CN101614607A - Optical fiber F-P pressure sensor and pressure liquid level sensing device thereof - Google Patents
Optical fiber F-P pressure sensor and pressure liquid level sensing device thereof Download PDFInfo
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- CN101614607A CN101614607A CN200910063396A CN200910063396A CN101614607A CN 101614607 A CN101614607 A CN 101614607A CN 200910063396 A CN200910063396 A CN 200910063396A CN 200910063396 A CN200910063396 A CN 200910063396A CN 101614607 A CN101614607 A CN 101614607A
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Abstract
The invention discloses a kind of optical fiber F-P pressure sensor and pressure sensing device thereof, relate to a kind of pressure transducer.The structure of this sensor is: the center is provided with the pressure diaphragm capsule/sheet of pressure filling orifice and the periphery of support member opening is tightly connected; Be provided with fiber-optic fixing-hole and air equalizer opening at the center of support member bottom surface, fiber-optic fixing-hole is connected with conduction optical fiber; Between the central plane of the end face that conducts optical fiber and pressure diaphragm capsule/sheet, constitute an enhanced extrinsic F-P chamber.This sensor construction is simple, and volume is little, the convenient installation, and the pressure resolution height is fit to less and the measurement demand that precision is high of range very much; Change sensitive element easily to be applicable to different measurement demands according to range; Cost is cheaper, and optical source wavelength is not had specific (special) requirements; Be applicable to small chemical liquid storage, oil tank, the accumulating amount metering of chemicals/oily storage tank car and various types of liquid gaseous state warehousing and transportation facilities.
Description
Technical field
The present invention relates to a kind of pressure transducer, relate in particular to a kind of optical fiber F-P pressure sensor and pressure liquid level sensing device thereof.
Background technology
Design about the F-P chamber has many kinds, and the design that is applied to the F-P cavity pressure liquid level sensor of level gauging mainly concentrates on the design of the flexible member of responsive displacement and corresponding pressure thereof.Existing scheme comprises: early stage silicon chip, invar sheet and Bourdon tube, and the corrugated tube of the big range of linearity that occurs in the recent period.
The shortcoming of silicon chip, invar sheet is that the linear elasticity scope is little, complex structure, and range is limited; Though it is and corrugated tube has solved the problem of wide range preferably, inadequate again on measuring accuracy.
And adopt the design of manometer pressure diaphragm capsule/sheet commonly used not meet report as yet.
Summary of the invention
Purpose of the present invention just is to overcome the shortcoming and defect that prior art exists, and a kind of optical fiber F-P pressure sensor and pressure liquid level sensing device thereof are provided.
The object of the present invention is achieved like this:
1, design concept
(1) utilize pressure diaphragm capsule/sheet that liquid pressure is converted to linear displacement
Suppose under the uniform condition of density (is rational for most of product oil accumulating jar/cars), the pressure of liquid internal is directly proportional with its degree of depth, if energy measurement goes out the pressure of liquid bottom, can instead push away the distance of liquid bottom and liquid level so, thereby measure liquid level.The internal pressure of liquid and the pass of the degree of depth are:
A p=ρ gh mistake! Do not find Reference source.
In the formula: ρ is a density of liquid, and g is an acceleration of gravity, and p is a dark pressure for the h place in the liquid.
When fluid density p one timing, pressure transducer is placed container bottom, by detecting the information that pressure just can obtain the liquid in container height.
(2) thus measure the height that this micrometric displacement obtains liquid level by fiber F-P cavity
Fiber F-P cavity is based on the two-beam interference principle in the wave optics.Problem for convenience of description, we suppose that the light intensity of two surface reflections equates that the reflectivity of two reflectings surface is less, then can regard the F-P chamber as low fineness device, are approximately two-beam interference, then the light intensity after the twin-beam reflection stack is output as:
In the formula, λ is the wavelength of light source, and δ is the initial light path difference of the corresponding folded light beam of F-P chamber two reflectings surface.
Flexure strip can produce micrometric displacement because of the pressure change at this place, produces corresponding optical path difference thus, measures this optical path difference, can obtain the variable quantity of pressure, and then calculate level value.
2, process structure aspect
The present invention adopts pressure diaphragm capsule/sheet general in the conventional manometer to make sensitive element, technical maturity, not only overcome the restriction of existing silicon wafer, Bourdon tube sensitive element elastic ranges such as (Bourdon tube) and technology, more improved the stability of product, reduced cost.
Specifically, a kind of structure of optical fiber F-P pressure sensor is:
This sensor comprises pressure filling orifice, pressure diaphragm capsule/sheet, support member, fiber-optic fixing-hole, the gentle pressure equalizing port of conduction optical fiber;
The center is provided with the pressure diaphragm capsule/sheet of pressure filling orifice and the periphery of support member opening is tightly connected; Be provided with fiber-optic fixing-hole and air equalizer opening at the center of support member bottom surface, fiber-optic fixing-hole is connected with conduction optical fiber;
Between the central plane of the end face that conducts optical fiber and pressure diaphragm capsule/sheet, constitute an enhanced extrinsic F-P chamber.
Its principle of work is:
The pressure filling orifice and the fluid to be measured of sensor are communicated with, and deformation (recessed) takes place in pressure diaphragm capsule/sheet under the effect of fluid pressure, thereby changes the F-P chamber spacing of two reflection end faces up and down, and promptly the chamber long hair in F-P chamber is given birth to and changed.From conduction optical fiber input laser, the same frequency laser that two end face reflections are returned interferes, and measures the phase changing capacity of output intensity again, obtains corresponding liquid level through converting.
The present invention has following advantage and good effect:
1. sensor construction is simple, and volume is little, the convenient installation, and the pressure resolution height is fit to less and the measurement demand that precision is high of range very much;
2. change sensitive element easily to be applicable to different measurement demands according to range;
3. with low cost, optical source wavelength there is not specific (special) requirements.
The present invention is applicable to small chemical liquid storage, oil tank, the accumulating amount metering of chemicals/oily storage tank car and various types of liquid warehousing and transportation facilities.
Description of drawings
Fig. 1 is the optical fiber F-P pressure sensor structural representation;
Fig. 2 is based on the pressure liquid level sensing device block diagram of optical fiber F-P pressure sensor;
Fig. 3 is the power control unit block diagram.
Wherein:
10-optical fiber F-P pressure sensor (abbreviation sensor),
11-pressure filling orifice, 12-pressure diaphragm capsule/sheet, the 13-support member,
The 14-fiber-optic fixing-hole, 15-optical fiber, 16-pressure compensation opening;
20-narrow linewidth light source;
The 30-power control unit,
31-analog to digital converter (A/D), 32-single-chip microcomputer, 33-digital to analog converter (D/A);
The 40-3dB coupling mechanism;
The 50-photodetector;
60-signal Processing and display unit.
English to Chinese
F-P:Fabry-Perot, Fabry-Perot, the interference of light;
DFB:distributed feedback Bragg, the distributed-feedback Prague formula;
PIN:positive-intrinsic-negative, p type-Intrinsical-n type;
Embodiment
Describe in detail below in conjunction with drawings and Examples:
One, optical fiber F-P pressure sensor (abbreviation sensor) 10
1, overall
As Fig. 1, this sensor 10 comprises pressure filling orifice 11, pressure diaphragm capsule/sheet 12, support member 13, fiber-optic fixing-hole 14, conduction optical fiber 15 and air equalizer opening 16;
The center is provided with the pressure diaphragm capsule/sheet 12 of pressure filling orifice 11 and the periphery of support member 13 openings is tightly connected; Be provided with fiber-optic fixing-hole 14 and air equalizer opening 16 at the center of support member 13 bottom surfaces, fiber-optic fixing-hole 14 is connected with conduction optical fiber 15;
Between the central plane of the end face that conducts optical fiber 15 and pressure diaphragm capsule/sheet 12, constitute an enhanced extrinsic F-P chamber.
2, functional block
1, the pressure filling orifice 11
Pressure filling orifice 11 is a kind of short tubes that are arranged on above pressure diaphragm capsule/sheet 12, is communicated with by rubber tube and fluid to be measured.
2, pressure diaphragm capsule/sheet 12
Pressure diaphragm capsule/sheet 12 is a kind of conventional manometer flexible members, special ripple struction design, the displacement and the pressure that guarantee central spot are linear, guarantee that promptly two reflection end interplanar distance interference of light phase change are linear relationship about pressure (liquid level) and the F-P chamber.
3, support member 13
4, fiber-optic fixing-hole 14
Fiber-optic fixing-hole 14 is a kind of cylindrical perforates that protrude in support member 13 bottom surfaces; Its function is the endface position of regulating optical fiber 15 obtaining best interference effect, and tightens up conduction optical fiber 15 and prevent because mechanical effect causes the variation of interference light power.
4, conduction optical fiber 15
Conduction optical fiber 15 is a kind of optical fiber that has carried out special processing (plated film or increase collimating apparatus) in the common communications fiber tip; Its function is to form F-P chamber and light conduction with pressure diaphragm capsule/sheet 12 reflecting surface centers.
16, air equalizer opening 16
Air equalizer opening 16 is that aperture and the atmosphere that support member 13 bottoms are provided with is communicated with, and plays equilibrium air pressure.
Two, based on the pressure liquid level sensing device (abbreviation sensing device) of optical fiber F-P pressure sensor
1, overall
As Fig. 2, this sensing device comprises sensor 10, narrow linewidth light source 20, power control unit 30, three-dB coupler 40, photodetector 50 and signal Processing and display unit 60;
The output terminal of narrow linewidth light source 20 is connected with the input end of three-dB coupler 40; The output terminal of three-dB coupler 40 is connected with photodetector 50 with sensor 10 respectively;
Its principle of work is:
It is I that narrow linewidth light source 20 sends luminous power
0Light, behind three-dB coupler 40, arrive the central plane of the end face of the optical fiber 15 in the sensor 10 and pressure diaphragm capsule/sheet 12 respectively and be reflected, two bundle reflected light interfere after three-dB coupler 40 closes light, and interference light arrives the luminous power of photodetector 50 through light path down
Wherein, λ is the wavelength of light source, and δ is the initial light path difference of the corresponding folded light beam of F-P chamber two reflectings surface.Calculate force value through signal Processing and display unit 60, can obtain level value by the relation of liquid internal pressure-liquid level again.
2, functional block
1, sensor 10
2, the narrow linewidth light source 20
Narrow linewidth light source 20 is a kind of narrow-linewidth laser light sources; Guarantee the requirement that the F-P chamber covers with sufficient coherent length;
Selecting centre wavelength for use is the semiconductor DFB of 1550nm.
The built in light electric explorer is arranged in the narrow linewidth light source 20, and the built in light electric explorer is a kind of general light electric diode, finishes the conversion of light signal to electric signal, and electric output pin is provided.
3, power control unit 30
As Fig. 3, power control unit 30 comprises analog to digital converter (A/D) 31, single-chip microcomputer 32 and digital to analog converter (D/A) 33 and narrow linewidth light source 20 composition FEEDBACK CONTROL;
Narrow linewidth light source 20, analog to digital converter (A/D) 31, single-chip microcomputer 32, digital to analog converter (D/A) 33 and narrow linewidth light source 20 front and back closed loop successively are connected.
Its principle of work is: when narrow linewidth light source 20 causes the Output optical power change owing to factors such as temperature, at first via the built in light electric explorer opto-electronic conversion in the narrow linewidth light source 20, again via analog to digital converter (A/D) 31 analog to digital conversion, the back is discerned by single-chip microcomputer 32, and by digital to analog converter (D/A) 33 digital-to-analog conversions, the supplying electric current of control narrow linewidth light source 20 keeps the stable of Output optical power.
(1) analog to digital converter (A/D) 31
Analog to digital converter (A/D) the 31st, a kind of is the general-purpose device of digital signal with analog signal conversion; The electrical signal conversion that is used for opto-electronic conversion is come is the digital signal of single-chip microcomputer 32 needs, handles for single-chip microcomputer 32;
Select the AD7708 chip of U.S. ADI company for use.
(2) single-chip microcomputer 32
Single-chip microcomputer 32 is a kind of general programmable central processing units; Realization is to the judgement and the control of narrow linewidth laser power variation;
Select ARM7 series 440DX chip for use.
(3) digital to analog converter (D/A) 33
Digital to analog converter (D/A) the 33rd, a kind of general-purpose device that digital signal is converted to simulating signal; Be used for the output control command of single-chip microcomputer 33 is converted to the current signal of control laser instrument 20;
Select the AD5663 chip of U.S. ADI company for use.
4, three-dB coupler 40
Three-dB coupler 40 is a kind of luminous-power distributors commonly used, and the light of narrow linewidth light source 20 is divided into two-way: the one tunnel is connected with sensor 10; One the tunnel is connected with photodetector 50;
It is 50: 50 fiber coupler that the present invention selects 1 * 2 type, splitting ratio for use.
5, photodetector 50
The present invention selects coaxial tail fiber type PIN photodetector for use.
6, signal Processing and display unit 60
Signal Processing and display unit 60 are a kind of microprocessor, amplification, filtering, analog to digital conversion and display circuits of comprising commonly used; Microprocessor is selected FPGA series for use.
Claims (10)
1, a kind of optical fiber F-P pressure sensor is characterized in that:
This sensor (10) comprises pressure filling orifice (11), pressure diaphragm capsule/sheet (12), support member (13), fiber-optic fixing-hole (14), conduction optical fiber (15) and air equalizer opening (16);
The center is provided with the pressure diaphragm capsule/sheet (12) of pressure filling orifice (11) and the periphery of support member (13) opening is tightly connected; Be provided with fiber-optic fixing-hole (14) and air equalizer opening (16) at the center of support member 13 bottom surfaces, fiber-optic fixing-hole (14) is connected with conduction optical fiber (15);
Between the central plane of the end face that conducts optical fiber (15) and pressure diaphragm capsule/sheet (12), constitute extrinsic (F-P) chamber;
Described F-P is the interference of light.
2, by the described a kind of optical fiber F-P pressure sensor of claim 1, it is characterized in that:
Pressure diaphragm capsule/sheet (12) is a kind of conventional manometer flexible member, and special ripple struction design guarantees that the displacement and the pressure of central spot is linear.
3, by the described a kind of optical fiber F-P pressure sensor of claim 1, it is characterized in that:
Support member (13) is a kind of and pressure diaphragm capsule/sheet (12) metal round cover with material, is provided with fiber-optic fixing-hole (14) and air equalizer opening (16).
4, by the described a kind of optical fiber F-P pressure sensor of claim 1, it is characterized in that:
Fiber-optic fixing-hole (14) is a kind of position, angle and fixing cylindrical perforate that protrudes in support member (12) bottom surface of being convenient to regulate optical fiber.
5, by the described a kind of optical fiber F-P pressure sensor of claim 1, it is characterized in that:
Conduction optical fiber (15) is a kind of optical fiber that carries out plated film or increase collimating apparatus in the common communications fiber tip.
6, based on the pressure liquid level sensing device of the described a kind of optical fiber F-P pressure sensor of claim 1, it is characterized in that:
This sensing device comprises sensor (10), narrow linewidth light source (20), power control unit (30), three-dB coupler (40), photodetector (50) and signal Processing and display unit (60);
Power control unit (30) is connected with narrow linewidth light source (20);
The output terminal of narrow linewidth light source (20) is connected with the input end of three-dB coupler (40); The output terminal of three-dB coupler (40) is connected with photodetector (50) with sensor (10) respectively; Photodetector (50) is connected with display unit (60) with signal Processing.
7, by the described pressure liquid level sensing device of claim 6, it is characterized in that:
Narrow linewidth light source (20) is a kind of narrow-linewidth laser light source, and selecting centre wavelength for use is the semiconductor DFB of 1550nm; The narrow linewidth light source has the built in light electric explorer in (20).
8, by the described pressure liquid level sensing device of claim 6, it is characterized in that the structure of power control unit (30) is:
Narrow linewidth light source (20), analog to digital converter (31), single-chip microcomputer (32), digital to analog converter (33) and narrow linewidth light source (20) front and back closed loop successively connect to form feedback control circuit.
9, by the described pressure liquid level sensing device of claim 6, it is characterized in that:
It is 50: 50 fiber coupler that three-dB coupler (40) is selected 1 * 2 type, splitting ratio for use.
10, by the described pressure liquid level sensing device of claim 6, it is characterized in that:
Signal Processing and display unit (60) are a kind of circuit that comprises microprocessor, amplification, filtering, analog to digital conversion and demonstration commonly used, and microprocessor is selected FPGA series for use.
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| CN2009100633963A CN101614607B (en) | 2009-07-31 | 2009-07-31 | Optical fiber F-P pressure sensor and pressure liquid level sensing device thereof |
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| CN2009100633963A CN101614607B (en) | 2009-07-31 | 2009-07-31 | Optical fiber F-P pressure sensor and pressure liquid level sensing device thereof |
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| CN101614607A true CN101614607A (en) | 2009-12-30 |
| CN101614607B CN101614607B (en) | 2012-02-29 |
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| WO2012071693A1 (en) * | 2010-11-29 | 2012-06-07 | Wu Maoting | Pressure and temperature measuring device |
| CN102654413A (en) * | 2011-03-01 | 2012-09-05 | 中国科学院合肥物质科学研究院 | Temperature self-compensating type fiber optic liquid level sensor |
| CN102680162A (en) * | 2012-06-07 | 2012-09-19 | 北京航空航天大学 | Atmospheric pressure meter based on fiber bragg grating |
| CN102735273A (en) * | 2012-06-29 | 2012-10-17 | 中国科学院半导体研究所 | Optical fiber sensor based on Fabry-Perot cavity |
| CN103245369A (en) * | 2013-03-22 | 2013-08-14 | 黎敏 | Novel fiber bragg grating demodulation method and system thereof based on multi-longitudinal mode F-P laser device |
| CN103994851A (en) * | 2014-05-15 | 2014-08-20 | 香港理工大学深圳研究院 | Resonant type Fabry-Perot optical fiber sensor, manufacturing method and air pressure detecting method |
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| CN105092122A (en) * | 2015-09-09 | 2015-11-25 | 南京师范大学 | Convoluted diaphragm Fabry-Perot type fiber optic pressure sensor and manufacture method thereof |
| CN106323516A (en) * | 2015-07-10 | 2017-01-11 | 成都凯天电子股份有限公司 | F-P pressure sensor with compound dielectric film |
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| CN201508266U (en) * | 2009-07-31 | 2010-06-16 | 武汉光子科技有限公司 | Optical fiber F-P pressure sensor and pressure/liquid-level sensing unit thereof |
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- 2009-07-31 CN CN2009100633963A patent/CN101614607B/en not_active Expired - Fee Related
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| CN102654413A (en) * | 2011-03-01 | 2012-09-05 | 中国科学院合肥物质科学研究院 | Temperature self-compensating type fiber optic liquid level sensor |
| CN102680162A (en) * | 2012-06-07 | 2012-09-19 | 北京航空航天大学 | Atmospheric pressure meter based on fiber bragg grating |
| CN102680162B (en) * | 2012-06-07 | 2014-09-03 | 北京航空航天大学 | Atmospheric pressure meter based on fiber bragg grating |
| CN102735273A (en) * | 2012-06-29 | 2012-10-17 | 中国科学院半导体研究所 | Optical fiber sensor based on Fabry-Perot cavity |
| CN102735273B (en) * | 2012-06-29 | 2014-11-05 | 中国科学院半导体研究所 | Optical fiber sensor based on Fabry-Perot cavity |
| CN105051512A (en) * | 2013-01-31 | 2015-11-11 | 镭射点有限公司 | Optical sensor for contactless pressure measurements |
| CN103245369A (en) * | 2013-03-22 | 2013-08-14 | 黎敏 | Novel fiber bragg grating demodulation method and system thereof based on multi-longitudinal mode F-P laser device |
| CN103245369B (en) * | 2013-03-22 | 2015-07-08 | 黎敏 | Novel fiber bragg grating demodulation method and system thereof based on multi-longitudinal mode F-P laser device |
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| CN103994851A (en) * | 2014-05-15 | 2014-08-20 | 香港理工大学深圳研究院 | Resonant type Fabry-Perot optical fiber sensor, manufacturing method and air pressure detecting method |
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| CN106323516A (en) * | 2015-07-10 | 2017-01-11 | 成都凯天电子股份有限公司 | F-P pressure sensor with compound dielectric film |
| CN106323516B (en) * | 2015-07-10 | 2022-04-22 | 成都凯天电子股份有限公司 | F-P pressure sensor with composite medium film |
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| CN106872089A (en) * | 2017-03-29 | 2017-06-20 | 西北核技术研究所 | High range dynamic pressure measurement device and its measuring method |
| CN106872089B (en) * | 2017-03-29 | 2019-03-05 | 西北核技术研究所 | High range dynamic pressure measurement device and its measurement method |
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| CN110806245A (en) * | 2019-10-09 | 2020-02-18 | 厦门通富微电子有限公司 | Liquid level sensing device |
| CN110579261B (en) * | 2019-10-09 | 2020-10-27 | 宁波吉利罗佑发动机零部件有限公司 | Device and method for detecting liquid level of cooling liquid, concentration of cooling liquid and cooling liquid |
| CN110987159A (en) * | 2019-12-18 | 2020-04-10 | 京东方科技集团股份有限公司 | Sound pressure sensor |
| CN110987159B (en) * | 2019-12-18 | 2022-09-16 | 京东方科技集团股份有限公司 | Sound pressure sensor |
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Effective date of registration: 20150729 Address after: 430070 Hubei Province, Wuhan city Hongshan District Road No. 10 A street, Wenxiu No. two door 6A Patentee after: WUHAN JINGYUGUANG SENSING SYSTEM RESEARCH INSTITUTE CO., LTD. Address before: 430071 77-6-12, small West Wuchang District, Wuhan District, Hubei, Hongshan Patentee before: Li Min |
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