CN101599613B - Time sequence control device and method of preionization and main discharge - Google Patents

Time sequence control device and method of preionization and main discharge Download PDF

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CN101599613B
CN101599613B CN200910045239XA CN200910045239A CN101599613B CN 101599613 B CN101599613 B CN 101599613B CN 200910045239X A CN200910045239X A CN 200910045239XA CN 200910045239 A CN200910045239 A CN 200910045239A CN 101599613 B CN101599613 B CN 101599613B
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CN101599613A (en
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曹昇炜
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Shanghai Micro Electronics Equipment Co Ltd
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Abstract

The present invention provides a time sequence control device and a method of gas discharge laser preionization and main discharge, wherein the time sequence control device of gas discharge laser preionization and main discharge comprises a input terminal,a preionized discharge loop, a main discharge loop, time measurement unit and a control unit. The present invention further enhances the homogeneity of the laser discharge for supplying a stable light source output to a photoetching machine though maintaining the stability of the interval between preionization and main discharge time.

Description

Preionization and main discharge time sequence control device and method
Technical field
The invention relates to a sequential control device and a method, and particularly relevant for a kind of gas discharge laser preionization and main discharge time sequence control device and method.
Background technology
The employed light source of mask aligner is mainly the excimer laser of 193nm and 248nm, excimer laser is the pulsed gas discharge laser, its output is generally KHz magnitude pulse laser, its output energy and live width have directly determined the productive rate and the imaging capability of mask aligner, thereby the energy of excimer laser pulse output and live width stability have direct influence to the final performance of mask aligner.
For the pulsed gas discharge laser, especially working media is the excimer laser of ArF or KrF, lasing gas discharge just can take place when only the free electron density in the discharge working region satisfies threshold condition, therefore, this type of laser has all been introduced preionization mechanism, promptly the photon that produced by sparkover or corona discharge before main discharge is with the background trace impurity ionization in the region of discharge, thereby in region of discharge, produce the electron density that satisfies the main discharge threshold condition, guarantee the generation of main discharge.Because the uniformity of electron density that preionization produces has determined the uniformity of main discharge, thereby can main discharge take place at the appropriate time after preionization takes place, and also can directly have influence on the output beam quality of final laser.Generally speaking, the tens of ns after the preionization are the Best Times that main discharge takes place, too early or cross the output performance that all can have influence on laser evening.Accurate sequencing control between preionization and the main discharge can be to guaranteeing laser, and even the stability of final mask aligner, plays important effect.
Yet in the laser running, because circuit noise, and numerous Effect of Environmental such as temperature, can cause the time interval of preionization and main discharge to drift about, have influence on the output stability of discharge uniformity and laser, the performance of final mask aligner is caused harmful effect.And traditional sequencing control technology can't respond the discharge time of the drift at interval that takes place in the practical application, and the discharge sequential is dynamically controlled, and sequential and Laser Output Beam quality of stability therefore can't effectively guarantee to discharge.
Summary of the invention
The object of the present invention is to provide a kind of gas discharge laser preionization and main discharge time sequence control device, to improve the disappearance of prior art.
The present invention proposes a kind of gas discharge laser preionization and the main discharge time sequence control device comprises input, preionized discharge loop, main discharge circuit, time measuring unit and control unit.The preionized discharge loop comprises master synchronizer, prime narrowing circuit, first final stage narrowing circuit and the pre-ionization electrode.Master synchronizer electrically connects input, produces the required pulse of laser discharge; The prime narrowing circuit couples master synchronizer, narrows above-mentioned pulse duration; The first final stage narrowing circuit electrically connects above-mentioned prime narrowing circuit; Pre-ionization electrode electrically connects the above-mentioned first final stage narrowing circuit.Main discharge circuit comprises master synchronizer, prime narrowing circuit, second final stage narrowing circuit and the main discharge electrode.The second final stage narrowing circuit electrically connects the prime narrowing circuit, and main discharge electrode electrically connects the second final stage narrowing circuit.Time measuring unit electrically connects preionized discharge loop and main discharge circuit, second time that the very first time that measurement preionization begins and main discharge begin.Control unit electrically connect preionized discharge loop and main discharge circuit at least one of them, and control unit electrically connects time measuring unit, according to second electric current of first electric current in the very first time and second time control preionized discharge loop and main discharge circuit at least one of them.
The present invention proposes a kind of gas discharge laser preionization and main discharge sequential control method in addition, comprise the following steps: that laser starts working, be provided with first electric current of preionization loop pulsactor and main discharge circuit pulsactor second electric current at least one of them; After preionization and main discharge take place, second time that the very first time that acquisition preionization begins and main discharge begin; And reset according to the above-mentioned very first time and above-mentioned second time first electric current in main discharge circuit preionization loop and main discharge circuit second electric current at least one of them.
Preionized discharge loop and main discharge circuit can be by controlling discharge time separately the saturated deadline of adjusting pulsactor in gas discharge laser preionization of the present invention and main discharge time sequence control device and the method, adopt the feedback loop control mode, the discharge time of origin of monitoring preionization and main discharge guarantees the discharge time of stability at interval in real time.And preionized discharge loop and main discharge circuit shared master synchronizer and prime narrowing circuit, only adopt separately independently final stage compressor circuit, such design can make circuit structure more simple, and can offset the influence of noise dither for the discharge sequential.
For above and other objects of the present invention, feature and advantage can be become apparent, preferred embodiment cited below particularly, and conjunction with figs. are described in detail below.
Description of drawings
Figure 1 shows that according to the gas discharge laser preionization of first embodiment of the invention and the FBD (function block diagram) of main discharge time sequence control device.
Figure 2 shows that the gas discharge laser preionization of first embodiment and the schematic diagram of the narrowing circuit in the main discharge time sequence control device.
Figure 3 shows that the gas discharge laser preionization of first embodiment and the schematic diagram of the discharge circuit in the main discharge time sequence control device.
Figure 4 shows that according to the gas discharge laser preionization of second embodiment of the invention and the FBD (function block diagram) of main discharge time sequence control device.
Figure 5 shows that according to the gas discharge laser preionization of third embodiment of the invention and the FBD (function block diagram) of main discharge time sequence control device.
Figure 6 shows that gas discharge laser preionization according to an embodiment of the invention and main discharge sequential control method.
Embodiment
Figure 1 shows that the functional block diagram of gas discharge laser preionization according to an embodiment of the invention and main discharge time sequence control device.
As shown in Figure 1, gas discharge laser preionization and main discharge time sequence control device 1 comprise input S i, preionized discharge loop (not marking among Fig. 1), main discharge circuit (not marking among Fig. 1), time measuring unit 15 and control unit 16.
The preionized discharge loop comprises master synchronizer 11, prime narrowing circuit 12, the first final stage narrowing circuit 131 and pre-ionization electrode 132.Master synchronizer 11 electrically connects input S i, produce the required pulse of laser discharge.Prime narrowing circuit 12 couples master synchronizer 11, narrows pulse duration.131 first final stage narrowing circuits electrically connect prime narrowing circuit 12.Pre-ionization electrode 132 electrically connects 131 first final stage narrowing circuits.
Main discharge circuit comprises master synchronizer 11, prime narrowing circuit 12, the second final stage narrowing circuit 141 and main discharge electrode 142.The second final stage narrowing circuit 141 electrically connects prime narrowing circuit 12, and main discharge electrode 142 electrically connects the second final stage narrowing circuit 141.
Time measuring unit 15 electrically connects preionized discharge loop and main discharge circuit, measures the very first time T that preionization begins 1Second time T that begins with main discharge 2Control unit 16 electrically connects the preionized discharge loop, and control unit 16 electric connection time measuring units 15, according to very first time T 1With second time T 2First electric current in control preionized discharge loop.
In the present embodiment, solid-state switch SW can be an insulated gate bipolar power tube switch (IGBT), also can be turn-off thyristor (GTO) or thyristor, wherein the IGBT switch is owing to have the opening time weak point, electric current rises fast, characteristics such as is easy to close, thereby becomes the first-selection of solid-state switch.
Magnetic switch MSC is actually a satiable inductor, and the core material of satiable inductor is generally ferrite metal or amorphous metal.The saturation condition of inductance has defined the disconnection of magnetic switch with closed.Under unsaturated state, the high inductance of magnetic switch does not allow electric current to pass through, and magnetic switch is in off state, and when reaching capacity state, inductance value descends, and magnetic switch is realized path.Figure 2 shows that the gas discharge laser preionization of first embodiment and the schematic diagram of the narrowing circuit in the main discharge time sequence control device.As shown in Figure 2, magnetic switch MSC and front and back stages electric capacity have constituted the basic structure of magnetic pulse compression circuit, the major function of this compressor circuit is that the pulse duration by this circuit is narrowed, front stage circuits with lower speed to capacitor C ' charging, C ' then with higher speed by magnetic switch MSC phase capacitor C " charging; when be complementary the deadline that the power conversion time between the electric capacity of front and back and pulsactor reach capacity, just can realize sufficient power conversion between the adjacent two-stage.The pulse compression ratio δ of single-stage magnetic switch can be expressed as follows:
δ = t 1 t 2 = L / L MS sat (1)
Divide wherein t 1, t 2In the charging interval of electric capacity before and after the expression, L represents the inductance value of front stage circuits, and L MS SatThe pulsactor of then representing magnetic switch.The pulse compression ratio that general single-stage magnetic switch can be realized is approximately 2~5, and by using multistage magnetic switch structure, then can reach the pulse compression ratio of several magnitude.
Figure 3 shows that the gas discharge laser preionization of first embodiment and the schematic diagram of the discharge circuit in the main discharge time sequence control device.
As shown in Figure 3, master synchronizer 11 comprises solid-state switch SW, magnetic switch MSC 0, transformer TF the first coil L 1, capacitor C 0, solid-state switch SW, magnetic switch MSC 0, transformer TF the first coil L 1Series connection back and capacitor C 0In parallel.
Prime narrowing circuit 12 comprises the second coil L 2, capacitor C 1, magnetic switch MSC 1And capacitor C 2The second coil L 2The first coil L with transformer TF 1Coupling; Capacitor C 1With the second coil L 2For being connected in parallel; Capacitor C 2With magnetic switch MSC 1Back and capacitor C are connected in series 1In parallel.
The first final stage narrowing circuit 131 comprises capacitor C 2, magnetic switch MSC 3And capacitor C Pp, magnetic switch MSC wherein 3And capacitor C PpSeries connection back and capacitor C 2Parallel connection and pre-ionization electrode is PE is and capacitor C PpBe connected in parallel.
The second final stage narrowing circuit 141 comprises capacitor C 2, magnetic switch MSC 2And capacitor C p, magnetic switch MSC wherein 2And capacitor C pSeries connection back and capacitor C 2Parallel connection and main discharge electrode is CE is and capacitor C pBe connected in parallel.
The concrete course of work of the discharge circuit of gas discharge laser preionization and main discharge time sequence control device is among Fig. 3: elementary storage capacitance C when solid-state switch SW disconnects 0By the high voltage source HV charging of a kV magnitude, after charging reaches a determined value, solid-state switch SW closure, storage capacitance C 0Discharge forms pulse, and this pulse is through primary magnetic switch MSC 0Narrow, and pass through to form the high-voltage pulse of tens of kV magnitudes behind the transformer TF, and then import the prime magnetic pulse compression circuit.The discharge circuit of laser according to actual needs, can have only a prime magnetic pulse compression circuit, and multistage magnetic pulse compression circuit (not marking among Fig. 5) also can be arranged; Electrion pulse that further narrows through one or more prime magnetic pulse compression circuits and then input main discharge and preionization is the independently first final stage magnetic pulse compression circuit 131 and the second final stage magnetic pulse compression circuit 141 separately, passes through magnetic switch MSC respectively 2With MSC 3To capacitor C pWith C PpCharging after electric capacity charges to separately threshold voltage, forms discharge respectively between pre-ionization electrode PE and main discharge electrode CE.In the first final stage magnetic pulse compression circuit 131 and the second final stage magnetic pulse compression circuit 141, capacitor C pAnd C PpDischarge time respectively by magnetic switch MSC 2And MSC 3Saturated deadline of decision, as long as both saturated deadline of differences, just can realize preionization and main discharge separating in time.
Because the time that Laser emission exists is the time of origin of main discharge, therefore can gather the very first time of preionization generation and second time that main discharge takes place with time measuring unit.Time measuring unit can comprise photodiode and pick-up loop, and wherein photodiode is determined second time that main discharge takes place by the zero-time of monitoring Laser emission, and pick-up loop is determined the very first time of the generation of preionization
As mentioned before, in the first final stage magnetic compression circuit 131 and the second final stage magnetic compression circuit 141, the magnetic switch MSC that uses 2And MSC 3Be satiable inductor, its saturation time can push away according to Faraday's law.According to Faraday's law:
∫Vdt=NA euΔB (2)
Wherein N is a coil turn, A EuBe the cross-sectional area in magnetic saturation zone not, Δ B is the swing of magnetic flux, then can be expressed as the saturated deadline of magnetic switch:
t sat = N A eu ΔB V (3)
Apply electric current by core at the magnetic switch pulsactor, can realize accurately control to Δ B, relation between the size of the electric current that applies and the magnetic flux swing is by the core material decision of pulsactor, different materials has different I-Δ B curves, but for most materials, I-Δ B all can think linear 0 to the central area of positive and negative several amperes.
After supposing to demarcate, confirm to have relation between the swing of pulsactor core current and magnetic flux: then there is following relation in Δ B=KI+b between the variable quantity of saturation time and the core current variable quantity:
ΔI = V N A eu K ΔT (4)
In control method shown in Figure 1, measure second time of gained and the control unit 16 that time difference control is responsible in very first time input by time measuring unit 15 (comprising photodiode and pick-up loop), by the duration and the time interval of control unit 16 calculating preionization and main discharge, when both time interval and optimized preset values when occurring departing from, control unit generates according to the algorithm based on formula (4) and resets electric current, the saturated deadline that electric current is adjusted saturated inductance in the preionization loop is reseted in utilization, resets the time interval of preionization and main discharge.
Please also refer to Fig. 1 to Fig. 3, establish I 1Be preionization loop pulsactor MSC 3Core reset electric current, TD TOptimum target value for the main discharge and the preionization time difference.When laser is started working, the control unit I that at first Uses Defaults 1LElectric current I is set 1After preionization and main discharge generation, the time collecting unit is determined the time T that preionization takes place 1Time T with the main discharge generation 2, the discharge time difference can be definite by these two time points, i.e. TD=T 2-T 1Calculated value and desired value TD as TD TBetween drift delta T=TD appears TDuring-TD, control unit recomputates preionization loop pulsactor MSC according to (4) formula 3Core reset electric current, be made as I 1L-Δ I 1, and before discharge generation next time, use I 1L-Δ I 1Value is reseted I 1This process is stablized the preionization and the purpose in the main discharge time interval along with the carrying out of pulsed discharge constantly repeated thereby reach in the course of work of laser.
Figure 4 shows that according to the gas discharge laser preionization of second embodiment of the invention and the FBD (function block diagram) of main discharge time sequence control device.As shown in Figure 4, gas discharge laser preionization and main discharge time sequence control device 4 comprise input S i', preionized discharge loop (not marking among Fig. 4), main discharge circuit (not marking among Fig. 4), time measuring unit 45 and control unit 46.
The preionized discharge loop comprises master synchronizer 41, prime narrowing circuit 42, the first final stage narrowing circuit 431 and pre-ionization electrode 432.Master synchronizer 141 electrically connects input S i', produce the required pulse of laser discharge.Prime narrowing circuit 42 couples master synchronizer 41, narrows pulse duration.The first final stage narrowing circuit 431 electrically connects prime narrowing circuit 42.Pre-ionization electrode 432 electrically connects 431 first final stage narrowing circuits.
Main discharge circuit comprises master synchronizer 41, prime narrowing circuit 42, the second final stage narrowing circuit 441 and main discharge electrode 442.The second final stage narrowing circuit 441 electrically connects prime narrowing circuit 42, and main discharge electrode 442 electrically connects the second final stage narrowing circuit 441.
Time measuring unit 45 electrically connects preionized discharge loop and main discharge circuit, measures the very first time T that preionization begins 1' and second time T that begins of main discharge 2'.Control unit 46 electrically connects main discharge circuit, and control unit 46 electric connection time measuring units 45, according to very first time T 1' and second time T 2' second electric current in control main ionic discharge loop.
This embodiment and first embodiment of the present invention use identical discharge circuit (as shown in Figure 3), the feedback mechanism of sequencing control is also identical, unique difference is: in first embodiment of the present invention, control for the discharge time difference is by adjusting saturated inductance realization deadline in the preionization loop, and in second embodiment, then be by realizing the deadline of adjusting saturated inductance in the main discharge circuit for the control of the discharge time difference.
Please also refer to Fig. 3 to Fig. 4, establish I 2Be main discharge circuit pulsactor MSC 2Core reset electric current, TD T' be the optimum target value of the main discharge and the preionization time difference.When laser is started working, the control unit I that at first Uses Defaults 2LElectric current I is set 2After preionization and main discharge generation, the time collecting unit is determined the time T that preionization takes place 1' and the time T that takes place of main discharge 2', the discharge time difference can be definite by these two time points, i.e. TD '=T 2'-T 1'.The calculated value and the desired value TD that work as TD ' T' between drift delta T '=TD appears TDuring '-TD ', control unit recomputates main discharge circuit pulsactor MSC according to (4) formula 2Core reset electric current, be made as I 2L+ Δ I 2, and before discharge generation next time, use I 2L+ Δ I 2Value is reseted I 2This process is stablized the preionization and the purpose in the main discharge time interval along with the carrying out of pulsed discharge constantly repeated thereby reach in the course of work of laser.
Figure 5 shows that according to the gas discharge laser preionization of third embodiment of the invention and the FBD (function block diagram) of main discharge time sequence control device.As shown in Figure 5, gas discharge laser preionization and main discharge time sequence control device 5 comprise input S i", preionized discharge loop (not marking among Fig. 5), main discharge circuit (not marking among Fig. 5), time measuring unit 55 and control unit 56.
The preionized discharge loop comprises master synchronizer 51, prime narrowing circuit 52, the first final stage narrowing circuit 531 and pre-ionization electrode 532.Master synchronizer 541 electrically connects input S i", produce the required pulse of laser discharge.Prime narrowing circuit 52 couples master synchronizer 51, narrows pulse duration.531 first final stage narrowing circuits electrically connect prime narrowing circuit 52.Pre-ionization electrode 532 electrically connects 531 first final stage narrowing circuits.
Main discharge circuit comprises master synchronizer 51, prime narrowing circuit 52, the second final stage narrowing circuit 541 and main discharge electrode 542.The second final stage narrowing circuit 441 electrically connects prime narrowing circuit 52, and main discharge electrode 542 electrically connects the second final stage narrowing circuit 541.
Time measuring unit 55 electrically connects preionized discharge loop, main discharge circuit and master synchronizer 51, measures the very first time T that preionization begins 1", second time T that begins of main discharge 2" and the triggered time T of master synchronizer 3Control unit 46 electrically connects main discharge circuit, preionization loop, master synchronizer 51 and time measuring unit 55, according to very first time T 1", second time T 2" and triggered time T 3First electric current, second electric current of main discharge circuit and the triggering signal of master synchronizer 51 in control preionization loop.
This embodiment and first embodiment of the present invention use identical discharge circuit (as shown in Figure 3), the feedback mechanism of sequencing control is also identical, unique difference is: in this embodiment, time measuring unit is not only measured the time of origin of preionization and main discharge, the triggered time of also measuring master synchronizer simultaneously.Reset electric current by adjusting preionization loop and main discharge circuit pulsactor core separately, control the time interval of preionization and master synchronizer triggering and the time interval of main discharge and master synchronizer triggering respectively, stablize the preionization and the purpose in the main discharge time interval thereby reach indirectly.
Please also refer to Fig. 3 and Fig. 5, I 1' reset electric current for preionization loop pulsactor core, I 2' reset electric current, TD for the core of main discharge loop pulsactor T1Be preionization and the optimum target value of the master synchronizer triggering time difference, TD T2Be main discharge and the optimum target value of the master synchronizer triggering time difference.When laser is started working, the control unit I that at first Uses Defaults 1L' and I 2L' electric current I is set respectively 1', I 2'.After preionization and main discharge generation, the time collecting unit is determined the time T that preionization takes place 1" and the time T that takes place of main discharge 2", and the triggered time T of record master synchronizer 3, the discharge time difference can be determined by these time points, and calculate TD 1=T 1-T 3, TD 2=T 2-T 3, at last according to TD 1, TD 2With TD T1, TD T2Between difference DELTA T 1'=TDT 1'-TD 1, Δ T 2'=TDT 2'-TD 2, calculate I according to formula (4) 1L'+Δ I 1' with I 2L'+Δ I 2', and use I 1L'+Δ I 1', I 2L'+Δ I 2' reset I 1', I 2'.Along with the pulsed discharge pulse is constantly carried out, this process constantly repeats, thereby stablizes the time interval between preionization, main discharge and the master synchronizer triggering.
Figure 6 shows that gas discharge laser preionization according to an embodiment of the invention and main discharge sequential control method, comprise the following steps:
S601: laser is started working, and first electric current of preionization loop pulsactor is set;
S603: after preionization and main discharge take place, second time that the very first time that acquisition preionization begins and main discharge begin;
S605: according to very first time T 1With second time T 2Reset first electric current in preionization loop.
Please also refer to Fig. 1 to Fig. 3 and Fig. 6, establish I 1Be preionization loop pulsactor MSC 3Core reset electric current, TD TOptimum target value for the main discharge and the preionization time difference.Among the step S601, when laser is started working, the control unit I that at first Uses Defaults 1LElectric current I is set 1Among the step S603, after preionization and main discharge generation, the time collecting unit is determined the time T that preionization takes place 1Time T with the main discharge generation 2, the discharge time difference can be definite by these two time points, i.e. TD=T 2-T 1Among the step S605, as calculated value and the desired value TD of TD TBetween drift delta T=TD appears TDuring-TD, control unit recomputates preionization loop pulsactor MSC according to (4) formula 3, be made as I 1L-Δ I 1, and before discharge generation next time, use I 1L-Δ I 1Value is reseted I 1This process is stablized the preionization and the purpose in the main discharge time interval along with the carrying out of pulsed discharge constantly repeated thereby reach in the course of work of laser.
Preionized discharge loop and main discharge circuit can be by controlling discharge time separately the saturated deadline of adjusting pulsactor in gas discharge laser preionization of the present invention and main discharge time sequence control device and the method, adopt the feedback loop control mode, the discharge time of origin of monitoring preionization and main discharge guarantees the discharge time of stability at interval in real time.And preionized discharge loop and main discharge circuit shared master synchronizer and prime narrowing circuit, only adopt separately independently final stage compressor circuit, such design can make circuit structure more simple, and can offset the influence of noise dither for the discharge sequential.
Concrete case study on implementation only is a preferable case study on implementation of the present invention described in the present invention, is not to be used for limiting practical range of the present invention.Be that all equivalences of doing according to the content of the present patent application claim change and modification, all should be as technology category of the present invention.

Claims (15)

1. gas discharge laser preionization and main discharge time sequence control device is characterized in that comprising:
Input;
The preionized discharge loop, comprise master synchronizer, prime narrowing circuit, first final stage narrowing circuit and the pre-ionization electrode, above-mentioned master synchronizer electrically connects above-mentioned input, produce the required pulse of above-mentioned laser discharge, above-mentioned prime narrowing circuit couples above-mentioned master synchronizer, narrow above-mentioned pulse duration, the above-mentioned first final stage narrowing circuit electrically connects above-mentioned prime narrowing circuit, and above-mentioned pre-ionization electrode electrically connects the above-mentioned first final stage narrowing circuit;
Main discharge circuit, comprise above-mentioned master synchronizer, above-mentioned prime narrowing circuit, second final stage narrowing circuit and the main discharge electrode, the above-mentioned second final stage narrowing circuit electrically connects above-mentioned prime narrowing circuit, and main discharge electrode electrically connects the above-mentioned second final stage narrowing circuit;
Time measuring unit electrically connects above-mentioned preionized discharge electrode and above-mentioned main discharge electrode, second time that the very first time that measurement preionization begins and main discharge begin; And
Control unit, electrically connect above-mentioned first final stage narrowing circuit and the above-mentioned second final stage narrowing circuit at least one of them, and above-mentioned control unit electrically connects above-mentioned time measuring unit, the electric current of the discharge loop that electrically connects according to control of the very first time and above-mentioned second time and control unit.
2. time sequence control device according to claim 1 is characterized in that wherein above-mentioned time measuring unit measures the triggered time of above-mentioned master synchronizer.
3. time sequence control device according to claim 2, it is characterized in that above-mentioned control unit control according to the very first time, above-mentioned second time and above-mentioned triggered time in the triggering signal of second electric current of first electric current in above-mentioned preionized discharge loop, above-mentioned main discharge circuit and above-mentioned pulse generator at least one of them.
4. time sequence control device according to claim 1 is characterized in that wherein above-mentioned input is the input high voltage source.
5. time sequence control device according to claim 1 is characterized in that wherein above-mentioned prime narrowing circuit couples by a transformer and above-mentioned master synchronizer.
6. time sequence control device according to claim 1 is characterized in that wherein above-mentioned time measuring unit comprises the light-emitting diode of measuring above-mentioned second time and the pick-up loop of measuring the above-mentioned very first time.
7. time sequence control device according to claim 1 is characterized in that wherein above-mentioned master synchronizer comprises:
Solid-state switch electrically connects above-mentioned input;
First magnetic switch, with above-mentioned solid-state switch for being connected in series;
First coil, with above-mentioned first magnetic switch for being connected in series; And
First electric capacity, with above-mentioned solid-state switch, above-mentioned magnetic switch, above-mentioned coil is for being connected in parallel, and above-mentioned first electric capacity electrically connects above-mentioned input.
8. time sequence control device according to claim 7 is characterized in that wherein above-mentioned prime narrowing circuit comprises:
Second coil is with above-mentioned first coil coupling;
Second electric capacity, with above-mentioned second coil for being connected in parallel;
Second magnetic switch; And
The 3rd electric capacity, with above-mentioned second magnetic switch for being connected in series,
Wherein, above-mentioned the 3rd electric capacity and above-mentioned second magnetic switch and above-mentioned second electric capacity are for being connected in parallel.
9. time sequence control device according to claim 8 is characterized in that wherein above-mentioned prime narrowing circuit is the one-level narrowing circuit.
10. time sequence control device according to claim 1 is characterized in that wherein above-mentioned prime narrowing circuit is the multistage pulses compressor circuit.
11. time sequence control device according to claim 8 is characterized in that the wherein above-mentioned first final stage narrowing circuit comprises:
Above-mentioned the 3rd electric capacity;
The 3rd magnetic switch; And
The 4th electric capacity is connected in series with above-mentioned the 3rd magnetic switch,
Wherein, above-mentioned the 4th electric capacity and above-mentioned the 3rd magnetic switch and above-mentioned the 3rd electric capacity is for being connected in parallel, and above-mentioned pre-ionization electrode and above-mentioned the 4th electric capacity are for being connected in parallel.
12. time sequence control device according to claim 8 is characterized in that the wherein above-mentioned second final stage narrowing circuit comprises:
Above-mentioned the 3rd electric capacity;
The 4th magnetic switch; And
The 5th electric capacity is connected in series with above-mentioned the 4th magnetic switch,
Wherein, above-mentioned the 5th electric capacity and above-mentioned the 4th magnetic switch and above-mentioned the 3rd electric capacity is for being connected in parallel, and above-mentioned main discharge electrode and above-mentioned the 5th electric capacity are for being connected in parallel.
13. gas discharge laser preionization and main discharge sequential control method is characterized in that comprising the following steps:
Laser is started working, be provided with first electric current of preionization loop pulsactor and main discharge circuit pulsactor second electric current at least one of them;
After preionization and main discharge take place, second time that the very first time that the time measuring unit of electric connection preionized discharge electrode and main discharge electrode measurement preionization begins and main discharge begin; And
According to the above-mentioned very first time and above-mentioned second time, the control unit that is electrically connected to time measuring unit reset first electric current in preionization loop and main discharge circuit second electric current at least one of them to reset the time interval of preionization and main discharge.
14. sequential control method according to claim 13, it is characterized in that wherein above-mentioned time measuring unit is measured in the step of above-mentioned second time that above-mentioned very first time that preionization begins and main discharge begin more to comprise: above-mentioned time measuring unit is measured the triggered time of master synchronizer.
15. sequential control method according to claim 14 is characterized in that one of them the step at least that the above-mentioned very first time of above-mentioned foundation and above-mentioned second time resets second electric current of first electric current in preionization loop and main discharge circuit is:
Reset according to the above-mentioned very first time, above-mentioned second time and above-mentioned triggered time second electric current of first electric current, main discharge circuit in preionization loop and above-mentioned master synchronizer triggering signal at least one of them.
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