CN101585449A

CN101585449A - Baseplate displacement mechanism

Info

Publication number: CN101585449A
Application number: CNA2008101079142A
Authority: CN
Inventors: 叶公旭; 林祈廷
Original assignee: Contrel Semiconductor Technology Co Ltd
Current assignee: Contrel Semiconductor Technology Co Ltd
Priority date: 2008-05-21
Filing date: 2008-05-21
Publication date: 2009-11-25

Abstract

The invention relates to a baseplate displacement mechanism comprising a base, an X-axis platform and a Y-axis platform, wherein the X-axis platform is provided with a first motor, a second motor and a first frame, the first motor is provided with a first body and a first leading screw, and the first body is arranged at the base; the first frame is spanned on the first leading screw and can be driven by the first motor to axially shift along the first leading screw; the second motor is provided with a second body and a second leading screw, and the second body is arranged on the first frame; the Y-axis platform is provided with a second frame and a plurality of reverse components, and the second frame is spanned on the second leading screw and can be driven by the second motor to shift axially along the second leading screw; one end of each reverse component is arranged at the base and the other end is arranged at the bottom of the second frame, and the reverse components provide a reverse action relative to the second frame so as to reduce the load of the second motor; and the shift direction of the Y-axis platform is vertical to that of the X-axis platform.

Description

Baseplate displacement mechanism

Technical field

The present invention is relevant with liquid crystal panel technology, particularly relevant for a kind of baseplate displacement mechanism.

Background technology

Existing baseplate displacement mechanism mainly uses cam-actuated mode to drive a displacement substrate, regulates the position of this substrate in an X-axis and a Y-axis, is beneficial to the following process operation with the purpose that reaches the correction substrate position.

Yet because cam is need design according to stroke again, its design procedure is comparatively loaded down with trivial details; Moreover cam drive needs on control program via carrying out coordinate transformation according to conversion program again, and coordinate position after the calculating and actual position have error to produce easily, have the limited shortcoming of accuracy rate in control; , one class, cam drive mode itself just is not easy to reach linear displacement, if this factor is considered into, the error of coordinate position and actual position will increase; In other words, cam drive mode and be not suitable for the occasion of micro-manipulation.In addition, whenever the stroke of existing baseplate displacement mechanism is had some change, cam will redesign, and have to use inconvenient shortcoming.

In sum, known baseplate displacement mechanism has above-mentioned shortcoming and haves much room for improvement.

Summary of the invention

Main purpose of the present invention is to provide a kind of baseplate displacement mechanism, and it can use the guide screw driving principle to have the characteristic of linear displacement, further reduces coordinate and actual position because of the error that conversion program produces, and has the advantage of accuracy control.

For reaching above-mentioned purpose, a kind of baseplate displacement mechanism provided by the present invention includes: a pedestal; One X-axis platform has one first motor, one second motor and one first framework, and this first motor has one first body and one first guide screw, and this first body is located at this pedestal; This first framework is located at this first guide screw and can be subjected to this first motor driven along this first guide screw longitudinal travel; This second motor has one second body and one second guide screw, and this second body is located at this first framework; One Y-axis platform has one second framework and a plurality of anti-member that pushes away, and this second framework is located at this second guide screw and can be subjected to this second motor driven along this second guide screw longitudinal travel; Described anti-member one end that pushes away is located at this pedestal, and the other end is located at this second base of frame, described counter push away member relatively this second framework provide an antagonistic force and the load that alleviates this second motor; Wherein, vertical this X-axis platform sense of displacement of this Y-axis platform sense of displacement.

Thus, baseplate displacement mechanism provided by the present invention is by said structure, and its principle that can use guide screw to drive makes this X-axis platform and this Y-axis platform tool that the characteristic of linear displacement be arranged; It carries out displacement control compared to existing with cam, and this baseplate displacement mechanism does not need to carry out coordinate transformation via a conversion program again and more or less freely at control program; Moreover this baseplate displacement mechanism also can reduce coordinate and actual position because of the error that conversion program produces, and has the advantage of accuracy control.In addition, whenever the stroke of this baseplate displacement mechanism is had some change, this baseplate displacement mechanism only needs to replace the guide screw of required trip distance, and it with cam-actuated content, has advantage easy to use compared to existing.

Description of drawings

In order to describe structure of the present invention, feature and effect place in detail, below enumerate preferred embodiment and conjunction with figs. the explanation as after, wherein:

Fig. 1 is the block diagram of the present invention's first preferred embodiment.

Fig. 2 mainly discloses the structure at the first preferred embodiment back side for the block diagram of the present invention's first another angle of preferred embodiment.

Fig. 3 mainly discloses X-axis flat-bed structure for the block diagram of the present invention's first preferred embodiment portion of element.

Fig. 4 mainly discloses Y-axis flat-bed structure for the block diagram of the present invention's first preferred embodiment portion of element.

Fig. 5 is the block diagram of the present invention's first preferred embodiment portion of element, mainly discloses the structure of Z shaft platform.

The specific embodiment

See also Fig. 1 to Fig. 5, the baseplate displacement mechanism 10 that the present invention's first preferred embodiment is provided includes a pedestal (not shown), an X-axis platform 30, a Y-axis platform 40 and a Z shaft platform 50.

This pedestal is not the feature place of this work, does not give unnecessary details in this appearance.

This X-axis platform 30 has one first motor 32, one second motor 34, one first framework 36 and a plurality of first slide rail 38; This first motor 32 has one first body 321 and one first guide screw 322, and this first body 321 is located at this pedestal; This first framework 36 is located at this first guide screw 322 and driven along these first guide screw, 322 longitudinal travels by this first motor 32; This second motor 34 has one second body 341 and one second guide screw 342, and this second body 341 is located at this first framework 36; Respectively this first slide rail 38 is located between this pedestal and this first framework 36, with auxiliary these first framework, 36 slippages.

This Y-axis platform 40 has one second framework 42, a plurality of anti-member 44 and a plurality of second slide rail 46 of pushing away; This second framework 42 is located at this second guide screw 322 and driven along these second guide screw, 322 longitudinal travels by this second motor 32; Described counter 44 one ends of structure that push away are located at this pedestal, and the other end is located at this second framework, 42 bottoms, and described anti-member 44 relative these second frameworks 42 that push away provide an antagonistic force bearing the weight of these second framework, 42 parts, and then the load that alleviates this second motor 32.Wherein, vertical these X-axis platform 30 sense of displacement of these Y-axis platform 40 sense of displacement.Respectively this second slide rail 46 is located between this first framework 36 and this second framework 42, with auxiliary these second framework, 42 slippages.Describedly instead push away member 44 to be selected from compression spring, air cylinder and hydraulic actuating cylinder wherein a kind of; In the present embodiment, described counter to push away member 44 choosing be example with the compression spring, is casehistory only at this, is not construed as limiting condition.

This Z shaft platform 50 has one the 3rd framework 52 and one the 3rd motor, 54, the three motors 52 have one the 3rd body 541 and one the 3rd guide screw, 542, the three bodies 541 are located at this second framework 42; The 3rd framework 52 is located at the 3rd guide screw 542 and driven along the 3rd guide screw 542 longitudinal travels by the 3rd motor 52.Wherein, this X-axis platform 30 defines a plane with this Y-axis platform 40, vertical this plane of these Z shaft platform 50 sense of displacement.

Via said structure, present embodiment provides this baseplate displacement mechanism 10, and wherein this X-axis platform 30, this Y-axis platform 40 and this Z shaft platform 50 principle that can use guide screw to drive is carried out displacement and had the characteristic of linear displacement; It carries out the displacement effector compared to existing with cam, and this baseplate displacement mechanism 10 does not need to carry out coordinate transformation via a conversion program again and more or less freely at control program; Moreover this baseplate displacement mechanism 10 also can reduce coordinate and actual position because of the error that conversion program produces, and has the advantage of accuracy control.In addition, whenever the stroke of this baseplate displacement mechanism 10 is had some change, this baseplate displacement mechanism 10 only needs to replace the guide screw of required trip distance, and it does not need redesign compared to existing with the cam drive person, has advantage easy to use.

The present invention takes off disclosed composed component among the embodiment in preceding, is casehistory only, is not the scope that is used for limiting this case, the alternative or variation of other equivalence element, and the claim scope that also should be this case contains.

Claims

1. a baseplate displacement mechanism is characterized in that, includes:

One pedestal;

One X-axis platform has one first motor, one second motor and one first framework, and this first motor has one first body and one first guide screw, and this first body is located at this pedestal; This first framework is located at this first guide screw and can be subjected to this first motor driven along this first guide screw longitudinal travel; This second motor has one second body and one second guide screw, and this second body is located at this first framework; And

One Y-axis platform has one second framework and a plurality of anti-member that pushes away, and this second framework is located at this second guide screw and can be subjected to this second motor driven along this second guide screw longitudinal travel; Described anti-member one end that pushes away is located at this pedestal, and the other end is located at this second base of frame, described counter push away member relatively this second framework provide an antagonistic force and the load that alleviates this second motor; Wherein, vertical this X-axis platform sense of displacement of this Y-axis platform sense of displacement.

2. according to the described baseplate displacement mechanism of claim 1, it is characterized in that, wherein saidly instead push away member to be selected from compression spring, air cylinder and hydraulic actuating cylinder wherein a kind of.

3. according to the described baseplate displacement mechanism of claim 1, it is characterized in that wherein this X-axis platform includes a plurality of first slide rails, respectively this first slide rail is located between this pedestal and this first framework, with auxiliary this first framework slippage.

4. according to the described baseplate displacement mechanism of claim 1, it is characterized in that wherein this Y-axis platform includes a plurality of second slide rails, respectively this second slide rail is located between this first framework and this second framework, with auxiliary this second framework slippage.

5. according to the described baseplate displacement mechanism of claim 1, it is characterized in that wherein also include and be located at this Y-axis flat-bed Z shaft platform, this X-axis platform and this Y-axis platform define a plane, vertical this plane of this Z shaft platform sense of displacement.

6. according to the described baseplate displacement mechanism of claim 5, it is characterized in that wherein this Z shaft platform has one the 3rd framework and one the 3rd motor, the 3rd motor has one the 3rd body and one the 3rd guide screw, and the 3rd body is located at this second framework; The 3rd framework is located at the 3rd guide screw and can be subjected to the 3rd motor driven along the 3rd guide screw longitudinal travel.