CN101566501A - Method for measuring plasma electron density by fiber spectrum synergizing discharge current - Google Patents
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- CN101566501A CN101566501A CNA2009100115837A CN200910011583A CN101566501A CN 101566501 A CN101566501 A CN 101566501A CN A2009100115837 A CNA2009100115837 A CN A2009100115837A CN 200910011583 A CN200910011583 A CN 200910011583A CN 101566501 A CN101566501 A CN 101566501A
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Abstract
The invention relates to a method for measuring plasma electron density by fiber spectrum synergizing discharge current, and belongs to the technical field of discharge plasma diagnosis. The method is technically characterized by comprising the following steps: using a micro fiber spectrum measuring path and a discharge current measuring circuit at the same time to acquire real-time parameters of optical radiation spectrum of discharge plasma and discharge current, comprehensively analyzing the parameters through a computer data processing system, and calculating the electron density of the plasma. The micro fiber spectrum measuring path consists of a fiber probe, a conducting fiber and a micro fiber spectrometer, which are connected in turn; the discharge current measuring circuit consists of a current sensor, a current signal amplifier and a data acquisition device, which are connected in turn; and the computer data processing system calculates the electron density of the discharge plasma by using the acquired data according to the gas molecule motion theory. The method has the advantage that the application range of the discharge plasma electron density diagnosed by optical emission spectrometry is expanded to an imbalance state from a local thermal balance state.
Description
Technical field
The invention belongs to discharge plasma diagnostic techniques field, relate to a kind of in real time, the method for original position, no disturbance diagnosis plasma electron density, especially a kind of method of measuring plasma electron density by fiber spectrum synergizing discharge current.
Background technology
The generation of discharge plasma is the important foundation of present new high-tech industry and scientific and technical research with keeping; obtained further investigation and widespread use, become scientific and engineering with global effect in a plurality of fields such as most advanced and sophisticated electron device manufacturing, the energy, environmental protection, plasma metallurgy, national defence.The control of article on plasma body physical process and technology is depended in the progress that the discharge plasma Research And Engineering is used, and the prerequisite of control is to have the reliable detection technology to guarantee, especially real-time, original position, undisturbed detection technique.Therefore, the accurate measurement of discharge plasma characteristic parameter is become discharge plasma experimental study and engineering and need one of problem that at first solves in using.
Electron temperature and electron density are two important parameters that characterize plasma discharging volume property and state, and methods such as Langmuir probe commonly used at present, optical emitting spectrum (OES), laser-induced fluorescence (LIF) (LIF), absorption spectrum, mass spectrum, microwave transmission are diagnosed or measured.But because discharge plasma kind complexity, electric discharge device comes in every shape, electron temperature and electron density distribution wide scope, a lot of plasmas depart from the local thermal equilibrium state, therefore up to the present also do not have a kind of method to be applicable to the diagnosis of all discharge plasmas, can only adopt different diagnostic methods according to concrete condition.Wherein, although laser-induced fluorescence (LIF), absorption spectrum, mass spectrum, microwave transmission method etc. can be carried out Accurate Analysis to active particle composition, distribution and number density etc., but can't accurately understand plasma electron density and electron temperature, and laser, microwave etc. are outer executes " the no disturbance " that energy also is difficult to really accomplish the article on plasma body, measuring system complex and expensive in addition, these methods and not being suitable in the discharge plasma production technology are used.In the classic method, Langmuir probe gains universal acceptance to the diagnostic result of electron temperature and electron density, but it is narrow that the Langmuir probe diagnosis exists the scope of application, the article on plasma body easily produces disturbance and pollution, be subject to problems such as rf electric field interference, also limited its application in the plasma discharging body technology.In the optical emission spectroscopy, Stark broadening has solved the diagnosis problem of high-density plasmas such as arc discharge exactly, but the non-equilibrium plasma low slightly to density, it is linear, line width variation is not obvious, and range of application is restricted.By contrast, although also there is the requirement of local thermal equilibrium in the slope method in the optical emission spectroscopy to the plasma of being diagnosed, but what investigate when measuring is easily measured radiation wavelength and relative radiation intensity, to its carry out can in wide range, realizing after the suitable method correction to discharge plasma carry out in real time, original position, no disturbance ground is measured.
Institutes Of Technology Of Nanjing has developed a kind of contactless plasma temperature and electron density measurement device (Chinese utility model patent, ZL200720044567.4), the optical fiber emission spectroscopy measurements has been incorporated in the plasma parameters measurement mechanism, has solved the real-time problems of measurement of transient state plasmas such as High Temperature High Pressure burning, blast detonation well.The principle of this measurement mechanism is based on the theoretical foundation of atom optics emission spectrum, relies on boltzmann and saha Equation for Calculating plasma temperature and electron density.Therefore, only, could obtain accurate measurement result satisfying under the thermally equilibrated condition of local.For the nonequilibrium plasma away from thermal equilbrium state, owing to do not carry out the method correction, the measurement result deviation of nonequilibrium plasma electron density is very big.
According to gas-kinetic theory, the discharge current by a certain cross section is directly proportional with electron density, i.e. I=en
eu
eS/4, wherein I is that discharge current, e are electron charge, n
eBe electron density, u
eFor average velocity, the S of electronics is that discharge current passes through the cross section.Electronics average velocity u
eCan at first utilize the fiber spectrum method to measure the electron temperature of plasma, and then pass through formula
Calculate and obtain.For the measurement of discharge current, can be undertaken by a lot of all purpose instruments, do not need to understand plasma and be in equilibrium state or nonequilibrium state.Therefore, on the basis of optical fiber emission spectroscopy measurements plasma parameters, the discharge current of actual measurement is incorporated in the plasma electron density measurement mechanism, promptly can expands the measurement range of electron density, can reduce the measured deviation of non-equilibrium plasma electron density again.
Summary of the invention
Technical matters to be solved by this invention is defective and the deficiency that overcomes existing optical emission spectroscopy diagnosis plasma electron density, and a kind of method of measuring plasma electron density by fiber spectrum synergizing discharge current is provided.The present invention is on the basis of optical emitting spectroscopic diagnostics plasma electron temperature method, real-time discharge current parameter is incorporated in the electron density measurement, reduce to utilize thermal equilibrium condition to estimate the deviation that the nonequilibrium plasma electron density is brought, enlarged the scope of application of diagnosis discharge plasma electron density.
Technical scheme of the present invention is:
The method of measuring plasma electron density by fiber spectrum synergizing discharge current realizes by the measuring plasma electron density by fiber spectrum synergizing discharge current device, this device is by fibre-optical probe, conduction optical fiber, micro fiber spectrometer, compositions such as computer data processing system, current sensor, current signal amplifier and data acquisition unit.Use mini optical fibre spectral measurement path and discharge current measuring circuit to obtain the optical radiation spectrum and the real-time parameter of discharge current of discharge plasma simultaneously, by computer data processing system these parameters are carried out calculating after the comprehensive computing electron density of discharge plasma again.
In mini optical fibre spectral measurement path, fibre-optical probe is connected an end of conduction optical fiber, and be placed near the tested plasma, the other end of conduction optical fiber then is connected with micro fiber spectrometer, pass to micro fiber spectrometer by conduction optical fiber light signal that fibre-optical probe is collected and separate the optical radiation spectrum of reading discharge plasma, the wavelength of optical radiation spectrum, data parameter such as radiation intensity is again by being input to computer data processing system with data line that micro fiber spectrometer is connected with computing machine relatively.
In discharge current measuring circuit, it is extreme that current sensor is installed in the low tension of electric discharge device, and be connected with current signal amplifier, current sensor senses to current signal after current signal amplifier amplifies, be input to data acquisition unit, pass to computer data processing system through data line again, for computer data processing system provides computational data.
Computer data processing system is set up on gas molecule motion theoretical foundation the calculating of electron density, according to this theory electron density n of discharge plasma as can be known
ePass through section S, electron temperature T with discharge current I, discharge plasma electric current
eThe pass be:
In the formula, the unit of electric current I is A, and electric current is m by the unit of section S
2, electron temperature T
eUnit be eV, electron density n
eUnit be m
-3As long as record electric current I and electron temperature T by section S
eJust can try to achieve electron density n
e
Will take into full account the structure of electric discharge device to the measurement of discharge current I, the different current sampling methods of electric discharge device structure are also different.Need know the size of current sampling device electric current during actual measurement by the cross section, current sampling device can be installed in the discharge system, also can independent parallel outside discharge system, but must guarantee that current sampling device and discharge system have identical discharging structure parameter and discharging condition.If the discharge current that can obtain whole discharge system is by cross-sectional sizes, it also is a kind of simple and easy to do method that the discharge current of measurement total system comes the calculating plasma electron density.
To electron temperature T
eMeasurement adopt multiline slope method commonly used in the optical spectra method.According to Boltzmann distribution law, when electronics during from energy level m → n transition, the radiation of generation has following relation:
In the formula, N
nBe atomicity density; g
nBe n statistical wieght of level, g
mBe the m statistical wieght of level; A
mBe the probability of energy level m → n with the spontaneous transition of photon form, unit is s
-1H is a Planck constant; λ
mBe spectral line of emission wavelength, unit is nm; E
m, E
nBe the excitation energy of m, n energy level, unit is eV; K is a Boltzmann constant; T
eBe electron temperature, unit is eV, and C is a constant.This formula has reflected ln (I
mλ
m/ g
mA
m) and E
mLinear.Because I
mAnd λ
mCan record g by fiber spectrum
m, A
m, E
m, E
nCan find from relevant document or database, utilize least square fitting to be in line again, its slope is-1/T
e, can calculate electron temperature T thus with average meaning
e
Among the present invention micro fiber spectrometer is adopted in the measurement of optical radiation spectrum, its core is to have line style ccd detector and the microoptical circuit system that is no less than 2048 pixels, and the light signal that optical fiber can be transmitted shines after by the beam split of low-light grid and understands spectral information on the ccd detector.Micro fiber spectrometer also can replace with common fiber spectrometer, but can make the plasma electron density measurement mechanism lose dirigibility and convenience, and may increase cost.
Effect of the present invention and benefit are owing to made full use of the simple and easy to do advantage of optical emitting spectroscopic diagnostics plasma electron temperature, use micro fiber spectrometer that measuring system is further simplified simultaneously, have increased the dirigibility of measuring system.To be incorporated in the measuring system with the closely-related real-time discharge current of electron density, reduced to estimate the deviation that the nonequilibrium plasma electron density is brought based on thermal equilibrium condition, enlarged the scope of application of diagnosis discharge plasma electron density, make many scripts be difficult to the nonequilibrium plasma of diagnosing with conventional method that departs from thermal equilbrium state, particularly the electron density measurement of hyperbar nonequilibrium plasma becomes a reality.This method is easy and simple to handle, and cost is low, and the plasma discharging system is not had influence, be a kind of in real time, original position, undisturbed easy diagnostic method, be particularly suitable in the production technology of reality, using.
Description of drawings
Accompanying drawing 2 is measuring plasma electron density by fiber spectrum synergizing discharge current schematic flow sheets.
Among the figure: 1 fibre-optical probe; 2 conduction optical fiber; 3 micro fiber spectrometers; 4 computer data processing systems; 5 current sensors; 6 current signal amplifiers; 7 data acquisition units; 8 discharge plasmas produce system; 9 mini optical fibre spectral measurement paths; 10 discharge current measuring circuit; The input of 11 light signals; 12 microoptical circuit beam split; 13CCD spectrum is understood; The input of 14 discharge current signals; 15 discharge current signals amplify; 16 analog to digital conversion; 17 read optical radiation spectrum wavelength, relative radiation intensity parameter; 18 spectroscopic diagnostics parameters are set; 19 calculate electron temperature T
e20 read discharge current; 21 read discharge current by cross section numerical value; 22 calculate discharge current density; 23 calculate discharge plasma electron density n
e24 electron density n
eWith electron temperature T
eResult of calculation shows.
Embodiment
Below in conjunction with technical scheme and accompanying drawing, be example with neon glow discharge plasma electron density measurement, be described in detail the specific embodiment of the present invention.
The structure of measuring plasma electron density by fiber spectrum synergizing discharge current device of the present invention comprises fibre-optical probe 1 as shown in drawings; Conduction optical fiber 2; Micro fiber spectrometer 3; Computer data processing system 4; Current sensor 5; Current signal amplifier 6; Data acquisition unit 7.When discharge plasma generation system 8 was excited, the light signal of plasma emission to be measured was collected the back by fibre-optical probe 1 and is entered micro fiber spectrometer 3 by conduction optical fiber 2.In micro fiber spectrometer 3, light signal is converted into the electric signal that characterizes with wavelength and relative radiation intensity and is transferred to computer data processing system 4.Under neon glow discharge situation, chosen in advance has public five spectral lines of 603.000nm, 607.434nm, 638.299nm, 650.653nm, 724.517nm of energy level down, computer data processing system 4 will read the relative radiation intensity of these five spectral lines automatically, according to the multiline slope method in the optical spectra diagnosis, with relative radiation intensity I
m, radiation wavelength λ
m, m statistical wieght of level g
m, m energy level spontaneous transition probability A
m, m, n energy level excitation energy E
m, E
nBring relational expression ln (I into
mλ
m/ g
mA
m) ≈-(E
m-E
n)/T
e+ C calculates the electron temperature T of neon glow discharge again according to least square method
e
In spectral measurement, current sensor 5 is transferred to current signal amplifier 6 with the current signal that records, and is transferred to signal picker 7 after current signal amplifier 6 is adjusted again, passes to computer data processing system 4 after modulus changes.Computer data processing system 4 is by reading discharge current I, discharge current by section S and electron temperature T
e, according to formula
Can calculate the electron density n of discharge plasma
e
The present invention combines fiber spectrum with the discharge current density measurement, utilize fiber spectrum diagnosis plasma The characteristics that the body electron temperature is simple and easy to do will be incorporated into survey with the closely-related real-time discharge current of electron density In the amount device, discharge the error of utilizing thermal equilibrium condition estimation electron density to bring, enlarged the diagnosis discharge The scope of application of plasma electron density makes many thermal equilbrium states that depart from that are difficult to conventional method diagnosis Nonequilibrium plasma, particularly high pressure non equilibrium plasma become a reality to the measurement of electron density.
Claims (1)
1. the method for a measuring plasma electron density by fiber spectrum synergizing discharge current, this method realizes by the measuring plasma electron density by fiber spectrum synergizing discharge current device, it is characterized in that:
Use mini optical fibre spectral measurement path and discharge current measuring circuit to obtain the optical radiation spectrum and the real-time parameter of discharge current of discharge plasma, computer data processing system, this system links to each other with data acquisition unit with micro fiber spectrometer respectively by data line, be used to read optical radiation signal and discharge current signal, and after analysis-by-synthesis, calculate the electron density of discharge plasma according to Boltzmann distribution law and gas theory, molecular kinetic;
Wherein mini optical fibre spectral measurement path is composed as follows: comprise fibre-optical probe (1), conduction optical fiber (2), micro fiber spectrometer (3) and computer data processing system (4), wherein fibre-optical probe is connected an end of conduction optical fiber, and be placed near the tested plasma, the other end of conduction optical fiber then is connected with micro fiber spectrometer, the light signal of fibre-optical probe being collected by conduction optical fiber passes to the optical radiation spectrum that micro fiber spectrometer is understood discharge plasma, the wavelength of optical radiation spectrum, relatively data parameter such as radiation intensity is again by being input to computer data processing system with data line that micro fiber spectrometer is connected with computing machine;
Wherein discharge current measuring circuit is composed as follows: comprise current sensor (5), current signal amplifier (6) and data acquisition unit (7), being installed in the extreme current sensor of electric discharge device low tension is connected with current signal amplifier, current sensor senses to current signal after current signal amplifier amplifies, be input to data acquisition unit, pass to computer data processing system through data line again;
Concrete steps are: use the optical radiation spectrum and the real-time parameter of discharge current of mini optical fibre spectral measurement path and discharge current measuring circuit acquisition discharge plasma simultaneously, calculate the electron density of discharge plasma again by the computer data processing system foundation after the following formula of setting up on the gas molecule motion theoretical foundation carries out comprehensive computing with these parameters:
In the formula, n
eBe the discharge plasma electron density, unit is m
-3, I is a discharge current, and unit is A, and S passes through the cross section for the discharge plasma electric current, and unit is m
2, T
eBe electron temperature, unit is eV, electron temperature T
eCalculating adopt optical spectra multiline slope method, the micro fiber spectrometer of measuring light signal (3) has line style ccd detector and the microoptical circuit system that is no less than 2048 pixels.
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