficiency of optical device, reduce light intensity loss.In order further to reduce the roughness of reflecting surface, present embodiment can also carry out smooth treatment on the surface of solid component, and then metal-coated membrane.Because optical device is the glass capillary of hollow in the prior art, its reflecting surface is the inside surface of this glass capillary, because the inner space of glass capillary is less, the roughness of the reflecting surface in the present embodiment is difficult for the inside surface of glass capillary is reprocessed, so can be lower than the roughness of reflecting surface in the prior art.Roughness in the present embodiment can reach
Below, especially can reach 2-
Between.
The embodiment of the invention is made solid optical device by glass and two kinds of materials of metal, but the sigmatron of this optical device converging parallel.And the glass material in the optical device also can filter low energy X ray, obtains the X ray that energy is concentrated thereby assemble.The embodiment of the invention further improves the ability of assembling sigmatron by adopting foam glass material and/or heavy metal material.
The reflecting surface of the optical device in the embodiment of the invention is comparatively smooth, helps the transmission of X ray.And can before metal-coated membrane, carry out smooth treatment in the solid component surface to glass material, further reduce the roughness of reflecting surface, thereby improve the transfer efficiency of X ray, reduce light intensity loss.
Obviously, those skilled in the art can carry out various changes and modification to the present invention and not break away from the spirit and scope of the present invention.Like this, if of the present invention these are revised and modification belongs within the scope of claim of the present invention and equivalent technologies thereof, then the present invention also is intended to comprise these changes and modification interior.
Claims (6)
1. an optical device that is used for converging parallel X-ray is characterized in that, comprising:
By the solid component that glass material is made, this solid component is an axially symmetric structure, and one group of opposite side is parallel lines in two groups of opposite side of longitudinal cross-section, and another group opposite side is the relative para-curve of opening;
The sidewall metal-plated membrane of described solid component;
End in the described solid component two ends is used to receive X ray, and the other end is used to export X ray;
The critical surface of described glass material and metal film constitutes reflecting surface, and this reflecting surface is used for X ray total reflection takes place when described solid component is transferred to reflecting surface, and assembles outside the described other end.
2. optical device as claimed in claim 1 is characterized in that, glass material comprises one or more elements among Li, Be and the B.
3. optical device as claimed in claim 1 is characterized in that, the metal of the sidewall plating of described solid component comprises one or more elements in tungsten, gold and the platinum.
4. optical device as claimed in claim 1 is characterized in that, the glass surface of described solid component is through smooth treatment.
5. as each described optical device in the claim 1 to 4, it is characterized in that, also comprise: light barrier, be positioned at the end that described solid component is used to receive X ray, and it is overlapping to be used to export an end position of X ray along the incident direction of X ray and described solid component; This light barrier is used to absorb X ray.
6. as each described optical device in the claim 1 to 4, it is characterized in that the density of described glass material is 2.2g/cm
3Described metal is a gold;
Described solid component satisfies parabolic equation
In the described solid component, an end that is used to receive X ray is 17.6mm to the distance on para-curve summit, and an end that is used to export X ray is 2.3mm to the distance on para-curve summit.
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| CN2009100893513A CN101615443B (en) | 2009-07-16 | 2009-07-16 | Optical device for converging parallel X-ray |
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| CN2009100893513A CN101615443B (en) | 2009-07-16 | 2009-07-16 | Optical device for converging parallel X-ray |
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| CN101615443B true CN101615443B (en) | 2011-11-02 |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102890975B (en) * | 2012-10-09 | 2015-05-20 | 北京师范大学 | Optical device for focusing synchrotron radiation light source |
| CN103021498B (en) * | 2012-12-05 | 2015-04-22 | 北京师范大学 | Optical device, manufacturing method and system for focusing X rays |
| CN113345619B (en) * | 2021-06-16 | 2022-07-12 | 中国工程物理研究院激光聚变研究中心 | One-dimensional X-ray refraction blazed zone plate |
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| EP1477799A1 (en) * | 2003-04-30 | 2004-11-17 | Obshchestvo s ogranichennoj otvetstvennostyu "Institut Rentgenovskoi Optiki" | Polycapillary chromatographic column and the method of its manufacturing |
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Patent Citations (4)
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|---|---|---|---|---|
| US5744813A (en) * | 1994-07-08 | 1998-04-28 | Kumakhov; Muradin Abubekirovich | Method and device for controlling beams of neutral and charged particles |
| CN1157418A (en) * | 1996-02-17 | 1997-08-20 | 北京师范大学 | Integral X-ray lens and manufacturing method thereof and equipment using the same |
| US6749300B2 (en) * | 2001-03-12 | 2004-06-15 | IFG Institut für Gerätebau GmbH | Capillary optical element with a complex structure of capillaries and a method for its manufacture |
| EP1477799A1 (en) * | 2003-04-30 | 2004-11-17 | Obshchestvo s ogranichennoj otvetstvennostyu "Institut Rentgenovskoi Optiki" | Polycapillary chromatographic column and the method of its manufacturing |
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| A.Bjeoumikhov等.New generation of polycapillary lenses: manufacture and applications.《X-ray Spectrometry》.2003,(第32期), * |
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